Fixing jig for production of carrier plate
By designing a carrier plate fixing fixture including upper and lower spring mounting plates and double torsion springs, the problems of load plate crushing and uniformity during cleaning of semiconductor products are solved, and the flat fixation and uniform spraying of the carrier plate are achieved, which improves the product yield and accuracy.
Patent Information
- Application Number
- CN202323606405.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-28
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2033-12-28
AI Technical Summary
During the cleaning process of semiconductor products, the horizontal conveying of the packaged load plate causes the carrier plate to be crushed and roller printing, affecting the uniformity of cleaning and development etching, and has high cost and low yield.
A carrier plate fixing fixture is designed including upper and lower spring mounting plates and double torsion springs. The vertical fixing of the carrier plate is achieved through rubber buffer columns and spring mounting bases to avoid roller crushing, ensuring flatness and uniform spraying.
Effectively prevent carrier plate crushing and wrinkles, improve uniformity of cleaning and development etching, improve product accuracy and yield, and reduce scrapping.
Smart Images
Figure CN222168373U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a production carrier plate fixing jig, belonging to the technical field of semiconductor product cleaning devices. Background Art
[0002] In the semiconductor industry, including the packaging carrier industry, the production operations for cleaning semiconductor products are currently basically carried out by horizontally conveying the packaging carrier to clean, develop, and treat the panel with etching solutions. The yield is low and the cost is high. Especially in the development process stage after image transfer, since the circuit is very fine, no crushing and roller marks are allowed. The horizontal conveying packaging carrier method uses rollers to press the packaging carrier to fix it, and the rollers will crush the packaging carrier. Roller marks will cause serious quality problems for the product. The uniformity of cleaning, developing, and etching is not very good, and blind spots are easily present. Utility Model Content
[0003] The main technical problem solved by the utility model is to provide a production carrier plate fixing jig, which is used to fix the production carrier plate, ensures the flatness and wrinkle-free nature of the production carrier plate, prevents the plate surface from being crushed, and has good cleaning and processing effects.
[0004] In order to solve the above technical problems, the technical solution adopted by the utility model is: to provide a production carrier plate fixing jig, including a jig frame, an upper spring mounting plate is transversely arranged on the upper part of the jig frame, and a lower spring mounting plate is transversely arranged on the lower part of the jig frame, and multiple spring mounting bases are respectively arranged on the upper spring mounting plate and the lower spring mounting plate, each spring mounting base is provided with two spring mounting pins, and double torsion springs are installed on the two spring mounting pins, and the double torsion springs include a clamping movable swing arm.
[0005] Preferably, the multiple spring mounting bases on the upper spring mounting plate are horizontally arranged in a row.
[0006] Preferably, the multiple spring mounting bases on the lower spring mounting plate are horizontally arranged in a row.
[0007] Preferably, a rubber buffer column is provided on the spring mounting base.
[0008] Preferably, a left lower spring tensioning limit device and a right lower spring tensioning limit device are respectively provided on the inner sides of both sides of the lower part of the fixture frame.
[0009] Preferably, tensioning limit screws are respectively provided on the left side of the lower spring tensioning limit device and on the upper right side of the lower spring tensioning limit device.
[0010] Preferably, anti-collision blocks are respectively provided on the outer sides of both sides of the middle part of the fixture frame.
[0011] Preferably, a spring washer is provided on the spring mounting base.
[0012] The beneficial effects of the utility model are as follows: the production carrier plate fixing fixture of the utility model is used to fix the production carrier plate, and the production carrier plate is vertically fixed by upper and lower rows of double torsion springs, and no pressing plate roller is required, thereby ensuring the flatness and wrinkle-free nature of the production carrier plate, and the plate surface will not be crushed. The production carrier plate is fixed and flushed vertically, and the cleaning and treatment are uniform and effective. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative work, among which:
[0014] Figure 1 It is a structural schematic diagram of a production carrier plate fixing fixture of the utility model. DETAILED DESCRIPTION
[0015] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0016] See also Figure 1 The utility model embodiment includes: a production carrier plate fixing jig, which includes a jig frame 4, an upper spring mounting plate 3 is transversely arranged on the upper part of the jig frame 4, and a lower spring mounting plate 9 is transversely arranged on the lower part of the jig frame 4. A plurality of spring mounting bases 2 are respectively arranged on the upper spring mounting plate 3 and the lower spring mounting plate 9, and the spring mounting base 2 is mounted on the upper spring mounting plate 3 by screws 11. Two spring mounting pins 7 are arranged on each spring mounting base 2, and double torsion springs 5 are installed on the two spring mounting pins 7. The double torsion springs 5 include a clamping movable swing arm 13, and the double torsion spring 5 can be opened by pulling the clamping movable swing arm 13.
[0017] Preferably, the multiple spring mounting bases 2 on the upper spring mounting plate 3 are horizontally arranged in a row.
[0018] Preferably, the multiple spring mounting bases 2 on the lower spring mounting plate 9 are horizontally arranged in a row.
[0019] Preferably, a rubber buffer column 1 is provided on the spring mounting base 2 .
[0020] Preferably, a left lower spring tensioning limit device 12 and a right lower spring tensioning limit device 10 are respectively provided on the inner sides of both sides of the lower part of the fixture frame 4 .
[0021] Preferably, the left lower spring tensioning limit device 12 and the right lower spring tensioning limit device 10 are respectively provided with tensioning limit screws 14 .
[0022] Preferably, anti-collision blocks 8 are respectively provided on the outer sides of both sides of the middle part of the jig frame 4, and the anti-collision blocks 8 protrude from the jig frame 4 to prevent collision between the jig frame 4 and the production carrier during operation, thereby protecting the production carrier.
[0023] Preferably, a spring washer 6 is provided on the spring mounting base 2 .
[0024] When the production carrier plate fixing fixture of the utility model is used, the production carrier plate (not marked in the figure) is placed vertically, the upper part of the production carrier plate rests on the rubber buffer columns 1 on the multiple spring mounting bases 2 on the upper spring mounting plate 3, and the lower part of the production carrier plate rests on the rubber buffer columns 1 on the multiple spring mounting bases 2 on the lower spring mounting plate 9. The multiple double torsion springs 5 on the upper spring mounting plate 3 and the multiple double torsion springs 5 on the lower spring mounting plate 9 are opened, and the upper and lower parts of the production carrier plate are clamped and fixed. The rubber buffer columns 1 have a buffering effect on the production carrier plate to prevent the production carrier plate from deformation. After the production carrier is vertically fixed on the production carrier fixing fixture of the utility model, the production carrier fixing fixture of the utility model is placed on the cleaning line, and the production carrier is tensioned under the action of its own gravity, so that the production carrier is flat and wrinkle-free, which can improve the consistency of the etching solution on the surface of the production carrier. The cleaning, developing and etching processing equipment sprays the production carrier vertically, and there is no need to use rollers to press the production carrier. The vertical spraying can fully cover the surface of the production carrier, and there will be no blind spots in spraying and processing, which improves the uniformity of the panel processing by the developing and etching solutions, and there will be no roller damage and roller marks. The vertical spraying does not produce a pool effect on the board surface, which improves the board making effect, improves product accuracy, improves product yield, and reduces scrap.
Claims
1. A production carrier plate fixing jig, comprising a jig frame, an upper spring mounting plate is transversely arranged on the upper part of the jig frame, and a lower spring mounting plate is transversely arranged on the lower part of the jig frame. It is characterized in that A plurality of spring mounting bases are respectively arranged on the upper spring mounting plate and the lower spring mounting plate, and two spring mounting pins are arranged on each spring mounting base. Double torsion springs are installed on the two spring mounting pins, and the double torsion springs include clamping movable swing arms.
2. The production carrier plate fixing jig according to claim 1, It is characterized in that The multiple spring mounting bases on the upper spring mounting plate are horizontally arranged in a row.
3. The production carrier plate fixing jig according to claim 2, It is characterized in that The multiple spring mounting bases on the lower spring mounting plate are horizontally arranged in a row.
4. The production carrier plate fixing jig according to claim 3, It is characterized in that A rubber buffer column is arranged on the spring mounting base.
5. The production carrier plate fixing jig according to claim 3, It is characterized in that A left lower spring tensioning limiter and a right lower spring tensioning limiter are respectively arranged on the inner sides of both sides of the lower part of the jig frame.
6. The production carrier plate fixing jig according to claim 5, It is characterized in that The left side of the lower spring tensioning limit device and the upper right side of the lower spring tensioning limit device are respectively provided with tensioning limit screws.
7. The production carrier plate fixing jig according to claim 6, It is characterized in that Anti-collision blocks are respectively arranged on the outer sides of both sides of the middle part of the fixture frame.
8. The production carrier plate fixing jig according to claim 7, It is characterized in that A spring washer is arranged on the spring mounting base.