Crucible supporting assembly and single crystal furnace

Abstract

The utility model relates to a crucible supporting assembly and a single crystal furnace, the crucible supporting assembly comprises a tow bar main body, a tray and a tow bar head, the tray is arranged at one end of the tow bar main body, the tray is used for supporting a crucible edge of a crucible, the tow bar head is detachably connected to one end, far away from the tray, of the tow bar main body, and the tow bar head is used for being detachably connected with a crucible shaft; the tow bar comprises a tow bar body and is configured to be capable of being driven by a crucible shaft to rotate, the tow bar body is provided with a leakage-proof ring, the leakage-proof ring comprises a leakage-proof bottom wall arranged on the tow bar body and a leakage-proof edge arranged around the periphery of the leakage-proof bottom wall, and the leakage-proof bottom wall and the leakage-proof edge form a containing cavity used for containing silicon liquid. According to the crucible supporting assembly, the leaked silicon solution can be received and contained through the containing cavity in the leakage-proof ring, and it is avoided that the silicon solution continues to flow downwards along the tow bar body, and then lower shaft related elements are damaged.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal silicon manufacturing, and in particular to a crucible support assembly and a single crystal furnace. Background Art

[0002] Single crystal silicon rods are the basic materials in the photovoltaic field, and the CZ method is one of the main methods for preparing single crystal silicon. The CZ method for preparing single crystal silicon is to put polycrystalline silicon into a quartz crucible, heat and melt it to form a silicon melt, and then go through the steps of temperature adjustment, seeding, shoulder release, shoulder rotation, equal diameter, and finishing, and finally pull the single crystal silicon rod upward from the melt liquid surface.

[0003] However, on the one hand, the quartz crucible is prone to soften and deform when it is exposed to temperatures above the melting point of silicon for a long time. There is also a certain probability that the quartz crucible itself has defects or stresses that cannot be observed by the naked eye or testing instruments. When defective quartz crucibles are put into use, there is a risk of silicon leakage. Once the silicon solution leaks, it will flow to the drag rod, causing erosion and damage to the lower shaft related components such as the lower shaft bellows. Utility Model Content

[0004] Based on this, it is necessary to provide a crucible support assembly and a single crystal furnace to avoid the problem of damage to lower shaft related components caused by silicon leakage.

[0005] According to one aspect of the present application, an embodiment of the present application provides a crucible support assembly, the crucible support assembly comprising: a drag rod body; a tray, arranged at one end of the drag rod body, the tray being used to support the crucible of the crucible; and a drag rod head, detachably connected to the end of the drag rod body away from the tray, the drag rod head being used to be detachably connected to the crucible shaft, and being configured to be driven to rotate by the crucible shaft; wherein a leak-proof ring is arranged on the drag rod body, the leak-proof ring comprising a leak-proof bottom wall arranged on the drag rod body, and a leak-proof edge arranged around the periphery of the leak-proof bottom wall; the leak-proof bottom wall and the leak-proof edge structure form a accommodating chamber for accommodating silicon liquid.

[0006] In one embodiment, the anti-leakage ring is an integral structure with the tow bar body.

[0007] In one embodiment, the anti-leakage edge is coaxially arranged with the handle body.

[0008] In one embodiment, a height H of the anti-leakage edge along the axis direction of the handle body satisfies the condition: H ≥ 20 mm.

[0009] In one of the embodiments, the tray and the handle body are coaxially arranged, and the projection structure along the axial direction of the handle body is circular; the projection structure of the anti-leakage ring along the axial direction of the handle body is in the shape of a circular ring; wherein, with the axis of the handle body as a reference, the outer diameter of the projection of the anti-leakage ring along the axial direction of the handle body is smaller than the diameter of the projection of the tray along the axial direction of the handle body.

[0010] In one embodiment, the handle head is threadedly connected to an end of the handle body remote from the tray.

[0011] In one of the embodiments, a mounting hole is provided at one end of the drag rod body away from the tray, and the drag rod head comprises: a rod portion, an outer wall of the rod portion is provided with an external thread adapted to the internal thread in the mounting hole; and a transmission portion connected to one end of the rod portion, the transmission portion being used to be detachably connected to the crucible shaft and configured to be driven to rotate by the crucible shaft; wherein, along the axial direction of the drag rod body, from one end of the transmission portion close to the drag rod body to the other end away from the drag rod body, the transmission portion is constructed in a tapered pyramid shape.

[0012] In one embodiment, the rod portion and the transmission portion are coaxially arranged with the handle body; the projection of the transmission portion along the axis of the handle body is an N-gon; wherein N is a natural number, and 3≤N≤8.

[0013] In one embodiment, the radial dimension of the rod portion is smaller than the radial dimension of the end surface of the transmission portion close to the rod portion, so as to form a step surface for abutting against the end surface of the tow bar body away from the tray; a shock absorbing layer is provided on the step surface.

[0014] According to another aspect of the present application, an embodiment of the present application also provides a single crystal furnace, including a furnace body and a crucible located in the furnace body, the single crystal furnace also includes: a crucible support assembly as mentioned above, a tray for supporting the crucible; and a crucible shaft connected to a power source, the drag rod head is detachably connected to the crucible shaft, and the crucible shaft can drive the crucible support assembly to rotate.

[0015] The above-mentioned crucible support assembly is provided with a leak-proof ring on the drag rod body. The leak-proof ring includes a leak-proof bottom wall provided on the drag rod body and a leak-proof edge provided around the periphery of the leak-proof bottom wall. The leak-proof bottom wall and the leak-proof edge structure form a accommodating cavity for accommodating silicon liquid. When the crucible leaks silicon, the accommodating cavity in the leak-proof ring can receive and accommodate the leaked silicon solution, thereby preventing the silicon solution from continuing to flow downward along the drag rod body and thereby damaging the lower shaft-related components. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of a crucible support assembly in the related art.

[0017] Figure 2It is a schematic diagram of the overall structure of the crucible axis in a single crystal furnace in the related art.

[0018] Figure 3 A schematic diagram of the overall structure of a crucible support assembly provided in one embodiment of the present application.

[0019] Figure 4 An exploded structural cross-sectional view of a crucible support assembly provided in accordance with one embodiment of the present application.

[0020] Figure 5 A schematic diagram of the exploded structure of a crucible support assembly provided in one embodiment of the present application.

[0021] Figure 6 A schematic diagram of the overall structure of a crucible shaft in a single crystal furnace provided in one embodiment of the present application.

[0022] The reference numerals in the specific implementation manner are as follows:

[0023] 10: Crucible support assembly;

[0024] 100: tow bar body, 110: leak-proof ring; 111: leak-proof bottom wall, 112: leak-proof edge, 113: accommodating cavity, 120: mounting hole;

[0025] 200: Pallet;

[0026] 300: tow bar head, 310: rod part, 320: transmission part, 330: step surface;

[0027] 20: crucible shaft, 21: containing groove. DETAILED DESCRIPTION

[0028] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0029] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0030] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0031] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0032] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0033] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0034] Figure 1 The overall structure diagram of the lower shaft drag rod 11 in the related art is shown. Figure 2 The figure shows the overall structure of the crucible shaft 15 in the single crystal furnace in the related art.

[0035] In related technologies, such as Figure 1 As shown, the lower shaft drag rod 11 in the single crystal furnace includes a rod body 12, one end of the rod body 12 is provided with a tray 13 for supporting the crucible, and the other end of the rod body is provided with a truncated cone-shaped drag rod head 14. Figure 2 As shown, one end of the crucible shaft 15 is provided with a groove 16 matching the truncated cone-shaped drag rod head 14. By setting the drag rod head 14 in the groove 16 on the crucible shaft 15, the drag rod head 14 can be detachably connected to the crucible shaft 15. During the use of the single crystal furnace, the power source is connected to the crucible shaft 15, and the power source drives the crucible shaft 15 to rotate, so that the crucible shaft 15 can drive the lower shaft drag rod 11 to rotate, and then drive the crucible supported on the tray 13 to rotate. However, on the one hand, the quartz crucible is easy to soften and deform when it is at a temperature above the melting point of silicon for a long time. There is also a certain probability that the quartz crucible itself has defects or stresses that cannot be observed by the naked eye and test instruments. When the defective quartz crucible is put into use, there will be a risk of silicon leakage. Once the silicon solution leaks, it will flow along the lower shaft drag rod 11 and cause erosion and damage to the lower shaft related components such as the lower shaft bellows.

[0036] Figure 3 FIG. 1 shows a schematic diagram of the overall structure of a crucible support assembly 10 provided in one embodiment of the present application. Figure 4 FIG. 1 is a cross-sectional view of an exploded structure of a crucible support assembly 10 provided in one embodiment of the present application.

[0037] To at least partially address the above issues, see Figure 3 to Figure 4The embodiment of the present application provides a crucible support assembly 10, which includes a rod body 100, a tray 200 and a rod head 300. The tray 200 is disposed at one end of the rod body 100, and the tray 200 is used to support the crucible of the crucible. The rod head 300 is detachably connected to the end of the rod body 100 away from the tray 200. The rod head 300 is used to be detachably connected to the crucible shaft 20, and is configured to be driven to rotate by the crucible shaft 20. The rod body 100 is provided with a leakproof ring 110, and the leakproof ring 110 includes a leakproof bottom wall 111 disposed on the rod body 100, and a leakproof edge 112 disposed around the periphery of the leakproof bottom wall 111. The leakproof bottom wall 111 and the leakproof edge 112 form a receiving cavity 113 for receiving silicon liquid.

[0038] In the crucible support assembly 10 of the embodiment of the present application, a tray 200 for supporting the crucible is provided at one end of the drag rod body 100, and a drag rod head 300 is detachably connected to the end of the drag rod body 100 away from the tray 200, wherein the shape and size of the tray 200 and the drag rod head 300 can be flexibly adjusted according to different use requirements, and are not specifically limited here. When silicon leakage occurs during the use of the crucible, in order to prevent the silicon solution from flowing from the tray 200 to the drag rod head 300 along the drag rod body 100, and then corroding and damaging the lower shaft related components such as the lower shaft bellows, in particular, a leak-proof ring 110 is provided on the drag rod body 100 of the embodiment of the present application, and the leak-proof ring 110 is provided on the drag rod body 100 and is located between the tray 200 and the drag rod head 300. As for the specific setting height of the leak-proof ring 110 on the drag rod body 100, it varies according to the size of the drag rod body 100, and is not limited here. For example, in some embodiments, the leak-proof ring 110 can be disposed on the side of the rod body 100 closer to the tray 200, so as to collect the silicon solution leaked from the crucible as soon as possible and prevent the silicon solution from flowing too long along the rod body 100. In other embodiments, the leak-proof ring 110 can also be disposed on the side of the rod body 100 closer to the rod head 300, so as to clean the silicon solution collected in the leak-proof ring 110 and ensure the normal use of the crucible and the crucible support assembly 10.

[0039] Specifically, the leak-proof ring 110 includes a leak-proof bottom wall 111 arranged on the drag rod body 100, and a leak-proof edge 112 arranged around the periphery of the leak-proof bottom wall 111. The leak-proof bottom wall 111 and the leak-proof edge 112 are configured to form a accommodating cavity 113 for accommodating silicon liquid. The leak-proof bottom wall 111 is extended from the outer wall of the drag rod body 100 in a direction away from the drag rod body 100, and the leak-proof edge 112 is extended from the end of the leak-proof bottom wall 111 toward a side close to the tray 200, so that the opening of the accommodating cavity 113 is oriented toward the tray 200. In this way, the silicon solution leaked from the crucible on the tray 200 can flow into the interior of the accommodating cavity 113 through the opening of the accommodating cavity 113 after flowing along the drag rod body 100 for a distance, and is blocked by the leak-proof bottom wall 111 and the leak-proof edge 112, and cannot continue to flow downward along the drag rod body 100 and thus damage the lower shaft-related components.

[0040] In the leak-proof ring 110, the direction in which the leak-proof bottom wall 111 extends outward from the outer wall of the handle body 100 may form a certain angle with the radial direction of the handle body 100, and the angle and the size of the leak-proof bottom wall 111 extending outward are not specifically limited. The direction in which the leak-proof edge 112 extends from the end of the leak-proof bottom wall 111 toward the side close to the tray 200 may form a certain angle with the axial direction of the handle body 100, and the angle and the size of the leak-proof edge 112 extending toward the side close to the tray 200 are not specifically limited, as long as the size of the accommodating cavity 113 constructed by the leak-proof bottom wall 111 and the leak-proof edge 112 can meet the requirement of completely accommodating the leaked silicon solution.

[0041] The crucible support assembly 10 in the embodiment of the present application is provided with a leak-proof ring 110 on the drag rod body 100. The leak-proof ring 110 includes a leak-proof bottom wall 111 provided on the drag rod body 100 and a leak-proof edge 112 provided around the periphery of the leak-proof bottom wall 111. The leak-proof bottom wall 111 and the leak-proof edge 112 are constructed to form a accommodating cavity 113 for accommodating silicon liquid. When the crucible leaks silicon, the accommodating cavity 113 in the leak-proof ring 110 can receive and accommodate the leaked silicon solution, thereby preventing the silicon solution from continuing to flow downward along the drag rod body 100 and thereby damaging the lower shaft-related components.

[0042] The leak-proof bottom wall 111 in the leak-proof ring 110 is extended from the outer wall of the handle body 100 in the direction away from the handle body 100, and the leak-proof edge 112 is extended from the end of the leak-proof bottom wall 111 toward the side close to the tray 200. Therefore, the leak-proof bottom wall 111 and the leak-proof edge 112 can be connected to the handle body 100 by welding, riveting, etc. In some embodiments, the leak-proof ring 110 can also be an integral structure with the handle body 100. That is, the leak-proof bottom wall 111 and the leak-proof edge 112 in the leak-proof ring 110 are integrally formed with the handle body 100. In this way, the manufacturing process of the handle body 100 and the leak-proof ring 110 is less, and the sealing performance of the accommodating cavity 113 constructed between the handle body 100 and the leak-proof ring 110 is better, so that the silicon liquid accommodated in the accommodating cavity 113 will not leak.

[0043] As described above, the direction in which the leak-proof edge 112 extends from the end of the leak-proof bottom wall 111 toward the side close to the tray 200 may form a certain angle with the axial direction of the handle body 100, such as Figure 4 As shown, in some embodiments, optionally, the anti-leakage edge 112 and the handle body 100 can be configured to be coaxially arranged. The anti-leakage edge 112 is coaxially arranged with the handle body 100, that is, the extension direction of the anti-leakage edge 112 from the end of the anti-leakage bottom wall 111 toward the side close to the tray 200 is parallel to the axial direction of the handle body 100. In this way, along the axial direction of the handle body 100, the cross-sectional shape and cross-sectional size of the cross section of the accommodating cavity 113 in the direction perpendicular to the axial direction of the handle body 100 remain unchanged, and the overall shape of the accommodating cavity 113 is more regular.

[0044] The dimension of the anti-leakage edge 112 extending toward the side close to the tray 200 is not specifically limited. In some embodiments, optionally, the height H of the anti-leakage edge 112 along the axis direction of the handle body 100 satisfies the condition: H ≥ 20 mm. For example, the height H of the anti-leakage edge 112 along the axis direction of the handle body 100 can be 20 mm, 24 mm, 27 mm, 30 mm, 35 mm, 42 mm, 50 mm, etc. The above data are only examples, and H is not limited to the above data in actual embodiments. By making the height H of the anti-leakage edge 112 along the axis direction of the handle body 100 ≥ 20 mm, the depth of the accommodating cavity 113 is also greater than or equal to 20 mm. In this way, the volume of the accommodating cavity 113 can meet the requirement of accommodating the leaked silicone liquid in most cases.

[0045] Please continue reading Figure 4In some embodiments, optionally, the tray 200 and the handle body 100 are coaxially arranged, and the projection structure along the axial direction of the handle body 100 is circular, and the projection structure of the leak-proof ring 110 along the axial direction of the handle body 100 is annular, that is, the central axis of the tray 200 along the axial direction of the handle body 100 coincides with the central axis of the handle body 100 along the axial direction of the handle body 100, therefore, the circular projection figure of the tray 200 along the axial direction of the handle body 100 also coincides with the center of the annular projection figure of the leak-proof ring 110 along the axial direction of the handle body 100.

[0046] In which, with the axis of the handle body 100 as a reference, the outer diameter of the projection of the anti-leakage ring 110 along the axis of the handle body 100 is smaller than the diameter of the projection of the tray 200 along the axis of the handle body 100. In other words, under the premise that the projection figure of the tray 200 along the axis of the handle body 100 coincides with the center of the projection figure of the anti-leakage ring 110 along the axis of the handle body 100, the projection figure of the anti-leakage ring 110 along the axis of the handle body 100 completely falls into the projection figure of the tray 200 along the axis of the handle body 100, and the anti-leakage ring 110 does not protrude too much.

[0047] As described above, the tow bar head 300 is detachably connected to the end of the tow bar body 100 away from the tray 200. Therefore, in some embodiments, the tow bar head 300 is optionally threadedly connected to the end of the tow bar body 100 away from the tray 200. The threaded connection between the tow bar head 300 and the tow bar body 100 facilitates the installation of the tow bar head 300 on the tow bar body 100 and the removal of the tow bar head 300 from the tow bar body 100.

[0048] Figure 5 A schematic diagram of the exploded structure of a crucible support assembly 10 provided in one embodiment of the present application is shown.

[0049] Please also read Figures 4 to 5 In some embodiments, optionally, a mounting hole 120 is provided at one end of the rod body 100 away from the tray 200, and the rod head 300 includes a rod portion 310 and a transmission portion 320. The outer wall of the rod portion 310 is provided with an external thread that matches the internal thread in the mounting hole 120. The transmission portion 320 is connected to one end of the rod portion 310. The transmission portion 320 is used to be detachably connected to the crucible shaft 20 and is configured to be driven to rotate by the crucible shaft 20. In particular, along the axis direction of the rod body 100, from the transmission portion 320 close to one end of the rod body 100 to the other end away from the rod body 100, the transmission portion 320 is configured to be a tapered pyramid.

[0050] The tow bar head 300 is threadedly connected to one end of the tow bar body 100 away from the tray 200. Specifically, a mounting hole 120 is provided at one end of the tow bar body 100 away from the tray 200, and an outer wall of a rod portion 310 of the tow bar head 300 is provided with an external thread that is adapted to the internal thread in the mounting hole 120. The threaded connection between the tow bar head 300 and the tow bar body 100 can be achieved by the cooperation of the external thread on the outer wall of the rod portion 310 of the tow bar head 300 and the internal thread in the mounting hole 120 of the tow bar body 100.

[0051] Furthermore, since the drag rod head 300 is used to be detachably connected to the crucible shaft 20 and is configured to be driven to rotate by the crucible shaft 20, in order to make the crucible shaft 20 and the drag rod head 300 more convenient to connect and disassemble, and also to facilitate the crucible shaft 20 to drive the drag rod head 300 to rotate more smoothly, one end of the rod portion 310 of the drag rod head 300 is connected to a transmission portion 320, and, along the axial direction of the drag rod body 100, from one end of the transmission portion 320 close to the drag rod body 100 to the other end away from the drag rod body 100, the transmission portion 320 is constructed to be in a tapered pyramid shape. With this arrangement, the tapered pyramid-shaped transmission portion 320 can abut against the crucible shaft 20 through the pyramidal surface thereon, thereby achieving the effect of connection and synchronous rotation, and the pyramid-shaped transmission portion 320 is more convenient to connect and disassemble with the crucible shaft 20.

[0052] Please continue reading Figure 5 In some embodiments, optionally, the rod portion 310 and the transmission portion 320 are configured to be coaxially arranged with the tow bar body 100; the projection of the transmission portion 320 along the axial direction of the tow bar body 100 is configured as an N-gon; wherein N is a natural number, and 3≤N≤8. Along the axial direction of the tow bar body 100, from one end of the transmission portion 320 close to the tow bar body 100 to the other end away from the tow bar body 100, the transmission portion 320 is configured to be a tapered pyramid, and the projection figure of the pyramid-shaped transmission portion 320 along the axial direction of the tow bar body 100 is an N-gon. Exemplarily, the projection figure of the transmission portion 320 along the axial direction of the tow bar body 100 can specifically be a triangle, a quadrilateral, a pentagon, a hexagon, a heptagon, an octagon, etc. The above data are only taken as examples. In the case Figure 5 In the illustrated embodiment, the projection shape of the transmission part 320 along the axis direction of the handle body 100 is a pentagon.

[0053] In the tow bar head 300, the transmission part 320 is connected to one end of the rod part 310, and the rod part 310 and the transmission part 320 are both configured to be coaxially arranged with the tow bar body 100. In some embodiments, optionally, the radial dimension of the rod part 310 is smaller than the radial dimension of the end face of the transmission part 320 close to the rod part 310, so as to form a step surface 330 for abutting against the end face of the tow bar body 100 away from the tray 200. When the tow bar head 300 is connected and installed with the tow bar body 100, the step surface 330 on the tow bar head 300 can abut against the end face of the tow bar body 100 away from the tray 200, so the step surface 330 can be used to limit the installation of the tow bar head 300. Furthermore, a shock-absorbing layer can be provided on the step surface 330 to play a shock-absorbing and buffering role between the tow bar head 300 and the tow bar body 100. For example, the shock-absorbing layer can be a sponge layer or the like.

[0054] Figure 6 A schematic diagram of the overall structure of a crucible shaft 20 in a single crystal furnace provided in one embodiment of the present application is shown.

[0055] Please combine Figures 3 to 5 Also see Figure 6 The embodiment of the present application also provides a single crystal furnace, which includes a furnace body and a crucible located in the furnace body. The single crystal furnace also includes a crucible support assembly 10 as described in any of the above embodiments and a crucible shaft 20 connected to a power source. The tray 200 of the crucible support assembly 10 is used to support the crucible. The drag rod head 300 of the crucible support assembly 10 is detachably connected to the crucible shaft 20. The crucible shaft 20 can drive the crucible support assembly 10 to rotate with the help of the power source.

[0056] Specifically, Figure 6 As shown, one end of the crucible shaft 20 is provided with a receiving groove 21 matching the transmission part 320 of the drag rod head 300. By setting the transmission part 320 of the drag rod head 300 in the receiving groove 21 of the crucible shaft 20, the drag rod head 300 can be detachably connected to the crucible shaft 20.

[0057] The single crystal furnace of the embodiment of the present application adopts the crucible support assembly 10 described in any of the above embodiments. A leak-proof ring 110 is provided on the drag rod body 100 of the crucible support assembly 10. During the use of the single crystal furnace, the silicon solution leaked from the crucible on the tray 200 can flow into the interior of the accommodating cavity 113 through the opening of the accommodating cavity 113 after flowing along the drag rod body 100 for a distance, and is blocked by the leak-proof bottom wall 111 and the leak-proof edge 112, and cannot continue to flow downward along the drag rod body 100 to thereby damage the lower shaft-related components.

[0058] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0059] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A crucible support assembly, characterized in that: The crucible support assembly comprises: Tow bar body; a tray, disposed at one end of the drag rod body, the tray being used to support the crucible; and A drag rod head, detachably connected to an end of the drag rod body away from the tray, the drag rod head is used to be detachably connected to the crucible shaft, and is configured to be driven to rotate by the crucible shaft; Wherein, the tow bar body is provided with a leak-proof ring, and the leak-proof ring comprises a leak-proof bottom wall provided on the tow bar body, and a leak-proof edge provided around the periphery of the leak-proof bottom wall; The leak-proof bottom wall and the leak-proof edge structure form a containing cavity for containing silicon liquid.

2. The crucible support assembly according to claim 1, characterized in that: The anti-leakage ring and the tow bar body are an integrated structure.

3. The crucible support assembly according to claim 1, characterized in that: The anti-leakage edge and the handle body are coaxially arranged.

4. The crucible support assembly according to claim 3, characterized in that: The height H of the anti-leakage edge along the axis direction of the tow bar body satisfies the following conditions: H ≥ 20 mm.

5. The crucible support assembly according to claim 3, characterized in that: The tray and the handle body are coaxially arranged, and the projection structure along the axis direction of the handle body is circular; The projection of the anti-leakage ring along the axis direction of the tow bar body is in a circular ring shape; Wherein, taking the axis of the handle body as a reference, the outer diameter of the projection of the anti-leakage ring along the axis of the handle body is smaller than the diameter of the projection of the tray along the axis of the handle body.

6. The crucible support assembly according to any one of claims 1 to 5, characterized in that: The tow bar head is threadedly connected to one end of the tow bar body away from the tray.

7. The crucible support assembly according to claim 6, characterized in that: The end of the tow bar body away from the tray is provided with a mounting hole, and the tow bar head comprises: A rod portion, wherein the outer wall of the rod portion is provided with an external thread adapted to the internal thread in the mounting hole; and a transmission part connected to one end of the rod part, the transmission part being used to be detachably connected to the crucible shaft and configured to be driven to rotate by the crucible shaft; Wherein, along the axial direction of the tow bar body, from one end of the transmission part close to the tow bar body to the other end far away from the tow bar body, the transmission part is constructed in a tapered pyramid shape.

8. The crucible support assembly according to claim 7, characterized in that: The rod part and the transmission part are configured to be coaxially arranged with the tow bar body; The projection structure of the transmission part along the axial direction of the tow bar body is an N-gon; wherein N is a natural number, and 3≤N≤8.

9. The crucible support assembly according to claim 7, characterized in that: The radial dimension of the rod portion is smaller than the radial dimension of the end surface of the transmission portion close to the rod portion, so as to form a step surface for abutting against the end surface of the towing rod body away from the tray; A shock-absorbing layer is arranged on the step surface.

10. A single crystal furnace, comprising a furnace body and a crucible located in the furnace body, characterized in that: The single crystal furnace also includes: The crucible support assembly according to any one of claims 1 to 9, wherein the tray is used to support the crucible; and A crucible shaft is connected to a power source, the drag rod head is detachably connected to the crucible shaft, and the crucible shaft can drive the crucible supporting assembly to rotate.

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