High-precision frameless motor for semiconductor equipment

Abstract

The utility model discloses a high-precision frameless motor for semiconductor equipment, which comprises an outer shielding shell and a graphite inner container fixed on the inner wall of the outer shielding shell, a steel sleeve is fixed on the inner wall of the graphite inner container, a sealing cover used for sealing the lower port of the steel sleeve is fixed at the bottom end of the steel sleeve, a conical inner shell is arranged in the steel sleeve, and the conical inner shell is connected with the graphite inner container. And a stator body is installed in the conical inner shell, and a permanent magnet rotor is rotationally installed in the stator body. According to the frameless motor, all anti-electromagnetic interference components are additionally arranged, so that the propagation of electromagnetic radiation can be effectively blocked, the influence of electromagnetic interference on surrounding equipment or systems is reduced, the electromagnetic compatibility of the frameless motor is favorably improved, and the frameless motor is more reliable to use in a sensitive environment.

Description

Technical Field

[0001] The utility model relates to the technical field of frameless motors, in particular to a high-precision frameless motor for semiconductor equipment. Background Art

[0002] Frameless motors are mainly used in semiconductor equipment in the precision positioning and control systems during the semiconductor manufacturing process, such as the robotic arms in semiconductor wafer manufacturing equipment, the optical modules in semiconductor testing equipment, and the welding devices in semiconductor packaging equipment. These application scenarios place stringent requirements on the accuracy, stability, and high speed of the motors, and frameless motors are one of the ideal choices that can meet these requirements.

[0003] The structure of a frameless motor usually consists of two parts: a rotor and a stator. The rotor part usually uses a magnet made of permanent magnetic material, and generates a magnetic field through an externally applied current, thereby interacting with the magnetic field of the stator part to achieve rotation. The stator part usually includes components such as coils and magnets. By controlling the current in the coil, a magnetic field is generated, which interacts with the magnetic field of the rotor to drive the rotor to rotate. Unlike traditional framed motors, frameless motors usually do not have a housing, end caps, and bearings. This design requires the user to provide the necessary support structure and bearing system for the frameless motor in the final application so that the motor can be directly integrated into the mechanical system. However, the current frameless motor does not have any anti-electromagnetic interference components added to its internal parts during use, and the frameless motor will generate electromagnetic interference during operation, which may affect the normal operation of surrounding electronic equipment or systems, especially in environments sensitive to electromagnetic interference such as semiconductor manufacturing equipment. This interference may cause equipment performance degradation or failure, thereby affecting production efficiency and product quality. Utility Model Content

[0004] The purpose of the utility model is to provide a high-precision frameless motor for semiconductor equipment, and an outer shielding shell, a graphite liner, a steel sleeve and a conical inner shell are sequentially added to the outside of the frameless motor toward the rotor to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solution: a high-precision frameless motor for semiconductor equipment, comprising an outer shielding shell and a graphite liner fixed on the inner wall of the outer shielding shell, and a steel sleeve is fixed on the inner wall of the graphite liner, and a sealing cover for sealing its lower port is fixed to the bottom end of the steel sleeve, a conical inner shell is installed inside the steel sleeve, and a stator body is installed inside the conical inner shell, a permanent magnet rotor is rotatably installed inside the stator body, a rotating shaft is installed inside the permanent magnet rotor, and the top end of the rotating shaft passes through the outside of the conical inner shell and is fixed with a driving disk.

[0006] Preferably, the stator body comprises an iron core fixed at one end inside the conical inner shell, and a copper wire winding wound in slots of the iron core.

[0007] Preferably, a downwardly recessed countersunk hole is provided at the center position of the top end of the sealing cover, a ball bearing is installed inside the countersunk hole, and the bottom end of the rotating shaft extends to the inside of the ball bearing.

[0008] Preferably, a plurality of equidistant positioning holes are installed at the edge of the top end of the driving disk.

[0009] Preferably, an upper protective end cover is installed at the top of the outer shielding shell, and a reinforcing grille is arranged between the bottom end of the upper protective end cover and the top end of the conical inner shell, the outer surface of the upper protective end cover is integrally formed with an annular lip, and the top end of the annular lip is installed with a positioning pin bolted to the outer shielding shell.

[0010] Preferably, the reinforced grille includes a plurality of limit rods fixed at equal intervals on the bottom end of the upper protective end cover, and a sink groove arranged at the top end of the conical inner shell and concentric with the limit rods, and the bottom end of the limit rod extends to the inside of the sink groove.

[0011] Preferably, an arc-shaped plug-in component is also provided between the upper protective end cover and the conical inner shell, and the arc-shaped plug-in component is two symmetrical arc-shaped evacuated shells arranged at the top of the conical inner shell, and two arc-shaped plates fixed on the top of the upper protective end cover, and the bottom end of the arc-shaped plate extends to the interior of the arc-shaped evacuated shell.

[0012] Compared with the prior art, the beneficial effect of the utility model is that the high-precision frameless motor for semiconductor equipment is provided with an outer shielding shell and a conical inner shell and other structures that cooperate with each other, and various anti-electromagnetic interference components are added, which can effectively block the propagation of electromagnetic radiation and reduce the impact of electromagnetic interference on surrounding equipment or systems. It also helps to improve the electromagnetic compatibility of the frameless motor, making it more reliable for use in sensitive environments, and ensuring the normal operation of the semiconductor equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a schematic diagram of the main structure of the utility model;

[0014] Figure 2 This is a schematic diagram of the main cross-sectional structure of the utility model;

[0015] Figure 3 It is a three-dimensional structural schematic diagram of the utility model;

[0016] Figure 4 It is a three-dimensional cross-sectional structural schematic diagram of the utility model;

[0017] In the figure: 1, outer shielding shell; 2, graphite liner; 3, steel sleeve; 4, conical inner shell; 401, sink groove; 5, stator body; 501, iron core; 502, copper wire winding; 6, permanent magnet rotor; 7, rotating shaft; 8, driving disk; 801, positioning hole; 9, upper protective end cover; 901, annular lip; 902, positioning pin; 903, limit rod; 10, arc plug-in. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] See also Figure 1-4 The utility model provides an embodiment: a high-precision frameless motor for semiconductor equipment, comprising an outer shielding shell 1 and a graphite liner 2 fixed on the inner wall of the outer shielding shell 1, and a steel sleeve 3 is fixed on the inner wall of the graphite liner 2, and a sealing cover for sealing its lower port is fixed at the bottom end of the steel sleeve 3, and a conical inner shell 4 is installed inside the steel sleeve 3, and a stator body 5 is installed inside the conical inner shell 4, and the conical inner shell 4 can improve the heat dissipation effect of the motor, increase the surface area, and accelerate the conduction and dissipation of heat, so as to maintain the stability of the internal temperature of the frameless motor and extend the working efficiency and life of the motor;

[0020] A permanent magnet rotor 6 is rotatably mounted inside the stator body 5, a rotating shaft 7 is mounted inside the permanent magnet rotor 6, the top end of the rotating shaft 7 penetrates the outside of the conical inner shell 4 and is fixed with a driving disk 8, and a plurality of equidistant positioning holes 801 are mounted at the edge of the top end of the driving disk 8;

[0021] The stator body 5 includes an iron core 501 fixed at one end of the inner conical inner shell 4, and a copper wire winding 502 wound in the slot of the iron core 501. The iron core 501 is composed of multiple layers of stacked silicon steel sheets, which are designed into a specific shape to form a magnetic circuit. The main function of the silicon steel sheets is to reduce eddy current loss and hysteresis loss and improve the efficiency of the motor. The copper wire winding 502 is wound in the slot of the iron core 501. When the copper wire winding 502 passes through the alternating current, the copper wire winding 502 generates an alternating magnetic field. The layout of the copper wire winding 502, the number of turns and the current size will affect the production. The strength and distribution of the magnetic field generated by the stator body 5, the rotating magnetic field generated by the stator body 5 interacts with the permanent magnets or the iron core on the permanent magnet rotor 6, that is, the rotating magnetic field of the stator body 5 will attract and repel the permanent magnet rotor 6, thereby generating a torque to rotate the rotor and the shaft 7. When the drive disk 8 is fixed to the support structure and bearing system provided by the user, the rotation of the shaft 7 and the drive disk 8 generates a mechanical output, which can be used to drive various devices. In this process, the speed and torque of the motor can be precisely controlled by precisely controlling the current in the stator body 5, thereby achieving high-precision motion control;

[0022] A downwardly sunken countersunk hole is provided at the center of the top of the sealing cover, a ball bearing is installed inside the countersunk hole, and the bottom end of the rotating shaft 7 extends to the inside of the ball bearing, so that the rotation stability of the rotating shaft 7 is improved by the ball bearing;

[0023] An upper protective end cover 9 is installed at the top of the outer shielding shell 1, and a reinforcing grille is arranged between the bottom end of the upper protective end cover 9 and the top end of the conical inner shell 4. An annular lip 901 is integrally formed on the outer surface of the upper protective end cover 9. A positioning pin 902 that is bolted to the outer shielding shell 1 is installed at the top of the annular lip 901. The upper protective end cover 9 is bolted to the top of the outer shielding shell 1 through the annular lip 901 and the positioning pin 902. At this time, the frameless motor is in a fully sealed state, which can prevent the external environment from affecting the inside of the motor, keep the motor running stably, and reduce the possibility of failure.

[0024] The reinforcement grille includes a plurality of limit rods 903 fixed at equal intervals at the bottom end of the upper protective end cover 9, and a sink 401 which is arranged at the top end of the conical inner shell 4 and is concentric with the limit rods 903. The bottom end of the limit rod 903 extends to the inside of the sink 401. The bottom end of the upper protective end cover 9 is plugged into the sink 401 through the limit rod 903. At this time, the plurality of limit rods 903 jointly form a reinforcement grille between the upper protective end cover 9 and the conical inner shell 4. The presence of the reinforcement grille can increase the mechanical support between the upper protective end cover 9 and the conical inner shell 4, so that the motor has better pressure resistance when subjected to external pressure.

[0025] An arc-shaped plug-in 10 is also provided between the upper protective end cover 9 and the conical inner shell 4. The arc-shaped plug-in 10 is two symmetrical arc-shaped evacuated shells arranged at the top of the conical inner shell 4, and two arc-shaped plates fixed on the top of the upper protective end cover 9. The bottom end of the arc-shaped plate extends to the interior of the arc-shaped evacuated shell. The arc-shaped plug-in 10 further connects the upper protective end cover 9 and the conical inner shell 4, which can effectively increase the connection strength between the upper protective end cover 9 and the conical inner shell 4, making the combination between them more firm and stable.

[0026] When the embodiment of the present application is in use, first, the frameless motor is sequentially arranged with an outer shielding shell 1, a graphite liner 2, a steel sleeve 3 and a conical inner shell 4 from the outside to the inside. The outer shielding shell 1 effectively isolates electromagnetic radiation to prevent it from propagating outward, thereby reducing interference with surrounding equipment or systems, and the outer shielding shell 1 can also provide mechanical protection to prevent external objects from damaging the motor, thereby enhancing the durability and stability of the motor; the graphite liner 2 has good electrical conductivity and thermal conductivity, can effectively absorb and disperse electromagnetic radiation, and reduce the impact of electromagnetic interference on the inside of the motor. At the same time, the graphite liner 2 also has certain mechanical strength and high temperature resistance, and can protect the internal components of the motor from the influence of the external environment; the steel sleeve 3 has excellent mechanical strength and corrosion resistance, and can effectively protect the internal components of the motor from damage by the external environment; the conical inner shell 4 makes the electromagnetic radiation more concentrated and reduces interference with the external environment. By adding various anti-electromagnetic interference components, the frameless motor can effectively block the propagation of electromagnetic radiation, reduce the impact of electromagnetic interference on surrounding equipment or systems, and help to improve the electromagnetic compatibility of the frameless motor, making it more reliable to use in sensitive environments, and ensuring the normal operation of semiconductor equipment.

[0027] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. High-precision frameless motor for semiconductor equipment, characterized by: The invention comprises an outer shielding shell (1) and a graphite liner (2) fixed on the inner wall of the outer shielding shell (1), a steel sleeve (3) fixed on the inner wall of the graphite liner (2), a sealing cover for sealing its lower port fixed at the bottom end of the steel sleeve (3), a conical inner shell (4) installed inside the steel sleeve (3), a stator body (5) installed inside the conical inner shell (4), a permanent magnet rotor (6) rotatably installed inside the stator body (5), a rotating shaft (7) installed inside the permanent magnet rotor (6), the top end of the rotating shaft (7) passes through the outside of the conical inner shell (4) and is fixed with a driving disk (8).

2. The high-precision frameless motor for semiconductor devices according to claim 1, characterized in that: The stator body (5) comprises an iron core (501) fixed at one end inside a conical inner shell (4), and a copper wire winding (502) wound in slots of the iron core (501).

3. The high-precision frameless motor for semiconductor devices according to claim 1, characterized in that: A downwardly recessed countersunk hole is provided at the center of the top of the sealing cover, a ball bearing is installed inside the countersunk hole, and the bottom end of the rotating shaft (7) extends to the inside of the ball bearing.

4. The high-precision frameless motor for semiconductor devices according to claim 1, characterized in that: A plurality of equidistant positioning holes (801) are installed at the edge of the top end of the driving disk (8).

5. The high-precision frameless motor for semiconductor devices according to claim 1, characterized in that: An upper protective end cover (9) is installed at the top end of the outer shielding shell (1), and a reinforcing grille is arranged between the bottom end of the upper protective end cover (9) and the top end of the conical inner shell (4), and an annular lip (901) is integrally formed on the outer surface of the upper protective end cover (9), and a positioning pin (902) bolted to the outer shielding shell (1) is installed at the top end of the annular lip (901).

6. The high-precision frameless motor for semiconductor devices according to claim 5, characterized in that: The reinforced grille comprises a plurality of limit rods (903) fixed at equal intervals on the bottom end of the upper protective end cover (9), and a sink groove (401) arranged at the top end of the conical inner shell (4) and concentric with the limit rods (903), wherein the bottom end of the limit rod (903) extends to the inside of the sink groove (401).

7. The high-precision frameless motor for semiconductor devices according to claim 5, characterized in that: An arc-shaped insert (10) is also provided between the upper protective end cover (9) and the conical inner shell (4). The arc-shaped insert (10) is two symmetrical arc-shaped evacuated shells provided at the top of the conical inner shell (4), and two arc-shaped plates fixed on the top of the upper protective end cover (9), the bottom ends of the arc-shaped plates extending to the interior of the arc-shaped evacuated shells.

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