Wastewater precipitation and filtration device for semiconductor cleaning equipment

Abstract

The utility model discloses a device for precipitating and filtering wastewater of semiconductor cleaning equipment, which comprises a treating pond comprising a water inlet chamber, a filtering chamber and a precipitating chamber, the middle part of the filtering chamber is fixedly connected with a built-in collecting cylinder, the outer side of the built-in collecting cylinder is provided with a filtering component, and the filtering component comprises a rotating ring disc; and the filter plate frame is fixedly connected with the rotating ring disc. The utility model relates to the technical field of wastewater treatment. According to the wastewater settling and filtering device for the semiconductor cleaning equipment, through continuous filtering and automatic filter residue cleaning, the filtering efficiency and the equipment operation continuity are improved, the detachable filter screen plate is convenient to maintain and replace, the downtime is shortened, the maintenance cost is reduced, and the service life is prolonged. The design of the spiral packing auger simplifies the waste residue collecting and transferring process, the requirement for manual cleaning is reduced, the overall design structure is compact, space is saved, and operation and automatic control are easy.

Description

Technical Field

[0001] The utility model relates to the technical field of wastewater treatment, in particular to a wastewater sedimentation and filtering device for semiconductor cleaning equipment. Background Art

[0002] In the semiconductor manufacturing process, the wastewater generated by the cleaning equipment contains a variety of chemicals and particles, which can pollute the environment if discharged directly. Therefore, it is necessary to effectively treat and recycle these wastewaters to reduce the impact on the environment and save resources.

[0003] Traditional wastewater treatment methods usually include chemical precipitation, biological treatment and physical filtration. However, these methods have some limitations, such as low treatment efficiency, high cost, and failure to meet environmental protection requirements. Especially in semiconductor manufacturing, due to the large variety and high concentration of impurities in wastewater, traditional treatment methods often fail to achieve ideal treatment effects.

[0004] For example, patent CN218262054U discloses a semiconductor cleaning wastewater discharge treatment device. This technical solution sets a rotating device in the sedimentation tank, which will cause the waste liquid to rotate in the sedimentation tank. Under the action of centrifugal force, tiny particles will be concentrated at the center of the bottom of the sedimentation tank, and then discharged through the sediment discharge hole. However, during use, the device does not have a filtering function, and the impurity particles cannot be completely gathered in the center. A small part of the impurity particles are easily discharged with the water flow, which will cause both waste and pollution.

[0005] Therefore, the utility model proposes an improved wastewater treatment device, which is continuously optimized and reduces costs to meet higher functional requirements by transforming and upgrading existing equipment. Utility Model Content

[0006] In view of the deficiencies in the prior art, the utility model provides a wastewater sedimentation and filtration device for semiconductor cleaning equipment, which solves the problems raised in the background technology.

[0007] To achieve the above purpose, the utility model is implemented by the following technical solutions: a wastewater sedimentation and filtration device for semiconductor cleaning equipment, comprising a treatment pool including a water inlet chamber, a filtration chamber and a sedimentation chamber, a built-in collection cylinder is fixedly connected to the middle of the filtration chamber, and a filter member is provided on the outside of the built-in collection cylinder, the filter member comprises a rotating ring disk, and a filter plate frame fixedly connected to the rotating ring disk, the rotating ring disk is rotatably connected to the inner side of the sedimentation chamber, and the rotating ring disk is sleeved on both ends of the outer side of the built-in collection cylinder;

[0008] A residue inlet slot is provided at the upper portion of the built-in collecting cylinder, a filter screen is provided on the surface of the filter plate frame, slide openings are provided on both sides of the filter plate frame, and a cleaning rod is slidably connected to the slide opening, and the cleaning rod is used to clean the filter residue on the surface of the filter screen.

[0009] Preferably, the cleaning rod comprises a slide rod and a cleaning brush arranged on the surface of the slide rod, wherein the cleaning brush contacts the surface of the filter screen plate, and pulleys are arranged at both ends of the slide rod.

[0010] Preferably, an annular chute is provided on the inner side of the filter chamber, and the upper part of the annular chute is a concave structure;

[0011] The pulley is slidably connected with the annular sliding groove.

[0012] Preferably, a driving motor is fixedly connected to the outside of the treatment tank, and the output end of the driving motor passes through the inner side of the filter chamber and is fixedly connected to a gear through a coupling. The outer side of the rotating ring disk is a tooth structure, and the gear is meshed with the tooth structure of the rotating ring disk for transmission.

[0013] Preferably, an external collection box is provided on one side of the treatment pool, and one end of the internal collection cylinder is an open structure, and its opening is connected to the external collection box;

[0014] Preferably, a spiral auger is rotatably connected to the inner side of the built-in collecting cylinder, and one end of the spiral auger passes through the outer side of the treatment tank and is fixedly connected to a driven wheel.

[0015] Preferably, a driving wheel is further provided at the coupling at the output end of the driving motor, and the driving wheel and the driven wheel are connected via a belt transmission.

[0016] Preferably, the filter plate frame and the filter mesh plate are detachably connected.

[0017] Beneficial Effects

[0018] The utility model provides a wastewater sedimentation and filtration device for semiconductor cleaning equipment. Compared with the prior art, it has the following beneficial effects:

[0019] The utility model improves the filtering efficiency and the continuity of equipment operation through continuous filtering and automatic cleaning of filtering residues.

[0020] In the utility model, the detachable filter screen plate is designed to facilitate maintenance and replacement, thereby reducing downtime and maintenance costs.

[0021] In the utility model, the design of the spiral auger simplifies the collection and transfer process of waste residues and reduces the need for manual cleaning.

[0022] The utility model has a compact overall design structure, saves space, and is easy to operate and automatically control. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a structural sectional view of the utility model;

[0024] Figure 2 This is the structural front view of the utility model;

[0025] Figure 3 It is a structural left view of the cleaning rod of the utility model.

[0026] In the figure: 1. treatment tank; 11. water inlet chamber; 12. filter chamber; 121. annular chute; 13. sedimentation chamber; 14. drive motor; 141. gear; 142. driving wheel; 15. external collection box; 2. internal collection cylinder; 21. slag inlet slot; 22. spiral auger; 221. driven wheel; 31. rotating ring disk; 32. filter plate frame; 321. filter screen plate; 322. chute opening; 41. slide rod; 42. cleaning brush; 43. pulley. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] See also Figure 1-Figure 2 , the utility model provides a technical solution: a wastewater sedimentation and filtration device for semiconductor cleaning equipment, comprising a treatment pool 1, and the treatment pool 1 is provided with a water inlet chamber 11, a filtration chamber 12 and a sedimentation chamber 13 from left to right;

[0029] The middle of the filtration chamber 12 is fixedly connected with a built-in collection barrel 2, one side of the treatment tank 1 is provided with an external collection box 15, and one end of the built-in collection barrel 2 is an open structure, and its opening is connected with the external collection box 15, and a filter member is provided on the outside of the built-in collection barrel 2, and the filter member includes a rotating ring disk 31, and a filter plate frame 32 fixedly connected to the rotating ring disk 31, the rotating ring disk 31 is rotatably connected to the inner side of the sedimentation chamber 13, and the rotating ring disk 31 is sleeved on both ends of the outer side of the built-in collection barrel 2;

[0030] A slag inlet notch 21 is provided on the upper portion of the built-in collecting cylinder 2, and a filter screen plate 321 is provided on the surface of the filter plate frame 32;

[0031] The outside of the treatment tank 1 is fixedly connected with a driving motor 14, and the output end of the driving motor 14 penetrates the inside of the filter chamber 12 and is fixedly connected with a gear 141 through a coupling. The outside of the rotating ring disk 31 is a tooth structure, and the gear 141 is meshed with the tooth structure of the rotating ring disk 31 for transmission;

[0032] This embodiment realizes effective filtration of impurities in wastewater through the built-in collecting cylinder 2 and the rotating ring disk 31, and can automatically clean the filter screen 321. At the same time, the driving motor 14 drives the gear 141 and the rotating ring disk 31 to engage and transmit, thereby improving the filtration efficiency. The design of the slag inlet slot 21 facilitates the collection of filtered waste slag and facilitates subsequent processing.

[0033] Embodiment 2

[0034] See also Figure 1-Figure 3 As the second embodiment of the present utility model, when the present application is implemented, compared with the first embodiment, the technical solution of the present embodiment is different from that of the first embodiment only in that:

[0035] Slide openings 322 are provided on both sides of the filter plate frame 32 , and cleaning rods are slidably connected to the slide openings 322 , and the cleaning rods are used to clean filter residues on the surface of the filter screen plate 321 .

[0036] The cleaning rod comprises a slide rod 41 and a cleaning brush 42 arranged on the surface of the slide rod 41 . The cleaning brush 42 contacts the surface of the filter screen plate 321 . Pulleys 43 are arranged at both ends of the slide rod 41 .

[0037] An annular chute 121 is provided on the inner side of the filter chamber 12, and the upper part of the annular chute 121 is a concave structure;

[0038] The pulley 43 is slidably connected to the annular slide groove 121;

[0039] This embodiment adds a cleaning rod on the basis of the first embodiment to clean the filter residue on the surface of the filter screen plate 321, further improving the cleaning ability and stability of the filtration system. At the same time, the sliding connection design between the pulley 43 and the annular groove 121 allows the cleaning rod to move along a preset trajectory, thereby enhancing the controllability of the cleaning process.

[0040] Embodiment 3

[0041] As the third embodiment of the utility model, when the present application is implemented, compared with the first and second embodiments, the technical solution of this embodiment is to combine the solutions of the first and second embodiments, and the difference between the technical solution of this embodiment and the first and second embodiments is that in this embodiment:

[0042] A spiral auger 22 is rotatably connected to the inner side of the built-in collecting cylinder 2 , and one end of the spiral auger 22 passes through the outer side of the treatment tank 1 and is fixedly connected to a driven wheel 221 .

[0043] A driving wheel 142 is also provided at the coupling at the output end of the driving motor 14, and the driving wheel 142 is connected to the driven wheel 221 through a belt transmission;

[0044] This embodiment combines the advantages of embodiment one and embodiment two, and adds a spiral auger 22 inside the built-in collecting barrel 2, so as to realize automatic cleaning of waste residue to the external collecting box 15. At the same time, the driven wheel 221 and the driving wheel 142 are connected by belt drive, which simplifies the transmission structure and reduces maintenance costs.

[0045] Embodiment 4

[0046] As the fourth embodiment of the utility model, when the present application is implemented, compared with the first embodiment, the second embodiment and the third embodiment, the difference between the present embodiment and the first embodiment, the second embodiment and the third embodiment is only that in the present embodiment:

[0047] The filter plate frame 32 and the filter screen plate 321 are detachably connected. In this embodiment, the detachable connection between the filter plate frame 32 and the filter screen plate 321 is any one of a threaded connection, a snap connection and a hinge connection;

[0048] In this embodiment, the detachable connection between the filter plate frame 32 and the filter screen plate 321 improves the maintainability and replacement convenience of the equipment and reduces downtime.

[0049] Embodiment 5

[0050] As the fifth embodiment of the present utility model, when the present application is implemented, compared with the first embodiment, the second embodiment, the third embodiment and the fourth embodiment, the technical solution of this embodiment is to combine the solutions of the first embodiment, the second embodiment, the third embodiment and the fourth embodiment;

[0051] The utility model forms a multifunctional, high-efficiency and easy-to-maintain wastewater filtration system, which integrates multiple functional modules and provides a more comprehensive solution to meet the needs of different working conditions. By continuously optimizing the filtration mechanism and adding cleaning and maintenance functions, the entire wastewater filtration system is more efficient, automated and easy to maintain, ensuring long-term stable operation and reducing the difficulty of operation.

[0052] Meanwhile, the contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0053] When in use, waste water from the semiconductor cleaning equipment enters the water inlet chamber 11, then flows into the filter chamber 12 for filtration, and then flows into the sedimentation chamber 13 for sedimentation.

[0054] During the filtering process, the driving motor 14 drives the gear 141 to rotate, and at the same time, the gear 141 is meshed with the tooth structure of the rotating ring disk 31, so that the rotating ring disk 31 drives the filter plate frame 32 to rotate, and then the filter screen plate 321 on the filter plate frame 32 filters the impurities contained in the wastewater flowing into the filter chamber 12;

[0055] At the same time, when the filter plate frame 32 rotates around the built-in collecting cylinder 2, the sliding rod 41 slidably connected at the filter plate frame 32 is slidably connected to the annular slide groove 121. When it moves to the concave structure of the annular slide groove 121, the sliding rod 41 drives the cleaning brush 42 to slide at the filter plate frame 32 and scrapes and cleans the waste residue on the surface of the filter screen plate 321. Then, the scraped and cleaned waste residue falls into the interior of the built-in collecting cylinder 2 from the residue inlet notch 21;

[0056] During the rotation of the driving motor 14, the driving wheel 142 drives the driven wheel 221 to rotate through the belt, and then the spiral auger 22 rotates inside the built-in collecting cylinder 2 and cleans the waste residue inside the built-in collecting cylinder 2 to the inside of the external collecting box 15;

[0057] Meanwhile, when the filter screen plate 321 is damaged, the detachably connected filter screen plate 321 can be removed from the filter plate frame 32 and replaced with a new filter screen plate 321 to ensure the rapid replacement of the filter screen plate 321 .

[0058] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0059] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A wastewater sedimentation and filtration device for semiconductor cleaning equipment, comprising a treatment tank (1) including a water inlet chamber (11), a filtration chamber (12) and a sedimentation chamber (13), characterized in that: A built-in collecting cylinder (2) is fixedly connected to the middle of the filtering chamber (12), and a filtering member is provided on the outside of the built-in collecting cylinder (2), the filtering member comprising a rotating ring disk (31) and a filtering plate frame (32) fixedly connected to the rotating ring disk (31), the rotating ring disk (31) is rotatably connected to the inside of the sedimentation chamber (13), and the rotating ring disk (31) is sleeved on both ends of the outside of the built-in collecting cylinder (2); The upper portion of the built-in collecting cylinder (2) is provided with a residue inlet notch (21), the surface of the filter plate frame (32) is provided with a filter screen plate (321), both sides of the filter plate frame (32) are provided with slide openings (322), and the slide openings (322) are slidably connected with cleaning rods, which are used to clean the residue on the surface of the filter screen plate (321).

2. The device for sedimentation and filtration of wastewater from semiconductor cleaning equipment according to claim 1, characterized in that: The cleaning rod comprises a sliding rod (41) and a cleaning brush (42) arranged on the surface of the sliding rod (41), wherein the cleaning brush (42) contacts the surface of the filter screen plate (321), and pulleys (43) are arranged at both ends of the sliding rod (41).

3. The device for sedimentation and filtration of wastewater from semiconductor cleaning equipment according to claim 2, characterized in that: An annular chute (121) is provided on the inner side of the filter chamber (12), and the upper part of the annular chute (121) is a concave structure; The pulley (43) is slidably connected to the annular sliding groove (121).

4. The device for sedimentation and filtration of wastewater from semiconductor cleaning equipment according to claim 1, characterized in that: A driving motor (14) is fixedly connected to the outside of the treatment tank (1), and the output end of the driving motor (14) passes through the inside of the filter chamber (12) and is fixedly connected to a gear (141) via a coupling. The outside of the rotating ring disk (31) is a tooth structure, and the gear (141) is meshed with the tooth structure of the rotating ring disk (31) for transmission.

5. The device for sedimentation and filtration of wastewater from semiconductor cleaning equipment according to claim 1, characterized in that: An external collection box (15) is provided on one side of the treatment pool (1), and one end of the internal collection cylinder (2) is an open structure, and the opening is connected to the external collection box (15).

6. The device for sedimentation and filtration of wastewater from semiconductor cleaning equipment according to claim 4, characterized in that: The inner side of the built-in collecting cylinder (2) is rotatably connected to a spiral auger (22), and one end of the spiral auger (22) penetrates the outer side of the treatment tank (1) and is fixedly connected to a driven wheel (221).

7. The device for sedimentation and filtration of wastewater from semiconductor cleaning equipment according to claim 6, characterized in that: A driving wheel (142) is also provided at the coupling at the output end of the driving motor (14), and the driving wheel (142) and the driven wheel (221) are connected via a belt transmission.

8. The device for sedimentation and filtration of wastewater from semiconductor cleaning equipment according to claim 1, characterized in that: The filter plate frame (32) and the filter screen plate (321) are detachably connected.

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