Laser polishing device of diamond film and production equipment of diamond film
By using a laser galvanometer to scan the processing head and protection mechanism in the laser polishing device of the diamond film to form an air film and a low-pressure suction layer, the dust interference and absorption problems are solved, and efficient diamond film surface polishing is achieved, and the polishing quality is improved. speed.
Patent Information
- Application Number
- CN202420944392.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-30
- Publication Date
- 2024-12-20
- Estimated Expiration
- 2034-04-30
AI Technical Summary
In the existing polishing methods of diamond films, mechanical polishing is prone to rupture, chemical polishing efficiency is low and cost is high, while the laser polishing process is affected by dust, resulting in the formation of surface gullies and the inability to process stably.
A laser polishing device for diamond film is designed, using a laser galvanometer scanning processing head, a first protection mechanism and a second protection mechanism to form an air film to isolate dust and splashes through a built-in pipeline, and use negative pressure adsorption technology to remove dust. and splashes to ensure efficient laser polishing process.
High-quality polishing of the diamond film surface is achieved, avoiding dust interference and absorption, improving polishing speed and efficiency, and reducing the absorption effect of dust on laser light.
Smart Images
Figure CN222199253U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of diamond processing, in particular to a laser polishing device for a diamond film and production equipment for the diamond film. Background Art
[0002] With the rapid development of the semiconductor industry, diamond has attracted extensive attention due to its higher bandgap, higher carrier mobility, higher breakdown electric field and greater thermal conductivity. It can meet the future needs of high power, strong electric field and radiation resistance, and is an ideal material for making power semiconductor devices. However, the surface roughness of the diamond film prepared by chemical vapor deposition is large and cannot be directly used in the semiconductor field. It needs to be processed to reduce the surface roughness.
[0003] At present, the commonly used methods to reduce the surface roughness of diamond films include grinding and polishing, among which polishing includes mechanical polishing, chemical polishing, energy-assisted polishing, etc. Mechanical polishing easily causes the diamond sheet to break and takes a long time to polish; chemical polishing is inefficient and costly; laser polishing is a non-contact polishing method that not only has no mechanical force but also has a fast processing speed. However, the polishing process will affect the diamond's absorption of energy due to dust, and the processing process cannot be stabilized, thus forming surface grooves on the diamond film.
[0004] In view of this, the present utility model is proposed. Utility Model Content
[0005] The utility model aims to provide a diamond film laser polishing device and diamond film production equipment, which can improve the surface polishing quality of the diamond film.
[0006] The embodiment of the utility model is achieved as follows:
[0007] In the first aspect, the utility model provides a laser polishing device for diamond film, which includes a laser galvanometer scanning processing head, a first protection mechanism and a second protection mechanism, the first protection mechanism is provided with a mounting groove for placing the diamond film to be processed, the first protection mechanism is provided with a built-in pipeline, the built-in pipeline is provided with an air inlet and an air outlet, the air outlet faces the mounting groove, the second protection mechanism is arranged below the first protection mechanism, the second protection mechanism is provided with an air intake for sucking away dust and splashes during the processing, and the air intake is connected to the mounting groove.
[0008] In an optional embodiment, the built-in pipeline includes an annular tube inner wall and an annular tube outer wall, the annular tube inner wall is arranged inside the annular tube outer wall and forms an annular gas cavity, the air inlet is arranged on the annular tube outer wall and communicates with the gas cavity, and the air outlet is arranged on the annular tube inner wall and communicates with the gas cavity.
[0009] In an optional embodiment, there are two air inlets symmetrically arranged on the outer wall of the annular tube.
[0010] In an optional embodiment, the number of the air outlets is 10-30 and they are evenly distributed in a ring shape on the inner wall of the annular tube.
[0011] In an optional embodiment, the opening directions of the air outlets are all toward the center of the inner wall of the annular tube.
[0012] In an optional embodiment, a plurality of connecting rods are provided between the inner wall of the annular tube and the outer wall of the annular tube.
[0013] In an optional embodiment, the laser polishing device for diamond film further includes a negative pressure mechanism, the second protection mechanism is a hollow structure, and the air intake port is connected to the negative pressure mechanism.
[0014] In an optional embodiment, the laser galvanometer scanning processing head is provided with a semi-transparent reflective mirror for collecting the surface conditions of the diamond to determine whether graphitization occurs on the surface.
[0015] In an optional embodiment, the laser galvanometer scanning processing head is further provided with a visual monitoring optical fiber and a welding optical fiber, the visual monitoring optical fiber is electrically connected to the semi-transparent reflector, and the visual monitoring optical fiber is electrically connected to the welding optical fiber.
[0016] In a second aspect, the utility model provides a diamond film production device, which includes a diamond film laser polishing device as described in any one of the aforementioned embodiments.
[0017] The beneficial effects of the embodiments of the utility model are:
[0018] The laser polishing device for diamond film provided by the utility model is provided with a first protection mechanism and a second protection mechanism, wherein the air inlet of the first protection mechanism takes in air and discharges it from the air outlet, and the discharged gas forms an air film toward the center, which neither affects the passage of the laser nor isolates the interference and absorption of the laser by dust and splashes during the polishing process; at the same time, the negative pressure adsorption at the second protection mechanism can absorb the dust and splashes during the polishing process. The laser polishing device for diamond film improves the gas protection during the polishing process, adopts air supply and air suction to manufacture a high-pressure air film layer and a low-pressure air suction layer, and forms a thin film layer in the middle through the introduction of high-pressure gas, and the air film layer does not affect the laser transmission. In addition, by providing a low-pressure layer, the dust generated during the laser polishing of the diamond film is sucked away, and the absorption effect of the dust on the laser is reduced. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.
[0020] Figure 1 A schematic structural diagram of a laser polishing device for a diamond film provided in an embodiment of the utility model;
[0021] Figure 2 A schematic diagram of the structure of the cooperation between the first protection mechanism and the second protection mechanism in the laser polishing device for diamond film provided by an embodiment of the utility model;
[0022] Figure 3 A schematic diagram of the structure of the first protection mechanism in the laser polishing device for diamond film provided by an embodiment of the utility model;
[0023] Figure 4 A schematic diagram of the internal structure of the first protection mechanism in the laser polishing device for diamond film provided by an embodiment of the utility model;
[0024] Figure 5 A schematic diagram of the structure of the second protection mechanism in the laser polishing device for diamond film provided by an embodiment of the utility model;
[0025] Figure 6 A cross-sectional view of a second protection mechanism in a laser polishing device for a diamond film provided by an embodiment of the utility model;
[0026] Figure 7 A top view of the second protection mechanism in the laser polishing device for diamond film provided in an embodiment of the utility model.
[0027] Icons: 100- laser polishing device for diamond film; 110- laser galvanometer scanning processing head; 111- semi-transparent reflector; 112- visual monitoring optical fiber; 113- welding optical fiber; 120- first protection mechanism; 121- mounting groove; 122- built-in pipeline; 123- air inlet; 124- air outlet; 125- inner wall of annular tube; 126- outer wall of annular tube; 127- connecting rod; 128- gas chamber; 130- second protection mechanism; 131- air inlet; 200- diamond film. DETAILED DESCRIPTION
[0028] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.
[0029] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0030] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.
[0031] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.
[0032] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0033] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0034] Example
[0035] Please refer to Figure 1 This embodiment provides a laser polishing device 100 for a diamond film, which includes a laser galvanometer scanning processing head 110 , a first protection mechanism 120 and a second protection mechanism 130 .
[0036] Among them, the laser galvanometer scanning processing head 110 is used to laser polish the diamond film 200. The laser type of the laser galvanometer scanning processing head 110 is an ultrashort pulse laser. The laser galvanometer scanning processing head 110 is provided with a semi-transparent reflector 111 for collecting the surface conditions of the diamond to determine whether the surface is graphitized. Graphitization is an important indicator of diamond laser polishing. The semi-transparent reflector 111 is provided to collect the surface conditions of the diamond to determine whether the surface is graphitized. Graphite with too high thickness is not easy to remove, which increases the difficulty of subsequent processing. The semi-transparent reflector 111 inside the laser galvanometer scanning processing head 110 is deflected and moved to achieve rapid movement of the light beam and process the diamond film 200. In this embodiment, the laser galvanometer scanning processing head 110 is also provided with a visual monitoring optical fiber 112 and a welding optical fiber 113. The visual monitoring optical fiber 112 is electrically connected to the semi-transparent reflector 111, and the visual monitoring optical fiber 112 is electrically connected to the welding optical fiber 113. The visual monitoring optical fiber 112 determines whether the laser power needs to be increased based on the data collected by the semi-transparent reflector 111, thereby controlling the welding optical fiber 113 to adjust the corresponding laser power, wherein the information feedback frequency is 500-1000 Hz.
[0037] See also Figure 2 , Figure 3 and Figure 4The first protection mechanism 120 is used to supply gas to form a protective gas film during the processing of the diamond film 200. Specifically, the first protection mechanism 120 is provided with a mounting groove 121 for placing the diamond film 200 to be processed. The first protection mechanism 120 is provided with a built-in pipeline 122. The built-in pipeline 122 is provided with an air inlet 123 and an air outlet 124, and the air outlet 124 faces the mounting groove 121. The air inlet 123 is used to introduce gas into the built-in pipeline 122, and then the gas is distributed through the built-in pipeline and discharged from the air outlet 124. The setting of the air outlet 124 toward the mounting groove 121 can make the discharged gas form an air film. The formation of the air film does not affect the passage of the laser, and isolates the interference and absorption of the laser by dust and splashes during the polishing process.
[0038] The built-in pipeline 122 includes an annular tube inner wall 125, an annular tube outer wall 126 and a connecting rod 127. The annular tube inner wall 125 is arranged in the annular tube outer wall 126 and forms an annular gas cavity 128. There are multiple connecting rods 127 and they are evenly arranged between the annular tube inner wall 125 and the annular tube outer wall 126. The connecting rods 127 can play a role in strengthening the annular tube inner wall 125 and the annular tube outer wall 126. The air inlet 123 is arranged on the annular tube outer wall 126 and communicates with the gas cavity 128. The air outlet 124 is arranged on the annular tube inner wall 125 and communicates with the gas cavity 128. There are two air inlets 123 and they are symmetrically arranged on the annular tube outer wall 126. There are 10-30 air outlets 124 and they are evenly distributed on the annular tube inner wall 125 in an annular shape. The opening direction of the air outlet 124 is toward the center of the annular tube inner wall 125. By setting two air inlets 123 and multiple air outlets 124, rapid air intake and uniform air discharge can be achieved, and the opening direction of the air outlets 124 is all toward the center of the inner wall 125 of the annular tube, so that the exhausted gas can form an air film along the position toward the center of the circle, and the air film is more uniform. By controlling the gas entering from the air inlet 123, and the number of air outlets 124 is large and the aperture is small, a high-pressure air film layer can be formed, which is beneficial to reduce the periodic effect of dust on laser energy during the processing and improve the polishing quality. It should be understood that the air inlet 123 is connected to the air pipe to achieve air intake, wherein the pressure of the air pipe connected to the air inlet 123 is greater than 250kPa. Please refer to Figure 5 , Figure 6 and Figure 7, the second protection mechanism 130 is arranged below the first protection mechanism 120, and the second protection mechanism 130 is provided with an air intake port 131 for sucking away dust and splashes during the processing, and the air intake port 131 is connected to the mounting groove 121. The laser polishing device 100 of the diamond film also includes a negative pressure mechanism (not shown in the figure), the second protection mechanism 130 is a hollow structure, and the air intake port 131 is connected to the negative pressure mechanism. The negative pressure mechanism can form a low-pressure air intake layer at the second protection mechanism 130, quickly and efficiently suck away dust and splashes during the processing, and prevent dust and splashes from affecting laser processing. It should be understood that the air intake port 131 is connected to the air pipe to achieve air intake, wherein the pressure of the air pipe connected to the air intake port 131 is greater than 21kPa. It can be seen that the pressure of the second protection mechanism 130 is significantly lower than that of the first protection mechanism 120, which makes it easier for dust and splashes generated during the processing to move from the direction of the first protection mechanism 120 toward the direction of the second protection mechanism 130. The air film formed by the first protection mechanism 120 prevents the dust and splashes generated during the processing from moving upward. The dual effects of the air film and pressure make the dust and splashes suction effect better.
[0039] The working principle of the laser polishing device 100 for diamond film is as follows: the diamond film 200 is placed in the mounting groove 121 of the first protection mechanism 120, and then gas is introduced into the air inlet 123 of the first protection mechanism 120, and the gas is evenly discharged from the air outlet 124, and at the same time, the negative pressure adsorption at the second protection mechanism 130 is started, and then the laser galvanometer scanning processing head 110 starts laser processing, and the gas discharged from the air outlet 124 of the first protection mechanism 120 forms an air film toward the center, which neither affects the passage of the laser nor isolates the interference and absorption of the laser by dust and splashes during the polishing process; at the same time, the negative pressure adsorption at the second protection mechanism 130 can absorb the dust and splashes during the polishing process. The laser polishing device 100 for diamond film improves the gas protection during the polishing process, adopts air supply and air suction to manufacture a high-pressure air film layer and a low-pressure air suction layer, and forms a thin film layer in the middle by the introduction of high-pressure gas, and the air film layer does not affect the laser transmission. In addition, by providing a low-pressure layer, dust generated during the laser polishing of the diamond film 200 is sucked away, thereby reducing the absorption effect of dust on laser.
[0040] In addition, the utility model also provides a production device for a diamond film 200, which includes the laser polishing device 100 for the diamond film.
[0041] In summary, the laser polishing device 100 of the diamond film provided by the utility model is provided with a first protection mechanism 120 and a second protection mechanism 130, wherein the air inlet 123 of the first protection mechanism 120 takes in air and discharges it from the air outlet 124, and the discharged gas forms an air film toward the center, which neither affects the passage of the laser nor isolates the interference and absorption of the laser by dust and splashes during the polishing process; at the same time, the negative pressure adsorption at the second protection mechanism 130 can absorb the dust and splashes during the polishing process. The laser polishing device 100 of the diamond film improves the gas protection during the polishing process, adopts air supply and air suction to manufacture a high-pressure air film layer and a low-pressure air suction layer, and forms a thin film layer in the middle through the introduction of high-pressure gas, and the air film layer does not affect the laser transmission. In addition, by setting a low-pressure layer, the dust generated during the laser polishing of the diamond film 200 is sucked away, reducing the absorption effect of the dust on the laser.
[0042] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.
Claims
1. A laser polishing device for diamond film, It is characterized in that It includes a laser galvanometer scanning processing head, a first protection mechanism and a second protection mechanism. The first protection mechanism is provided with a mounting groove for placing the diamond film to be processed. The first protection mechanism is provided with a built-in pipeline. The built-in pipeline is provided with an air inlet and an air outlet. The air outlet faces the mounting groove. The second protection mechanism is arranged below the first protection mechanism. The second protection mechanism is provided with an air intake for sucking away dust and splashes during the processing process. The air intake is connected to the mounting groove.
2. The laser polishing device for diamond film according to claim 1, It is characterized in that The built-in pipeline includes an inner wall of an annular tube and an outer wall of an annular tube, the inner wall of the annular tube is arranged inside the outer wall of the annular tube and forms an annular gas cavity, the air inlet is arranged on the outer wall of the annular tube and communicates with the gas cavity, and the air outlet is arranged on the inner wall of the annular tube and communicates with the gas cavity.
3. The laser polishing device for diamond film according to claim 2, It is characterized in that There are two air inlets symmetrically arranged on the outer wall of the annular tube.
4. The laser polishing device for diamond film according to claim 2, It is characterized in that The number of the air outlets is 10-30 and they are evenly distributed in a ring shape on the inner wall of the annular tube.
5. The laser polishing device for diamond film according to claim 2, It is characterized in that The opening directions of the air outlets are all toward the center of the inner wall of the annular tube.
6. The laser polishing device for diamond film according to claim 2, It is characterized in that A plurality of connecting rods are arranged between the inner wall of the annular tube and the outer wall of the annular tube.
7. The laser polishing device for diamond film according to any one of claims 1 to 6, It is characterized in that The laser polishing device for diamond film further comprises a negative pressure mechanism, the second protection mechanism is a hollow structure, and the air intake port is connected to the negative pressure mechanism.
8. The laser polishing device for diamond film according to any one of claims 1 to 6, It is characterized in that The laser galvanometer scanning processing head is provided with a semi-transparent reflective mirror for collecting the surface conditions of the diamond to determine whether graphitization occurs on the surface.
9. The laser polishing device for a diamond film according to claim 8, It is characterized in that The laser galvanometer scanning processing head is also provided with a visual monitoring optical fiber and a welding optical fiber. The visual monitoring optical fiber is electrically connected to the semi-transparent reflector, and the visual monitoring optical fiber is electrically connected to the welding optical fiber.
10. A diamond film production device, It is characterized in that It comprises the laser polishing device for diamond film as claimed in any one of claims 1 to 9.