Cache device of semiconductor product
By adopting a horizontally translated material acquisition device in the semiconductor product cache equipment, the problems of high control requirements and large space occupation in the prior art are solved, and efficient transfer of material boxes and equipment compactness are achieved.
Patent Information
- Application Number
- CN202420269003.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-02
- Publication Date
- 2024-12-17
- Estimated Expiration
- 2034-02-02
AI Technical Summary
The existing semiconductor product cache equipment has high control requirements and large space occupies during material transfer, making it difficult to meet actual production needs.
A cache device for semiconductor products is designed, and the material acquisition device is translated in the first horizontal direction by providing a first opening and a second opening on the rack, and using the driving assembly and the material acquisition device in the first transfer module. The transfer of the material box reduces the rotational motion amplitude, reduces control difficulty and space occupation.
It realizes efficient transfer of material boxes, reduces control needs and space occupation, and improves the compactness and operational flexibility of the equipment.
Smart Images
Figure CN222180662U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of automatic production of semiconductor products, in particular to a cache device for semiconductor products. Background Art
[0002] With the development of technology, automated production systems are gradually applied to the production of semiconductor products. In the process of transferring the material to be processed from the previous processing step to the next processing step, the material needs to be transferred to the cache device for caching first. The automated production system continuously transfers the material in the cache device to the processing equipment according to the production rhythm of the equipment to be processed, thereby realizing continuous processing of the processing equipment. In the related art, when the storage position for storing the material in the cache device is located on the opposite side to the second opening, the material is usually driven to rotate around the horizontal axis by the driving mechanism of the cache device, so that the material in the storage position rotates from one side to the other side. However, this driving method has the disadvantages of high control requirements and large space occupation, and it is difficult to meet the actual production needs. Utility Model Content
[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes a cache device for semiconductor products, which can reduce control requirements and space occupation.
[0004] A semiconductor product cache device according to a first embodiment of the present invention is used to store a material box containing the semiconductor product, comprising:
[0005] A frame having a first opening and a second opening, wherein the first opening is used for the material box to enter the frame, and the second opening is used for the material box to be removed from the frame;
[0006] A first shelf, disposed in the frame, having a plurality of first storage locations for storing the material boxes;
[0007] A first transfer module, comprising a drive assembly and a material acquisition device, wherein the drive assembly comprises a first drive device, the material acquisition device is connected to the first drive device, and the material acquisition device is capable of acquiring or releasing the material box;
[0008] Among them, along the first horizontal direction, the first shelf and the second opening are located on opposite sides of the first transfer module, and when the material acquisition device acquires the material box, the first driving device is configured to drive the material acquisition device to translate along the first horizontal direction toward the second opening, so that the material acquisition device transfers the material box to the second opening.
[0009] The cache device of the semiconductor product according to the first embodiment of the utility model has at least the following beneficial effects:
[0010] In this embodiment, the first driving device drives the material acquisition device to translate along the first horizontal direction to transfer the material box from one side to the other side. Compared with transferring the material box by rotation, the overall movement amplitude is smaller. On the one hand, it can reduce the occupied space. On the other hand, the material acquisition device moves along a straight line, which is also convenient for controlling its position and can reduce the control requirements.
[0011] In other embodiments of the present invention, the material acquisition device includes a first clamping power member and two groups of first clamping members, the two groups of first clamping members are distributed along a second horizontal direction, the second horizontal direction is perpendicular to the first horizontal direction, and the first clamping power member is configured to drive the two groups of the first clamping members to move toward each other along the second horizontal direction to clamp the material box in the first storage position, and drive the two groups of the first clamping members to move in the opposite direction along the second horizontal direction to release the material box.
[0012] In other embodiments of the present invention, the first driving device is further configured to drive the material acquisition device to translate along the first horizontal direction toward the first shelf, so that the two groups of the first clamping members enter the first storage position to clamp the material box;
[0013] And / or, the first driving device is further configured to drive the material acquisition device to translate along the first horizontal direction toward the first shelf, so that the two groups of the first clamping members enter the first storage position to release the material box;
[0014] And / or, the frame has a discharge position corresponding to the second opening, and the first driving device is also configured to drive the material acquisition device to translate along the first horizontal direction toward the second opening, so that the two groups of the first clamping members enter the discharge position to release the material box.
[0015] In other embodiments of the present invention, the material acquisition device has a first translational action and a third translational action along the first horizontal direction toward the first shelf, and a second translational action along the direction toward the second opening, and the material acquisition device is further configured to: perform the first translational action and acquire the material box in the first storage position, perform the second translational action after acquiring the material box so that the material box partially extends out of the first storage position, release the material box after performing the second translational action, perform the third translational action after releasing the material box and acquire the material box again, and after acquiring the material box again, translate along the first horizontal direction toward the second opening so that the material box completely leaves the first storage position;
[0016] And / or, the frame has a discharge position corresponding to the second opening, the material acquisition device has a fourth translational action and a sixth translational action of translation along the first horizontal direction toward the second opening, and a fifth translational action of translation along the direction toward the first shelf. When the material acquisition device acquires the material box, the material acquisition device is further configured to: perform the fourth translational action to allow part of the material box to enter the discharge position, release the material box after performing the fourth translational action to allow part of the material box to enter the discharge position, perform the fifth translational action after releasing the material box and acquire the material box again, perform the sixth translational action after acquiring the material box again to allow the material box to completely enter the discharge position, and release the material box again after performing the sixth translational action.
[0017] In other embodiments of the present invention, the frame further has a first feeding position corresponding to the first opening, and the cache device further includes a feeding diversion module, which is arranged at the first feeding position, and the feeding diversion module is configured to receive the material box that enters from the first opening and is in a first posture, and drive the material box in the first posture to rotate around a vertical axis until it is in a second posture, wherein the length direction of the material box in the first posture is perpendicular to the length direction of the material box in the first storage position, and the length direction of the material box in the second posture is parallel to the length direction of the material box in the first storage position;
[0018] The first transfer module is configured to transfer the magazine in the second posture from the infeed diversion module to the first storage location.
[0019] In other embodiments of the present invention, the frame further has a third opening, and the third opening is used for allowing the material box to enter the frame, wherein the third opening extends to two adjacent sides of the frame respectively.
[0020] In other embodiments of the present invention, a portion of the third opening and the first opening are located on the same side of the frame.
[0021] In other embodiments of the present invention, the rack has a second feeding position corresponding to the third opening, and the second feeding position is configured to store the material box in a second posture, wherein the length direction of the material box in the second posture is parallel to the length direction of the material box in the first storage position;
[0022] The first transfer module is configured to transfer the material box in the second posture from the second feeding position to the first storage position.
[0023] In other embodiments of the present invention, the frame has a discharge position corresponding to the second opening, and the cache device further includes a discharge diversion module and a second transfer module, both of which are arranged at the discharge position, and the discharge diversion module is configured to receive the material box transferred by the first transfer module and in the second posture, and drive the material box in the second posture to rotate around the vertical axis until it is in the first posture, wherein the length direction of the material box in the first posture is perpendicular to the length direction of the material box in the first storage position, and the length direction of the material box in the second posture is parallel to the length direction of the material box in the first storage position;
[0024] The second transfer module is configured to transfer the magazine in the first posture from the discharge diversion module to the second opening.
[0025] In other embodiments of the present invention, a plurality of the first storage locations are distributed along a second horizontal direction, the second horizontal direction is perpendicular to the first horizontal direction, and the first transfer module further comprises a second driving device, the second driving device being configured to drive the material acquisition device to move along the second horizontal direction so as to transfer the material box entering from the first opening to one of the plurality of the first storage locations distributed along the first horizontal direction;
[0026] And / or, a plurality of the first storage positions are distributed along the vertical direction, and the first transfer module further comprises a third driving device, wherein the third driving device is configured to drive the material acquisition device to move along the vertical direction so as to transfer the material box entering from the first opening to one of the plurality of the first storage positions distributed along the vertical direction.
[0027] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0028] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:
[0029] Figure 1 It is a brief schematic diagram of a transfer box in the related art;
[0030] Figure 2 This is a three-dimensional schematic diagram of a material box applicable to the utility model;
[0031] Figure 3 It is a three-dimensional schematic diagram of a cache device in an embodiment of the utility model;
[0032] Figure 4 for Figure 3 A three-dimensional schematic diagram of the cache device in another direction;
[0033] Figure 5 for Figure 3 A three-dimensional schematic diagram of a hidden housing of a middle cache device;
[0034] Figure 6 for Figure 3 A top view of the hidden housing of the middle cache device;
[0035] Figure 7 for Figure 3 A three-dimensional schematic diagram of a first shelf of a middle cache device;
[0036] Figure 8 for Figure 3 A three-dimensional schematic diagram of a first transfer module of a middle cache device;
[0037] Fig. 9 for Figure 3 A three-dimensional schematic diagram of a material acquisition device of a middle cache device;
[0038] Fig.10 for Figure 3 A side view of a material acquisition device of a middle cache device;
[0039] Fig.11 for Figure 3 A schematic diagram of a process of transferring a material box from a material acquisition device of a middle cache device to a first storage location;
[0040] Fig.12 for Figure 3 A three-dimensional schematic diagram of a feed diversion module of a middle buffer device;
[0041] Fig.13 for Figure 3 A three-dimensional schematic diagram of the second transfer module and the discharge diversion module of the middle buffer device.
[0042] Reference numerals:
[0043] Rotary drive mechanism 10, material acquisition mechanism 20, shelf 30, material unloading position 40;
[0044] Frame 100, first opening 110, second opening 120, third opening 130, material discharge position 140, first material input position 150, second material input position 160;
[0045] A first shelf 200, a first storage position 210, a carrying plate 220, and a guide wheel 230;
[0046] A first transfer module 300, a drive assembly 310, a first drive device 311, a support component 3111, a second drive device 312, a third drive device 313, a material acquisition device 320, a first clamping power member 321, and a first clamping member 322;
[0047] Feeding diversion module 400, first rotating power member 410, first rotating platform 420;
[0048] A second transfer module 500, a second clamping power member 510, and a second clamping member 520;
[0049] The material discharging and diverting module 600, the second rotating power member 610, and the second rotating platform 620;
[0050] Second shelf 700;
[0051] Material box 800. DETAILED DESCRIPTION
[0052] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.
[0053] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0054] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.
[0055] In the description of the present utility model, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present utility model based on the specific content of the technical solution.
[0056] In the description of the utility model, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.
[0057] At present, automated production systems are gradually applied to the production of semiconductor products. For example, the production system first controls unmanned transport robots and other transportation tools to transfer semiconductor products to cache equipment for caching, and then controls the transportation tools to transport the semiconductor products to be processed in the cache equipment to the processing equipment for processing according to the production rhythm of the processing equipment. This process requires the scheduling of semiconductor products entering and moving out of the cache equipment, such as scheduling semiconductor products from a shelf 30 on one side to a material unloading position 40 on the other side. Common cache devices rely on rotation to achieve the aforementioned scheduling function. For details, refer to Figure 1 A rotating drive mechanism 10 such as a rotating cylinder or a rotating motor is provided in the cache device. The driving end of the rotating drive mechanism 10 is connected to a material acquisition mechanism 20. The material acquisition mechanism 20 can acquire semiconductor products from the shelf 30 on the left, and then be driven by the rotating drive mechanism 10 to rotate around the horizontal axis, thereby driving the semiconductor products to rotate to the right side (the dotted line part in the figure represents the material acquisition mechanism 20 after rotation), so as to deliver the semiconductor products from the discharge position 140 on the right side. However, the material acquisition mechanism 20 has a large movement amplitude during the rotation process. On the one hand, a larger rotation space is required, thereby increasing the volume of the cache device. On the other hand, it also increases the control difficulty of precise positioning of the material. These defects restrict the practical application of the cache device. Based on this, the utility model proposes a cache device that can reduce the volume of the device and reduce the control difficulty.
[0058] It should be noted that semiconductor products are usually transported through a material box 800. The material box 800 will be used to replace the semiconductor products in the following description. Figure 2 As shown, the material box 800 is a roughly rectangular structure with a hollow interior. Two opposite cavity walls have multiple groups of grooves arranged in the vertical direction, and each group of grooves is used to place the same material, that is, one material box 800 can place multiple materials.
[0059] Reference Figures 3 to 6The cache device in the first embodiment of the utility model includes a rack 100, a first shelf 200 and a first transfer module 300. The first shelf 200 and the first transfer module 300 are both located in the rack 100. The first shelf 200 is used to store the material box 800, and the first transfer module 300 is used to realize the transfer of the material box 800. For the convenience of description, the directions involved in the utility model are first defined, referring to Figure 3 , define the left-right direction as the first horizontal direction, the front-back direction as the second horizontal direction, and the up-down direction as the vertical direction. Further, the first horizontal direction toward the first shelf 200 is the left direction, and the first horizontal direction toward the second opening 120 is the right direction.
[0060] Reference Figure 3 , Figure 4 The rack 100 is used to protect the internal modules and also to prevent the operator from being injured when the modules move. In this embodiment, the rack 100 includes a frame structure and a shell. The shell includes a plurality of panels connected to the frame structure. In order to facilitate the entry and exit of materials, the rack 100 also has a first opening 110 and a second opening 120. The first opening 110 is used for the material box 800 to enter the rack 100, and the second opening 120 is used for the material box 800 to be moved out of the rack 100. It should be noted that in some embodiments, the first opening 110 is also used for the material box 800 to be moved out of the rack 100, and the second opening 120 is used for the material box 800 to enter the rack 100. The first opening 110 has a certain shape and size so that the operator or the unmanned transport robot can send the material box 800 into the rack 100 through the first opening 110; similarly, the second opening 120 has a certain shape and size so that the material box 800 can be moved out of the rack 100 through the second opening 120. Figure 3 , Figure 4 In the illustrated embodiment, both the first opening 110 and the second opening 120 are rectangular.
[0061] The first shelf 200 is used to temporarily store the material box 800. Figure 3 , Figure 4 And refer to Figure 5 , Figure 6 , along the first horizontal direction, that is Figure 3In the left and right directions, the first shelf 200 and the second opening 120 are located on opposite sides of the first transfer module 300. Specifically, the first shelf 200 is located on the left side of the first transfer module 300, and the second opening 120 is located on the right side of the first transfer module 300. The material box 800 on the first shelf 200 needs to be transferred to the second opening 120 through the first transfer module 300. In some embodiments, the first transfer module 300 can directly move the material box 800 out through the second opening 120. In other embodiments, the first transfer module 300 transfers the material box 800 to the discharge position 140 corresponding to the second opening 120, and then moves it out of the rack 100 by other transfer mechanisms. This will be specifically described in subsequent embodiments.
[0062] Reference Figure 7 The first shelf 200 has a plurality of first storage locations 210 (the dotted line area in the figure roughly illustrates the range of a single first storage location 210), so that a plurality of material boxes 800 can be cached. Figure 7 In the illustrated embodiment, the first shelf 200 includes a carrier plate 220, on which at least two groups of guide wheels 230 distributed along a second horizontal direction (e.g., front-to-back direction) are disposed, and a single first storage position 210 is defined between two adjacent groups of guide wheels 230, and the guide wheels 230 are used to guide the material box 800 during the process of the material box 800 entering the first storage position 210, and in addition, the guide wheels 230 can rotate around a vertical axis, thereby reducing friction with the material box 800. The length, width, and height of the first storage position 210 are respectively adapted to the length, width, and height of the material box 800, so that the material box 800 can smoothly enter and exit the first storage position 210, and can also play a certain role in limiting the material box 800.
[0063] It should be noted that the guide wheel 230 may also be replaced by a fixed guide block.
[0064] The first transfer module 300 includes a material acquisition device 320, which can acquire or release the material box 800, wherein the material acquisition device 320 acquires the material box 800 means that the material acquisition device 320 can fix the material box 800 and can drive the material box 800 to move synchronously, for example, the material acquisition device 320 fixes the material box 800 by clamping, vacuum adsorption, magnetic adsorption, etc.; the material acquisition device 320 releases the material box 800 means that the material acquisition device 320 is separated from the material box 800, and the material acquisition device 320 can move alone.
[0065] The first transfer module 300 further includes a drive assembly 310, the drive assembly 310 includes a first drive device 311, and the material acquisition device 320 is connected to the first drive device 311. In this embodiment, after the material acquisition device 320 acquires the material box 800 (for example, the material box 800 is acquired from the first storage position 210), the first drive device 311 is configured to drive the material acquisition device 320 to move along a first horizontal direction (i.e., toward the second opening 120) Figure 3 , Figure 6 In this embodiment, the first driving device 311 drives the material acquiring device 320 to translate along the first horizontal direction to transfer the material box 800 from one side to the other side. Compared with transferring the material box 800 by rotating, the overall movement amplitude is smaller, which can reduce the occupied space (such as Figure 6 As shown, the structure of the cache device along the left and right directions is compact). On the other hand, the material acquisition device 320 moves along a straight line, which is also convenient for controlling its position and can reduce control requirements.
[0066] It should be noted that the first driving device 311 can not only drive the material acquisition device 320 to translate along the first horizontal direction toward the second opening 120, but also drive the material acquisition device 320 to translate along the first horizontal direction toward the first shelf 200 (ie Figure 3 , Figure 6 The material box 800 is translated into the first storage position 210 (in the left direction), thereby placing the material box 800 into the first storage position 210 or obtaining the material box 800 from the first storage position 210.
[0067] Specifically, the first drive device 311 includes a base, a motor, a synchronous belt and a synchronous wheel, the material acquisition device 320 is slidably connected to the base through a slide rail, the motor is fixedly connected to the base, its drive shaft is connected to the synchronous wheel, the synchronous belt is wound around the synchronous wheel and is fixedly connected to the material acquisition device 320, so that as the motor drive shaft rotates forward and backward, the material acquisition device 320 can reciprocate in the left and right directions. It can be understood that the first drive device 311 can also be a drive device based on a motor-screw-screw seat, or a drive device based on a gear-rack.
[0068] Based on the first embodiment, refer to Figure 5 , Figure 6 The cache device in some embodiments of the present invention further includes a second shelf 700 , and the second shelf 700 and the second opening 120 are disposed on the same side of the first transfer module 300 , for example Figure 6The second shelf 700 has a plurality of second storage locations, which can be understood with reference to the first storage location 210. By setting the second shelf 700, the storage capacity of the cache device can be increased. In this embodiment, the first transfer module 300 can also transfer the material box 800 to the second shelf 700, and transfer the material box 800 in the second shelf 700 to the second opening 120.
[0069] Based on the first embodiment, the material acquisition device 320 in some embodiments of the present invention acquires the material box 800 by clamping. Fig. 9 , Fig.10 The material acquisition device 320 includes a first clamping power member 321 and two groups of first clamping members 322. The two groups of first clamping members 322 are arranged along the second horizontal direction (i.e. Fig. 9 Specifically, the first clamping members 322 are clamping plates extending along the left-right direction, a group of first clamping members 322 includes one clamping plate, and in other embodiments, a group of first clamping members 322 may also include multiple clamping plates distributed along the vertical direction.
[0070] The first clamping power member 321 is configured to drive the two groups of first clamping members 322 to move toward each other in the front-to-back direction to clamp the material box 800 in the first storage position 210, and drive the two groups of first clamping members 322 to move in the opposite direction in the front-to-back direction to release the material box 800. The first clamping power member 321 can be a cylinder in the figure, and drive shafts are extended from both opposite ends of the cylinder. The drive shafts at both ends can be extended or retracted synchronously, and the drive shafts at both ends are respectively connected to a group of first clamping members 322.
[0071] In some embodiments, when the first driving device 311 includes the aforementioned base, motor, synchronous belt and synchronous wheel, the first clamping power member 321 is slidably connected to the base of the first driving device 311 through a slide rail and a slider, and is fixedly connected to the synchronous belt, so that the first clamping power member 321 and the first clamping member 322 can be driven by the first driving device 311 to move in the left and right directions.
[0072] When the material acquisition device 320 acquires the material box 800 by clamping, in some embodiments of the present invention, the first driving device 311 is further configured to drive the material acquisition device 320 to move in a first horizontal direction (i.e., Figure 6The first driving device 311 drives the two groups of first clamping members 322 in the open state to move to the left, so that the two groups of first clamping members 322 extend into the first storage position 210 and are located on both sides of the width direction of the material box 800. Then, the first clamping power member 321 drives the two groups of first clamping members 322 to move toward each other, thereby clamping the material box 800. After clamping the material box 800, the first driving device 311 drives the material acquiring device 320 to move to the right, so that the material box 800 can be at least partially separated from the first storage position 210. In the above process, the two groups of first clamping members 322 only need to translate in the first horizontal direction and open and close in the second horizontal direction to clamp the material box 800 and drive the material box 800 to at least partially separate from the first storage position 210. The movement amplitude of the material acquisition device 320 is small, which is suitable for transferring the material box 800 in a compact space.
[0073] In some other embodiments of the present invention, the first driving device 311 is further configured to drive the material acquisition device 320 to translate to the left, so that the two groups of first clamping members 322 enter the first storage position 210 to release the material box 800. Specifically, when the material acquisition device 320 needs to transfer the material box 800 input from the first opening 110 to a first storage position 210, it first aligns with the entrance of the first storage position 210, and the first driving device 311 drives the two groups of first clamping members 322 in the clamping state to move to the left, so that at least part of the material box 800 enters the first storage position 210, and then the first clamping power member 321 drives the two groups of first clamping members 322 to move in the opposite direction to release the material box 800. In the above process, the two groups of first clamping members 322 only need to translate in the first horizontal direction and open and close in the second horizontal direction to make the material box 800 at least partially enter the first storage position 210. The movement amplitude of the material acquisition device 320 is small, which is suitable for transferring the material box 800 in a compact space.
[0074] In other embodiments of the present invention, referring to Figure 4 The frame 100 has a discharge position 140 corresponding to the second opening 120. The material box 800 in the first storage position 210 or the second storage position will be first transferred to the discharge position 140 and then moved out from the discharge position 140. In this way, when the transport module docked with the discharge position 140 of the cache device is not in place, the first transfer module 300 can first transfer the material box 800 to the discharge position 140 in order to perform other actions. The first transfer module 300 does not need to wait for the transport module to be in place, which can improve the efficiency of the first transfer module 300.
[0075] The first driving device 311 is also configured to drive the material acquisition device 320 to translate to the right, so that the two groups of first clamping members 322 enter the material discharging position 140 to release the material box 800. Specifically, when the material acquisition device 320 needs to transfer the material box 800 in the first storage position 210 or the second storage position to the material discharging position 140, it first aligns with the entrance of the material discharging position 140, and the first driving device 311 drives the two groups of first clamping members 322 in the clamping state to move to the right, so that at least part of the material box 800 enters the material discharging position 140, and then the first clamping power member 321 drives the two groups of first clamping members 322 to move in the opposite direction to release the material box 800. In the above process, the two groups of first clamping members 322 only need to translate in the first horizontal direction and open and close in the second horizontal direction to make at least part of the material box 800 enter the material discharging position 140. The movement amplitude of the material acquisition device 320 is small, which is suitable for transferring the material box 800 in a compact space.
[0076] Based on the first embodiment, in some embodiments of the present invention, the material acquisition device 320 has a first translation action and a third translation action toward the left, and a second translation action toward the right. The material acquisition device 320 can move the material box 800 out of the first storage position 210 with a smaller displacement amplitude through the coordination of the first translation action to the third translation action. Fig.11 The steps for the material obtaining device 320 to obtain the material box 800 are as follows:
[0077] Step 1: The material acquisition device 320 is aligned with the entrance of the target first storage location 210 .
[0078] Step 2: The material acquisition device 320 performs a first translational movement toward the left and acquires the material box 800 in the first storage position 210, wherein the step of acquiring the material box 800 can be understood with reference to the aforementioned embodiment, for example, when the material acquisition device 320 includes the aforementioned first clamping power member 321 and the first clamping member 322, the two groups of first clamping members 322 extend to the left into the first storage position 210 and move toward each other to clamp the material box 800. In this embodiment, the length of the first clamping member 322 extending into the first storage position 210 is relatively short, and can only clamp a partial area of the material box 800, so that multiple displacements are required to drive the material box 800 to move out.
[0079] Step 3: After the material obtaining device 320 obtains the material box 800 , it performs a second translation action to make the material box 800 partially extend out of the first storage position 210 . In other words, at this time, a part of the material box 800 is still located in the first storage position 210 .
[0080] Step 4: The material acquisition device 320 releases the material box 800 after performing the second translation action, performs the third translation action and acquires the material box 800 again after releasing the material box 800, and translates to the left after acquiring the material box 800 again, so that the material box 800 is completely separated from the first storage position 210. Among them, the steps of releasing the material box 800 and acquiring the material box 800 again can be understood with reference to the aforementioned embodiment. When the material acquisition device 320 includes the aforementioned first clamping power member 321 and the first clamping member 322, the two groups of first clamping members 322 extend to the left into the first storage position 210 and move toward each other to clamp the material box 800, or the two groups of first clamping members 322 move in opposite directions to release the material box 800.
[0081] In this embodiment, the material acquisition device 320 moves the material box 800 out of the first storage position 210 through multiple translations. Compared with the method of moving the material box 800 out of the first storage position 210 through one translation, the length of the material acquisition device 320 extending into the first storage position 210 becomes shorter, that is, the maximum displacement of the material acquisition device 320 along the first horizontal direction becomes shorter, thereby further reducing the volume of the first driving device 311 to adapt to the internal compact cache device.
[0082] It should be noted that in some embodiments, the first driving device 311 can also carry the material box 800. In this way, when the material obtaining device 320 releases the material box 800 as described in the aforementioned step 4, the material box 800 can be prevented from accidentally falling. For details, refer to Fig. 9 , Fig.10 The first driving device 311 includes a base, and the base includes a supporting component 3111 disposed below the material acquisition device 320. The supporting component 3111 can be docked with components such as the carrier plate 220. When the material acquisition device 320 drives part of the material box 800 to leave the first storage position 210, the part of the material box 800 extending out of the first storage position 210 will be transferred to the supporting component 3111 and supported by the supporting component 3111.
[0083] It should also be noted that the distances between the first translation action and the third translation action are equal, which helps to simplify the control.
[0084] In some embodiments, when the cache device further includes a second shelf 700, the material acquisition device 320 can adopt the same steps to move the material box 800 out of the second storage location.
[0085] On the basis of the first embodiment, in some embodiments of the utility model, the frame 100 has a discharge position 140 corresponding to the second opening 120, and the material acquisition device 320 has a fourth translational action and a sixth translational action of translation toward the right, and a fifth translational action of translation toward the left. The material acquisition device 320 can put the material box 800 into the discharge position 140 with a smaller displacement amplitude through the cooperation of the fourth translational action to the sixth translational action. Specifically, the steps of releasing the material box 800 by the material acquisition device 320 are as follows:
[0086] Step 1: The material acquisition device 320 is aligned with the entrance of the material discharge position 140 .
[0087] Step 2: The material acquisition device 320 carries the material box 800 to perform a fourth translational movement to the right, so that part of the material box 800 enters the discharge position 140, wherein the step of the material acquisition device 320 driving the material box 800 to enter the discharge position 140 can be understood with reference to the aforementioned embodiment, for example, when the material acquisition device 320 includes the aforementioned first clamping power member 321 and the first clamping member 322, the two groups of first clamping members 322 clamp the material box 800 and move rightward to enter the discharge position 140. In this embodiment, the length of the first clamping member 322 extending into the discharge position 140 is relatively short, and multiple displacements are required to allow the material box 800 to fully enter the discharge position 140.
[0088] Step 3: After the material obtaining device 320 performs the fourth translation action, it releases the material box 800 so that part of the material box 800 enters the material discharging position 140 . In other words, at this time, part of the material box 800 is still located outside the material discharging position 140 .
[0089] Step 4: After releasing the material box 800, the material acquisition device 320 performs the fifth translational movement and acquires the material box 800 again. After acquiring the material box 800 again, the material acquisition device 320 performs the sixth translational movement to allow the material box 800 to completely enter the material discharging position. After performing the sixth translational movement, the material acquisition device 320 releases the material box 800 again. At this time, the material acquisition device 320 can be reset to the left. Among them, the steps of releasing the material box 800 and acquiring the material box 800 again can be understood with reference to the aforementioned embodiment. When the material acquisition device 320 includes the aforementioned first clamping power member 321 and the first clamping member 322, the two groups of first clamping members 322 extend rightward into the material discharging position 140 and move toward each other to clamp the material box 800, or the two groups of first clamping members 322 move in opposite directions to release the material box 800.
[0090] In this embodiment, the material acquisition device 320 moves the material box 800 into and out of the discharge position 140 through multiple translations. Compared with the method of moving the material box 800 into the discharge position 140 through one translation, the length of the material acquisition device 320 extending into the discharge position 140 becomes shorter, that is, the maximum displacement of the material acquisition device 320 along the first horizontal direction becomes shorter, thereby further reducing the volume of the first driving device 311 and adapting to the internal compact cache device.
[0091] It should be noted that in some embodiments, the first driving device 311 can also carry the material box 800. In this way, when the material obtaining device 320 releases the material box 800 as described in the aforementioned step three, the material box 800 can be prevented from accidentally falling. For details, refer to Fig. 9 , Fig.10 The first driving device 311 includes a base, and the base includes a supporting component 3111 disposed below the material acquisition device 320, and the supporting component 3111 can be connected to components such as the carrying plate 220. When part of the material box 800 enters the material discharge position 140, the part of the material box 800 outside the material discharge position 140 will still be supported by the supporting component 3111.
[0092] It should also be noted that the distances between the fourth translational action and the sixth translational action are equal, which helps to simplify control.
[0093] In some embodiments, the material acquisition device 320 can use the same steps to transfer the material box 800 to the first storage location 210; and when the cache device also includes a second shelf 700, the material acquisition device 320 can use the same steps to transfer the material box 800 to the first storage location 210.
[0094] Based on the first embodiment, refer to Figure 3 , Figure 5 and Fig.12 In some embodiments of the utility model, the rack 100 also has a first feed position 150 corresponding to the first opening 110. After the material box 800 is input from the first opening 110, it will first reach the first feed position 150, and then be transferred from the first feed position 150 to the first storage position 210 or the second storage position. In this way, when the first transfer module 300 inside the cache device is performing other operations, the operator or the unmanned transport robot can first transfer the material box 800 to the first feed position 150 without waiting for the first transfer module 300.
[0095] The cache device further includes a feeding diversion module 400, which is disposed at the first feeding position 150. The feeding diversion module 400 is configured to receive the material box 800 that enters from the first opening 110 and is in a first posture, and drives the material box 800 in the first posture to rotate around the vertical axis until it is in a second posture, wherein the length direction of the material box 800 in the first posture is perpendicular to the length direction of the material box 800 in the first storage position 210, and the length direction of the material box 800 in the second posture is parallel to the length direction of the material box 800 in the first storage position 210. In other words, the feeding diversion module 400 can rotate the material box 800 to a posture suitable for being placed in the first storage position 210. After the feeding diversion module 400 drives the material box 800 to rotate to the second posture, the first transfer module 300 is configured to transfer the material box 800 in the second posture from the feeding diversion module 400 to the first storage position 210 or the second storage position.
[0096] Specifically in the illustrated embodiment, when the material box 800 is in the first posture, its length direction is parallel to the second horizontal direction, that is, Figure 3 In the front-to-back direction, when the material box 800 is in the second posture, its length direction is parallel to the first horizontal direction, that is, Figure 3 In the left and right directions, on the one hand, the operator or the unmanned transport robot can put the material box 800 in the first posture into the feeding steering module 400 for easy loading; on the other hand, the material box 800 will be put into the first storage position 210 of the first shelf 200 in the second posture, referring to Figure 7 The length of the first storage position 210 along the first horizontal direction is greater than the width along the second horizontal direction. When multiple first storage positions 210 are distributed along the second horizontal direction, the number of first storage positions 210 in the first shelf 200 can be increased, thereby increasing the storage capacity of the cache device.
[0097] When the cache device further includes a feed diversion module 400, in some specific embodiments, the feed diversion module 400 includes a first rotating power member 410 and a first rotating platform 420, and the driving shaft of the first rotating power member 410 is connected to the first rotating platform 420, thereby being able to drive the first rotating platform 420 to rotate. Fig.12 In the state shown, it is possible to receive the material box 800 in the first posture. Fig.12 After the state shown is rotated 90°, the material box 800 can be adjusted from the first posture to the second posture. The first rotating power member 410 can be a rotating cylinder.
[0098] like Figure 5 As shown, the frame 100 has a plurality of first feeding positions 150 and a plurality of feeding diverting modules 400 , so as to enable the feeding of a plurality of material boxes 800 .
[0099] Based on the first embodiment, refer to Figure 3 , Figure 4 In some embodiments of the present invention, the frame 100 further has a third opening 130, and the third opening 130 is used for the feed box 800 to enter the frame 100. In some embodiments, the third opening 130 is also used for the feed box 800 to be removed from the frame 100, wherein the third opening 130 extends to adjacent two sides of the frame 100, so as to Figure 3 As shown in the example, a portion of the third opening 130 is located on the left side of the rack 100, and the other portion is located on the rear side of the rack 100. In this way, when the cache device is located at the intersection of the road, the operator or the unmanned transport robot can load materials from the left side of the rack 100 or from the rear side of the rack 100. The loading position is more flexible and the loading space is larger.
[0100] When the rack 100 is provided with the third opening 130 , in some embodiments of the present invention, the first opening 110 is used for manual or unmanned transport robot loading, and the third opening 130 is used for unmanned transport robot loading.
[0101] When the rack 100 is provided with the third opening 130, in some embodiments of the present invention, a portion of the third opening 130 and the first opening 110 are located on the same side of the rack 100, so as to Figure 3 As shown in the example, a portion of the third opening 130 and the first opening 110 are both located on the left side of the rack 100. When the left side of the rack 100 faces the main road, it is convenient for the operator or the unmanned transport robot to flexibly select different entrances to input the material box 800.
[0102] When the rack 100 is provided with the third opening 130, Figure 3 In some embodiments of the present invention, the frame 100 further has a second loading position corresponding to the third opening 130, and the second loading position 160 is configured to store the material box 800 in the second posture, and the length direction of the material box 800 in the second posture is parallel to the length direction of the material box 800 in the first storage position 210. In other words, the placement posture of the material box 800 in the second loading position 160 is the same as that of the material box 800 in the first storage position 210, so that the first transfer module 300 can directly transfer the material box 800 in the second loading position 160 to the first storage position 210.
[0103] Based on the first embodiment, refer to Figure 4 In some embodiments of the present invention, the frame 100 has a discharge position 140 corresponding to the second opening 120, referring to Fig.13The cache device also includes a discharge diversion module 600 and a second transfer module 500, both of which are arranged at the discharge position 140, wherein the discharge diversion module 600 is configured to receive the material box 800 transferred by the first transfer module 300 and in the second posture, and drive the material box 800 in the second posture to rotate around the vertical axis until it is in the first posture, and the second transfer module 500 is configured to transfer the material box 800 in the first posture from the discharge diversion module 600 to the second opening 120, wherein the first posture and the second posture can be understood with reference to the aforementioned embodiments.
[0104] Specific to Fig.13 In the illustrated embodiment, the discharge diversion module 600 can be understood with reference to the aforementioned feed diversion module 400, for example, including a second rotating power member 610 and a second rotating platform 620. The second transfer module 500 is located above the discharge diversion module 600, and includes a second clamping member 520 and a second clamping power member 510 for driving the second clamping member to open and close, and a translation drive device for driving the second clamping member to move along the first horizontal direction. When the discharge diversion module 600 drives the material box 800 to rotate to the first posture, the second clamping member clamps the material box 800, and then the translation drive device drives the material box 800 to move along the first horizontal direction to deliver the material box 800 from the second opening 120.
[0105] Based on the first embodiment, refer to Figure 7 In some embodiments of the present invention, the first shelf 200 includes a plurality of first storage locations 210, and the plurality of first storage locations 210 are distributed along the second horizontal direction, that is, along the front-to-back direction. Figure 8 The first transfer module 300 further includes a second driving device 312, which is configured to drive the material acquisition device 320 to move along the second horizontal direction to transfer the material box 800 entering from the first opening 110 to one of the plurality of first storage positions 210 distributed along the first horizontal direction.
[0106] Based on the first embodiment, refer to Figure 7 In some embodiments of the present invention, the first shelf 200 includes a plurality of first storage locations 210, and the plurality of first storage locations 210 are distributed vertically, that is, distributed in the up-down direction. Based on this, referring to Figure 8 The first transfer module 300 further includes a third driving device 313, which is configured to drive the material acquisition device 320 to move in the vertical direction to transfer the material box 800 entering from the first opening 110 to one of the plurality of first storage positions 210 distributed in the vertical direction.
[0107] It should be noted that the above embodiments can be combined, that is, the first shelf 200 includes multiple rows of first storage positions 210 distributed in the vertical direction, and each row includes multiple first storage positions 210 distributed in the second horizontal direction, so as to increase the storage capacity of the cache device. Correspondingly, the first transfer module 300 also includes a second drive device 312 and a third drive device 313, and the material box 800 can be transferred to any first storage position 210 through the cooperation of the first drive device 311 to the third drive device 313.
[0108] It should also be noted that the automatic production system can record the storage status of each first storage location 210 , thereby controlling the first transfer module 300 to transfer the material box 800 to an empty first storage location 210 .
[0109] It should also be noted that the second driving device 312 and the third driving device 313 can be driving devices based on a motor-synchronous wheel-synchronous belt, or can be driving devices based on a motor-lead screw-lead screw seat.
[0110] The embodiments of the utility model are described in detail above in conjunction with the accompanying drawings, but the utility model is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the utility model. In addition, the embodiments of the utility model and the features in the embodiments can be combined with each other without conflict.
Claims
1. A semiconductor product cache device, used for storing a material box containing the semiconductor product, characterized in that: include: A frame having a first opening and a second opening, wherein the first opening is used for the material box to enter the frame, and the second opening is used for the material box to be removed from the frame; A first shelf, disposed in the frame, having a plurality of first storage locations for storing the material boxes; A first transfer module, comprising a drive assembly and a material acquisition device, wherein the drive assembly comprises a first drive device, the material acquisition device is connected to the first drive device, and the material acquisition device is capable of acquiring or releasing the material box; Among them, along the first horizontal direction, the first shelf and the second opening are located on opposite sides of the first transfer module, and when the material acquisition device acquires the material box, the first driving device is configured to drive the material acquisition device to translate along the first horizontal direction toward the second opening, so that the material acquisition device transfers the material box to the second opening.
2. The cache device of a semiconductor product according to claim 1, characterized in that: The material acquisition device includes a first clamping power member and two groups of first clamping members, the two groups of first clamping members are distributed along a second horizontal direction, the second horizontal direction is perpendicular to the first horizontal direction, and the first clamping power member is configured to drive the two groups of the first clamping members to move toward each other along the second horizontal direction to clamp the material box in the first storage position, and drive the two groups of the first clamping members to move in the opposite direction along the second horizontal direction to release the material box.
3. The cache device of a semiconductor product according to claim 2, characterized in that: The first driving device is further configured to drive the material acquisition device to translate along the first horizontal direction toward the first shelf, so that the two groups of the first clamping members enter the first storage position to clamp the material box; And / or, the first driving device is further configured to drive the material acquisition device to translate along the first horizontal direction toward the first shelf, so that the two groups of the first clamping members enter the first storage position to release the material box; And / or, the frame has a discharge position corresponding to the second opening, and the first driving device is also configured to drive the material acquisition device to translate along the first horizontal direction toward the second opening, so that the two groups of the first clamping members enter the discharge position to release the material box.
4. The cache device of a semiconductor product according to claim 1, characterized in that: The material acquisition device has a first translation action and a third translation action along the first horizontal direction toward the first shelf, and a second translation action along the direction toward the second opening, and the material acquisition device is further configured to: perform the first translation action and acquire the material box in the first storage position, perform the second translation action after acquiring the material box so that the material box partially extends out of the first storage position, release the material box after performing the second translation action, perform the third translation action after releasing the material box and acquire the material box again, and after acquiring the material box again, translate along the first horizontal direction toward the second opening so that the material box completely leaves the first storage position; And / or, the frame has a discharge position corresponding to the second opening, the material acquisition device has a fourth translational action and a sixth translational action of translation along the first horizontal direction toward the second opening, and a fifth translational action of translation along the direction toward the first shelf. When the material acquisition device acquires the material box, the material acquisition device is further configured to: perform the fourth translational action to allow part of the material box to enter the discharge position, release the material box after performing the fourth translational action to allow part of the material box to enter the discharge position, perform the fifth translational action after releasing the material box and acquire the material box again, perform the sixth translational action after acquiring the material box again to allow the material box to completely enter the discharge position, and release the material box again after performing the sixth translational action.
5. The cache device of a semiconductor product according to claim 1, characterized in that: The frame also has a first feeding position corresponding to the first opening, and the cache device also includes a feeding diversion module, which is arranged at the first feeding position, and is configured to receive the material box that enters through the first opening and is in a first posture, and drive the material box in the first posture to rotate around a vertical axis until it is in a second posture, wherein the length direction of the material box in the first posture is perpendicular to the length direction of the material box in the first storage position, and the length direction of the material box in the second posture is parallel to the length direction of the material box in the first storage position; The first transfer module is configured to transfer the magazine in the second posture from the infeed diversion module to the first storage location.
6. The cache device of a semiconductor product according to claim 1, characterized in that: The frame further has a third opening, and the third opening is used for allowing the material box to enter the frame, wherein the third opening extends to two adjacent sides of the frame respectively.
7. The cache device of a semiconductor product according to claim 6, characterized in that: A portion of the third opening is located on the same side of the frame as the first opening.
8. The cache device of a semiconductor product according to claim 6, characterized in that: The rack has a second material feeding position corresponding to the third opening, and the second material feeding position is configured to store the material box in a second posture, wherein the length direction of the material box in the second posture is parallel to the length direction of the material box in the first storage position; The first transfer module is configured to transfer the material box in the second posture from the second feeding position to the first storage position.
9. The cache device of a semiconductor product according to claim 1, characterized in that: The frame has a material discharging position corresponding to the second opening, and the cache device also includes a material discharging diverting module and a second transfer module, both of which are arranged at the material discharging position, and the material discharging diverting module is configured to receive the material box transferred by the first transfer module and in the second posture, and drive the material box in the second posture to rotate around the vertical axis until it is in the first posture, wherein the length direction of the material box in the first posture is perpendicular to the length direction of the material box in the first storage position, and the length direction of the material box in the second posture is parallel to the length direction of the material box in the first storage position; The second transfer module is configured to transfer the magazine in the first posture from the discharge diversion module to the second opening.
10. The cache device of a semiconductor product according to claim 1, characterized in that: The plurality of first storage locations are distributed along a second horizontal direction, the second horizontal direction is perpendicular to the first horizontal direction, the first transfer module further comprises a second driving device, the second driving device is configured to drive the material acquisition device to move along the second horizontal direction, so as to transfer the material box entering from the first opening to one of the plurality of first storage locations distributed along the first horizontal direction; And / or, a plurality of the first storage positions are distributed along the vertical direction, and the first transfer module further comprises a third driving device, wherein the third driving device is configured to drive the material acquisition device to move along the vertical direction so as to transfer the material box entering from the first opening to one of the plurality of the first storage positions distributed along the vertical direction.