Gluing device of gluing developing machine

Abstract

The utility model provides a gluing device of a gluing developer, which relates to the technical field of gluing developers and comprises a gluing developer shell and an adjusting mechanism, one side of the gluing developer shell is in bolted connection with a cover plate, and the other side of the cover plate is provided with the adjusting mechanism. Through cooperative use of the main motor, the threaded rod and the T-shaped block, when the height needs to be adjusted, the work can be easily completed only by controlling the main motor, manual adjustment is avoided, the error rate is reduced, the threaded rod and the T-shaped block can provide high moving precision, ascending or descending of the gluing frame can be accurately controlled, and the working efficiency is improved. Through cooperative use of the auxiliary motor, the connecting column and the suction cup, due to stable connection between the connecting column and the suction cup, the auxiliary motor can accurately drive the suction cup to rotate, power loss can be avoided, and compared with a traditional gear, frequent maintenance is not needed, and the downtime is shortened.

Description

Technical Field

[0001] The utility model relates to the technical field of glue coating and developing machines, in particular to a glue coating device of a glue coating and developing machine. Background Art

[0002] A coating developer is a device used in the photolithography process to manufacture semiconductor devices, integrated circuits and other micro-nano structures. In order to accurately control the coating process and ensure high precision and high efficiency in semiconductor manufacturing and micro-nano processing, we need a coating device for the coating developer.

[0003] After searching, the utility model with patent number "CN219758660U" provides "a glue developer with smooth coating, including a glue developer housing, the interior of the glue developer housing is movably connected to two rotating suction cup devices, a double-head nozzle pipe is arranged in the middle of the interior of the glue developer housing and in the middle of the two rotating suction cup devices, and a baffle door is movably connected to the interior of the glue developer housing near the back; in the glue developer with smooth coating, a rotating suction cup device and a double-head nozzle pipe are arranged in the outer housing, wherein the nozzle hose is provided with The glue injection port is connected to the hydraulic glue injection hose, and the threaded groove tube connected to the threaded column can adjust the height of the nozzle hose, which is equivalent to indirectly adjusting the nozzle's spray diameter. A servo motor to a large gear structure is set at the bottom of the wafer adsorption plate, and the size of the spray diameter is controlled by adjusting the height of the nozzle hose from the wafer adsorption plate. However, the device requires manual intervention during adjustment, which is prone to errors. In addition, during the lifting process, it cannot provide high accuracy and cannot accurately control the glue coating height, which will affect the glue coating quality. Secondly, the gear meshing transmission used in the device requires more maintenance in the later stage, which will affect work efficiency.

[0004] Therefore, we provide a glue coating device for a glue coating and developing machine. Utility Model Content

[0005] The purpose of the utility model is to provide a glue coating device for a glue coating and developing machine to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a glue coating device of a glue coating developer, comprising a glue coating developer housing and an adjustment mechanism, wherein a cover plate is bolted to one side of the glue coating developer housing, and the adjustment mechanism is installed on the other side of the cover plate;

[0007] The adjustment mechanism includes a mounting seat, a transmission member, a T-bar, a right-angle block and a fixing member. The mounting seat is installed on the other side of the cover plate, the transmission member is installed inside the mounting seat, the T-bar is installed outside the transmission member, right-angle blocks are installed on both sides of the upper end of the T-bar, and a fixing member is installed on one side of the right-angle block.

[0008] Preferably, a main groove is formed on one side of the mounting seat, and a secondary groove is formed on the other side of the main groove.

[0009] Preferably, the transmission member includes a main motor and a threaded rod, the bottom end of the main groove is bolted to the main motor, the upper end of the main motor is mounted with a threaded rod via an output shaft, and the mounting seat and the threaded rod are rotationally connected.

[0010] Preferably, the threaded rod and the T-rod are threadedly connected, fixing holes are provided at both ends of one side of the T-rod, adjustment grooves are provided at both ends of the surface of the T-rod, a protrusion is fixedly installed at the center of one side of the T-rod, and the secondary groove and the protrusion are slidably connected.

[0011] Preferably, an adjustment block is fixedly mounted on the inner side of the right-angle block, and the adjustment slot and the adjustment block are slidably connected.

[0012] Preferably, the fixing member includes a connecting rope and a clamping column, the connecting rope is fixedly installed on one side of the right-angle block, the clamping column is installed on one end of the connecting rope, and the clamping column passes through the right-angle block and extends to the inside of the fixing hole.

[0013] Preferably, a rotating part is installed inside the outer shell of the glue coating and developing machine, and the rotating part includes an auxiliary motor, a connecting column and a suction cup. The auxiliary motor is bolted on both sides of the inner bottom end of the outer shell of the glue coating and developing machine. The auxiliary motor is welded with a connecting column through the output end, and a suction cup is installed on the top of the connecting column.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. The glue coating device of the glue coating developer is used in conjunction with the main motor, threaded rod and T-block. When the height needs to be adjusted, the work can be easily completed by controlling the main motor, avoiding manual adjustment and reducing the error rate. The threaded rod and T-block can provide high movement accuracy and can accurately control the rise or fall of the glue coating rack. Secondly, the connection method of the device is mostly threaded or bolted, which can be easily disassembled, so that the device can be recycled for a second time, reducing the cost output;

[0016] 2. Through the coordinated use of the auxiliary motor, the connecting column and the suction cup, due to the stable connection between the connecting column and the suction cup, the auxiliary motor can accurately drive the suction cup to rotate, which can avoid power loss. Compared with traditional gears, this device does not require frequent maintenance, reducing downtime. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the glue coating device of the glue coating and developing machine of the utility model;

[0018] Figure 2 It is a schematic diagram of the rear structure of the glue coating device of the glue coating and developing machine of the utility model;

[0019] Figure 3 This is a schematic cross-sectional structural diagram of the mounting seat of the utility model;

[0020] Figure 4 It is a schematic diagram of the structure of the transmission member, T-bar and right-angle block of the utility model;

[0021] Figure 5 It is a schematic diagram of the enlarged structure of point A of the utility model;

[0022] Figure 6 It is a schematic diagram of the matching of the outer shell and the rotating part of the glue coating and developing machine of the utility model.

[0023] Numbers in the figure: 1. Glue coating and developing machine casing; 11. Cover plate; 2. Adjustment mechanism; 21. Mounting seat; 211. Main groove; 212. Auxiliary groove; 22. Transmission member; 221. Main motor; 222. Threaded rod; 23. T-bar; 231. Fixing hole; 232. Adjustment groove; 233. Bump; 24. Right-angle block; 241. Adjustment block; 25. Fixing member; 251. Connecting rope; 252. Clamping column; 3. Rotating member; 31. Auxiliary motor; 32. Connecting column; 33. Suction cup. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0025] Embodiment 1

[0026] See also Figure 1-5As shown, the utility model provides an embodiment: a glue coating device of a glue coating developer, comprising a glue coating developer housing 1 and an adjustment mechanism 2, a cover plate 11 is bolted to one side of the glue coating developer housing 1, and the adjustment mechanism 2 is installed on the other side of the cover plate 11;

[0027] The adjustment mechanism 2 includes a mounting seat 21, a transmission member 22, a T-bar 23, a right-angle block 24 and a fixing member 25. The mounting seat 21 is installed on the other side of the cover plate 11, the transmission member 22 is installed inside the mounting seat 21, the T-bar 23 is installed on the outside of the transmission member 22, right-angle blocks 24 are installed on both sides of the upper end of the T-bar 23, and a fixing member 25 is installed on one side of the right-angle block 24.

[0028] Furthermore, a main groove 211 is formed on one side of the mounting seat 21 , and a secondary groove 212 is formed on the other side of the main groove 211 . The main groove 211 provides positioning information for the main motor 221 , and the secondary groove 212 provides a path for the protrusion 233 .

[0029] Furthermore, the transmission member 22 includes a main motor 221 and a threaded rod 222. The bottom end of the main groove 211 is bolted to the main motor 221. The upper end of the main motor 221 is installed with the threaded rod 222 through the output shaft, and the mounting seat 21 and the threaded rod 222 are rotatably connected. The main motor 221 can drive the threaded rod 222 to rotate. When the threaded rod 222 rotates, it can drive the T-bar 23 to move, thereby achieving the purpose of lifting.

[0030] Furthermore, the threaded rod 222 and the T-bar 23 are threadedly connected, fixing holes 231 are provided at both ends of one side of the T-bar 23, and adjustment grooves 232 are provided at both ends of the surface of the T-bar 23. A protrusion 233 is fixedly installed at the center of one side of the T-bar 23, and the secondary groove 212 and the protrusion 233 are slidably connected. The fixing hole 231 provides a fixing path for the clamping column 252, the adjustment groove 232 provides a moving path for the adjustment block 241, and the protrusion 233 specifies the moving direction of the T-bar 23.

[0031] Furthermore, an adjustment block 241 is fixedly installed on the inner side of the right-angle block 24 , and the adjustment slot 232 and the adjustment block 241 are slidably connected. The adjustment block 241 provides higher stability for the right-angle block 24 , so that the adjustment block 241 can slide smoothly inside the adjustment slot 232 .

[0032] Furthermore, the fixing member 25 includes a connecting rope 251 and a clamping column 252. The connecting rope 251 is fixedly installed on one side of the right-angle block 24, and the clamping column 252 is installed on one end of the connecting rope 251. The clamping column 252 passes through the right-angle block 24 and extends to the inside of the fixing hole 231. The connecting rope 251 can fix the clamping column 252. When the clamping column 252 needs to be moved, the connecting rope 251 can conveniently change the working position, and the clamping column 252 can fix the right-angle block 24 and the T-bar 23.

[0033] Embodiment 2

[0034] See also Figure 1 , Figure 2 and Figure 6 As shown, comparative example 1, as another implementation mode of the utility model, a rotating part 3 is installed inside the outer casing 1 of the glue developer, and the rotating part 3 includes an auxiliary motor 31, a connecting column 32 and a suction cup 33. The auxiliary motor 31 is bolted on both sides of the bottom end of the inner casing 1 of the glue developer, and the auxiliary motor 31 is welded with a connecting column 32 through the output end, and a suction cup 33 is installed on the top of the connecting column 32. The auxiliary motor 31 provides a power source, and the connecting column 32 can improve the stability between the auxiliary motor 31 and the suction cup 33, and the suction cup 33 can fix the film at a specific position of the developer.

[0035] Working principle: first, move the glue coating device of a glue coating and developing machine to the working position. In the first step, when the height needs to be adjusted, the main motor 221 is controlled to start working. At this time, the main motor 221 drives the T-bar 23 to rise, and the T-bar 23 drives the glue coating frame to rise. In the second step, when the lateral distance needs to be adjusted, the right-angle block 24 is pushed. At this time, the right-angle block 24 slides on the outside of the T-bar 23, and the adjustment block 241 slides inside the adjustment groove 232. In the third step, when the suction cup 33 needs to be rotated, the auxiliary motor 31 is controlled to start working. At this time, the auxiliary motor 31 drives the suction cup 33 to rotate through the output end and the connecting column 32. In this way, the use process of the glue coating device of a glue coating and developing machine is completed.

Claims

1. A glue coating device for a glue coating developer, comprising a glue coating developer housing (1) and an adjustment mechanism (2), characterized in that: A cover plate (11) is bolted to one side of the coating and developing machine housing (1), and an adjustment mechanism (2) is installed on the other side of the cover plate (11); The adjustment mechanism (2) comprises a mounting seat (21), a transmission member (22), a T-shaped rod (23), a right-angle block (24) and a fixing member (25); the mounting seat (21) is mounted on the other side of the cover plate (11); the transmission member (22) is mounted inside the mounting seat (21); the T-shaped rod (23) is mounted on the outside of the transmission member (22); right-angle blocks (24) are mounted on both sides of the upper end of the T-shaped rod (23); and the fixing member (25) is mounted on one side of the right-angle block (24).

2. The glue coating device of the glue coating and developing machine according to claim 1, characterized in that: A main groove (211) is formed on one side of the mounting seat (21), and a secondary groove (212) is formed on the other side of the main groove (211).

3. The glue coating device of the glue coating and developing machine according to claim 2, characterized in that: The transmission member (22) comprises a main motor (221) and a threaded rod (222); the main motor (221) is bolted to the bottom end of the main groove (211); the threaded rod (222) is mounted on the upper end of the main motor (221) via an output shaft; and the mounting seat (21) and the threaded rod (222) are rotatably connected.

4. The glue coating device of the glue coating and developing machine according to claim 3, characterized in that: The threaded rod (222) is threadedly connected to the T-shaped rod (23); fixing holes (231) are provided at both ends of one side of the T-shaped rod (23); adjustment grooves (232) are provided at both ends of the surface of the T-shaped rod (23); a protrusion (233) is fixedly installed at the center of one side of the T-shaped rod (23); and the auxiliary groove (212) and the protrusion (233) are slidably connected.

5. The glue coating device of the glue coating and developing machine according to claim 4, characterized in that: An adjustment block (241) is fixedly mounted on the inner side of the right-angle block (24), and the adjustment slot (232) and the adjustment block (241) are slidably connected.

6. The glue coating device of the glue coating and developing machine according to claim 5, characterized in that: The fixing member (25) comprises a connecting rope (251) and a clamping column (252); the connecting rope (251) is fixedly mounted on one side of the right-angle block (24); the clamping column (252) is mounted on one end of the connecting rope (251); and the clamping column (252) passes through the right-angle block (24) and extends to the interior of the fixing hole (231).

7. The glue coating device of a glue coating and developing machine according to claim 1, characterized in that: A rotating part (3) is installed inside the outer shell (1) of the coating developer. The rotating part (3) includes an auxiliary motor (31), a connecting column (32) and a suction cup (33). The auxiliary motor (31) is bolted to both sides of the bottom end of the inner shell (1) of the coating developer. The auxiliary motor (31) is welded to a connecting column (32) through the output end. The suction cup (33) is installed at the top of the connecting column (32).

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