Dust collecting structure for blind end of vacuum pipeline

Abstract

The utility model discloses a dust collecting structure for a blind end of a vacuum pipeline, which comprises a body and a top cover, the top cover is mounted at the top end of the body, the body is of a multi-layer roll-shaped structure, the axial edge of the outermost roll is hermetically connected to the inner side wall of the blind end, and a gap is reserved between every two adjacent roll layers. A cutting opening in the axial direction is formed in the end, close to the top, of the body and provided with a baffle, the baffle extends in the axial direction to be higher than the top end of the body to form a blocking piece, the top cover comprises a hollowed-out part and a cover body part, the hollowed-out part is located at the cutting opening, and a ventilation hole is formed in the top of a columnar cavity formed by rolling the innermost side of the cover body part. According to the dry pump, the dust collecting structure is additionally arranged at the blind end, the flow direction of air during vacuumizing of the dry pump is changed, and dust contained in the air is deposited at the bottom of the blind end and is not prone to being pumped away, so that the dust entering the dry pump is effectively reduced, the service life of the dry pump is guaranteed, and the possible influence on a main machine table is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum pipelines in semiconductor factories, in particular to a dust collection structure for blind ends of vacuum pipelines. Background Art

[0002] The vacuum pipeline structure in a semiconductor factory is as follows: Figure 1 As shown, the dry pump exhausts air to form negative pressure, and the lower end of the connection between the dry pump and the main pipeline (vacuum port) has a blind end (Deadleg) for collecting dust (for example, silica dust generated by process gas in the vacuum pipeline, etc.). However, after the blind end collects the dust, the dust storage effect is poor, and the collected dust is easily sucked into the dry pump by the dry pump, affecting the service life of the dry pump and even affecting the use of the host equipment. Utility Model Content

[0003] The technical problem to be solved by the utility model is to provide a dust collection structure for the blind end of a vacuum pipeline, which can achieve a better dust collection effect and is not easily sucked into the dry pump by a dry pump.

[0004] In order to solve the above technical problems, the utility model provides a dust collection structure for the blind end of a vacuum pipeline, comprising:

[0005] A body is placed in the blind end, the body is formed into a multi-layer roll structure, the axial edge of the outermost roll is sealed and connected to the inner side wall of the blind end, there is a spacing between the roll layers of the body, an axial cutting opening is formed at one end of the body close to the top, the axial length of the cutting opening is less than the height of the body, the radial cutting position of the cutting opening does not exceed the side of the innermost roll layer away from the cutting opening, the cutting opening is provided with a baffle to seal the cutting opening, and the baffle extends axially higher than the top of the body to form a baffle for shielding the entrance of the vacuum pipeline;

[0006] The top cover is fixedly mounted on the top of the main body, and the baffle divides the top cover into a hollow portion and a cover portion, wherein the hollow portion is located at the position of the cutting opening, and the cover portion has a ventilation hole at the top of the columnar cavity formed by the innermost roll.

[0007] Preferably, the size of the cover body matches the inner diameter of the blind end.

[0008] Preferably, the radial cutting position of the cutting opening does not exceed the center position of the top end of the body.

[0009] Preferably, the multi-layer roll structure is at least a two-layer roll structure.

[0010] Preferably, the spacing between each roll layer is 0.5-10 cm.

[0011] Preferably, the axial length of the body is the same as the depth of the blind end.

[0012] Preferably, a fixing structure for connecting the rolls is provided at the bottom end of the body.

[0013] Preferably, the fixing structure is a plurality of fixing bars.

[0014] The utility model adds a dust collection structure at the blind end to change the flow direction of air when the dry pump is vacuuming, so that the dust contained in the air is deposited at the bottom of the blind end and is not easily sucked away, thereby effectively reducing the dust entering the dry pump, ensuring the service life of the dry pump and reducing the possible impact on the main machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solution of the present invention, the following briefly introduces the drawings required for use in the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 It is a schematic diagram of the vacuum pipeline structure in the prior art;

[0017] Figure 2 It is a schematic diagram of an embodiment of the vacuum pipeline blind end dust collection structure of the utility model being installed on the vacuum pipeline;

[0018] Figure 3 It is a schematic diagram of the main structure of an embodiment of a dust collection structure for a blind end of a vacuum pipeline of the utility model;

[0019] Figure 4 1 is a schematic diagram of the top cover structure of an embodiment of the vacuum pipeline blind end dust collection structure of the utility model, wherein the dotted line indicates the contact position between the top end of the body and the top cover;

[0020] Figure 5 It is a schematic diagram of an embodiment of a dust collection structure for a blind end of a vacuum pipeline of the utility model, wherein a top cover is installed on the top of a body, and a dotted line portion shows a contact position between the top of the body and the top cover;

[0021] Figure 6 It is a schematic diagram of cross-arranged fixing bars of an embodiment of a dust collection structure for blind ends of vacuum pipelines of the utility model;

[0022] Figure 7 It is a schematic diagram of parallel arrangement of fixing bars in one embodiment of a dust collection structure for blind ends of vacuum pipelines of the utility model.

[0023] In the figure, 1-blind end; 2-main body; 21-cutting edge; 22-baffle; 23-baffle; 221-axial baffle; 222-radial baffle; 3-top cover; 31-hollow part; 32-cover body; 33-ventilation hole; 4-fixing bar; 5-main line; 6-vacuum port; 7-dry pump. DETAILED DESCRIPTION

[0024] The following will be combined with the accompanying drawings to clearly and completely describe the technical solutions in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] refer to Figure 3 , Figure 4 and Figure 5 , showing a dust collection structure for a vacuum pipeline blind end of the utility model, comprising:

[0026] A body is placed in the blind end, the body is formed into a multi-layer roll structure, the axial edge of the outermost roll is sealed and connected to the inner side wall of the blind end, there is a spacing between the roll layers of the body to form a gap, an axial cutting opening is formed at one end of the body close to the top, the axial length of the cutting opening is less than the height of the body, the radial cutting position of the cutting opening does not exceed the side of the innermost roll layer away from the cutting opening, the cutting opening is provided with a baffle to seal the cutting opening, and the baffle extends axially higher than the top of the body to form a baffle for shielding the entrance of the vacuum pipeline;

[0027] The top cover is fixedly mounted on the top of the main body, and the baffle divides the top cover into a hollow portion and a cover portion, wherein the hollow portion is located at the position of the cutting opening, and the cover portion has a ventilation hole at the top of the columnar cavity formed by the innermost roll.

[0028] In the embodiment of the utility model, the main body with the top cover installed is placed in the blind end (see Figure 2), the side edge and the top edge of the baffle are in contact with the inner wall of the main pipeline (forming a sealed contact. In order to increase the sealing effect, a sealing strip can be wrapped around the edge, which can be achieved by the existing technology here and will not be repeated; at the contact position, it can also be set to a welding form so that the two are fixedly connected) to separate the vacuum port connecting the dry pump and the main pipeline from the other parts of the main pipeline, and the outer edge of the top cover is in contact with the inner wall of the blind end (forming a sealed contact. In order to increase the sealing effect, a sealing strip can be wrapped around the outer edge of the top cover. This can be achieved by the existing technology here and will not be repeated; at the contact position, it can also be set to a welding form so that the two are fixedly connected); the side edge of the outermost roll of the main body is in contact with the inner wall of the blind end (forming a sealed contact. In order to increase the sealing effect, a sealing strip can be wrapped around the edge. This can be achieved by the existing technology here and will not be repeated As described above; the contact position can also be set to a welding form so that the two form a fixed connection); at this time, the vacuum port is connected to the cutout of the main body through the hollow part of the top cover, and the main line is connected to the columnar cavity formed by the innermost roll of the main body through the ventilation hole of the top cover; when the dry pump is working, the gas in the main line passes through the ventilation hole of the top cover into the columnar cavity formed by the innermost roll of the main body, and then flows along the gaps between the layers until it flows to the contact point between the outermost roll and the inner wall of the blind end, and then continues to flow out from the cutout, through the hollow part of the top cover into the pipeline connected to the dry pump, because the air passes through the path from top to bottom and then to top (and in a spiral shape) in the structure formed by the main body and the blind end (spiral air duct), the dust in the air is collected at the bottom of the blind end and is not easily sucked away, thereby effectively reducing the possibility of dust entering the dry pump. It should be noted that the baffle set at the cutting edge generally includes an axial baffle and a radial baffle (such as Figure 3 The axial baffle is used to seal the axial opening to prevent the air in the gap between the coils at the opening from directly entering the cutting opening, and the radial baffle is used to seal the radial opening to prevent the air in the gap between the coils at the opening from directly entering the cutting opening; it should be noted that the shortest cutting opening can be 0, that is, no cutting opening is provided, in which case the baffle only includes the radial baffle, and the air in the gap between each coil flows out from the gap between the outermost coil and the inner wall of the blind end. It should be explained that the cutting opening is a notch formed in the body after a portion of the body is cut axially.

[0029] In a specific embodiment, the size of the cover body matches the inner diameter of the blind end. Understandably, the size of the cover body is comparable to the inner diameter of the blind end, that is, the cover body can be covered at the end of the blind end, and the edge of the cover body is closely attached to the inner wall of the blind end.

[0030] In a specific embodiment, the radial cutting position of the cutting opening does not exceed the center position of the top of the body. It can be understood that the radial cutting position of the cutting opening refers to the position where the end face of the body is cut off; in order to facilitate the air to enter from the columnar cavity formed by the innermost layer of the body, the cutting position should at least not exceed the side of the innermost layer away from the cutting opening, otherwise, the air will not enter the body from the columnar cavity formed by the innermost layer, but from the gap between the layers, shortening the path of the spiral flow of air, and its effect of preventing dust from being drawn away will be weakened; preferably, the cutting position does not exceed the center position of the top of the body in order to leave at least half of the columnar cavity formed by the innermost layer for air to enter.

[0031] In a specific embodiment, the multi-layer roll structure is at least a two-layer roll structure. Understandably, when there is only a single-layer roll, the distance for air to flow between the roll layers is too short, which will still cause the settled dust to be easily pumped away. Therefore, in theory, the more layers the better, but it needs to be considered in combination with the actual situation, because the more layers the smaller the interlayer spacing, the greater the resistance to air circulation, and the effect of dry pump vacuuming will be affected. Therefore, the interlayer spacing of each layer is preferably 0.5-10cm, more preferably 1-3cm.

[0032] In a specific embodiment, the axial length of the body is the same as the depth of the blind end.

[0033] In a specific embodiment, the bottom end of the body is provided with a fixing structure for connecting the rolls. Preferably, the fixing structure is a plurality of fixing bars. It is understandable that the fixing bar can be a single bar that radially penetrates the bottom end of the body, or a plurality of fixing bars, such as two, three or more, and the fixing method can be a cross arrangement or a parallel arrangement, such as Figure 6 and Figure 7 The setting method of the fixing strip is shown; it should be noted that the fixing structure is set as a fixing strip, which facilitates the discharge of dust after the bottom of the blind end is opened.

[0034] The above description is only a preferred embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A dust collection structure for blind ends of vacuum pipelines, characterized in that: include: A body is placed in the blind end, the body is formed into a multi-layer roll structure, the axial edge of the outermost roll is sealed and connected to the inner side wall of the blind end, there is a spacing between the roll layers of the body, an axial cutting opening is formed at one end of the body close to the top, the axial length of the cutting opening is less than the height of the body, the radial cutting position of the cutting opening does not exceed the side of the innermost roll layer away from the cutting opening, the cutting opening is provided with a baffle to seal the cutting opening, and the baffle extends axially higher than the top of the body to form a baffle for shielding the entrance of the vacuum pipeline; The top cover is fixedly mounted on the top of the main body, and the baffle divides the top cover into a hollow portion and a cover portion, wherein the hollow portion is located at the position of the cutting opening, and the cover portion has a ventilation hole at the top of the columnar cavity formed by the innermost roll.

2. The dust collection structure according to claim 1, characterized in that: The size of the cover body matches the inner diameter of the blind end.

3. The dust collection structure according to claim 1, characterized in that: The radial cutting position of the cutting opening does not exceed the center position of the top end of the body.

4. The dust collection structure according to claim 1, characterized in that: The multi-layer roll-like structure is at least a two-layer roll-like structure.

5. The dust collection structure according to claim 1, characterized in that: The spacing between each roll layer is 0.5-10cm.

6. The dust collection structure according to claim 1, characterized in that: The axial length of the body is the same as the depth of the blind end.

7. The dust collection structure according to claim 1, characterized in that: The bottom end of the body is provided with a fixing structure for connecting the rolls.

8. The dust collection structure according to claim 7, characterized in that: The fixing structure is a plurality of fixing bars.

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