High-precision device for detecting rotating speed of motor in cavity of semiconductor machine

Abstract

The high-precision device for detecting the rotating speed of the motor in the cavity of the semiconductor machine comprises a device main body, the top of the device main body is provided with a display screen, one side surface of the device main body is provided with a first electric wire, one end of the first electric wire is connected with a first wiring terminal, and the other side surface of the device main body is provided with a second electric wire. The other end of the second electric wire is connected with the second wiring terminal; and a circuit board is arranged in the device main body. The utility model relates to a high-precision device for detecting the rotating speed of a motor in a cavity of a semiconductor machine table, which is arranged on a motor of a cover of the cavity of the machine table and is used for detecting the rotating speed of the motor. A rotating speed detection controller is additionally arranged, so that a high-precision device which effectively avoids the situation that the motor is damaged, the rotating speed of a magnet in a cavity cover is not proper, the product quality is influenced, and the real-time rotating speed cannot be detected is realized. The device is suitable for the high-precision detection of the rotating speed of the magnet of the cavity cover of all semiconductor machines.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing industry machines, in particular to a high-precision device for detecting motor rotation speed in a semiconductor machine cavity. Background Art

[0002] In the past, the machine cavity cover rotated by a motor-driven magnet, and had no function of detecting the rotation speed; this had defects, and when problems occurred, the phenomenon could not be effectively captured, which resulted in problems and affected product quality; the utility model newly installed a controller for detecting the rotation speed on the basis of the existing machine cavity cover, which can follow up in real time. Utility Model Content

[0003] The purpose of the present invention is to provide a high-precision device for detecting the motor speed in a semiconductor machine chamber to solve the problems mentioned in the background art.

[0004] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0005] A high-precision device for detecting motor speed in a semiconductor machine cavity, comprising a device body, a display screen is arranged on the top of the device body, a first wire is arranged on one side of the device body, one end of the first wire is connected to a first wiring terminal, a second wire is arranged on the other side of the device body, the other end of the second wire is connected to a second wiring terminal, a circuit board is arranged inside the device body, the circuit board comprises a first wiring terminal, a second wiring terminal, a display screen, a chip U2, and a voltage regulator U3, an NRST pin of the chip U2 is connected in series with a capacitor C10, the other end of the capacitor C10 is grounded, the capacitor C10 is connected in parallel with a resistor R21, the other end of the resistor R21 is arranged VCC electrical signal, the OSCIN / PA1 pin and the OSCOUT / PA2 pin of the chip U2 are connected to the first wiring terminal, the VSS pin of the chip U2 is grounded, connected in parallel with a capacitor C9, and connected in parallel with a capacitor C11, the other end of the capacitor C9 is connected to the VCAP pin of the chip U2, the other end of the capacitor C11 is connected to the VDD pin of the chip U2, the PB5 pin of the chip U2 is connected in series with a resistor R15, the other end of the resistor R15 is connected to pin 5 of the display screen, the PB4 pin of the chip U2 is connected to a resistor R13, the other end of the resistor R13 is connected to pin 5 of the display screen, and the PC4 pin of the chip U2 is connected to the resistor R11 , the other end of the resistor R11 is connected to pin 3 of the display screen, the PC5 pin of the chip U2 is connected to the resistor R10, the other end of the resistor R10 is connected to pin 2 of the display screen, the PC6 pin of the chip U2 is connected to the resistor R9, the other end of the resistor R9 is connected to pin 1 of the display screen, the PD2 pin of the chip U2 is connected in series with the resistor R7, the resistor R7 is connected in parallel with a diode D4, and is connected in parallel with a diode D3, the diode D4 is grounded, and the diode D3 is connected to the VCC voltage, the resistor R7 is connected in series with a resistor R17, the resistor R17 is connected to pin 5 of the second wiring terminal, the resistor R17 is connected in parallel with a resistor R16, and the resistor R16 is grounded, the chip Pin PD3 of chip U2 is connected to resistor R4, resistor R4 is connected in parallel with diode D7, diode D7 is grounded, the other end of resistor R4 is connected to pin No. 1 of the second terminal, the GND end of the voltage regulator U3 is grounded, pin No. 1 of the second terminal is connected in parallel with diode D5, the other end of diode D5 is connected to the Vin end of the voltage regulator U3, pins No. 2 and No. 3 of the second terminal are connected in parallel and then connected in series with capacitor C1, the other end of capacitor C1 is connected to the Vin end of the voltage regulator U3, the Vout end of U3 outputs vcc voltage, capacitor C6 and capacitor C2 are connected in parallel to the Vout end of U3, the other ends of capacitor C6 and capacitor C2 are grounded.

[0006] Preferably, a resistor R14 is connected in series to pin No. 11 of the display screen, a resistor R12 is connected in series to pin No. 10 of the display screen, and a resistor R8 is connected in series to pin No. 7 of the display screen.

[0007] Preferably, a resistor R18 is connected in series to pin No. 4 of the second wiring terminal.

[0008] Preferably, pin 12 of the display screen is connected to pin PC7 of chip U2, pin 9 of the display screen is connected to pin PA3 of chip U2, pin 8 of the display screen is connected to pin PD6 of chip U2, pin 6 of the display screen is connected to pin PC3 of chip U2, the other end of resistor R8 is connected to pin PD4 of chip U2, the other end of resistor R12 is connected to pin PD5 of chip U2, and the other end of resistor R14 is connected to pin PD1 of chip U2.

[0009] Preferably, the other end of the resistor R18 is connected to the PC7 pin of the chip U2.

[0010] Preferably, the Vout terminal of the voltage regulator U3 is connected to the VDD pin of the chip U2.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] The utility model is a high-precision device for detecting the motor speed in the cavity of a semiconductor machine. It is a device installed on the motor of the machine cavity cover to detect the motor speed. The principle is to install a speed detection controller to effectively avoid motor damage, which leads to incorrect magnet speed in the cavity cover and affects product quality. The high-precision device cannot detect the real-time speed. The utility model is light, wear-resistant, high-temperature resistant and corrosion-resistant; and is suitable for high-precision detection devices of magnet speeds of all semiconductor machine cavity covers. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0014] Figure 2 This is the internal circuit diagram of the device body of the utility model.

[0015] In the figure: 1. device body; 2. first electric wire; 3. first connecting terminal; 4. display screen; 5. second electric wire; 6. second connecting terminal. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0017] See also Figure 1-2 , the utility model provides a technical solution:

[0018] A high-precision device for detecting the motor speed in a semiconductor machine cavity, comprising a device body 1, a display screen 4 is arranged on the top of the device body 1, a first wire 2 is arranged on one side of the device body 1, one end of the first wire 2 is connected to a first terminal 3, a second wire 5 is arranged on the other side of the device body 1, and the other end of the second wire 5 is connected to a second terminal 6, a circuit board is arranged inside the device body 1, and the circuit board includes a first terminal 3, a second terminal 6, a display screen 4, a chip U2, and a voltage regulator U3, an NRST pin of the chip U2 is connected in series with a capacitor C10, the other end of the capacitor C10 is grounded, the capacitor C10 is connected in parallel with a resistor R21, and the other end of the resistor R21 A VCC electrical signal is provided, the OSCIN / PA1 pin and the OSCOUT / PA2 pin of the chip U2 are connected to the first wiring terminal 3, the VSS pin of the chip U2 is grounded, and is connected in parallel with a capacitor C9 and a capacitor C11, the other end of the capacitor C9 is connected to the VCAP pin of the chip U2, the other end of the capacitor C11 is connected to the VDD pin of the chip U2, the PB5 pin of the chip U2 is connected in series with a resistor R15, the other end of the resistor R15 is connected to the No. 5 pin of the display screen 4, the PB4 pin of the chip U2 is connected to a resistor R13, the other end of the resistor R13 is connected to the No. 5 pin of the display screen 4, and the PC4 pin of the chip U2 is connected to the resistor R11 The other end of the resistor R11 is connected to the No. 3 pin of the display screen 4, the PC5 pin of the chip U2 is connected to the resistor R10, the other end of the resistor R10 is connected to the No. 2 pin of the display screen 4, the PC6 pin of the chip U2 is connected to the resistor R9, the other end of the resistor R9 is connected to the No. 1 pin of the display screen 4, the PD2 pin of the chip U2 is connected in series with the resistor R7, the resistor R7 is connected in parallel with the diode D4, and is connected in parallel with the diode D3, the diode D4 is grounded, the diode D3 is connected to the VCC voltage, the resistor R7 is connected in series with the resistor R17, the resistor R17 is connected to the No. 5 pin of the second wiring terminal 6, the resistor R17 is connected in parallel with the resistor R16, and the resistor R16 is grounded , the pin PD3 of the chip U2 is connected to the resistor R4, the resistor R4 is connected in parallel with a diode D7, the diode D7 is grounded, the other end of the resistor R4 is connected to the pin No. 1 of the second terminal 6, the GND end of the voltage regulator U3 is grounded, the pin No. 1 of the second terminal 6 is connected in parallel with a diode D5, the other end of the diode D5 is connected to the Vin end of the voltage regulator U3, the pins No. 2 and No. 3 of the second terminal 6 are connected in parallel and then connected in series with the capacitor C1, the other end of the capacitor C1 is connected to the Vin end of the voltage regulator U3, the Vout end of U3 outputs the vcc voltage, the Vout end of U3 is connected in parallel with capacitors C6 and C2, and the other ends of capacitors C6 and C2 are grounded.

[0019] Furthermore, the pin No. 11 of the display screen 4 is connected in series with a resistor R14 , the pin No. 10 of the display screen 4 is connected in series with a resistor R12 , and the pin No. 7 of the display screen 4 is connected in series with a resistor R8 .

[0020] Furthermore, a resistor R18 is connected in series to pin No. 4 of the second wiring terminal 6 .

[0021] Furthermore, pin 12 of display screen 4 is connected to pin PC7 of chip U2, pin 9 of display screen 4 is connected to pin PA3 of chip U2, pin 8 of display screen 4 is connected to pin PD6 of chip U2, pin 6 of display screen 4 is connected to pin PC3 of chip U2, the other end of resistor R8 is connected to pin PD4 of chip U2, the other end of resistor R12 is connected to pin PD5 of chip U2, and the other end of resistor R14 is connected to pin PD1 of chip U2.

[0022] Furthermore, the other end of the resistor R18 is connected to the PC7 pin of the chip U2.

[0023] Furthermore, the Vout terminal of the voltage regulator U3 is connected to the VDD pin of the chip U2.

[0024] Working principle: The utility model is a high-precision device that detects the real-time rotation speed by installing a rotation speed detection controller, wherein the rotation speed detection controller is implemented by chip U2, thereby effectively avoiding motor damage that causes incorrect rotation speed of the magnet inside the cavity cover to affect product quality.

[0025] When in use, the first terminal 3 and the second terminal 6 are connected in parallel to the circuit for supplying power to the magnet. At this time, the surface of the display screen 4 will display the rotation speed in real time. When it is found that the rotation speed in the display screen 4 is incorrect, the phenomenon can be effectively captured and the problem can be presented, so that maintenance can be conveniently carried out, which has certain practicality.

[0026] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high-precision device for detecting motor speed in a semiconductor machine chamber, comprising a device body (1), characterized in that: A display screen (4) is arranged on the top of the device body (1); a first wire (2) is arranged on one side of the device body (1); one end of the first wire (2) is connected to a first wiring terminal (3); a second wire (5) is arranged on the other side of the device body (1); the other end of the second wire (5) is connected to a second wiring terminal (6); a circuit board is arranged inside the device body (1); the circuit board comprises a first wiring terminal (3), a second wiring terminal (6), a display screen (4), a chip U2, and a voltage regulator U3; an NRST pin of the chip U2 is connected in series with a capacitor C10; the other end of the capacitor C10 is grounded; a resistor R21 is connected in parallel with the capacitor C10; the other end of the resistor R21 is connected to the ground; The chip U2 is provided with a VCC electrical signal at its end, the OSCIN / PA1 pin and the OSCOUT / PA2 pin of the chip U2 are connected to the first wiring terminal (3), the VSS pin of the chip U2 is grounded, connected in parallel with a capacitor C9, and connected in parallel with a capacitor C11, the other end of the capacitor C9 is connected to the VCAP pin of the chip U2, the other end of the capacitor C11 is connected to the VDD pin of the chip U2, the PB5 pin of the chip U2 is connected in series with a resistor R15, the other end of the resistor R15 is connected to pin No. 5 of the display screen (4), the PB4 pin of the chip U2 is connected to a resistor R13, the other end of the resistor R13 is connected to pin No. 5 of the display screen (4), the PC4 pin of the chip U2 is connected to the resistor R13, the other end of the resistor R13 is connected to pin No. 5 of the display screen (4), and the The chip U2 is connected to a resistor R11, the other end of the resistor R11 is connected to pin 3 of the display screen (4), the PC5 pin of the chip U2 is connected to a resistor R10, the other end of the resistor R10 is connected to pin 2 of the display screen (4), the PC6 pin of the chip U2 is connected to a resistor R9, the other end of the resistor R9 is connected to pin 1 of the display screen (4), the PD2 pin of the chip U2 is connected in series with a resistor R7, the resistor R7 is connected in parallel with a diode D4, and is connected in parallel with a diode D3, the diode D4 is grounded, and the diode D3 is connected to a VCC voltage, the resistor R7 is connected in series with a resistor R17, the resistor R17 is connected to pin 5 of the second wiring terminal (6), and the resistor R17 is connected in parallel with a resistor R1 6, resistor R16 is grounded, pin PD3 of the chip U2 is connected to resistor R4, resistor R4 is connected in parallel with diode D7, diode D7 is grounded, the other end of resistor R4 is connected to pin 1 of the second wiring terminal (6), the GND end of the voltage regulator U3 is grounded, pin 1 of the second wiring terminal (6) is connected in parallel with diode D5, the other end of diode D5 is connected to the Vin end of the voltage regulator U3, pins 2 and 3 of the second wiring terminal (6) are connected in parallel and then connected in series with capacitor C1, the other end of capacitor C1 is connected to the Vin end of the voltage regulator U3, the Vout end of U3 outputs vcc voltage, the Vout end of U3 is connected in parallel with capacitor C6 and capacitor C2,The other ends of capacitor C6 and capacitor C2 are grounded.

2. The high-precision device for detecting motor speed in a semiconductor machine chamber according to claim 1, characterized in that: Pin No. 11 of the display screen (4) is connected in series with a resistor R14, pin No. 10 of the display screen (4) is connected in series with a resistor R12, and pin No. 7 of the display screen (4) is connected in series with a resistor R8.

3. The high-precision device for detecting motor speed in a semiconductor machine chamber according to claim 1, characterized in that: Pin No. 4 of the second wiring terminal (6) is connected in series with a resistor R18.

4. The high-precision device for detecting motor speed in a semiconductor machine chamber according to claim 1, characterized in that: Pin No. 12 of the display screen (4) is connected to pin PC7 of chip U2, pin No. 9 of the display screen (4) is connected to pin PA3 of chip U2, pin No. 8 of the display screen (4) is connected to pin PD6 of chip U2, pin No. 6 of the display screen (4) is connected to pin PC3 of chip U2, the other end of resistor R8 is connected to pin PD4 of chip U2, the other end of resistor R12 is connected to pin PD5 of chip U2, and the other end of resistor R14 is connected to pin PD1 of chip U2.

5. The high-precision device for detecting motor speed in a semiconductor machine chamber according to claim 1, characterized in that: The other end of the resistor R18 is connected to the PC7 pin of the chip U2.

6. The high-precision device for detecting motor speed in a semiconductor machine chamber according to claim 1, characterized in that: The Vout terminal of the voltage regulator U3 is connected to the VDD pin of the chip U2.

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