Image acquisition equipment for wire duct and wire net

By designing the image acquisition equipment of the wire trough network, using multi-angle lighting and translation platform technology, the problems of low accuracy and limited range of existing diamond line detection methods are solved, and more efficient and accurate diamond line detection is achieved. Stable operation under polluted environment.

CN222189137UActive Publication Date: 2024-12-17SHANGHAI JIAOTONG UNIV
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Patent Information

Application Number
CN202420584513.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-03-25
Publication Date
2024-12-17
Estimated Expiration
2034-03-25

AI Technical Summary

Technical Problem

The existing diamond line detection methods rely on manual operations, and there are problems of detection errors and low accuracy. The traditional methods are carried out in a single lighting environment, making it difficult to fully present diamond line details, and the detection range is limited.

Method used

An image acquisition device for a wire trough network is designed, including an integrated fuselage, a magnetic fixing module, a translation platform, a sealed transmission module, an optical imaging module, an image processing module and a multi-angle lighting module, through the translation platform and a multi-angle The lighting module improves detection range and accuracy, the magnetic fixing module reduces the impact of machine vibration, and seals the transmission module to prevent liquid and dust from entering.

Benefits of technology

It improves the efficiency and accuracy of diamond wire detection, expands the detection range, reduces detection errors, and operates stably under contaminated conditions.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to an image acquisition device for a wire duct and a wire net, which comprises an integrated machine body, a magnetic attraction fixing module, a translation platform, a sealed transmission module, an optical imaging module, an image processing module and a multi-angle illumination module, and is characterized in that the magnetic attraction fixing module is fixed on one side of the integrated machine body; the translation platform is slidably connected to the top of the integrated machine body through the sealing transmission module, the optical imaging module and the image processing module are both installed on the translation platform, the translation platform and the integrated machine body are both provided with light holes for the optical imaging module to collect images, and the bottom of the integrated machine body is provided with an image collection cavity. The multi-angle illumination module is mounted on one side of the image acquisition cavity; the multi-angle illumination module comprises a low-position tangential illumination light source located on one side of the end face of the bottom of the integrated machine body and a high-position lateral illumination light source located above the low-position tangential illumination light source. Compared with the prior art, the image acquisition device has the advantages that the image acquisition of the wire duct and the wire net can be realized quickly and accurately in a wide coverage range, and the like.
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Description

Technical Field

[0001] The utility model relates to the field of photovoltaic silicon wafer production equipment, in particular to an image acquisition device for a wire trough wire network. Background Art

[0002] The production of silicon wafers mainly relies on diamond wire cutting technology, which uses diamond wire to cut silicon rods at high speed to produce thin silicon wafers. The arrangement and tension control of the diamond wire are crucial to the stability and cutting quality of the cutting process.

[0003] However, the existing diamond wire detection methods mainly rely on manual operation, including using a mobile phone or microscope to shoot the diamond wire grooves and wire nets on the main roller, and then manually marking and counting them after magnification. However, given that the size of the diamond wire and its grooves is extremely small (only tens of microns) and densely arranged, the working conditions inside the cutting machine are poor, and there are interferences such as mortar liquid and mortar pipes, manual shooting is difficult and counting accuracy is limited, which can easily lead to detection errors.

[0004] In addition, traditional manual inspection is usually carried out under a single lighting environment, which limits the comprehensive presentation of the details of the diamond wire, thereby increasing the possibility of false detection and missed detection. At the same time, due to the inherent limitations of the imaging field of mobile phones and microscopes, these traditional inspection methods are often only applicable to a smaller range of inspections and cannot cover a wider inspection area. Utility Model Content

[0005] The purpose of the utility model is to provide an image acquisition device for a wire trough wire network in order to overcome the defects of the prior art.

[0006] The purpose of the utility model can be achieved through the following technical solutions:

[0007] An image acquisition device for a cable trough and cable network, comprising an integrated body, a magnetic fixing module, a translation stage, a sealed transmission module, an optical imaging module, an image processing module and a multi-angle lighting module, wherein the magnetic fixing module is fixed to one side of the integrated body, the translation stage is slidably connected to the top of the integrated body through the sealed transmission module, the optical imaging module and the image processing module are both mounted on the translation stage, the translation stage and the integrated body are respectively provided with a translation stage light-transmitting hole and an integrated body light-transmitting hole for the optical imaging module to perform image acquisition, an image acquisition cavity is provided at the bottom of the integrated body, and the multi-angle lighting module is mounted on one side of the image acquisition cavity.

[0008] Furthermore, the multi-angle lighting module includes a low-position tangential lighting light source located at one side of the bottom end surface of the integrated fuselage and a high-position lateral lighting light source located above the low-position tangential lighting light source.

[0009] Furthermore, a positioning plate is provided on the bottom end surface of the integrated body.

[0010] Furthermore, the magnetic fixing module includes one or more parallel magnets for magnetically fixing on a vertical shell on one side of the surface of the wire trough wire network to be detected.

[0011] Furthermore, the sealed transmission module includes a magnet block, a magnetic sheet, a slider, a pressure plate, a fixed plate, a drive motor and a lead screw, wherein the drive motor and the lead screw are both installed in an integrated body, the output end of the drive motor is connected to the lead screw, the bottom of the slider is transmission-connected to the lead screw, and the top is connected to the translation table; the magnet block is embedded in the top of the integrated body, and the two ends of the magnetic sheet are fixed to the top of the integrated body through a fixed plate and are located above the magnet block; the pressure plate is fixed to the two ends of the slider and forms gaps with the two ends of the slider in the moving direction, and the magnetic sheet passes through the gap between the slider and the pressure plate.

[0012] Furthermore, the bottom of the slider is raised and connected to the lead screw; the middle of the top is raised, and blocks are provided on both sides. There are multiple pressure plates, which are respectively connected to the blocks on both sides of the slider, and form a gap between the raised part of the top of the slider.

[0013] Furthermore, the sealed transmission module also includes a sealing gasket, which is located between the magnet block and the magnetic sheet, and has two ends fixed by the fixing plate.

[0014] Furthermore, the light-transmitting hole of the integrated body is in the shape of an elongated strip and matches the moving stroke of the translation stage.

[0015] Furthermore, both sides of the top of the integrated body are provided with long rails, and both sides of the bottom of the translation platform are provided with sliding blocks that match the corresponding guide rails.

[0016] Furthermore, the sliding direction of the translation platform is parallel to the end surface direction of the wire trough and wire mesh equipment to be detected.

[0017] Furthermore, the image acquisition device also includes a controller, which is respectively connected to the sealed transmission module, the optical imaging module, the image processing module and the multi-angle lighting module, and the controller is installed in the integrated body.

[0018] Compared with the prior art, the utility model has the following advantages:

[0019] (1) The utility model provides a translation stage that can slide along the direction of the end face to be detected, thereby driving the optical imaging module to slide. During the image acquisition process, the imaging area can be changed, and finally the diamond wire images for different detection areas are obtained, thereby increasing the detection range.

[0020] (2) The utility model provides a multi-angle lighting module including a low-position tangential lighting light source and a high-position lateral lighting light source, wherein the high-position lateral lighting light source is located obliquely above the end face to be detected, thereby avoiding shadow obstruction caused by the undulations in the end face morphology to be detected, which is beneficial to extracting global key information; the low-position tangential lighting light source is located on one side of the end face to be detected and close to the end face to be detected, thereby utilizing the shadows caused by the undulations in the end face morphology to be detected, which is beneficial to amplifying detail information and improving the efficiency and accuracy of diamond wire detection.

[0021] (3) The utility model fixes the image acquisition device to the silicon wafer cutting machine platform through a magnetic fixing module and uses the lower end surface of the positioning plate for positioning, thereby reducing the impact of machine platform vibration and avoiding damage to the wire network during the detection process.

[0022] (4) The utility model uses the structure of the magnet block, slider, pressure plate, sealing gasket and magnetic sheet to keep the sliding area of ​​the slider in a certain sealing state while the driving motor and the lead screw drive the slider to slide, thereby preventing liquid or flying dust on the other side of the slider from entering the electronic working space inside the device, playing a role in preventing liquid splashing and dust, and helping to improve the operating stability of the detection equipment under polluted conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a side schematic diagram of an image acquisition device for a wire trough wire network provided in an embodiment of the utility model;

[0024] Figure 2 A schematic diagram of the three-dimensional structure of an image acquisition device for a wire trough and wire network provided in an embodiment of the utility model;

[0025] Figure 3 A schematic diagram of the internal structure of an integrated body of an image acquisition device for a wire trough and wire network provided in an embodiment of the utility model;

[0026] Figure 4 A schematic diagram of the internal installation state of a multi-angle lighting module of an image acquisition device for a wire trough wire network provided in an embodiment of the utility model;

[0027] Figure 5 It is a schematic diagram of the overall structure of a sealed transmission module of an image acquisition device for a wire trough wire network provided in an embodiment of the utility model;

[0028] Figure 6 This is a schematic diagram of the installation state of a slider of a sealed transmission module provided in an embodiment of the utility model;

[0029] Figure 7 A schematic diagram of the gap between a slider and a pressure plate of a sealed transmission module provided in an embodiment of the utility model;

[0030] In the figure, 1. integrated body, 101. positioning plate, 102. light transmission hole of integrated body, 103. guide rail, 2. magnetic fixing module, 3. translation stage, 4. sealing transmission module, 401. magnet block, 402. sealing gasket, 403. slider, 404. pressure plate, 405. magnetic sheet, 406. fixing plate, 407. gap, 5. optical imaging module, 6. image processing module, 7. multi-angle lighting module, 701. low-position tangential lighting source, 702. high-position lateral lighting source, 8. driving motor, 9. screw. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0032] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0034] In the description of the present utility model, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are the directions or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present utility model.

[0035] It should be noted that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0036] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0037] Example 1

[0038] like Figure 1 and Figure 2 As shown, this embodiment provides an image acquisition device for a wire trough and wire network, comprising an integrated body 1, a magnetic fixing module 2, a translation stage 3, a sealed transmission module 4, an optical imaging module 5, an image processing module 6 and a multi-angle lighting module 7, wherein the magnetic fixing module 2 is fixed to one side of the integrated body 1, the translation stage 3 is slidably connected to the top of the integrated body 1 through the sealed transmission module 4, the sliding direction of the translation stage 3 is parallel to the end face direction of the wire trough and wire network device to be detected, the optical imaging module 5 and the image processing module 6 are both installed on the translation stage 3, the translation stage 3 and the integrated body 1 are respectively provided with a translation stage light transmission hole 301 and an integrated body light transmission hole 102 for the optical imaging module 5 to perform image acquisition, an image acquisition cavity is provided at the bottom of the integrated body 1, and the multi-angle lighting module 7 is installed on one side of the image acquisition cavity;

[0039] This solution provides a translation stage 3 that can slide along the end face to be detected, driving the optical imaging module 5 to slide. During the image acquisition process, the imaging area can be changed, and finally diamond wire images for different detection areas are obtained, thereby increasing the detection range.

[0040] like Figure 3 and Figure 4 As shown, the multi-angle lighting module 7 includes a low-position tangential lighting light source 701 located at one side of the bottom end surface of the integrated body 1 and a high-position lateral lighting light source 702 located above the low-position tangential lighting light source 701 .

[0041] Optionally, the low-position tangential illumination light source 701 provides a long strip of illumination light source and is located at the bottom of one side of the image acquisition cavity. The above light source can be provided by multiple illumination lamps located on the same horizontal line; the high-position lateral illumination light source 702 can be provided with one or more illumination lamps.

[0042] The utility model sets a multi-angle lighting module 7 including a low-position tangential lighting light source and a high-position lateral lighting light source, wherein the high-position lateral lighting light source 702 is located obliquely above the end face to be detected, which can avoid shadow obstruction caused by the undulations in the morphology of the end face to be detected, and is conducive to extracting global key information; the low-position tangential lighting light source 701 is located on one side of the end face to be detected and close to the end face to be detected, and can utilize the shadows caused by the undulations in the morphology of the end face to be detected, which is conducive to magnifying detail information and improving the efficiency and accuracy of diamond wire detection.

[0043] As a preferred embodiment, in order to avoid damage to the end face of the wire trough and wire network to be inspected, a positioning plate 101 is provided on the bottom end face of the integrated body 1, and the image acquisition device is fixed to the silicon wafer cutting machine platform through a magnetic fixing module 2, thereby reducing the impact of machine vibration and avoiding damage to the wire network during the inspection process.

[0044] The positioning plate 101 is a flat plate structure, which is used for positioning by fitting against the end face to be detected. It can be made of any material that can form a fixed plane, preferably a vibration-isolating and soft material, such as a polyurethane coated board, which does not damage the end face to be detected.

[0045] The magnetic fixing module 2 includes one or more parallel magnets, which are used to be magnetically fixed on a vertical housing on one side of the surface of the wire slot wire network to be detected, and the multiple magnets are used to realize reliable fixation of the entire image acquisition device. The magnet can be a permanent magnet or a non-permanent magnet, such as an electromagnet.

[0046] Preferably, Figure 5 , Figure 6 and Figure 7 As shown, the sealed transmission module 4 includes a magnet block 401, a magnetic sheet 405, a slider 403, a pressure plate 404, a fixing plate 406, a drive motor 8 and a lead screw 9. The drive motor 8 and the lead screw 9 are both installed in the integrated body 1. The output end of the drive motor 8 is connected to the lead screw 9. The bottom of the slider 403 is connected to the lead screw 9 for transmission, and the top is connected to the translation stage 3. The magnet block 401 is embedded in the top of the integrated body 1. The two ends of the magnetic sheet 405 are fixed to the top of the integrated body 1 through the fixing plate 406 and are located above the magnet block 401. The pressure plate 404 is fixed to the two ends of the slider 403 and forms gaps with the two ends of the slider 403 in the moving direction. The magnetic sheet 405 passes through the gap 407 between the slider 403 and the pressure plate 404. Figure 7 shown.

[0047] Transmission principle: the magnetic sheet 405 is attracted by the magnet block 401 and remains fixed on the magnet block 401. The lead screw 9 is driven by the driving motor 8 to rotate. The slider 403 is fixed by the translation stage 3 and realizes translational movement along the magnetic sheet 405 under the transmission of the lead screw 9.

[0048] During the movement, due to the continuous magnetic force between the magnetic sheet 405 and the magnet block 401, the slider 403 can be continuously kept in a certain sealing state, preventing the liquid or flying dust on the other side of the slider 403 from entering the electronic working space inside the device, playing a role in preventing liquid splashing and dust, which is beneficial to improving the operating stability of the detection equipment under polluted conditions.

[0049] In this embodiment, the bottom of the slider 403 is raised and connected to the screw 9; the middle of the top is raised, and blocks are provided on both sides. There are multiple pressure plates 404, which are respectively connected to the blocks on both sides of the slider 403, and form a gap between the raised part of the top of the slider 403.

[0050] Preferably, the sealed transmission module 4 further comprises a sealing gasket 402 , which is located between the magnet block 401 and the magnetic sheet 405 , and has two ends fixed by fixing plates 406 , so as to further reduce the gap between the magnetic sheet 405 and the magnet block 401 .

[0051] The magnet block 401 and the sealing pad 402 are both located at the edge of the moving area of ​​the slider 403, and a hollow space is formed in the middle for the slider 403 to slide.

[0052] Optionally, the light-transmitting hole 102 of the integrated body is in a long strip shape and matches the moving stroke of the translation stage 3 .

[0053] Long rails 103 are provided on both sides of the top of the integrated body 1, and sliding blocks matching the corresponding rails 103 are provided on both sides of the bottom of the translation platform 3 to achieve stable sliding.

[0054] Optionally, the image acquisition device also includes a controller, which is respectively connected to the sealed transmission module 4, the optical imaging module 5, the image processing module 6 and the multi-angle lighting module 7. The controller is installed in the integrated body 1 and can realize drive control of the above modules, thereby realizing image acquisition.

[0055] The preferred specific embodiments of the utility model are described in detail above. It should be understood that ordinary technicians in this field can make many modifications and changes based on the concept of the utility model without creative work. Therefore, all technical solutions that can be obtained by technicians in this technical field based on the concept of the utility model through logical analysis, reasoning or limited experiments on the basis of the existing technology should be within the scope of protection determined by the claims.

Claims

1. An image acquisition device for a cable trough network, characterized in that: The invention comprises an integrated body (1), a magnetic fixing module (2), a translation platform (3), a sealed transmission module (4), an optical imaging module (5), an image processing module (6) and a multi-angle lighting module (7), wherein the magnetic fixing module (2) is fixed on one side of the integrated body (1), the translation platform (3) is slidably connected to the top of the integrated body (1) through the sealed transmission module (4), the optical imaging module (5) and the image processing module (6) are both mounted on the translation platform (3), the translation platform (3) and the integrated body (1) are respectively provided with a translation platform light-transmitting hole (301) and an integrated body light-transmitting hole (102) for the optical imaging module (5) to perform image acquisition, an image acquisition cavity is provided at the bottom of the integrated body (1), and the multi-angle lighting module (7) is mounted on one side of the image acquisition cavity.

2. The image acquisition device for a cable trough and cable network according to claim 1, characterized in that: The multi-angle lighting module (7) comprises a low-position tangential lighting light source (701) located on one side of the bottom end surface of the integrated body (1) and a high-position lateral lighting light source (702) located above the low-position tangential lighting light source (701).

3. The image acquisition device for a cable trough and cable network according to claim 1, characterized in that: A positioning plate (101) is provided on the bottom end surface of the integrated body (1).

4. The image acquisition device for a cable trough and cable network according to claim 1, characterized in that: The magnetic attraction fixing module (2) comprises one or more parallel magnets, which are used for magnetic attraction fixing on a vertical shell on one side of the surface of the wire trough wire network to be detected.

5. The image acquisition device for a cable trough and cable network according to claim 1, characterized in that: The sealed transmission module (4) comprises a magnet block (401), a magnetic sheet (405), a slider (403), a pressure plate (404), a fixing plate (406), a drive motor (8) and a lead screw (9); the drive motor (8) and the lead screw (9) are both installed in the integrated body (1); the output end of the drive motor (8) is connected to the lead screw (9); the bottom of the slider (403) is transmission-connected to the lead screw (9), and the top is connected to the translation platform (3); the magnet block (401) is embedded in the top of the integrated body (1); the two ends of the magnetic sheet (405) are fixed to the top of the integrated body (1) through the fixing plate (406) and are located above the magnet block (401); the pressure plate (404) is fixed to the two ends of the slider (403) and forms gaps with the two ends of the slider (403) in the moving direction respectively; the magnetic sheet (405) passes through the gap between the slider (403) and the pressure plate (404).

6. The image acquisition device for a cable trough and cable network according to claim 5, characterized in that: The bottom of the slider (403) is raised and connected to the lead screw (9); the middle of the top is raised and has blocks on both sides. There are multiple pressing plates (404), which are respectively connected to the blocks on both sides of the slider (403) and form a gap between the raised part of the top of the slider (403).

7. The image acquisition device for a cable trough and cable network according to claim 5, characterized in that: The sealed transmission module (4) further comprises a sealing gasket (402), which is located between the magnet block (401) and the magnetic sheet (405), and has two ends fixed by the fixing plate (406).

8. The image acquisition device for a cable trough and cable network according to claim 1, characterized in that: The integrated body light-transmitting hole (102) is in the shape of an elongated strip and is matched with the moving stroke of the translation platform (3).

9. The image acquisition device for a cable trough and cable network according to claim 1, characterized in that: Long strip-shaped guide rails (103) are provided on both sides of the top of the integrated body (1), and sliding blocks matching the corresponding guide rails (103) are provided on both sides of the bottom of the translation platform (3).

10. The image acquisition device for a cable trough and cable network according to claim 1, characterized in that: The image acquisition device further comprises a controller, which is respectively connected to the sealed transmission module (4), the optical imaging module (5), the image processing module (6) and the multi-angle lighting module (7), and the controller is installed in the integrated body (1).