Spraying device for electroplating pretreatment

Abstract

The utility model discloses a spraying device for electroplating pretreatment, which belongs to the technical field of semiconductor chip processing, and comprises a spraying box, a feeding component is arranged at the upper part in the spraying box, a support frame is arranged below the spraying box, a water tank is arranged on a bottom plate of the support frame, a stirring component is arranged in the water tank, and the stirring component is arranged in the spraying box. A water pump is arranged in the middle of the upper portion of the water tank, a spraying assembly is arranged above the water pump, backflow pipes are arranged on the two sides of the lower portion of the interior of the spraying box, and a filtering assembly is arranged below the backflow pipes. The water tank is arranged, water and flushing fluid in the water tank can be rapidly stirred and uniformly mixed, the filtering tank, the dismounting and mounting box, the filtering net and the adsorption net are arranged, the backflow flushing fluid can be conveniently filtered, and the use practicability is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor chip processing, and in particular relates to a spray device for electroplating pre-treatment. Background Art

[0002] Semiconductor chips refer to semiconductor devices that can achieve certain functions by etching and wiring on semiconductor sheets. Not only silicon chips, but also common semiconductor materials such as gallium arsenide and germanium. During processing, electroplating is required. Before electroplating, the surface of the product needs to be treated to remove the attachments on the surface of the product.

[0003] Chinese patent application No. 202122134434.9 discloses a spray device for pre-treatment of semiconductor materials for electroplating, which belongs to the field of semiconductor chip processing. The spray device includes a support body, a liquid collecting tank fixedly arranged on the support body, a feeding steel belt that moves laterally in the liquid collecting tank for transporting materials, and a spray mechanism for spraying the materials on the feeding steel belt; the spray mechanism includes spray pipes symmetrically arranged on both sides of the feeding steel belt, a water tank placed under the support body, a filter module fixedly arranged at the bottom of the liquid collecting tank, a water pump fixedly arranged on the water tank, and a conduit for connecting the outlet end of the water pump with the filter module and the spray pipe with the filter module. The spray pipe is provided with a high-pressure nozzle facing the material on the side close to the feeding steel belt. The use of spraying to treat the surface of the continuous semiconductor before electroplating can effectively avoid material jamming, and at the same time, the product can be prevented from being damaged by long-term contact with the cleaning liquid by controlling the start and stop of the spray mechanism.

[0004] The above-mentioned patent disclosed, 1. When in use, the material is cleaned by using a flushing liquid. When the flushing liquid is used, water needs to be added for dilution, but when it is used, it is inconvenient to quickly stir and mix the water and the flushing liquid evenly; 2. When in use, the flushing liquid is filtered by a filter component arranged at the output end of the water pump, but when it is used, the flushing liquid after flushing flows back into the water tank, which will be accompanied by impurities. After long-term use, the impurities are likely to cause damage to the water pump. At the same time, it is inconvenient to clean the filter. Utility Model Content

[0005] To solve the problems raised in the above background technology, the utility model provides a spray device for electroplating pretreatment, which is convenient for quickly stirring and evenly mixing water and flushing liquid in the water tank, convenient for filtering the backflowing flushing liquid, and convenient for disassembling and cleaning or replacing the filter screen.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a spray device for electroplating pretreatment, comprising a spray box, a feeding assembly is arranged above the interior of the spray box, a support frame is arranged below the spray box, a water tank is arranged on the bottom plate of the support frame, a stirring assembly is arranged inside the water tank, a water pump is arranged in the middle above the water tank, a spray assembly is arranged above the water pump, return pipes are arranged on both sides of the lower interior of the spray box, and a filtering assembly is arranged below the return pipe.

[0007] Preferably, the stirring assembly includes a stirring motor, a pulley 1, a stirring rod 1, a stirring blade 1, a pulley 2, a connecting belt, a stirring rod 2 and a stirring blade 2, wherein a stirring motor is arranged at one end above the water tank, a pulley 1 is arranged at one end of the stirring motor, a stirring rod 1 is arranged at one end of the pulley 1, a stirring blade 1 is symmetrically arranged on the surface of the stirring rod 1, a pulley 2 is arranged on one side of the pulley 1, a connecting belt is sleeved on the surfaces of the pulley 2 and the pulley 1, a stirring rod 2 is arranged at one end of the pulley 2, and a stirring blade 2 is symmetrically arranged on the surface of the stirring rod 2.

[0008] Preferably, a protective cover is provided on the surface of the stirring motor, and a heat dissipation hole is provided above the protective cover.

[0009] Preferably, the filter assembly includes a filter box, a disassembly box, a filter screen, an adsorption screen, a sealing plug cover, a clamping rod, a stabilizing slide bar and a clamping spring, wherein a filter box is provided at one end of the return pipe, a disassembly box is provided inside the filter box, a filter screen is provided inside the disassembly box, an adsorption screen is provided below the filter screen, a sealing plug cover is provided on one side of the disassembly box, a clamping rod is provided above the sealing plug cover, a stabilizing slide bar is slidably provided at one end of the clamping rod located inside the filter box, and a clamping spring is provided on one side of the stabilizing slide bar.

[0010] Preferably, a guide sliding opening is provided at one end of the clamping rod, and a clamping hole matching the clamping rod is provided above the sealing plug cover.

[0011] Preferably, the disassembly box is inserted into the interior of the filter box, and the disassembly box and the sealing plug cover are in abutting connection.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] 1. The utility model achieves the effect of quickly stirring and evenly mixing the water and the flushing liquid in the water tank by arranging a stirring component. By arranging a stirring motor, a pulley 1, a stirring rod 1, a stirring blade 1, a pulley 2, a connecting belt, a stirring rod 2 and a stirring blade 2, the water and the flushing liquid in the water tank can be quickly stirred and evenly mixed, thereby improving the practicality of use.

[0014] 2. The utility model realizes the effect of facilitating the filtering of the refluxed flushing liquid and facilitating the disassembly and assembly of the filter screen for cleaning or replacement by providing a filter assembly. The refluxed flushing liquid can be filtered by providing a filter box, a disassembly and assembly box, a filter screen and an adsorption screen. The sealing plug cover, a clamping rod, a stabilizing slide rod and a clamping spring can facilitate the disassembly and assembly of the filter screen for cleaning or replacement. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 It is a schematic diagram of the structure of the utility model cut from the front view;

[0017] Figure 3 This is a schematic diagram of the structure of the stirring assembly of the utility model;

[0018] Figure 4 It is a structural schematic diagram of the filter assembly of the utility model.

[0019] In the figure: 1. spray box; 2. feeding assembly; 3. support frame; 4. water tank; 5. stirring assembly; 51. stirring motor; 52. pulley one; 53. stirring rod one; 54. stirring blade one; 55. pulley two; 56. connecting belt; 57. stirring rod two; 58. stirring blade two; 6. water pump; 7. spray assembly; 8. return pipe; 9. filter assembly; 91. filter box; 92. disassembly box; 93. filter screen; 94. adsorption screen; 95. sealing plug cover; 96. clamping rod; 97. stabilizing slide bar; 98. clamping spring. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] Example 1

[0022] See also Figure 1-4 The utility model provides the following technical solutions: a spray device for electroplating pretreatment, comprising a spray box 1, a feeding assembly 2 is arranged above the inside of the spray box 1, a support frame 3 is arranged below the spray box 1, a water tank 4 is arranged on the bottom plate of the support frame 3, a stirring assembly 5 is arranged inside the water tank 4, a water pump 6 is arranged in the middle above the water tank 4, a spray assembly 7 is arranged above the water pump 6, return pipes 8 are arranged on both sides of the lower part of the spray box 1, and a filter assembly 9 is arranged below the return pipe 8.

[0023] Specifically, the stirring assembly 5 includes a stirring motor 51, a pulley 52, a stirring rod 53, a stirring blade 54, a pulley 55, a connecting belt 56, a stirring rod 57 and a stirring blade 58, wherein a stirring motor 51 is arranged at one end above the water tank 4, a pulley 52 is arranged at one end of the stirring motor 51, a stirring rod 53 is arranged at one end of the pulley 52, a stirring blade 54 is symmetrically arranged on the surface of the stirring rod 53, a pulley 55 is arranged at one side of the pulley 52, a connecting belt 56 is sleeved on the surfaces of the pulley 55 and the pulley 52, a stirring rod 57 is arranged at one end of the pulley 55, and a stirring blade 58 is symmetrically arranged on the surface of the stirring rod 57.

[0024] By adopting the above technical solution, the stirring motor 51 is started, and the stirring motor 51 drives the pulley 1 52. The rotation of the pulley 1 52 drives the stirring rod 1 53 and the stirring blade 1 54 to rotate. At the same time, the rotation of the pulley 1 52 drives the pulley 2 55 to rotate through the connecting belt 56, thereby driving the stirring rod 2 57 and the stirring blade 2 58 to rotate, so that the water and the flushing liquid are stirred and mixed evenly. When the device is in use, it is convenient to quickly stir and mix the water and the flushing liquid in the water tank 4, thereby improving the practicality of use.

[0025] Specifically, a protective cover is provided on the surface of the stirring motor 51, and heat dissipation holes are provided above the protective cover.

[0026] By adopting the above technical solution, the protective cover can easily protect the stirring motor 51, and the heat dissipation holes can easily discharge the heat in the protective cover.

[0027] When the present embodiment is in use: the stirring motor 51 is started, the stirring motor 51 drives the pulley 1 52, the rotation of the pulley 1 52 drives the stirring rod 1 53 and the stirring blade 1 54 to rotate, and at the same time, the rotation of the pulley 1 52 drives the pulley 2 55 to rotate through the connecting belt 56, thereby driving the stirring rod 2 57 and the stirring blade 2 58 to rotate, so that the water and the flushing liquid are stirred and mixed evenly, so that when the device is in use, the water and the flushing liquid in the water tank 4 can be quickly stirred and mixed evenly, thereby improving the practicality of use.

[0028] Example 2

[0029] The present embodiment is different from the embodiment 1 in that: specifically, the filter assembly 9 includes a filter box 91, a disassembly box 92, a filter screen 93, an adsorption screen 94, a sealing plug cover 95, a clamping rod 96, a stabilizing slide bar 97 and a clamping spring 98, wherein a filter box 91 is provided at one end of the return pipe 8, a disassembly box 92 is provided inside the filter box 91, a filter screen 93 is provided inside the disassembly box 92, an adsorption screen 94 is provided below the filter screen 93, a sealing plug cover 95 is provided on one side of the disassembly box 92, a clamping rod 96 is provided above the sealing plug cover 95, a stabilizing slide bar 97 is slidably provided at one end of the clamping rod 96 located inside the filter box 91, and a clamping spring 98 is provided on one side of the stabilizing slide bar 97.

[0030] By adopting the above technical solution, the refluxed flushing liquid flows into the filter box 91 through the reflux pipe 8, is filtered and adsorbed by the filter screen 93 and the adsorption screen 94, and then flows into the water tank 4 for continued use. When it is necessary to remove the filter screen 93 and the adsorption screen 94 for cleaning or replacement, the clamping rod 96 is pushed upward to disengage it from the clamping hole, and then the sealing plug cover 95 can be removed by pulling the disassembly box 92 out of the filter box 91. When the device is in use, it is convenient to filter the refluxed flushing liquid and to disassemble the filter screen 93 for cleaning or replacement, thereby improving the practicality of use.

[0031] Specifically, a guide sliding opening is provided at one end of the clamping rod 96 , and a clamping hole matching the clamping rod 96 is provided above the sealing plug cover 95 .

[0032] By adopting the above technical solution, the guide slide makes it easy for the sealing plug cover 95 to abut against the clamping rod 96 when it is installed, which can drive the clamping rod 96 to move upward. The clamping hole facilitates the insertion of the clamping rod 96 to fix the sealing plug cover 95.

[0033] Specifically, the disassembly box 92 is inserted into the filter box 91 , and the disassembly box 92 and the sealing plug cover 95 are in abutment connection.

[0034] By adopting the above technical solution, the disassembly box 92 is inserted into the interior of the filter box 91, so that the disassembly box 92 can be pulled out from the filter box 91. The disassembly box 92 and the sealing plug cover 95 are abutted and connected, so that the disassembly box 92 can be stably placed in the filter box 91.

[0035] When the present embodiment is in use, the refluxed flushing liquid flows into the filter box 91 through the reflux pipe 8, is filtered and adsorbed by the filter screen 93 and the adsorption screen 94, and then flows into the water tank 4 for continued use. When the filter screen 93 and the adsorption screen 94 need to be removed for cleaning or replacement, the clamping rod 96 is pushed upward to disengage it from the clamping hole, and then the sealing plug cover 95 can be removed by pulling the disassembly box 92 out of the filter box 91. This makes it easy to filter the refluxed flushing liquid and to disassemble the filter screen 93 for cleaning or replacement when the device is in use, thereby improving the practicality of use.

[0036] The structure and use principle of the spray box 1, feeding assembly 2 and spray assembly 7 in the utility model have been disclosed in a spray device for pre-treatment of semiconductor materials for electroplating disclosed in Chinese patent application No. 202122134434.9. Its working principle is that when the surface of the semiconductor is treated before electroplating, the flushing liquid in the water tank 4 is sucked by the water pump 6, and the flushing liquid enters the spray pipe through the conduit and is sprayed out by the high-pressure nozzle; the continuous semiconductor is fixed on the feeding steel belt, and the continuous semiconductor is moved from one end of the liquid collecting tank to the other end through the feeding steel belt. When the continuous semiconductor passes through the high-pressure nozzle, the flushing liquid sprayed from the high-pressure nozzle is sprayed onto the continuous semiconductor to clean the attachments on the surface of the continuous semiconductor.

[0037] The working principle and use process of the utility model: the utility model is used for spraying and washing semiconductor materials. When in use, water and washing liquid are added into the water tank 4, the water and washing liquid are stirred and mixed evenly by the stirring component 5, and then the material is transported by the feeding component 2, and then the mixed washing liquid is transported to the spray component 7 by the water pump 6, and the material is sprayed and washed. The washing liquid falling after washing passes through the reflux pipe 8 and then enters the filter component 9 for filtration, and then flows back to the water tank 4 for continued use. When the stirring component 5 is in use, the stirring motor 51 is started, and the stirring motor 51 drives the pulley 1 52. The rotation of the pulley 1 52 drives the stirring rod 1 53 and the stirring blade 1 54 to rotate. At the same time, the rotation of the pulley 1 52 drives the pulley 2 55 to rotate through the connecting belt 56, thereby driving The movable stirring rod 57 and the stirring blade 58 rotate to stir and mix the water and the flushing liquid evenly, so that when the device is in use, it is convenient to quickly stir and mix the water and the flushing liquid in the water tank 4, thereby improving the practicality of use. When the filter assembly 9 is in use, the refluxed flushing liquid flows into the filter box 91 through the reflux pipe 8, is filtered and adsorbed by the filter screen 93 and the adsorption screen 94, and then flows into the water tank 4 for continued use. When it is necessary to remove the filter screen 93 and the adsorption screen 94 for cleaning or replacement, the clamping rod 96 is pushed upward to disengage it from the clamping hole, and then the sealing plug cover 95 can be removed by pulling the disassembly box 92 out of the filter box 91. When the device is in use, it is convenient to filter the refluxed flushing liquid and to disassemble the filter screen 93 for cleaning or replacement, thereby improving the practicality of use.

[0038] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A spray device for electroplating pretreatment, comprising a spray box, characterized in that: A feeding assembly is arranged above the interior of the spray box, a supporting frame is arranged below the spray box, a water tank is arranged on the bottom plate of the supporting frame, a stirring assembly is arranged inside the water tank, a water pump is arranged in the middle above the water tank, a spray assembly is arranged above the water pump, return pipes are arranged on both sides of the lower interior of the spray box, and a filtering assembly is arranged below the return pipes.

2. The spray device for electroplating pretreatment according to claim 1, characterized in that: The stirring assembly includes a stirring motor, a pulley 1, a stirring rod 1, a stirring blade 1, a pulley 2, a connecting belt, a stirring rod 2 and a stirring blade 2, wherein a stirring motor is arranged at one end above the water tank, a pulley 1 is arranged at one end of the stirring motor, a stirring rod 1 is arranged at one end of the pulley 1, a stirring blade 1 is symmetrically arranged on the surface of the stirring rod 1, a pulley 2 is arranged on one side of the pulley 1, a connecting belt is sleeved on the surfaces of the pulley 2 and the pulley 1, a stirring rod 2 is arranged at one end of the pulley 2, and a stirring blade 2 is symmetrically arranged on the surface of the stirring rod 2.

3. The spray device for electroplating pretreatment according to claim 2, characterized in that: A protective cover is provided on the surface of the stirring motor, and a heat dissipation hole is provided above the protective cover.

4. The spray device for electroplating pretreatment according to claim 1, characterized in that: The filter assembly includes a filter box, a disassembly box, a filter screen, an adsorption screen, a sealing plug cover, a clamping rod, a stabilizing slide bar and a clamping spring, wherein a filter box is arranged at one end of the return pipe, a disassembly box is arranged inside the filter box, a filter screen is arranged inside the disassembly box, an adsorption screen is arranged below the filter screen, a sealing plug cover is arranged on one side of the disassembly box, a clamping rod is arranged above the sealing plug cover, a stabilizing slide bar is slidably arranged at one end of the clamping rod located inside the filter box, and a clamping spring is arranged on one side of the stabilizing slide bar.

5. The spray device for electroplating pretreatment according to claim 4, characterized in that: A guide sliding opening is provided at one end of the clamping rod, and a clamping hole matching the clamping rod is provided above the sealing plug cover.

6. The spray device for electroplating pretreatment according to claim 4, characterized in that: The disassembly and assembly box is inserted into the interior of the filter box, and the disassembly and assembly box and the sealing plug cover are in abutting connection.

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