Feeding device and crystalline silicon growth furnace
By using protective tubes and isolation tube sleeves in the feeding device to prevent silicon material from contacting the metal structure, the problem of metal contamination during feeding of quartz barrels is solved, and the life of the crystalline silicon rod is improved and the product quality stability is stable.
Patent Information
- Application Number
- CN202420135422.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-18
- Publication Date
- 2024-12-17
- Estimated Expiration
- 2034-01-18
AI Technical Summary
During the preparation of crystalline silicon, there is a risk of metal contamination during the feeding of quartz barrels, which leads to the doping of silicon materials by metal elements, affecting the minus number life of the crystalline silicon rod and product quality.
A feeding device is designed, by sequentially siding the first protective tube and the isolation tube to prevent the tie rod from being exposed, so as to prevent the silicon material collision protection of the tie rod from being prevented from contacting the metal structure, and reduce the risk of metal contamination.
It effectively avoids contact between silicon material and metal structure during the feeding process of the barrel, improves the product's life span, and improves product quality and stability.
Smart Images
Figure CN222182540U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of crystalline silicon preparation, and in particular to a feeding device and a crystalline silicon growth furnace. Background Art
[0002] In the crystalline silicon preparation industry, in order to reduce production costs, re-feeding of silicon materials is one of the development trends. In related technologies, quartz barrels are usually used for secondary feeding operations. However, during the quartz barrel feeding process, it is necessary to avoid the risk of metal contamination to prevent metal elements from being doped into the silicon material and affecting the minority carrier lifetime of the crystalline silicon rod. Utility Model Content
[0003] Based on this, it is necessary to provide a feeding device and a crystalline silicon growth furnace that can avoid the risk of metal contamination.
[0004] According to a first aspect of the present application, a feeding device is provided, the feeding device comprising:
[0005] A barrel having a first end and a second end along a first direction;
[0006] Lifting institutions include:
[0007] A fixed connecting plate, fixed to the first end of the barrel;
[0008] a bottom cone plate located at the second end of the barrel; and
[0009] A pull rod, one end of which passes through the fixed connecting plate, and the other end of which is connected to the bottom cone plate, so that the bottom cone plate abuts against or separates from the end surface of the second end of the barrel as the pull rod moves along the first direction;
[0010] The lifting mechanism further comprises a first protection tube and an isolation tube which are sequentially sleeved on the pull rod along a first direction, wherein one end of the first protection tube away from the isolation tube abuts against the fixed connecting plate, and one end of the isolation tube away from the first protection tube abuts against the bottom cone plate;
[0011] The first direction and the longitudinal extension direction of the pull rod are parallel to each other.
[0012] In one embodiment, the isolation tube is located inside the barrel; and at least a portion of the first protection tube is located outside the barrel.
[0013] In one embodiment, a first limiting portion and a second limiting portion spaced apart along a first direction are constructed in the first protective tube; the first limiting portion and the second limiting portion extend from the inner wall of the first protective tube toward the central axis of the first protective tube respectively to construct a first through hole and a second through hole for the pull rod to pass through; wherein the second limiting portion is closer to the isolation tube than the first limiting portion.
[0014] In one embodiment, the inner diameters of the first through hole and the second through hole are both smaller than the inner diameter of the isolation tube.
[0015] In one embodiment, the central axis of the first through hole, the central axis of the second through hole, and the central axis of the isolation tube coincide with each other.
[0016] In one embodiment, the inner diameter R1 of the end of the first protection tube away from the fixed connecting plate satisfies the condition: R1>R2;
[0017] Wherein, R2 is the outer diameter of the isolation tube.
[0018] In one embodiment, the first protective tube includes a first sub-tube and a second sub-tube which are sequentially sleeved on the pull rod along a first direction; one end of the first sub-tube away from the second sub-tube abuts against the fixed connecting plate, and one end of the second sub-tube away from the first sub-tube abuts against the isolation tube; wherein the second sub-tube is constructed to be able to be at least partially inserted into the first sub-tube, and locked at different extension lengths relative to the first sub-tube.
[0019] In one embodiment, the first sub-tube and the second sub-tube are threadedly connected.
[0020] In one embodiment, the lifting mechanism further includes a second protection tube sleeved on the pull rod and located inside the isolation tube; the length L1 of the second protection tube satisfies the condition: L3<L1<L2;
[0021] Wherein, L2 is the length of the portion of the pull rod located in the barrel, and L3 is the maximum stroke of the pull rod moving along the first direction.
[0022] In one embodiment, the pull rod includes a first part and a second part connected to each other; the outer diameter of the first part is larger than the outer diameter of the second part to form an annular step surface, and the second protective tube is arranged in the second part, one end of the second protective tube abuts against the step surface, and the other end abuts against the bottom cone plate.
[0023] In one embodiment, the second protection tube is a silicon carbide tube or a silicon nitride tube.
[0024] According to a second aspect of the present application, a crystalline silicon growth furnace is provided, comprising a feeding device as described in any one of the above items.
[0025] The above-mentioned feeding device and crystalline silicon growth furnace, by sequentially sleeved on the pull rod, prevent the pull rod from being exposed to the outside, thereby realizing protection of the pull rod against collision with silicon materials, and avoiding the problem of exposed metal structure when silicon materials are added into the barrel and poured into the furnace from the barrel. Full metal protection can be achieved in the barrel feeding process, and effectively prevent the silicon material from being contaminated by metal after entering the furnace after contacting the metal structure during the barrel feeding process, effectively avoiding the risk of metal contamination, thereby preventing metal elements from being doped into the silicon material to affect the minority carrier lifetime of the crystalline silicon rod, thereby improving the minority carrier lifetime of the product, improving product quality, and improving quality stability. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] FIG1 is a schematic structural diagram of a feeding device in some embodiments of the present application in a loading state.
[0027] FIG. 2 is a cross-sectional view of a feeding device in some embodiments of the present application in a loading state.
[0028] FIG3 is a schematic structural diagram of a feeding device in some embodiments of the present application in a feeding state.
[0029] FIG. 4 is a cross-sectional view of a feeding device in some embodiments of the present application in a feeding state.
[0030] FIG. 5 is an enlarged structural schematic diagram of portion A in FIG. 4 .
[0031] FIG. 6 is an enlarged structural schematic diagram of portion B in FIG. 4 .
[0032] FIG. 7 is a schematic diagram of the structure of a pull rod according to some embodiments of the present application.
[0033] Figure Number:
[0034] 100. feeding device; 1. barrel; 11. first end; 12. second end;
[0035] 2. Lifting mechanism; 21. Fixed connecting plate; 22. Bottom cone plate; 23. Pull rod; 231. First part; 232. Second part; 233. Step surface; 24. First protective tube; 241. First limiting part; 242. Second limiting part; 243. First through hole; 244. Second through hole; 245. First sub-tube; 246. Second sub-tube; 25. Isolation tube; 26. Second protective tube. DETAILED DESCRIPTION
[0036] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.
[0037] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.
[0038] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, "plurality" means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.
[0039] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0040] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.
[0041] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. An element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and are not intended to be the only implementation method.
[0042] In the preparation process of single crystal silicon and polycrystalline silicon rods, in order to reduce production costs, a quartz barrel is used for secondary feeding operations. The feeding process is generally as follows: manually pour silicon material into the quartz barrel according to the formula requirements; transfer the quartz barrel to the furnace table and lift it above the furnace table; lower the quartz barrel into the furnace; control the quartz bottom cone to descend and separate from the quartz barrel body, and pour the silicon material along the gap between the quartz barrel body and the quartz bottom cone; after the silicon material is poured out, lift the quartz barrel out of the furnace table.
[0043] In the related art, a metal lifting rod is used to separate the quartz bottom cone from the quartz barrel, and a quartz isolation tube is set in the quartz barrel to isolate the metal lifting rod from the silicon material. However, the upper end of the metal lifting rod is usually exposed to the outside. During the manual pouring process, the silicon material and the metal lifting rod collide with each other, causing the metal lifting rod to wear, and the metal pollution source enters the quartz barrel, causing the silicon material to be contaminated by metal. The metal elements doped into the silicon material affect the minority carrier lifetime of the crystalline silicon rod, resulting in abnormal product quality.
[0044] After the quartz barrel enters the furnace, when silicon material is added into the furnace, due to the tension force between the quartz isolation tube and the silicon material, the quartz isolation tube may not move downward synchronously with the metal lifting rod, causing the lower end of the metal lifting rod to be exposed in the furnace. During the unloading process, the silicon material falls and collides with the metal lifting rod and enters the furnace, which may also cause the silicon material to be contaminated by metal, thereby causing abnormal product quality.
[0045] The relative movement between the quartz isolation tube and the metal lifting rod will also produce scratches, and the friction and cutting will cause metal pollution sources to enter the quartz barrel, resulting in metal contamination of the silicon material, which in turn causes abnormal product quality.
[0046] Referring to Figures 1 to 4, Figure 1 shows a schematic diagram of the structure of the feeding device in some embodiments of the present application, Figure 2 shows a cross-sectional view of the feeding device in some embodiments of the present application, Figure 3 shows a schematic diagram of the structure of the feeding device in some embodiments of the present application in a feeding state, and Figure 4 shows a cross-sectional view of the feeding device in some embodiments of the present application in a feeding state; the feeding device 100 provided in the embodiment of the present application includes a barrel 1 and a lifting mechanism 2, the barrel 1 has a first end 11 and a second end 12 along a first direction; the lifting mechanism 2 includes a fixed connecting plate 21, a bottom cone plate 22 and a pull rod 23, the fixed connecting plate 21 is fixed to the barrel 1 The first end 11 of the barrel 1, the bottom cone plate 22 is located at the second end 12 of the barrel 1, one end of the pull rod 23 passes through the fixed connecting plate 21, and the other end of the pull rod 23 is connected to the bottom cone plate 22, so that the bottom cone plate 22 moves along the first direction with the pull rod 23 and abuts or separates from the end surface of the second end 12 of the barrel 1; wherein, the lifting mechanism 2 also includes a first protective tube 24 and an isolation tube 25 which are sequentially sleeved on the pull rod 23 along the first direction, the end of the first protective tube 24 away from the isolation tube 25 abuts against the fixed connecting plate 21, and the end of the isolation tube 25 away from the first protective tube 24 abuts against the bottom cone plate 22; the first direction and the longitudinal extension direction of the pull rod 23 are parallel to each other.
[0047] As shown in FIGS. 1 to 4 , the X direction is a first direction.
[0048] The barrel 1 is in the shape of a hollow cylinder with openings at both ends, the central axis of the barrel 1 is parallel to the first direction, the first end 11 and the second end 12 of the barrel 1 are both open, and a cavity for accommodating silicon material is formed in the barrel 1. For example, the barrel 1 can be a quartz barrel.
[0049] The lifting mechanism 2 includes a fixed connecting plate 21, a bottom cone plate 22 and a pull rod 23. The fixed connecting plate 21 is fixed to the first end 11 of the barrel 1, and the barrel 1 can be lifted by the fixed connecting plate 21 to drive the barrel 1 to move and rise and fall. The fixed connecting plate 21 can be a metal plate or a non-metal plate, which is not limited here. The bottom cone plate 22 is located at the second end 12 of the barrel 1, and the side of the bottom cone plate 22 facing the opening of the second end 12 of the barrel 1 can be set to a truncated cone shape; as shown in Figures 1 and 2, the bottom cone plate 22 moves close to the second end 12 of the barrel 1, and the bottom cone plate 22 can abut against the end surface of the second end 12 of the barrel 1, thereby closing the opening of the second end 12 of the barrel 1. At this time, the barrel 1 is in a loading state, and silicon material can be poured into the barrel 1 from the opening of the first end 11 of the barrel 1; as shown in Figures 3 and 4, the bottom cone plate 22 moves away from the second end 12 of the barrel 1, and the opening of the second end 12 of the barrel 1 can be opened. At this time, the barrel 1 is in a discharging state, and the silicon material in the barrel 1 can be poured out along the gap between the second end 12 of the barrel 1 and the bottom cone plate 22, so as to add the silicon material into the furnace. For example, the bottom cone plate 22 can be a quartz cone plate. The longitudinal extension direction of the pull rod 23 is parallel to the first direction. One end of the pull rod 23 passes through the fixed connecting plate 21, and the pull rod 23 can be operated at the first end 11 of the barrel 1; the other end of the pull rod 23 is connected to the bottom cone plate 22. When the pull rod 23 is operated, the bottom cone plate 22 can be driven to move synchronously with the pull rod 23, so that the bottom cone plate 22 moves along the first direction with the pull rod 23 and abuts or separates from the end surface of the second end 12 of the barrel 1, so as to close or open the opening of the second end 12 of the barrel 1 through the lifting mechanism 2 for loading or unloading operations. The pull rod 23 can be a metal rod, such as a stainless steel rod; of course, the pull rod 23 can also be made of non-metallic materials that can withstand high temperatures, which is not limited here.
[0050] The lifting mechanism 2 further includes a first protective tube 24 and an isolating tube 25, which are sequentially sleeved outside the pull rod 23 along the first direction; wherein the first protective tube 24 abuts against the fixed connecting plate 21, that is, the first protective tube 24 is sleeved outside the end of the pull rod 23 close to the fixed connecting plate 21, which can prevent the part of the rod body of the pull rod 23 close to the first end 11 of the barrel 1 from being exposed to the outside, so that the first protective tube 24 realizes metal protection of the part of the rod body of the pull rod 23 close to the first end 11 of the barrel 1; in the process of pouring silicon material from the opening of the first end 11 of the barrel 1 into the barrel 1, the first protective tube 24 can prevent the silicon material and the pull rod 23 from colliding with each other, avoid causing wear of the pull rod 23, realize the anti-collision protection of the pull rod 23 during the process of adding silicon material to the barrel 1, avoid the metal pollution source from entering the barrel 1 and causing the silicon material to be contaminated by metal, and reduce the risk of metal pollution. For example, the first protective tube 24 can be a quartz tube.
[0051] At the same time, the isolation tube 25 is connected to the first protection tube 24, and one end of the isolation tube 25 away from the first protection tube 24 abuts against the bottom cone plate 22, that is, the isolation tube 25 is sleeved on the outside of the rod body of the pull rod 23 between the first protection tube 24 and the bottom cone plate 22, and the isolation tube 25 isolates the pull rod 23 from the silicon material in the barrel 1 to prevent the silicon material from directly contacting the pull rod 23; due to the influence of gravity, the isolation tube 25 can move synchronously with the movement of the pull rod 23, so that when the barrel 1 is in the unloading state, the isolation tube 25 can prevent the part of the rod body of the pull rod 23 close to the second end 12 of the barrel 1 from being exposed, thereby preventing the silicon material from contacting the pull rod 23 when being poured from the barrel 1 into the furnace, thereby realizing metal protection during the unloading process of the barrel 1, further reducing the impact of metal pollution sources on the product, and avoiding the risk of metal pollution. For example, the isolation tube 25 can be a quartz tube. By avoiding contact between the silicon material and the pull rod 23 during the process of adding the silicon material into the barrel 1 and pouring the silicon material from the barrel 1 into the furnace, there is no need to change the silicon material feeding process conditions, thereby reducing the risk of metal contamination and preventing metal elements from being doped into the silicon material to affect the minority carrier lifetime of the crystalline silicon rod, thereby achieving an improvement in the minority carrier lifetime of the product. For example, one cycle can cumulatively improve the minority carrier lifetime of the product by 1.8%-2.2%, thereby improving product quality and enhancing quality stability.
[0052] The feeding device 100 of the embodiment of the present application prevents the pull rod 23 from being exposed to the outside by sequentially sleeved on the first protection tube 24 and the isolation tube 25 on the pull rod 23, thereby realizing protection of the pull rod 23 against collision with silicon materials, and preventing the problem of exposed metal structure when the silicon material is added into the barrel 1 and poured into the furnace from the barrel 1. It can realize full metal protection during the feeding process of the barrel 1, and effectively prevent the silicon material from being contaminated by metal after contacting the metal structure and entering the furnace during the feeding process of the barrel 1, thereby effectively avoiding the risk of metal contamination, thereby preventing metal elements from being doped into the silicon material to affect the minority carrier lifetime of the crystalline silicon rod, thereby improving the minority carrier lifetime of the product, improving product quality, and improving quality stability.
[0053] In some embodiments, as shown in FIGS. 1 to 4 , the opposite ends of the fixed connecting plate 21 are fixedly connected to the opposite sides of the opening of the first end 11 of the barrel 1, and the middle section of the fixed connecting plate 21 protrudes in the direction away from the barrel 1, so that the fixed connecting plate 21 is in a shape of a "J" as a whole; in this way, the distance between the middle section of the fixed connecting plate 21 and the end surface of the first end 11 of the barrel 1 can be increased, which is conducive to avoiding interference of the fixed connecting plate 21 during the process of pouring silicon material into the barrel 1. One end of the pull rod 23 is arranged in the middle section of the fixed connecting plate 21, and the part of the pull rod 23 close to the first end 11 of the barrel 1 is located outside the first end 11 of the barrel 1.
[0054] In some embodiments, the isolation tube 25 is located inside the barrel 1; at least part of the first protection tube 24 is located outside the barrel 1. The isolation tube 25 isolates the part of the rod 23 located inside the barrel 1 from the barrel 1, preventing the rod 23 from being exposed inside the barrel 1, thereby preventing the silicon material inside the barrel 1 from contacting the rod 23, and reducing the risk of metal contamination; the first protection tube 24 protects the part of the rod 23 located outside the first end 11 of the barrel 1 from collision with the silicon material, preventing the rod 23 from being exposed outside, thereby preventing the silicon material from colliding with the rod 23 during the process of pouring the silicon material into the barrel 1, causing the rod 23 to wear, and reducing the risk of metal contamination.
[0055] In some embodiments, as shown in Figures 2 and 4, a first limiting portion 241 and a second limiting portion 242 are configured in the first protective tube 24 and are spaced apart along the first direction; the first limiting portion 241 and the second limiting portion 242 extend from the inner wall of the first protective tube 24 toward the longitudinal axis of the first protective tube 24, respectively, to construct a first through hole 243 and a second through hole 244 for the pull rod 23 to pass through; wherein the second limiting portion 242 is closer to the isolation tube 25 than the first limiting portion 241.
[0056] The longitudinal axis of the first protective tube 24 is parallel to the first direction, so that the central axes of the first through hole 243 and the second through hole 244 are both parallel to the first direction, and the first through hole 243 and the second through hole 244 are coaxially arranged; the pull rod 23 is passed through the first through hole 243 and the second through hole 244, and the first limiting portion 241 and the second limiting portion 242 can be close to the peripheral side of the pull rod 23, which can limit the pull rod 23 and limit the pull rod 23 to move along the central axis direction of the first through hole 243 and the second through hole 244, that is, limit the pull rod 23 to move along the first direction; and the first limiting portion 241 and the second limiting portion 242 are spaced apart along the first direction to form a multi-point limit, which limits the pull rod 23. It has a better effect and prevents the pull rod 23 from shaking, thereby effectively limiting the pull rod 23 from moving in the first direction, and then in the process of pouring the silicon material from the barrel 1 into the furnace, it can ensure the vertical coaxiality of the isolation tube 25 sleeved on the pull rod 23 and the barrel 1, avoid the isolation tube 25 offset and cause material jamming, improve the problem of material jamming when feeding the barrel 1, increase the stability of material blanking, and improve the efficiency of silicon material feeding; at the same time, it is beneficial to reduce the tensioning force between the isolation tube 25 and the silicon material, so that the isolation tube 25 can move synchronously with the pull rod 23 to open the barrel 1, and avoid the isolation tube 25 not moving synchronously with the pull rod 23, causing the part of the rod body of the pull rod 23 close to the bottom cone plate 22 to be exposed in the furnace, thereby further reducing the risk of metal contamination.
[0057] In some specific embodiments, a first limiting portion 241 and a second limiting portion 242 are provided in the first protection tube 24 to ensure the vertical coaxiality between the isolation tube 25 and the barrel 1, which can reduce the probability of material jamming by 40%-54%.
[0058] In some embodiments, the inner diameters of the first through hole 243 and the second through hole 244 are both smaller than the inner diameter of the isolation tube 25. Such a configuration makes the tie rod 23 and the first through hole 243 and the second through hole 244 fit more closely, and the limiting effect of the tie rod 23 is better, which is conducive to improving the vertical coaxiality of the tie rod 23 and the isolation tube 25 with the barrel 1, further improving the problem of material jamming during material feeding in the barrel 1, improving the stability of blanking, and reducing the risk of metal contamination; the inner diameter of the isolation tube 25 is larger than the inner diameter of the first through hole 243 and the inner diameter of the second through hole 244, so that the end face of the isolation tube 25 can abut against the second limiting portion 242, thereby limiting the relative position of the isolation tube 25 and the first protective tube 24.
[0059] In some embodiments, the central axis of the first through hole 243, the central axis of the second through hole 244 and the central axis of the isolation tube 25 coincide with each other. Such an arrangement can further improve the vertical coaxiality of the pull rod 23 and the isolation tube 25 with the barrel 1, further avoid the phenomenon of material jamming caused by the offset of the isolation tube 25, effectively improve the problem of material jamming during material feeding in the barrel 1, increase the stability of material dropping, and reduce the risk of metal contamination.
[0060] In some embodiments, as shown in FIG5 , the inner diameter R1 of the end of the first protection tube 24 away from the fixed connecting plate 21 satisfies the condition: R1>R2; wherein R2 is the outer diameter of the isolation tube 25. The inner diameter R1 of the end of the first protection tube 24 away from the fixed connecting plate 21 is greater than the outer diameter R2 of the isolation tube 25, so that the end of the first protection tube 24 away from the fixed connecting plate 21 can be sleeved and connected to the outside of the isolation tube 25, avoiding the gap between the first protection tube 24 and the isolation tube 25 causing the pull rod 23 to be exposed, thereby ensuring the metal protection effect.
[0061] In some embodiments, as shown in Figure 5, the first protective tube 24 includes a first sub-tube 245 and a second sub-tube 246 which are sequentially sleeved on the pull rod 23 along the first direction; one end of the first sub-tube 245 away from the second sub-tube 246 abuts against the fixed connecting plate 21, and one end of the second sub-tube 246 away from the first sub-tube 245 abuts against the isolation tube 25; wherein the second sub-tube 246 is constructed to be able to be at least partially inserted into the first sub-tube 245, and locked at different extension lengths relative to the first sub-tube 245.
[0062] The first protection tube 24 includes a first sub-tube 245 and a second sub-tube 246, and the second sub-tube 246 is at least partially inserted into the first sub-tube 245, so that the length of the first protection tube 24 is equal to the sum of the length of the first sub-tube 245 and the length of the portion of the second sub-tube 246 located outside the first sub-tube 245; at the same time, the portion of the second sub-tube 246 inserted into the first sub-tube 245 can be locked at different insertion lengths, so that the length of the portion of the second sub-tube 246 located outside the first sub-tube 245 can be adjusted, and then the length of the first protection tube 24 can be adjusted. The first protection tube 24 prevents the silicon material from colliding with the tie rod 23 to avoid causing wear of the tie rod 23. Adjusting the length of the first protection tube 24 means adjusting the protection length range of the tie rod 23, so that the first protection tube 24 can be applied to a variety of application scenarios and a variety of tie rods 23 with different rod lengths located outside the first end 11 of the barrel 1, meeting actual use requirements, being convenient and flexible to use, and having a wide range of applications.
[0063] In some embodiments, the first sub-tube 245 and the second sub-tube 246 are threadedly connected. The threaded connection has a self-locking function, which effectively simplifies the locking and adjusting operation of the second sub-tube 246 and the first sub-tube 245, and has a simple structure, is easy to manufacture and use, and reduces costs.
[0064] In some embodiments, as shown in Figure 6, the lifting mechanism 2 also includes a second protective tube 26 that is sleeved on the pull rod 23 and located on the inner side of the isolation tube 25; the length L1 of the second protective tube 26 satisfies the condition: L3<L1<L2; wherein L2 is the length of the portion of the pull rod 23 located inside the barrel 1, and L3 is the maximum stroke of the pull rod 23 moving along the first direction.
[0065] The second protection tube 26 is nested between the tie rod 23 and the isolation tube 25 to achieve nested protection and isolation for the tie rod 23. Therefore, during the process of adding silicon material into the furnace, even if the isolation tube 25 and the tie rod 23 are relatively separated due to the tensioning force between the isolation tube 25 and the silicon material, the second protection tube 26 can still be sleeved on the outside of the tie rod 23 connected to one end of the bottom cone plate 22 to prevent the tie rod 23 from being exposed in the furnace. During the unloading process, the silicon material hits the second protection tube 26 to protect the tie rod 23 from impact by the silicon material, thereby preventing the silicon material from being contaminated by metal and causing abnormal product quality. At the same time, the length L1 of the second protection tube 26 is greater than the maximum stroke L3 of the tie rod 23 moving along the first direction to ensure that the material When the barrel 1 is in the unloading state, the isolation tube 25 and the second protection tube 26 will not be completely separated, thereby preventing a gap from appearing between the second protection tube 26 and the isolation tube 25 along the first direction, causing the pull rod 23 to be exposed in the furnace, thereby ensuring the protection of the pull rod 23 against silicon material impact; and the length L1 of the second protection tube 26 is less than the length of the part of the pull rod 23 located in the barrel 1, which is beneficial to saving materials and reducing costs; in addition, the nested protection isolation can avoid affecting the movable and retractable movement of the pull rod 23, thereby avoiding mutual friction between the silicon material and the pull rod 23 during the feeding process while ensuring the movable and retractable movement of the pull rod 23 along the first direction, avoiding wear of the pull rod 23, and effectively reducing the risk of metal contamination.
[0066] In some embodiments, as shown in Figures 6 and 7, the pull rod 23 includes a first part 231 and a second part 232 connected to each other; the outer diameter of the first part 231 is larger than the outer diameter of the second part 232 to form an annular step surface 233, and the second protective tube 26 is arranged in the second part 232, and one end of the second protective tube 26 abuts against the step surface 233 and the other end abuts against the bottom cone plate 22.
[0067] The second part 232 of the pull rod 23 is connected to the bottom cone plate 22; by setting the outer diameter of the second part 232 of the pull rod 23 to be smaller than the outer diameter of the first part 231, it is convenient to insert the second part 232 into the second protective tube 26, and the two ends of the second protective tube 26 are respectively abutted against the step surface 233 and the bottom cone plate 22, so that the second protective tube 26 is limitedly connected to the pull rod 23, ensuring that the second protective tube 26 can move synchronously with the movement of the pull rod 23, and further ensuring that the second protective tube 26 can protect the pull rod 23 from impact with silicon materials during the unloading process, thereby effectively reducing the risk of metal contamination.
[0068] In some embodiments, the second protective tube 26 is a silicon carbide tube or a silicon nitride tube. Both silicon carbide material and silicon nitride material have the characteristics of high temperature resistance, corrosion resistance, wear resistance, high strength, and impact resistance. The use of silicon carbide material or silicon nitride material to manufacture the second protective tube 26 can improve the anti-collision, anti-high temperature and anti-cutting performance of the second protective tube 26, and has a better effect on the anti-silicon material impact protection of the pull rod 23, effectively reducing the risk of metal contamination. For example, the second protective tube 26 can be made of high-purity silicon nitride material, wherein the high-purity silicon nitride is prepared by reacting high-purity silicon and pure nitrogen at a temperature of 1600 Kelvin (K).
[0069] Based on the same inventive concept, an embodiment of the present application further provides a crystalline silicon growth furnace, comprising a feeding device 100 provided in any of the above embodiments.
[0070] Since the crystalline silicon growth furnace has the same beneficial effects as the feeding device 100 , they will not be described in detail here.
[0071] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0072] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.
Claims
1. A feeding device, characterized in that: The feeding device comprises: A barrel having a first end and a second end along a first direction; Lifting institutions include: A fixed connecting plate, fixed to the first end of the barrel; a bottom cone plate located at the second end of the barrel; and A pull rod, one end of which passes through the fixed connecting plate, and the other end of which is connected to the bottom cone plate, so that the bottom cone plate abuts against or separates from the end surface of the second end of the barrel as the pull rod moves along the first direction; The lifting mechanism further comprises a first protection tube and an isolation tube which are sequentially sleeved on the pull rod along a first direction, wherein one end of the first protection tube away from the isolation tube abuts against the fixed connecting plate, and one end of the isolation tube away from the first protection tube abuts against the bottom cone plate; The first direction and the longitudinal extension direction of the pull rod are parallel to each other.
2. The feeding device according to claim 1, characterized in that: The isolation tube is located inside the barrel; at least a portion of the first protection tube is located outside the barrel.
3. The feeding device according to claim 1, characterized in that: The first protection tube is provided with a first limiting portion and a second limiting portion spaced apart along a first direction; The first limiting portion and the second limiting portion respectively extend from the inner wall of the first protection tube toward the central axis of the first protection tube to form a first through hole and a second through hole for the pull rod to pass through; Wherein, the second limiting portion is closer to the isolation tube than the first limiting portion.
4. The feeding device according to claim 3, characterized in that: The inner diameters of the first through hole and the second through hole are both smaller than the inner diameter of the isolation tube.
5. The feeding device according to claim 3, characterized in that: The central axis of the first through hole, the central axis of the second through hole, and the central axis of the isolation tube coincide with each other.
6. The feeding device according to claim 1, characterized in that: The inner diameter R1 of the end of the first protection tube away from the fixed connecting plate satisfies the condition: R1>R2; Wherein, R2 is the outer diameter of the isolation tube.
7. The feeding device according to any one of claims 1 to 6, characterized in that: The first protection tube comprises a first sub-tube and a second sub-tube which are sequentially sleeved on the pull rod along a first direction; One end of the first sub-tube away from the second sub-tube abuts against the fixed connecting plate, and one end of the second sub-tube away from the first sub-tube abuts against the isolation tube; The second sub-tube is configured to be at least partially inserted into the first sub-tube and locked at a different insertion length relative to the first sub-tube.
8. The feeding device according to claim 7, characterized in that: The first sub-pipe and the second sub-pipe are threadedly connected.
9. The feeding device according to any one of claims 1 to 6, characterized in that: The lifting mechanism further includes a second protection tube sleeved on the pull rod and located inside the isolation tube; The length L1 of the second protection tube satisfies the condition: L3<L1<L2; Wherein, L2 is the length of the portion of the pull rod located in the barrel, and L3 is the maximum stroke of the pull rod moving along the first direction.
10. The feeding device according to claim 9, characterized in that: The pull rod includes a first portion and a second portion connected to each other; The outer diameter of the first part is greater than that of the second part to form an annular step surface. The second protection tube is arranged on the second part. One end of the second protection tube abuts against the step surface and the other end abuts against the bottom cone plate.
11. The feeding device according to claim 9, characterized in that: The second protection tube is a silicon carbide tube or a silicon nitride tube.
12. A crystalline silicon growth furnace, characterized in that: It comprises a feeding device as described in any one of claims 1-11.