CVD (Chemical Vapor Deposition) kiln discharge hole bracket

Abstract

The embodiment of the utility model discloses a CVD (Chemical Vapor Deposition) kiln discharge port bracket, which relates to the field of CVD kiln equipment, is used for supporting a CVD kiln discharge port sealing device, and comprises a bracket base and a bracket assembly, and a positioning seat is arranged on the bracket base; the support assembly is installed on the support base through the positioning seat, the support assembly comprises the supporting piece, the supporting piece is used for supporting the discharging port sealing device, the discharging port sealing device can be stably and safely supported by arranging the support assembly and the supporting piece, and the discharging port of the CVD kiln can be conveniently sealed by the discharging port sealing device.

Description

Technical Field

[0001] The present application relates to the field of CVD kiln equipment, and in particular to a CVD kiln discharge port bracket. Background Art

[0002] A CVD (Chemical Vapor Deposition) furnace is a device used in the process of depositing thin films on solid surfaces. In the CVD process, a solid film is deposited on a solid surface by delivering gaseous precursor molecules into a reaction chamber. These precursor molecules decompose under high temperature conditions, producing deposits and releasing byproduct gases. CVD furnaces are widely used in many industries, including semiconductor manufacturing, coating technology, and nanomaterial preparation. These furnaces usually require strict temperature control and gas flow control to ensure that the deposited film has the desired properties.

[0003] The existing CVD furnace discharge port sealing device is a cylindrical solid steel material, weighing more than 50KG. When unloading, two workers are required to dismantle and install it on the escalator. During the dismantling and installation process, one worker needs to hug the cylindrical sealing device for support, while the other worker dismantles and installs the bolts. There are great safety hazards in this process.

[0004] Therefore, how to achieve stable and safe installation of the discharge port sealing device is an important technical problem that urgently needs to be solved. Utility Model Content

[0005] In order to solve the problems existing in the prior art, the utility model provides a CVD kiln discharge port bracket, which can stably and safely support the discharge port sealing device by providing a bracket assembly and a support member, so that the discharge port sealing device can seal the CVD kiln discharge port.

[0006] The technical solution adopted by the utility model to solve the above technical problems is as follows:

[0007] The present application provides a CVD kiln discharge port support, which is used to support a CVD kiln discharge port sealing device, including:

[0008] A bracket base, wherein a positioning seat is provided on the bracket base;

[0009] A bracket assembly is installed on the bracket base through the positioning seat, and the bracket assembly includes a support member, and the support member is used to support the discharge port sealing device.

[0010] Optionally, in some embodiments of the present application, the bracket assembly also includes a support rod, one end of the support rod is installed on the bracket base through the positioning seat, and the other end of the support rod is installed with a lifting device, the lifting device is movably connected to the support rod so that the lifting device can be lifted and lowered on the support rod, and the support member is installed on the lifting device so that the support member can move on the support rod.

[0011] Optionally, in some embodiments of the present application, the lifting device includes a threaded rod, a first threaded hole is opened on the support rod at a position corresponding to the threaded rod, and the threaded rod is threadedly connected to the first threaded hole so that the threaded rod is connected to the support rod.

[0012] Optionally, in some embodiments of the present application, the support member includes:

[0013] A fixing seat, wherein a second threaded hole is formed on the fixing seat at a position corresponding to the threaded rod, and an end of the threaded rod away from the first threaded hole is sleeved in the second threaded hole;

[0014] A semicircular support ring is arranged on the fixing seat, and the semicircular support ring is used to support the discharge port sealing device.

[0015] Optionally, in some embodiments of the present application, a fixing piece is fixed on the semicircular support ring, and the discharge port sealing device is fixed to the semicircular support ring via the fixing piece.

[0016] Optionally, in some embodiments of the present application, a plurality of the bracket assemblies are provided, and the plurality of the bracket assemblies are linearly arranged on the bracket base.

[0017] Compared with the prior art, the beneficial effects of the present invention are:

[0018] The utility model can support the discharge port sealing device by providing a support rod, a threaded rod and a support member that cooperate with each other. Specifically, the support member is provided with a semicircular support ring. When the discharge port sealing device is assembled on the discharge port, the support member is adjusted by rotating the threaded rod, so that the threaded rod pushes its support member to support the discharge port sealing device, thereby preventing the discharge port sealing device from being inadequately sealed due to the inclination of the discharge port sealing device. The adjustment of the threaded rod can move the support member to the position where support is required, thereby avoiding unexpected situations when the discharge port sealing device is installed, and also facilitating the stable sealing installation of the discharge port sealing device. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0020] Figure 1 A schematic diagram of the overall structure of the CVD kiln, the discharge port sealing device and the CVD kiln discharge port bracket assembly provided in the embodiment of the present application;

[0021] Figure 2 for Figure 1 The enlarged structural diagram at A in the middle;

[0022] Figure 3 A schematic diagram of the overall structure of a CVD kiln discharge port support provided in an embodiment of the present application;

[0023] Figure 4 for Figure 3 Enlarged view of point B in the middle;

[0024] Figure 5 A schematic diagram of the overall structure of the support member provided in an embodiment of the present application.

[0025] Description of reference numerals:

[0026] 100, bracket base; 110, positioning seat; 120, rotating wheel; 200, bracket assembly; 210, support member; 211, fixing seat; 212, semicircular supporting ring; 213, fixing member; 214, second threaded hole; 220, supporting rod; 221, first threaded hole; 230, lifting device; 231, threaded rod; 300, discharge port sealing device; 400, CVD kiln; 410, discharge port. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments of the present application, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the protection scope of the present application. It is understood that the drawings are only provided for reference and illustration, and are not used to limit the present application. The connection relationship shown in the drawings is only for the convenience of clear description and does not limit the connection method.

[0028] Specifically, Figure 1As shown, an embodiment of the present application provides a CVD kiln discharge port bracket, which is used for auxiliary support during the sealing process of the discharge port of the CVD kiln 400, wherein the CVD kiln 400 is a chemical vapor deposition (Chemical Vapor Deposition) kiln, which utilizes chemical vapor deposition reaction to prepare materials or perform surface treatment. The process is usually carried out under high temperature and vacuum or specific atmosphere conditions, so that the chemical components in the gas chemically react and deposit on the surface of the solid substrate to form the desired coating or material.

[0029] During the use of the CVD kiln 400, it is necessary to seal the discharge port 410 of the CVD kiln 400. The sealing process needs to be performed by the discharge port sealing device 300. The discharge port sealing device 300 seals the discharge port 410 to prevent external air from entering the interior of the kiln, thereby facilitating the reaction inside the CVD kiln 400.

[0030] Among them, due to the large size of the CVD kiln 400 itself, the position of its discharge port 410 is relatively high. At the same time, the weight of the discharge port sealing device itself is relatively heavy, about 50kg, which makes it difficult to align its position when installing it on the discharge port 410, and puts a huge test on the physical requirements and installation requirements of the workers. To facilitate the sealing installation process, the embodiment of the present application is provided with a bracket base 100. The top of the bracket base 100 is a flat structure, which is convenient for the installation of the bracket assembly 200. The lower part of the bracket base 100 is provided with four rotating wheels 120, which is convenient for the bracket base 100 to correspond to the bottom position of the discharge port sealing device 300.

[0031] A plurality of positioning seats 110 are arranged on the support base 100, and the positioning seat 110 is designed as a groove. The support assembly 200 can be installed on the support base 100 through its positioning seat 110. The support assembly 200 includes a support rod 220, and the support rod 220 is installed on the support base 100 through the positioning seat 110. The installation direction of the support rod 220 is toward its vertical direction, which is convenient for the installation of the position on the support rod 220 corresponding to its discharge port 410, and convenient for fixing its discharge port sealing device 300.

[0032] In the embodiment of the present application, a plurality of positioning seats 110 are linearly arranged on the support base 100 , and the support rod 220 can be installed on one of the positioning seats 110 , and the installation position can be set according to the corresponding position of the discharge port sealing device 300 .

[0033] Furthermore, a first threaded hole 221 is provided on the support rod 220 at one end away from its bracket base 100, and the first threaded hole 221 is used to install a threaded rod 231. The threaded rod 231 is threadedly connected in the first threaded hole 221, so that the threaded rod 231 can move linearly in the extension direction of the support rod 220, wherein the length of the threaded rod 231 is less than the length of the support rod 220, and a fixing seat 211 is sleeved on the end of the threaded rod 231 away from the support rod 220, and a second threaded hole 214 is provided on the fixing seat 211 at a position corresponding to the threaded rod 231, and the second threaded hole 214 is threadedly connected to the threaded rod 231, so that the fixing seat 211 is installed on the threaded rod 231.

[0034] In the embodiment of the present application, the threaded rod 231 is a lifting device 230 .

[0035] The fixed seat 211 can be moved in the up and down directions by being connected to the threaded rod 231 to adjust the height of the semicircular support ring 212 on the fixed seat 211, wherein the semicircular support ring 212 is fixedly installed on its fixed seat 211, and the semicircular fixed ring directly supports the discharge port sealing device 300, and the radius of the semicircular support ring 212 is greater than or equal to the radius of the discharge port sealing device 300. In the present application, it is preferred that the radius of the semicircular support ring 212 is equal to the radius of the discharge port sealing device 300.

[0036] When it is necessary to fix the discharge port sealing device 300, the semicircular fixing ring needs to be placed below the discharge port sealing device 300 by adjusting the threaded rod 231 and moving the bracket base 100. At this time, the threaded rod 231 is adjusted again, and the threaded rod 231 is raised on the support 210 so that the semicircular fixing ring is in contact with the discharge port sealing device 300 until the discharge port sealing device 300 can be completely placed on the semicircular support ring 212 and the discharge port sealing device 300 can be set corresponding to the discharge port 410 of the kiln, thereby facilitating the installation of the discharge port sealing device 300.

[0037] In the above process, a fixing part 213 is also fixedly connected to the semicircular support ring 212. When the discharge port sealing device 300 is placed on the semicircular support ring 212, the fixing part 213 is sleeved on the outer ring of the discharge port sealing device 300, and one section of the fixing part 213 is fixedly connected to a section of the semicircular support ring 212, and the other end of the fixing part 213 bypasses the discharge port sealing device 300 and is connected to the other end of the semicircular support ring 212, so as to facilitate the fixing of the discharge port sealing device 300.

[0038] Among them, further, in the embodiment of the present application, the fixing member 213 is configured as an iron chain, which can facilitate the fixing of the discharge port sealing device 300.

[0039] In the above process, in order to facilitate the installation process of the discharge port sealing device 300, in the embodiment of the present application, multiple bracket assemblies 200 are provided, preferably two, wherein the two bracket assemblies 200 are installed on the bracket base 100 through the positioning seat 110 in the front and back, and the two bracket assemblies 200 are provided with a semicircular support ring 212, so that when the discharge port sealing device 300 is installed, the discharge port sealing device 300 can be supported by the two bracket assemblies 200 to maintain the stability of the installation of the discharge port sealing device 300.

[0040] The above embodiments are only used to illustrate the technical method of the utility model rather than to limit it. Although the utility model is described in detail with reference to the preferred embodiments, ordinary technicians in the field should understand that the technical method of the utility model can be modified or replaced by equivalents without departing from the spirit and scope of the technical method of the utility model.

Claims

1. A CVD kiln discharge port support, used to support a CVD kiln discharge port sealing device, characterized in that: include: A bracket base, wherein a positioning seat is provided on the bracket base; A bracket assembly is installed on the bracket base through the positioning seat, and the bracket assembly includes a support member, and the support member is used to support the discharge port sealing device.

2. The CVD kiln discharge port support according to claim 1, characterized in that: The bracket assembly also includes a support rod, one end of which is mounted on the bracket base through the positioning seat, and the other end of the support rod is equipped with a lifting device, the lifting device is movably connected to the support rod so that the lifting device can be lifted and lowered on the support rod, and the support member is mounted on the lifting device so that the support member can move on the support rod.

3. The CVD kiln discharge port support according to claim 2, characterized in that: The lifting device comprises a threaded rod, a first threaded hole is provided on the support rod at a position corresponding to the threaded rod, and the threaded rod is threadedly connected to the first threaded hole so that the threaded rod is connected to the support rod.

4. The CVD kiln discharge port support according to claim 3, characterized in that: The support member comprises: A fixing seat, wherein a second threaded hole is formed on the fixing seat at a position corresponding to the threaded rod, and an end of the threaded rod away from the first threaded hole is sleeved in the second threaded hole; A semicircular support ring is arranged on the fixing seat, and the semicircular support ring is used to support the discharge port sealing device.

5. The CVD kiln discharge port support according to claim 4, characterized in that: A fixing piece is fixed on the semicircular support ring, and the discharge port sealing device is fixed to the semicircular support ring through the fixing piece.

6. The CVD kiln discharge port support according to claim 1, characterized in that: The support assembly is provided in plurality, and the plurality of support assemblies are linearly arranged on the support base.

Images