Wafer baking device
The wafer baking device addresses labor-intensive quartz tube transfer and alignment issues by allowing in-room loading and precise assembly, reducing manual handling and ensuring heating efficiency.
Patent Information
- Application Number
- CN202323550696.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-25
- Publication Date
- 2024-12-17
- Estimated Expiration
- 2033-12-25
AI Technical Summary
The transfer of heavy quartz tubes loaded with wafers requires multiple labor-intensive steps, increasing risk and labor hours, and setting a split-type baking device leads to potential matching errors affecting heating efficiency.
A wafer baking device with a base assembly and matching assembly, allowing the quartz tube to be loaded in the cleaning room and matched with the welding room assembly to form a baking chamber, using adjustable screws and rollers to ensure precise alignment without repeated lifting.
Reduces labor time and ensures accurate alignment, maintaining heating efficiency by minimizing manual handling and ensuring precise matching of components.
Smart Images
Figure CN222187558U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of baking equipment, in particular to a wafer baking device. Background Art
[0002] After the wafers are cleaned, they are transferred from the wafer cleaning room to the pipe welding room for baking and pipe welding. Since the quartz tube loaded with the wafers is very heavy, two people are required to lift and place the quartz tube in front and behind, which leads to more quartz tube transfer processes, high risk factors, and more labor hours. If the baking device is set as a split type, the quartz tube is first lifted and placed in a split of the baking device in the wafer cleaning room, and then the two splits are matched in the pipe welding room, but it is easy to cause a large matching error between the two splits, which will affect the heating effect of the baking device. Utility Model Content
[0003] The utility model aims to provide a wafer baking device, which can reduce the transfer process of the quartz tube loaded with the wafer and ensure the heating effect of the baking device.
[0004] In order to achieve the above-mentioned purpose, the utility model provides a wafer baking device, including a base assembly and a matching assembly, wherein the base assembly includes a first screw, a second screw, a transition piece, a third screw, a first support rod, a first roller, and a first adjustment plate, a second adjustment plate and a baking table assembly arranged in sequence from bottom to top, the upper end of the first support rod is connected to the first adjustment plate, the lower end of the first support rod is connected to the first roller, the first roller is provided with a locking device, the first screw is vertically arranged and threadedly connected to the first adjustment plate, the first screw abuts against the bottom surface of the second adjustment plate, the second screw is horizontally arranged and threadedly connected to the second adjustment plate, the second screw is rotatably connected to the transition piece, the transition piece is vertically slidably arranged on the first adjustment plate, and the first adjustment plate is provided with a first adjustment plate along the first adjustment plate. The third screw is arranged horizontally and threadedly connected to the baking table assembly, the third screw is perpendicular to the second screw, and the third screw is rotatably connected to the second adjusting plate, the second adjusting plate and the baking table assembly are respectively provided with a first matching portion and a second matching portion extending along the axial direction of the third screw, the first matching portion matches with the second matching portion, and a first groove is provided on the top surface of the baking table assembly; the matching assembly includes a cover assembly and a second supporting assembly, the bottom surface of the cover assembly is provided with a second groove, the second groove and the first groove can match to form a baking chamber for baking the quartz tube, and the second supporting assembly is connected to the bottom of the cover assembly.
[0005] Preferably, the baking table assembly includes a table body and a first heating shell, the second matching portion is arranged on the table body, a first mounting groove is opened on the top surface of the table body, the first heating shell is installed in the first mounting groove, the first groove is opened on the top surface of the first heating shell, and the third screw rod horizontally passes through the table body and is threadedly connected to the table body.
[0006] Preferably, the cover body assembly includes a top cover and a second heating shell, the bottom surface of the top cover is provided with a second mounting groove, the second heating shell is installed in the second mounting groove, the second groove is provided on the bottom surface of the second heating shell, and the second support assembly is connected to the bottom of the top cover.
[0007] Preferably, the first adjustment plate includes a first plate body and a first protrusion, the transition piece includes a transition ring and an insertion rod, the waist-shaped hole is opened in the first plate body, the first support rod is connected to the bottom of the first plate body, the first screw is threadedly connected to the first plate body, the first protrusion is connected to the side wall of the first plate body, the first protrusion is opened with a first limiting hole passing through from top to bottom, the insertion rod is slidably arranged in the first limiting hole, the upper end of the insertion rod is connected to the transition ring, and the second screw is penetrated through the transition ring and is rotatably connected to the transition ring.
[0008] Preferably, the second adjustment plate includes a second plate body and a connecting piece, the sliding column is arranged at the bottom of the second plate body, the first matching portion is arranged on the second plate body, the connecting piece is L-shaped, the first screw abuts the bottom surface of the second plate body, the second screw is threadedly connected to the second plate body, one end of the connecting piece is connected to the side wall of the second plate body, and the other end of the connecting piece is provided with a second limiting hole, and the third screw is passed through the second limiting hole and is rotatably connected to the connecting piece.
[0009] Preferably, the first roller is a universal wheel.
[0010] Preferably, the second supporting assembly includes a second support rod and a second roller, the second support rod is connected to the bottom of the cover assembly, and the second roller is installed at one end of the second support rod facing away from the cover assembly.
[0011] Preferably, the second roller is a universal wheel, and the second roller is provided with a locking device.
[0012] Preferably, a first control knob is disposed on the side wall of the platform, a first heating electric furnace wire is disposed on the inner wall of the first heating shell, and the first control knob is electrically connected to the first heating electric furnace wire.
[0013] Preferably, a second control knob is provided on the side wall of the top cover, a second heating electric furnace wire is provided on the inner wall of the second heating shell, and the second control knob is electrically connected to the second heating electric furnace wire.
[0014] The wafer baking device of the present invention has the following beneficial effects compared with the prior art:
[0015] By setting a base assembly and a matching assembly, after the base assembly is pushed into the wafer cleaning room, the staff can load the quartz tube into the first groove of the baking table assembly, and then push the base assembly into the welding pipe room to match with the matching assembly to form a baking device, reducing the number of times the quartz tube is lifted and placed and the labor consumed; after the base assembly is roughly pushed to the bottom of the matching assembly, the first roller is locked, and since the second screw and the third screw are both horizontally arranged and perpendicular to each other, the second screw and the third screw can be rotated to adjust the baking table assembly to move forward, backward, left and right so that the first groove is opposite to the second groove, and then the vertically arranged first screw is rotated. Since the first adjustment plate is also limited by the transition piece, the first adjustment plate will move along the first screw under the rotation of the first screw, so that the baking table assembly is lifted close to the cover assembly, and finally the first groove and the second groove are matched to form a baking chamber to heat the quartz tube. In the wafer baking device, the staff manually rotates the first screw, the second screw, and the third screw to adjust the first groove and the second groove to match, ensuring the accuracy of the baking device formed by the base assembly and the matching assembly, thereby ensuring the heating effect of the baking device. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 is a schematic diagram of a wafer baking device according to an embodiment of the utility model;
[0017] Figure 2 yes Figure 1 A schematic diagram of another direction of the wafer baking device;
[0018] In the figure, 1, base assembly; 11, first screw; 111, first handle; 12, second screw; 121, second handle; 13, transition piece; 131, transition ring; 132, plug rod; 14, third screw; 141, third handle; 15, first support rod; 16, first roller; 17, first adjustment plate; 171, waist-shaped hole; 172, first plate body; 173, first convex part; 18, second adjustment plate; 181, sliding column; 182, first Matching part; 183, second plate body; 184, connecting piece; 19, baking table assembly; 191, second matching part; 192, first groove; 193, table body; 194, first heating shell; 195, first control knob; 2, matching assembly; 21, cover body assembly; 211, second groove; 212, top cover; 213, second heating shell; 214, second control knob; 22, second supporting assembly; 221, second support rod; 222, second roller. DETAILED DESCRIPTION
[0019] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.
[0020] In the description of the present invention, it should be understood that the terms "upper", "lower", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0021] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features.
[0022] like Figure 1 and Figure 2As shown, a wafer baking device according to a preferred embodiment of the utility model comprises a base assembly 1 and a matching assembly 2. The base assembly 1 comprises a first screw 11, a second screw 12, a transition piece 13, a third screw 14, a first support rod 15, a first roller 16, and a first adjustment plate 17, a second adjustment plate 18 and a baking table assembly 19 arranged in sequence from bottom to top. The upper end of the first support rod 15 is connected to the first adjustment plate 17, and the lower end of the first support rod 15 is connected to the first roller 16. The first roller 16 is provided with a lock The first screw rod 11 is vertically arranged and threadedly connected to the first adjustment plate 17. The lower end of the first screw rod 11 is preferably provided with a first handle 111 to facilitate the rotation of the first screw rod 11. The first screw rod 11 abuts against the bottom surface of the second adjustment plate 18. The second screw rod 12 is horizontally arranged and threadedly connected to the second adjustment plate 18. The second screw rod 12 is rotatably connected to the transition piece 13. The transition piece 13 is vertically slidably arranged on the first adjustment plate 17. The first adjustment plate 17 is provided with a groove extending along the axial direction of the second screw rod 12. The bottom of the second adjustment plate 18 is provided with a sliding column 181 which is slidably arranged in the waist-shaped hole 171, the third screw 14 is horizontally arranged and threadedly connected to the baking table assembly 19, the third screw 14 is perpendicular to the second screw 12, and the third screw 14 is rotatably connected to the second adjustment plate 18, the second adjustment plate 18 and the baking table assembly 19 are respectively provided with a first matching portion 182 and a second matching portion 191 extending along the axial direction of the third screw 14, and the first matching portion 181 matches the second matching portion 191 The first matching portion 182 is preferably a long strip-shaped protrusion, and the second matching portion 191 is preferably a long strip-shaped groove corresponding to the shape of the protrusion. The top surface of the baking table assembly 19 is provided with a first groove 192; the matching assembly 2 includes a cover assembly 21 and a second support assembly 22, and the bottom surface of the cover assembly 21 is provided with a second groove 211. The second groove 211 and the first groove 192 can cooperate to form a baking chamber for baking the quartz tube, and the second support assembly 22 is connected to the bottom of the cover assembly 21.
[0023] Based on the wafer baking device of the above embodiment, by setting a base component 1 and a matching component 2, after the base component 1 is pushed into the wafer cleaning room, the staff can load the quartz tube into the first groove 192 of the baking table component 19, and then push the base component 1 to the welding pipe room to cooperate with the matching component 2 to form a baking device, thereby reducing the number of times the quartz tube is lifted and placed and the labor consumed; after the base component 1 is roughly pushed to the bottom of the matching component 2, the first roller 16 is locked, and since the second screw 12 and the third screw 14 are both horizontally arranged and perpendicular to each other, the baking table component 19 can be moved forward, backward, left and right by rotating the second screw 12 and the third screw 14 so that the first groove 192 is opposite to the second groove 211, and then the vertically arranged first screw 11 is rotated. Since the first adjustment plate 17 is also limited by the transition piece 13, the first adjustment plate 17 will move along the first screw 11 under the rotation of the first screw 11, so that the baking table component 19 is lifted close to the cover body component 21, and finally the first groove 192 and the second groove 211 are matched to form a baking chamber to heat the quartz tube. In this wafer baking device, the staff manually rotates the first screw 11, the second screw 12, and the third screw 14 to adjust the cooperation between the first groove 192 and the second groove 211, thereby ensuring the accuracy of the base component 1 and the matching component 2 to form the baking device, thereby ensuring the heating effect of the baking device.
[0024] Preferably, the baking table assembly 19 includes a table body 193 and a first heating shell 194, the second matching portion 191 is provided on the table body 193, the top surface of the table body 193 is provided with a first mounting groove, the first heating shell 194 is installed in the first mounting groove, the first groove 192 is provided on the top surface of the first heating shell 194, and the third screw 14 is horizontally passed through the table body 193 and is threadedly connected with the table body 193. By providing the first mounting groove in the table body 193 and arranging the first heating shell 194 in the first mounting groove, the table body 193 can wrap around a side of the first heating shell 194 away from the baking chamber, thereby ensuring the heating effect of the baking device when the base assembly 1 and the matching assembly 2 are matched. In addition, the end of the third screw 14 is preferably provided with a third handle 141 to facilitate the rotation of the third screw 14.
[0025] Preferably, the cover assembly 21 includes a top cover 212 and a second heating shell 213. The bottom surface of the top cover 212 is provided with a second mounting groove, the second heating shell 213 is installed in the second mounting groove, the second groove 211 is provided on the bottom surface of the second heating shell 213, and the second support assembly 22 is connected to the bottom of the top cover 212. By providing the second mounting groove in the top cover 212 and arranging the second heating shell 213 in the second mounting groove, the top cover 212 can wrap around a side of the second heating shell 213 away from the baking chamber, thereby ensuring the heating effect of the baking device when the base assembly 1 is matched with the matching assembly 2.
[0026] In some embodiments, the first adjustment plate 17 includes a first plate body 172 and a first protrusion 173, the transition piece 13 includes a transition ring 131 and an insertion rod 132, a waist-shaped hole 171 is opened in the first plate body 172, the first support rod 15 is connected to the bottom of the first plate body 172, the first screw 11 is threadedly connected to the first plate body 172, the first protrusion 173 is connected to the side wall of the first plate body 172, the first protrusion 173 is provided with a first limiting hole passing through from top to bottom, the insertion rod 132 is slidably arranged in the first limiting hole, the upper end of the insertion rod 132 is connected to the transition ring 131, the second screw 12 is penetrated through the transition ring 131 and is rotatably connected to the transition ring 131, and the second screw 12 is preferably rotatably connected to the transition ring 131 via a bearing. By setting a transition piece 13 formed by a transition ring 131 and an insert rod 132, the second screw rod 12 is connected to the first adjustment plate 17, that is, the second screw rod 12 can only rotate under the limitation of the transition ring 131 to move the second adjustment plate 18 forward and backward, and when the first adjustment plate 17 is raised and lowered by the first screw rod 11, the insert rod 132 can slide along the first limiting hole of the first protrusion 173 to maintain the indirect connection between the second screw rod 12 and the first adjustment plate 17, and the insert rod 132 can also limit the lifting and lowering of the first adjustment plate 17.
[0027] Preferably, the second adjustment plate 18 includes a second plate body 183 and a connecting member 184, the sliding column 181 is arranged at the bottom of the second plate body 183, the first matching portion 182 is arranged at the second plate body 183, the connecting member 184 is L-shaped, the first screw rod 11 abuts against the bottom surface of the second plate body 183, the second screw rod 12 is threadedly connected to the second plate body 183, the end of the second screw rod 12 is preferably installed with a second handle 121 to facilitate the rotation of the second handle 121, one end of the connecting member 184 is connected to the side wall of the second plate body 183, the other end of the connecting member 184 is provided with a second limiting hole, the third screw rod 14 is passed through the second limiting hole and is rotatably connected to the connecting member 184, and the third screw rod 14 is preferably rotatably connected to the connecting member 184 through a bearing. By providing the L-shaped connecting member 184, the second plate body 183 is rotatably connected to the third screw rod 14, so that the third screw rod 14 can only rotate, so that the baking table assembly 19 can move along the third screw rod 14.
[0028] Preferably, the first roller 16 is a universal wheel, so as to facilitate and flexibly push the base assembly 1.
[0029] Preferably, the second support assembly 22 includes a second support rod 221 and a second roller 222, the second support rod 221 is connected to the bottom of the cover assembly 21, and the second roller 222 is installed at one end of the second support rod 221 away from the cover assembly 21, so that the matching assembly 2 can also move to match the base assembly 1.
[0030] Furthermore, the second roller 222 is a universal wheel, and the second roller 222 is provided with a locking device (not shown).
[0031] Preferably, a first control knob 195 is provided on the side wall of the platform 193, a first heating electric furnace wire is provided on the inner wall of the first heating shell 194, and the first control knob 195 is electrically connected to the first heating electric furnace wire. By turning the first control knob 195, the first heating electric furnace wire can start heating, adjust the heating power or stop heating.
[0032] Preferably, a second control knob 214 is provided on the side wall of the top cover 212, a second heating electric furnace wire is provided on the inner wall of the second heating shell 213, and the second control knob 214 is electrically connected to the second heating electric furnace wire. By turning the second control knob 214, the second heating electric furnace wire can start heating, adjust the heating power or stop heating.
[0033] In summary, the embodiment of the utility model provides a wafer baking device, whose base assembly can be first pushed to the wafer cleaning room to load the quartz tube, and then pushed to the welding tube room, and after being roughly pushed to the bottom of the matching assembly, the baking table assembly is horizontally adjusted by the second screw and the third screw, so that the first groove is directly opposite to the second groove, and then the first screw is rotated to lift the baking table assembly, so that the first groove and the second groove cooperate to form a baking chamber, and the quartz tube containing the wafer is baked. The wafer baking device does not require the staff to lift and place the quartz tube multiple times, which reduces the labor time consumed, and the relative position of the baking table assembly and the cover assembly can be finely adjusted to ensure the heating effect of the wafer baking device.
[0034] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.
Claims
1. A wafer baking device, characterized in that: The invention comprises a base assembly and a matching assembly, wherein the base assembly comprises a first screw, a second screw, a transition piece, a third screw, a first support rod, a first roller, and a first adjustment plate, a second adjustment plate and a baking table assembly arranged in sequence from bottom to top, wherein the upper end of the first support rod is connected to the first adjustment plate, the lower end of the first support rod is connected to the first roller, the first roller is provided with a locking device, the first screw is vertically arranged and threadedly connected to the first adjustment plate, the first screw abuts against the bottom surface of the second adjustment plate, the second screw is horizontally arranged and threadedly connected to the second adjustment plate, the second screw is rotatably connected to the transition piece, the transition piece is vertically slidably arranged on the first adjustment plate, and the first adjustment plate is provided with a waist-shaped hole extending along the axial direction of the second screw. The bottom of the second adjustment plate is provided with a sliding column slidably arranged in the waist-shaped hole, the third screw is horizontally arranged and threadedly connected to the baking table assembly, the third screw is perpendicular to the second screw, and the third screw is rotatably connected to the second adjustment plate, the second adjustment plate and the baking table assembly are respectively provided with a first matching portion and a second matching portion extending along the axial direction of the third screw, the first matching portion matches with the second matching portion, and a first groove is provided on the top surface of the baking table assembly; the matching assembly includes a cover body assembly and a second support assembly, the bottom surface of the cover body assembly is provided with a second groove, the second groove and the first groove can cooperate to form a baking chamber for baking the quartz tube, and the second support assembly is connected to the bottom of the cover body assembly.
2. The wafer baking device according to claim 1, characterized in that: The baking table assembly includes a table body and a first heating shell, the second matching portion is arranged on the table body, the top surface of the table body is provided with a first mounting groove, the first heating shell is installed in the first mounting groove, the first groove is provided on the top surface of the first heating shell, and the third screw rod horizontally penetrates the table body and is threadedly connected to the table body.
3. The wafer baking device according to claim 1, characterized in that: The cover assembly includes a top cover and a second heating shell, the bottom surface of the top cover is provided with a second mounting groove, the second heating shell is installed in the second mounting groove, the second groove is provided on the bottom surface of the second heating shell, and the second supporting assembly is connected to the bottom of the top cover.
4. The wafer baking device according to claim 1, characterized in that: The first adjustment plate includes a first plate body and a first convex portion, the transition piece includes a transition ring and an insertion rod, the waist-shaped hole is opened in the first plate body, the first support rod is connected to the bottom of the first plate body, the first screw is threadedly connected to the first plate body, the first convex portion is connected to the side wall of the first plate body, the first convex portion is opened with a first limiting hole penetrating up and down, the insertion rod is slidably arranged in the first limiting hole, the upper end of the insertion rod is connected to the transition ring, and the second screw is penetrated through the transition ring and is rotatably connected to the transition ring.
5. The wafer baking device according to claim 1, characterized in that: The second adjustment plate includes a second plate body and a connecting piece, the sliding column is arranged at the bottom of the second plate body, the first matching portion is arranged on the second plate body, the connecting piece is L-shaped, the first screw abuts against the bottom surface of the second plate body, the second screw is threadedly connected to the second plate body, one end of the connecting piece is connected to the side wall of the second plate body, and the other end of the connecting piece is provided with a second limiting hole, and the third screw is passed through the second limiting hole and is rotatably connected to the connecting piece.
6. The wafer baking device according to claim 1, characterized in that: The first roller is a universal wheel.
7. The wafer baking device according to claim 1, characterized in that: The second supporting assembly includes a second support rod and a second roller, wherein the second support rod is connected to the bottom of the cover assembly, and the second roller is installed at one end of the second support rod away from the cover assembly.
8. The wafer baking device according to claim 7, characterized in that: The second roller is a universal wheel and is provided with a locking device.
9. The wafer baking device according to claim 2, characterized in that: A first control knob is disposed on the side wall of the platform, a first heating electric furnace wire is disposed on the inner wall of the first heating shell, and the first control knob is electrically connected to the first heating electric furnace wire.
10. The wafer baking device according to claim 3, characterized in that: A second control knob is disposed on the side wall of the top cover, a second heating electric furnace wire is disposed on the inner wall of the second heating shell, and the second control knob is electrically connected to the second heating electric furnace wire.