Switch lock device of wafer box, cleaning equipment and drying equipment

Abstract

The utility model discloses a wafer cassette switch lock device, cleaning equipment and drying equipment, the switch lock device comprises a mobile base and a plurality of switch lock units arranged on the mobile base, each switch lock unit comprises a cylinder and a knob connected with the cylinder, the cylinder comprises a piston rod connected with the knob, a first gas interface, a transmission assembly and a second gas interface, and the first gas interface is configured to be capable of driving the piston rod to drive the knob to do linear motion after gas is introduced so as to extend into or retreat from the box cover of the wafer box; the second gas interface is configured to drive the transmission assembly after gas is introduced, so that the piston rod drives the rotary knob to rotate, and the box body and the box cover of the wafer box are locked or unlocked. The unlocking and locking unit can unlock the box cover of the wafer box by arranging one air cylinder, and the unlocking and locking device is simple in structure, convenient to assemble, high in stability and convenient to overhaul and maintain.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer box processing devices, and relates to a switch lock device for a wafer box, and cleaning equipment and drying equipment with the switch lock device. Background Art

[0002] With the continuous development of semiconductor process technology, the requirements for environmental cleanliness in wafer processing and storage are getting higher and higher, and the cleanliness of the wafer needs to be controlled. The cleanliness of the wafer depends largely on the environment in the wafer box, so the wafer box needs to be cleaned and dried to ensure cleanliness. The existing wafer box has a box body and a lid. The lid is covered on the box body to form a sealed chamber, which needs to be opened or closed by turning a knob inserted into the knob hole to a certain angle. For the automatic cleaning equipment or drying equipment of the wafer box, it is necessary to configure an automatic switch lock device to automatically open or lock the lid. The existing switch lock device needs to set a linear motion drive mechanism and a rotation drive mechanism respectively to enable the unlocking part to move linearly and rotate a certain angle. For example, the switch lock device used in CN115020302A has a complex structure, high requirements for processing and assembly, and is prone to wear and jamming after a long period of use, and is not easy to maintain. Utility Model Content

[0003] The utility model aims to provide a switch lock device for a wafer box, which has a simple structure, is easy to assemble, has high stability, and is easy to inspect and maintain. Another purpose of the utility model is to provide a cleaning device and a drying device using the switch lock device.

[0004] A technical solution adopted by the utility model is as follows:

[0005] A switch lock device for a wafer box comprises a movable base and a plurality of switch lock units arranged on the movable base, each of the switch lock units comprises a cylinder and a knob connected to the cylinder, the cylinder comprises a piston rod connected to the knob, a first gas interface, a transmission assembly and a second gas interface, the first gas interface being configured to drive the piston rod to drive the knob to move linearly after gas is introduced so as to extend into or withdraw from the cover of the wafer box; the second gas interface being configured to drive the transmission assembly after gas is introduced so as to cause the piston rod to drive the knob to rotate so as to lock or unlock the box body and the cover of the wafer box.

[0006] Preferably, the knob includes a guide rod and an insert connected to the end of the guide rod, and the insert has an initial position and an unlocked position; when switching from the initial position to the unlocked position, the insert is configured to be driven by the guide rod to extend into the lock hole of the box cover and rotate to unlock the box cover and the box body; when switching from the unlocked position to the initial position, the insert is configured to be driven by the guide rod to rotate and exit the lock hole of the box cover to lock the box cover and the box body.

[0007] Preferably, the knob is arranged on the piston rod or is integral with the piston rod.

[0008] Preferably, the switch lock unit further comprises an adsorption component capable of adsorbing and fixing the unlocked box cover.

[0009] Preferably, the switch lock unit comprises a mounting plate, the mounting plate is arranged on the movable base, and the cylinder is arranged on the mounting plate; wherein, the mounting plate is detachably arranged on the movable base, and / or the cylinder is detachably mounted on the mounting plate.

[0010] Preferably, the transmission assembly includes a gear, the cylinder includes a rotating chamber connected to the second gas interface and a rotating piston arranged in the rotating chamber, the rotating piston has a rack portion, the rack portion and the gear are meshed with each other, and the rotating piston can move in the rotating chamber to drive the piston rod to rotate.

[0011] Preferably, the rotary piston includes a first rotary piston and a second rotary piston, the gear is arranged between the first rotary piston and the second rotary piston, and is respectively meshed with the rack portion of the first rotary piston and the rack portion of the second rotary piston; the length direction of the rack portion is perpendicular to the length direction of the piston rod.

[0012] Preferably, the cylinder further comprises a movable chamber connected to the first gas interface and a movable piston arranged in the movable chamber, the piston rod is rotatably connected to the movable piston around its own axis, and the movable piston can move in the movable chamber to drive the movable piston to move.

[0013] Another technical solution adopted by the utility model is as follows:

[0014] A wafer box cleaning device comprises a cleaning tank with a cleaning cavity and a cover body covering the cleaning tank to close the cleaning cavity. The cleaning device also comprises a switch lock device, wherein the switch lock device can unlock or lock the box cover of the wafer box.

[0015] Another technical solution adopted by the utility model is as follows:

[0016] A wafer box drying device comprises a drying tank with a drying cavity and a cover body covering the drying tank to close the drying cavity. The drying device also comprises a switch lock device, wherein the switch lock device can unlock or lock the box cover of the wafer box.

[0017] The utility model adopts the above solution, which has the following advantages compared with the prior art:

[0018] The switch lock device of the utility model realizes unlocking of the wafer box cover by a cylinder, has a simple structure, is easy to assemble, has high stability in single cylinder operation and low risk of jamming, and is easy to inspect and maintain; it is suitable for use in automatic cleaning equipment for cleaning wafer boxes or automatic drying equipment for drying wafer boxes. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solution of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0020] Figure 1 It is a structural schematic diagram of a wafer box cleaning device according to an embodiment of the utility model at a certain viewing angle, wherein the cover is opened;

[0021] Figure 2 It is a schematic structural diagram of a wafer box cleaning device according to an embodiment of the utility model from another perspective, wherein the cover is opened;

[0022] Figure 3 It is a structural schematic diagram of a wafer box cleaning device according to an embodiment of the utility model from another perspective, wherein the cover is opened;

[0023] Figure 4 It is a schematic diagram of a cover body equipped with a switch lock device according to an embodiment of the utility model;

[0024] Figure 5 for Figure 4 A partial enlarged view of the middle A;

[0025] Figure 6 It is a structural schematic diagram of a switch lock unit according to an embodiment of the utility model;

[0026] Figure 7 It is a structural schematic diagram of a cylinder according to an embodiment of the utility model;

[0027] Figure 8 A cross-sectional view perpendicular to the length direction of the piston rod of a cylinder according to an embodiment of the utility model;

[0028] Fig. 9 The figure is a schematic diagram of the structure of a wafer box.

[0029] in,

[0030] 1- Cleaning equipment;

[0031] 2-switch lock unit; 21-cylinder; 210-piston rod; 211-first gas interface; 212-gear; 213-second gas interface; 214-rotating chamber; 215-first rotary piston; 2150-first rack; 216-moving chamber; 217-moving piston; 218-second rotary piston; 2180-second rack; 22-knob; 220-guide rod; 221-insert; 23-adsorption assembly; 230-nozzle; 24-mounting plate;

[0032] 3-wafer box; 31-box cover; 310-lock hole; 32-box body;

[0033] 4-cover;

[0034] 5- Cleaning tank. DETAILED DESCRIPTION

[0035] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art. It should be noted that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation of the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0036] This embodiment provides a wafer box switch lock device, a cleaning device and a drying device. The cleaning device and the drying device use this switch lock device to automatically open the cover of the wafer box, so as to thoroughly clean and dry the wafer box. Figures 1 to 8 The cleaning device 1 shown is taken as an example for detailed description. Figures 1 to 3 The present embodiment shows a cleaning device 1 for a wafer box 3, which includes a cleaning tank 5 having a cleaning cavity and a cover 4 which is disposed on the cleaning tank 5 to seal the cleaning cavity. Fig. 9 As shown, the wafer box 3 includes a box cover 31 and a box body 32 , and the box cover 31 is provided with a lock hole 310 for the knob 22 to be inserted.

[0037] The cleaning device 1 includes a switch lock device, which is used to unlock the box cover 31 and the box body 32. Figures 3 to 5As shown, the switch lock device includes a mobile base and a plurality of switch lock units 2 arranged on the mobile base. In this embodiment, the mobile base is a part of the cover body 4; in other embodiments, the mobile base can be a separate part installed on the cover body 4. There are multiple switch lock units 2, and their number and positions correspond to the lock holes 310 on the wafer box 3. Fig. 9 As shown, there are two lock holes 310 on the cover 31 of the wafer box 3, and two switch lock units 2 are correspondingly provided.

[0038] Each switch lock unit 2 includes a cylinder 21 and a knob 22 connected to the cylinder 21. It should be noted that each switch lock unit 2 uses a single cylinder 21, and no additional drive elements such as other cylinders are configured.

[0039] Reference Figures 6 to 8 As shown, the cylinder 21 includes a piston rod 210 connected to the knob 22, a first gas interface 211, a transmission assembly, and a second gas interface 213. The first gas interface 211 is configured to drive the piston rod 210 to drive the knob 22 to perform linear motion after gas is introduced, so as to extend into or withdraw from the cover 31 of the wafer box 3. The second gas interface 213 is configured to drive the transmission assembly to drive the piston rod 210 to rotate the knob 22 after gas is introduced, so as to lock or unlock the box body 32 and the cover 31 of the wafer box 3.

[0040] Reference Figure 7 As shown, the cylinder 21 also includes a moving chamber 216 connected to the first gas interface 211 and a moving piston 217 disposed in the moving chamber 216. The piston rod 210 can be plugged with the moving piston 217 rotatably around its own axis, and the moving piston 217 can move in the moving chamber 216 to drive the moving piston 217 to move. Specifically, the number of the first gas interfaces 211 is at least two, and the moving piston 217 is disposed between the first gas interface 211 on the left and the first gas interface 211 on the right. When the first gas interface 211 on the left is connected to gas, the moving piston 217 is driven to drive the piston rod 210 to extend, and when the first gas interface 211 on the right is connected to gas, the moving piston 217 is driven to drive the piston rod 210 to retract.

[0041] Reference Figure 8As shown, the transmission assembly includes a gear 212, the cylinder 21 includes a rotating chamber 214 connected to the second gas interface 213 and a rotating piston arranged in the rotating chamber 214, the rotating piston has a rack portion, the rack portion and the gear 212 are meshed with each other, and the rotating piston can move in the rotating chamber 214 to drive the piston rod 210 to rotate. Among them, the rotating piston includes a first rotating piston 215 and a second rotating piston 218, the gear 212 is arranged between the first rotating piston 215 and the second rotating piston 218, and is respectively meshed with the first rack portion 2150 of the first rotating piston 215 and the second rack portion 2180 of the second rotating piston 218. The length direction of the rack portion is perpendicular to the length direction of the piston rod 210. In this embodiment, the cylinder 21 can adopt the extension and swing cylinder MQR of SMC.

[0042] Reference Figure 2 and Figure 6 As shown, the switch lock unit 2 further includes a mounting plate 24, which is detachably arranged on the mobile base (cover body 4), and the cylinder 21 is detachably mounted on the mounting plate 24. Figure 1 to Figure 2 As shown, the cylinder 21 is fixed to the upper side of the cover body 4 through a mounting plate 24 , and a through hole is provided on the cover body 4 , and the piston rod 210 of the cylinder 21 passes downward through the through hole and is connected to the guide rod 220 , and the lower end of the guide rod 220 is connected to the knob 22 .

[0043] The switch lock unit 2 includes a suction component 23 that can suction and fix the unlocked box cover 31 . In this embodiment, the suction component 23 includes a suction nozzle 230 .

[0044] When it is necessary to open the cover 31 of the wafer box 3, the cylinder 21 drives the guide rod 220 to move linearly to insert into the lock hole 310 on the cover 31, and the cylinder 21 rotates to separate the cover 31 and the box body 32 of the wafer box 3, and the suction nozzle 230 absorbs the opened cover 31, and then the cleaning equipment 1 or the drying equipment is closed, and the cylinder 21 retracts linearly, and the knob 22 escapes from the lock hole 310 on the cover 31, and the cover 31 is rotated after being absorbed by the suction nozzle 230, so as to prevent the knob 22 from affecting the rotation of the cover 31 after being absorbed by the suction nozzle 230.

[0045] The working principle of cylinder 21 is as follows: Figure 7 As shown, when the first gas interface 211 on the left is connected to the airflow, the airflow pushes the movable piston 217 to drive the piston rod 210 to move rightward within the moving range, and the knob 22 extends; when the first gas interface 211 on the right is connected to the airflow, the airflow pushes the movable piston 217 to drive the piston rod 210 to move leftward within the moving range, and the knob 22 retracts. Figure 8As shown, after the second gas interface 213 on the upper side is connected to the airflow, the airflow pushes the second rotary piston 218 on the upper side to move leftward, driving the middle gear 212 and the piston rod 210 to rotate counterclockwise; after the second gas interface 213 on the lower side is connected to the airflow, the airflow pushes the first rotary piston 215 on the lower side to move rightward, driving the middle gear 212 and the piston rod 210 to rotate clockwise.

[0046] Further, refer to Figure 6 As shown, the knob 22 includes a guide rod 220 and an insert 221 connected to the end of the guide rod 220, and the insert 221 has an initial position and an unlocking position. When switching from the initial position to the unlocking position, the insert 221 is configured to be driven by the guide rod 220 to extend into the lock hole 310 of the box cover 31 and rotate to unlock the box cover 31 and the box body 32; when switching from the unlocking position to the initial position, the insert 221 is configured to be driven by the guide rod 220 to rotate and exit the lock hole 310 of the box cover 31 to lock the box cover 31 and the box body 32. The knob 22 is arranged on the piston rod 210 to facilitate replacement and maintenance of the knob 22. Alternatively, the knob 22 and the piston rod 210 are set as one body, which has the advantage of ensuring the stability of the knob 22 and the piston rod 210 and reducing the process steps.

[0047] The lock hole 310 on the cover 31 of the wafer box 3 is a long hole, and the insert 221 is a corresponding long strip; after passing through the lock hole 310 and rotating a certain angle, the insert 221 and the cover 31 interfere with each other, so that the cover 31 can be removed from the box body 32. In other embodiments, the lock hole and the insert can also be set to other shapes, and this embodiment does not specifically limit their shapes, as long as the above-mentioned effects can be achieved.

[0048] The switch lock unit 2 can unlock the cover 31 of the wafer box 3 by setting a cylinder 21. Only one cylinder 21 is used to realize the linear motion and rotational motion of the knob 22. The switch lock device has a simple structure, is easy to assemble, has high stability, and is easy to inspect and maintain. The existing conventional wafer box cleaning and drying equipment requires two cylinders to cooperate to unlock the cover of the wafer box; in this embodiment, only one cylinder 21 is used to realize the linear and rotational motion of the knob 22, the structure is simpler, and the assembly is relatively simple, saving time and labor; because it is a cylinder, it will be more stable than the conventional one that requires two cylinders to cooperate, and it is not easy to get stuck. On the other hand, since only one cylinder is used, it is easy to inspect and maintain. For example, in the conventional setting, if the cylinder is stuck or the parts are damaged, it is necessary to test and repair them one by one to find the damaged parts, which requires longer maintenance time and equipment downtime. In addition, when repairing after the fault is found, more parts need to be disassembled and replaced. In this embodiment, if a component fails, it can be repaired by directly replacing the entire component, which is simpler to repair, takes less time, and causes less downtime. At the same time, since it is a single cylinder, the relationship between its frequency of use and life can be evaluated, so that the component can be regularly maintained to prevent failure after long-term operation.

[0049] The specific operation steps of cleaning the wafer box 3 of this embodiment are:

[0050] The robot grips the wafer box 3 and moves it to the vicinity of the cleaning tank 5, wherein a switch lock device is provided on the cover 4;

[0051] The piston rod 210 of the cylinder 21 extends out, the knob 22 is inserted into the lock hole 310 on the box cover 31, the piston rod 210 of the cylinder 21 rotates, and the knob 22 rotates in the wafer box 3 to unlock the box cover 31;

[0052] The adsorption assembly 23 on the cover body 4 fixes the box cover 31, and the cover body 4 is opened to separate the box cover 31 from the box body 32 of the wafer box 3, and the cylinder 21 is reset. The robot turns the box body 32 upside down in the cleaning tank 5, closes the cover body 4, and performs cleaning to ensure that there is no impurity residue in the wafer storage environment;

[0053] Open the cover body 4, and the robot takes out the box body 32 and connects it with the box cover 31 on the cover body 4;

[0054] The piston rod 210 of the cylinder 21 extends out, the knob 22 is inserted into the lock hole 310, the piston rod 210 of the cylinder 21 rotates, and the knob 22 rotates in the opposite direction in the wafer box 3 to lock the box cover 31 and the box body 32; the adsorption component 23 releases the cover body 4 and takes away the wafer box 3.

[0055] In addition to being installed on a cleaning device, the switch lock device can also be installed on other equipment that requires the box body 32 and the box cover 31 of the wafer box 3 to be disassembled, such as a drying device.

[0056] This embodiment further provides a drying device for a wafer box 3, which includes a drying tank having a drying cavity and a cover body 4 which is arranged on the drying tank to seal the drying cavity, and the cover body 4 is provided with the above-mentioned switch lock device.

[0057] The switch lock device of the wafer box 3 has the following advantages:

[0058] The switch lock device of this embodiment, the switch lock unit 2 uses only one cylinder 21 to realize the linear motion and rotational motion of the knob 22, and realizes the unlocking of the box cover 31 of the wafer box 3. The switch lock device has a simple structure, is easy to assemble, has high stability, and is easy to repair and maintain. The cleaning equipment 1 of this embodiment can fully clean the box cover 31 and the box body 32, and the drying equipment of this embodiment can fully dry the box cover 31 and the box body 32 to ensure the cleanliness and optimize the storage environment of the wafers.

[0059] As shown in this specification and claims, the terms "comprises" and "includes" only indicate the inclusion of explicitly identified steps and elements, and these steps and elements do not constitute an exclusive list, and the method or device may also include other steps or elements.

[0060] It is further understood that in the present disclosure, "plurality" refers to two or more than two, and other quantifiers are similar thereto.

[0061] It is further understood that the terms "first", "second", etc. are used to describe various information, but such information should not be limited to these terms. These terms are only used to distinguish the same type of information from each other, and do not indicate a specific order or degree of importance. In fact, the expressions "first", "second", etc. can be used interchangeably. For example, without departing from the scope of the present disclosure, the first information can also be referred to as the second information, and similarly, the second information can also be referred to as the first information.

[0062] The above embodiment is only for illustrating the technical concept and features of the utility model, and is a preferred embodiment. Its purpose is to enable people familiar with this technology to understand the content of the utility model and implement it accordingly, and it cannot be used to limit the protection scope of the utility model.

Claims

1. A wafer box switch lock device, comprising a movable base and a plurality of switch lock units arranged on the movable base, characterized in that: Each of the switch lock units includes a cylinder and a knob connected to the cylinder, the cylinder includes a piston rod connected to the knob, a first gas interface, a transmission assembly and a second gas interface, the first gas interface is configured to drive the piston rod to drive the knob to move linearly after gas is introduced, so as to extend into or withdraw from the cover of the wafer box; the second gas interface is configured to drive the transmission assembly after gas is introduced, so that the piston rod drives the knob to rotate, so as to lock or unlock the box body and cover of the wafer box.

2. The switch lock device according to claim 1, characterized in that: The knob includes a guide rod and an insert connected to the end of the guide rod, and the insert has an initial position and an unlocking position; when switching from the initial position to the unlocking position, the insert is configured to be driven by the guide rod to extend into the lock hole of the box cover and rotate, so as to unlock the box cover and the box body; When switching from the unlocking position to the initial position, the inserting member is configured to be driven by the guide rod to rotate and exit the locking hole of the box cover, so as to lock the box cover and the box body.

3. The switch lock device according to claim 1, characterized in that: The knob is arranged on the piston rod or is integral with the piston rod.

4. The switch lock device according to claim 1, characterized in that: The switch lock unit also includes an adsorption component that can adsorb and fix the unlocked box cover.

5. The switch lock device according to claim 1, characterized in that: The switch lock unit comprises a mounting plate, the mounting plate is arranged on the moving base, and the cylinder is arranged on the mounting plate; Wherein, the mounting plate is detachably arranged on the movable base, and / or the cylinder is detachably mounted on the mounting plate.

6. The switch lock device according to claim 1, characterized in that: The transmission assembly includes a gear, the cylinder includes a rotating chamber connected to the second gas interface and a rotating piston arranged in the rotating chamber, the rotating piston has a rack portion, the rack portion and the gear are meshed with each other, and the rotating piston can move in the rotating chamber to drive the piston rod to rotate.

7. The switch lock device according to claim 6, characterized in that: The rotary piston includes a first rotary piston and a second rotary piston. The gear is disposed between the first rotary piston and the second rotary piston and meshes with the rack portion of the first rotary piston and the rack portion of the second rotary piston respectively. The length direction of the rack portion is perpendicular to the length direction of the piston rod.

8. The switch lock device according to claim 1 or 6, characterized in that: The cylinder also includes a moving chamber connected to the first gas interface and a moving piston arranged in the moving chamber. The piston rod can be rotatably connected to the moving piston around its own axis, and the moving piston can move in the moving chamber to drive the moving piston to move.

9. A wafer box cleaning device, characterized in that: The cleaning device comprises a cleaning tank having a cleaning cavity and a cover body which covers the cleaning tank to close the cleaning cavity. The cleaning equipment also comprises a switch lock device as described in any one of claims 1 to 8, wherein the switch lock device can unlock or lock the cover of the wafer box.

10. A drying device for a wafer box, characterized in that: The drying device comprises a drying tank having a drying chamber and a cover body covering the drying tank to close the drying chamber. The drying device also comprises a switch lock device as described in any one of claims 1 to 8, wherein the switch lock device can unlock or lock the cover of the wafer box.

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