Positioning assembly

Abstract

The utility model provides a positioning assembly which is used for judging whether a nozzle is aligned with the center of a suction cup or not and comprises a positioning pin, the positioning pin comprises a fixing part and an alignment part which are integrally connected, and the fixing part is matched with a connecting hole in the center of the suction cup and is configured to be inserted into the connecting hole when the positioning assembly works; the aligning part and the fixing part are coaxially arranged, and when the positioning assembly works, whether the nozzle is aligned with the center of the suction cup or not is judged according to whether the nozzle is aligned with the aligning part or not. According to the positioning assembly provided by the invention, whether the nozzle is aligned with the center of the suction cup is judged according to whether the nozzle is aligned with the alignment part, so that whether the nozzle is aligned with the center of the wafer is judged. And the judgment process does not need to simulate photoresist spraying or move the suction cup, and is simple and efficient.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a positioning component. Background Art

[0002] In the photolithography process, a layer of photoresist needs to be evenly coated on the surface of the wafer first, and the circuit pattern on the mask is displayed on the wafer surface through exposure and development.

[0003] When applying photoresist, the photoresist is first sprayed through a nozzle to the area in the center of the wafer, and then evenly coated on the surface of the wafer through high-speed rotation of the wafer.

[0004] However, if the nozzle is not aligned with the exact center of the wafer, it will cause uneven photoresist coating, ultimately affecting the critical dimension of the wafer and reducing product yield.

[0005] Therefore, a positioning component is needed that can simply and efficiently determine whether the nozzle is aligned with the center of the wafer. Utility Model Content

[0006] The purpose of the present application is to provide a positioning component to simply and efficiently determine whether the nozzle is aligned with the center of the wafer.

[0007] An embodiment of the present application provides a positioning assembly for determining whether the center of a nozzle is aligned with that of a suction cup, comprising: a positioning pin, wherein the positioning pin comprises a fixing portion and an alignment portion which are integrally connected, wherein the fixing portion matches a connecting hole at the center of the suction cup and is configured to be inserted into the connecting hole when the positioning assembly is working, wherein the alignment portion is coaxially arranged with the fixing portion, and when the positioning assembly is working, whether the center of the nozzle is aligned with that of the suction cup is determined based on whether the nozzle is aligned with the alignment portion.

[0008] In some embodiments, the cross-sectional area of ​​the alignment portion is smaller than the cross-sectional area of ​​the fixing portion.

[0009] In some embodiments, the length of the alignment portion is 3.8-4.2 mm.

[0010] In some embodiments, the positioning assembly further includes a supporting platform, which is connected to the positioning pin and is disposed around the alignment portion.

[0011] In some embodiments, the positioning assembly further includes a fastener, which is disposed on a side of the supporting platform away from the fixing portion and is used to fix the supporting platform to the positioning pin.

[0012] In some embodiments, the fastener is threadably connected to the alignment portion.

[0013] In some embodiments, the supporting platform is made of transparent material.

[0014] In some embodiments, the material of the positioning pin includes metal.

[0015] In some embodiments, the cross-sectional area of ​​the alignment portion is less than or equal to 1 mm 2 .

[0016] In some embodiments, an end of the fixing portion away from the aligning portion is provided with a chamfer.

[0017] The beneficial effects of the positioning assembly provided in the embodiments of the present application include but are not limited to:

[0018] The positioning assembly of the present application includes a positioning pin, and the positioning pin includes an integrally connected fixing and alignment portion. The fixing portion matches the connection hole in the center of the suction cup, and is configured to be inserted into the connection hole when the positioning assembly is working. The alignment portion is coaxially arranged with the fixing portion. When the positioning assembly is working, the alignment between the nozzle and the center of the suction cup is judged based on whether the nozzle is aligned with the alignment portion, and then the alignment between the nozzle and the center of the wafer is judged. There is no need to simulate photoresist injection or move the suction cup during the judgment process. It is simple and efficient. The whole test takes only twenty minutes, and the risk of accidentally touching the nozzle due to moving the suction cup is avoided. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The following figures describe in detail the exemplary embodiments disclosed in this application. The same reference numerals represent similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting, exemplary embodiments, and the drawings are only for the purpose of illustration and description, and are not intended to limit the scope of this application. Other embodiments may also accomplish the inventive intent in this application. It should be understood that the drawings are not drawn to scale.

[0020] in:

[0021] Figure 1 is a schematic diagram of the structure of a positioning component according to some embodiments of the present application; and

[0022] Figure 2 1 is a top view of a positioning assembly according to some embodiments of the present application. DETAILED DESCRIPTION

[0023] The following description provides specific application scenarios and requirements of the present application, with the purpose of enabling those skilled in the art to make and use the content in the present application. It will be apparent to those skilled in the art that various local modifications to the disclosed embodiments are apparent, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the present application. Therefore, the present application is not limited to the embodiments shown, but to the widest scope consistent with the claims.

[0024] In the prior art, whether the nozzle is aligned with the center of the wafer is usually determined in the following two ways:

[0025] The first method is to transfer the wafer to the suction cup in the process chamber, and judge whether the nozzle is aligned with the center of the wafer by simulating photoresist spraying. The cycle of a single simulated photoresist spraying is as long as 2 hours, and the coating process usually involves 4 to 6 nozzles. If this method is used to judge the nozzle position, it will greatly affect the wafer processing efficiency.

[0026] Another way is to lift the suction cup. Since the wafer and the suction cup are coaxially arranged during the processing, the alignment of the nozzle and the center of the wafer can be determined by judging whether the nozzle is aligned with the center of the suction cup. However, since the straight-line distance between the suction cup and the nozzle is only 5 mm, the suction cup can easily touch the nozzle during the rising process, causing damage to the nozzle. In addition, since the height of the suction cup has changed, the position of the suction cup needs to be calibrated after judgment to avoid errors in the subsequent wafer transfer process.

[0027] The present application provides a positioning assembly for determining whether the center of a nozzle is aligned with that of a suction cup, comprising: a positioning pin, wherein the positioning pin comprises an integrally connected fixing portion and an alignment portion, wherein the fixing portion matches a connecting hole at the center of the suction cup and is configured to be inserted into the connecting hole when the positioning assembly is working, wherein the alignment portion is coaxially arranged with the fixing portion, and when the positioning assembly is working, whether the center of the nozzle is aligned with that of the suction cup is determined based on whether the nozzle is aligned with the alignment portion.

[0028] The positioning assembly of the present application is coaxially arranged with the suction cup, and the nozzle is judged to be aligned with the center of the suction cup by judging whether the alignment part of the nozzle and the positioning pin is aligned, and then the nozzle is judged to be aligned with the center of the wafer. In the judgment process, there is no need to simulate the photoresist spraying or move the suction cup, which is simple and efficient.

[0029] The positioning assembly provided in the present application will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] refer to Figures 1-2The present application provides a positioning assembly, including a positioning pin 100, wherein the positioning pin 100 includes an integrally connected fixing portion 101 and an alignment portion 102. The fixing portion 101 matches the connection hole 12 at the center of the suction cup 11, and is configured to be inserted into the connection hole 12 when the positioning assembly is working. The alignment portion 102 is coaxially arranged with the fixing portion 101. When the positioning assembly is working, whether the nozzle 13 is aligned with the alignment portion 102 is determined to determine whether the center of the suction cup 11 is aligned.

[0031] In some embodiments, the cross-sectional area of ​​the alignment portion 102 is smaller than the cross-sectional area of ​​the fixing portion 101. By setting the cross-sectional area of ​​the alignment portion 102 to be similar to the size of the nozzle 13, it is easier for the operator to visually check whether the nozzle 13 is aligned with the alignment portion 102. In some embodiments, the cross-sectional area of ​​the alignment portion 102 is less than or equal to 1 mm 2 .

[0032] The cross section of the alignment portion 102 may be circular, square or other regular polygonal, preferably, the cross section of the alignment portion 102 is circular. In some embodiments, the diameter of the alignment portion 102 is 0.95-1.05 mm, optionally, the diameter of the alignment portion 102 is 0.95 mm, 1.0 mm or 1.05 mm.

[0033] In some embodiments, the length of the alignment portion 102 is 3.8-4.2 mm. Generally, the distance from the nozzle 13 to the top surface of the suction cup 11 is 5.0 mm. If the length of the alignment portion 102 is set to 3.8-4.2 mm, the distance from the nozzle 13 to the top surface of the alignment portion 102 is 0.8-1.2 mm, which is convenient for operators to observe whether the nozzle 13 is aligned with the alignment portion 102.

[0034] In some embodiments, the diameter of the fixing portion 101 is 3.75-3.8 mm to match the connecting hole 12 of most suction cups 11 on the market.

[0035] In some embodiments, one end of the fixing portion 101 away from the aligning portion 102 is provided with a chamfer to facilitate the insertion of the fixing portion 101 into the connecting hole 12 .

[0036] In some embodiments, the material of the positioning pin 100 includes at least one of metal and ceramic. In some embodiments, the material of the positioning pin 100 is stainless steel.

[0037] In some embodiments, the positioning assembly further includes a support platform 200, which is connected to the positioning pin 100 and is arranged around the alignment portion 102. The support platform 200 is provided to clamp the positioning pin 100 with the suction cup 11. Specifically, the fixing portion 101 is inserted into the connecting hole 12, and the support platform 200 contacts the top surface of the suction cup 11, so that the alignment portion 102 is located above the top surface of the suction cup 11. The support platform 200 can prevent the alignment portion 102 from entering the connecting hole 12 and losing the alignment function when the length of the positioning portion is less than the length of the connecting hole 12.

[0038] In some embodiments, the support platform 200 may be in any shape, as long as the cross-sectional area of ​​the support platform 200 is greater than the diameter of the connecting hole 12. Preferably, the cross-sectional area of ​​the support platform 200 is circular. In some embodiments, the diameter of the support platform 200 is 18 to 21 mm, and optionally, the diameter of the support platform 200 is 18 mm, 20 mm, or 21 mm.

[0039] In some embodiments, the thickness of the supporting platform 200 is 0.8-1.1 mm. Optionally, the thickness of the supporting platform 200 is 0.8 mm, 1.0 mm or 1.1 mm.

[0040] In some embodiments, the support platform 200 is made of a transparent material to facilitate observation of the concentricity between the support platform 200 and the suction cup 11 .

[0041] In some embodiments, the support platform 200 is made of polymethyl methacrylate (PMMA).

[0042] In some embodiments, the positioning assembly further includes a fastener 300 , which is disposed on a side of the supporting platform 200 away from the fixing portion 101 and is used to fix the supporting platform 200 to the positioning pin 100 .

[0043] In some embodiments, the fastener 300 is threadedly connected to the alignment portion 102. Specifically, the fastener 300 is provided with a threaded hole that matches the thread of the alignment portion 102, the surface of the alignment portion 102 is provided with threads, and the alignment portion 102 is inserted into the threaded hole to achieve the threaded connection between the alignment portion 102 and the fastener 300.

[0044] In some embodiments, the thickness of the fastener 300 is 0.8-1.1 mm. Optionally, the thickness of the fastener 300 is 0.8 mm, 1.0 mm or 1.1 mm.

[0045] In some embodiments, the material of the fastener 300 includes at least one of metal and ceramic. In some embodiments, the material of the fastener 300 is stainless steel.

[0046] In some embodiments, the process of using the positioning assembly provided in the present application to determine whether the center of the nozzle 13 is aligned with the suction cup 11 is as follows: insert the positioning portion into the connecting hole 12 of the suction cup 11, move the nozzle 13 of the process chamber to the working position in turn, and the operator determines whether the nozzle 13 is aligned with the alignment portion 102 to determine whether the center of the nozzle 13 is aligned with the suction cup 11. For a process chamber equipped with six nozzles, it only takes twenty minutes to complete the test of all nozzles.

[0047] The beneficial effects of the positioning assembly provided in the embodiments of the present application include but are not limited to:

[0048] The positioning assembly of the present application includes a positioning pin, and the positioning pin includes an integrally connected fixing portion and an alignment portion. The fixing portion matches the connection hole in the center of the suction cup, and is configured to be inserted into the connection hole when the positioning assembly is working. The alignment portion is coaxially arranged with the fixing portion. When the positioning assembly is working, the alignment between the nozzle and the center of the suction cup is judged based on whether the nozzle is aligned with the alignment portion, and then the alignment between the nozzle and the center of the wafer is judged. There is no need to simulate photoresist injection or move the suction cup during the judgment process. It is simple and efficient. The whole test takes only twenty minutes, and the risk of accidentally touching the nozzle due to moving the suction cup is avoided.

[0049] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other possible beneficial effects.

[0050] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this application. Such modifications, improvements and corrections are suggested in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this application.

[0051] It should be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", and "fix" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a rotating connection or a sliding connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood in combination with specific circumstances.

[0052] In addition, when terms such as "first", "second", and "third" are used in the specification of this application to describe various features, these terms are only used to distinguish these features and cannot be understood as indicating or implying the relationship between the features, the relative importance, or implicitly indicating the number of features indicated.

[0053] In addition, the present specification describes exemplary embodiments by reference to idealized exemplary cross-sectional views and / or plan views and / or stereograms. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be interpreted as being limited to the shapes of the regions shown herein, but should include deviations in shapes caused by, for example, manufacturing. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the actual shapes of the regions of the device nor to limit the scope of the exemplary embodiments.

[0054] At the same time, the present application uses specific words to describe the embodiments of this specification. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in the present application does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0055] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus help understand one or more embodiments of the invention, in the above description of the embodiments of this application, multiple features are sometimes combined into one embodiment, figure or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims. In fact, the features of the embodiments are less than all the features of the single embodiment disclosed above.

[0056] Finally, it should be understood that the embodiments described in this application are only used to illustrate the principles of the embodiments of the present application. Other variations may also fall within the scope of the present application. Therefore, as an example and not a limitation, the alternative configurations of the embodiments of the present application may be considered to be consistent with the teachings of the present application. Accordingly, the embodiments of the present application are not limited to the embodiments explicitly introduced and described in the present application.

Claims

1. A positioning assembly for determining whether the nozzle and the center of the suction cup are aligned, characterized in that: include: The positioning pin includes a fixing portion and an alignment portion which are integrally connected, the fixing portion matches the connection hole at the center of the suction cup and is configured to be inserted into the connection hole when the positioning assembly is working, the alignment portion is coaxially arranged with the fixing portion, and when the positioning assembly is working, whether the nozzle is aligned with the center of the suction cup is determined based on whether the nozzle is aligned with the alignment portion.

2. The positioning assembly according to claim 1, characterized in that: The cross-sectional area of ​​the alignment portion is smaller than the cross-sectional area of ​​the fixing portion.

3. The positioning assembly according to claim 1, characterized in that: The length of the alignment portion is 3.8-4.2 mm.

4. The positioning assembly according to claim 1, characterized in that: It also includes a supporting platform, which is connected to the positioning pin and is arranged around the alignment part.

5. The positioning assembly according to claim 4, characterized in that: It also includes a fastener, which is arranged on a side of the supporting platform away from the fixing portion and is used to fix the supporting platform to the positioning pin.

6. The positioning assembly according to claim 5, characterized in that: The fastener is threadably connected to the alignment portion.

7. The positioning assembly according to claim 4, characterized in that: The material of the supporting platform is transparent material.

8. The positioning assembly according to claim 1, characterized in that: The material of the positioning pin includes at least one of metal and ceramic.

9. The positioning assembly according to claim 1, characterized in that: The cross-sectional area of ​​the alignment portion is less than or equal to 1 mm 2 .

10. The positioning assembly according to claim 1, characterized in that: One end of the fixing portion away from the aligning portion is provided with a chamfer.

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