Welding tool and semiconductor welding device

Abstract

The utility model relates to the field of semiconductor processing equipment, and provides a welding tool and a semiconductor welding device. The welding tool comprises a supporting assembly, a first fixing plate, a second fixing plate, a first clamping assembly and a second clamping assembly, the first fixing plate and the second fixing plate are both arranged on the supporting assembly, and a preset angle is formed between the second fixing plate and the first fixing plate. The first clamping assembly is arranged on the supporting assembly in a sliding mode, and the first clamping assembly and the first fixing plate are arranged in a back-to-back mode. The first clamping assembly is suitable for being away from or close to the first fixing plate so as to change the distance between the first clamping assembly and the first fixing plate. The second clamping assembly is arranged on the supporting assembly, the second clamping assembly and the second fixing plate are arranged in a back-to-back mode, and the second clamping assembly can move relative to the second fixing plate. The welding tool provided by the utility model can be adapted to different welding products, and different welding tools do not need to be replaced, so that the welding efficiency of the welding products is effectively improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor processing equipment, in particular to a welding tool and a semiconductor welding device. Background Art

[0002] The high-end waste gas treatment equipment in the semiconductor industry has extremely high requirements for air tightness. Welding leaks are not allowed when welding the waste gas treatment equipment. Therefore, the welding quality requirements for the parallelism and verticality of the end faces of the welded parts are extremely high.

[0003] Currently, manual welding is the main method for welding welded parts. However, since the tooling and fixtures used for manual welding cannot adapt to different welding products, different welding tooling needs to be replaced for each welding product, which affects the welding efficiency and cannot guarantee stable welding quality. Utility Model Content

[0004] The utility model aims to solve at least one of the problems existing in the related art. To this end, the utility model proposes a welding jig, which can adapt to different welding products by adjusting the length between the first clamping assembly of the first fixing plate of the welding jig without changing different welding jigs, thereby effectively improving the efficiency of welding the welding products.

[0005] The utility model also provides a semiconductor welding device.

[0006] The first aspect of the utility model provides a welding tool, comprising:

[0007] Support components;

[0008] A first fixing plate, disposed on the supporting assembly;

[0009] A second fixing plate, disposed on the supporting assembly, wherein the second fixing plate forms a predetermined angle with the first fixing plate;

[0010] A first clamping assembly is slidably disposed on the supporting assembly, the first clamping assembly and the first fixing plate are disposed opposite to each other so that the first clamping assembly and the first fixing plate clamp the weldment; the first clamping assembly is suitable for moving away from or approaching the first fixing plate to change the distance between the first clamping assembly and the first fixing plate;

[0011] The second clamping assembly is arranged on the supporting assembly. The second clamping assembly is arranged back to back with the second fixing plate. The second clamping assembly can move relative to the second fixing plate.

[0012] According to a welding tool provided in an embodiment of the utility model, the first clamping assembly includes:

[0013] a first connecting member, the first connecting member being slidably connected to the supporting assembly;

[0014] A first clamping member, wherein a fixed end of the first clamping member is connected to the first connecting member, an extended end of the first clamping member is arranged opposite to the first fixing plate, and the extended end of the first clamping member is movable relative to the first fixing plate.

[0015] According to a welding tool provided by an embodiment of the utility model, the support assembly is provided with a sliding member, and the first connecting member is slidably matched with the sliding member.

[0016] According to a welding tool provided in an embodiment of the utility model, the second clamping assembly includes:

[0017] a second connecting member, the second connecting member being connected to the supporting assembly;

[0018] A second clamping member, wherein the fixed end of the second clamping member is arranged on the second connecting member, the extended end of the second clamping member is arranged opposite to the second fixing plate, and the extended end of the second clamping member can move relative to the second fixing plate.

[0019] A welding tool provided according to an embodiment of the utility model also includes:

[0020] An auxiliary clamping assembly is connected to the first clamping assembly, the auxiliary clamping assembly and the first clamping assembly form a predetermined angle therebetween, and the auxiliary clamping assembly is suitable for abutting against the weldment.

[0021] According to a welding tool provided in an embodiment of the utility model, the auxiliary clamping assembly comprises:

[0022] an auxiliary positioning member, the auxiliary positioning member being arranged on the first connecting member, the abutting surface of the auxiliary positioning member being coplanar with the abutting surface of the second fixing plate;

[0023] An auxiliary clamping piece, wherein the fixed end of the auxiliary clamping piece is connected to the first connecting piece, the extending end of the auxiliary clamping piece is arranged back to back with the auxiliary positioning piece, and the extending end of the auxiliary clamping piece can move relative to the auxiliary positioning piece so that the auxiliary clamping piece abuts against the welding piece.

[0024] According to a welding tool provided by an embodiment of the utility model, the first clamping member is provided with a pressure sensor, and the pressure sensor is used to detect the pressure applied to the first clamping member.

[0025] According to a welding tool provided in an embodiment of the utility model, the support assembly includes a base plate and a support member, the support member is arranged on the base plate, the first clamping assembly is slidably connected to the base plate, and the first fixing plate, the second fixing plate and the second clamping assembly are all installed on the support member.

[0026] According to a welding tool provided by an embodiment of the utility model, a plurality of connection blocks are arranged between the base plate and the support member, and the plurality of connection blocks are arranged on the base plate at intervals.

[0027] The semiconductor welding device provided in the second aspect of the present invention includes a welding robot, a pneumatic control element and any one of the welding tooling described above, wherein the pneumatic control element is electrically connected to the control system of the welding robot, and the first clamping assembly and the second clamping assembly are both connected to the pneumatic control element.

[0028] The above one or more technical solutions in the embodiments of the utility model have at least one of the following technical effects:

[0029] According to the welding jig provided by the embodiment of the utility model, the distance between the first clamping assembly and the first fixed plate is changed by moving the first clamping assembly away from or close to the first fixed plate, so that the length of the welding jig from the first fixed plate to the first clamping assembly can be adjusted according to the actual length of the welded part, so that the welding jig can clamp welded parts of different lengths, effectively improving the adaptability of the welding jig to welded parts of different specifications. Furthermore, when the welding robot welds welded parts of different specifications, the length of the welding jig from the first clamping assembly of the first fixed plate can be adjusted so that the welding jig can adapt to different welding products without changing different welding jigs, effectively improving the efficiency of welding the welding products. At the same time, since the welded part is fixed by the welding jig, the consistency of the weld is guaranteed, gaps in the weld are avoided, and the welding quality is effectively improved.

[0030] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0032] Figure 1 It is a three-dimensional structural schematic diagram of a welding tool provided in an embodiment of the utility model;

[0033] Figure 2 It is a schematic diagram of the top view of the welding tool provided in the embodiment of the utility model;

[0034] Figure 3 It is a three-dimensional structural schematic diagram of the first clamping assembly provided in an embodiment of the utility model;

[0035] Figure 4 It is a rear structural schematic diagram of the first clamping assembly provided by an embodiment of the utility model;

[0036] Figure 5 It is a schematic diagram of the top view of the support member provided in the embodiment of the utility model;

[0037] Figure 6 It is a structural schematic diagram of a welding part provided in an embodiment of the utility model.

[0038] Reference numerals:

[0039] 100, support assembly; 110, sliding member; 120, base plate; 130, support member; 131, first mounting groove; 132, second mounting groove; 133, third mounting groove; 140, connecting block; 200, first fixing plate; 300, second fixing plate; 400, first clamping assembly; 410, first connecting member; 411, convex plate; 420, first clamping member; 421, first clamping plate; 422, first cylinder; 500, second clamping assembly; 510, second connecting member; 520, second clamping member; 521, second clamping plate; 522, second cylinder; 600, auxiliary clamping assembly; 610, auxiliary positioning member; 620, auxiliary clamping member; 621, auxiliary clamping plate; 622, auxiliary cylinder; 700, welding member; 710, opening. DETAILED DESCRIPTION

[0040] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0041] In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0042] In the description of the embodiments of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0043] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0044] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model embodiment. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0045] Combine the following Figures 1 to 6 The welding tool provided by the embodiment of the first aspect of the utility model is described.

[0046] Figure 1 The three-dimensional structural diagram of the welding tool provided by the embodiment of the utility model is illustrated. Figure 2 The schematic diagram of the top view of the welding tool provided by the embodiment of the utility model is illustrated as follows: Figure 1 and Figure 2 As shown, the welding tool includes a support assembly 100, a first fixing plate 200, a second fixing plate 300, a first clamping assembly 400 and a second clamping assembly 500. The first fixing plate 200 and the second fixing plate 300 are both arranged on the support assembly 100, and a predetermined angle is formed between the second fixing plate 300 and the first fixing plate 200. The first clamping assembly 400 is slidably arranged on the support assembly 100, and the first clamping assembly 400 and the first fixing plate 200 are arranged opposite to each other, so that the first clamping assembly 400 and the first fixing plate 200 clamp the welding piece 700. The first clamping assembly 400 is suitable for moving away from or approaching the first fixing plate 200 to change the distance between the first clamping assembly 400 and the first fixing plate 200. The second clamping assembly 500 is arranged on the support assembly 100, and the second clamping assembly 500 and the second fixing plate 300 are arranged opposite to each other, and the second clamping assembly 500 can move relative to the second fixing plate 300.

[0047] According to the welding jig provided by the embodiment of the utility model, by moving the first clamping assembly 400 away from or close to the first fixing plate 200, the distance between the first clamping assembly 400 and the first fixing plate 200 is changed, so that the length of the welding jig from the first fixing plate 200 to the first clamping assembly 400 can be adjusted according to the actual length of the weldment 700, so that the welding jig can clamp weldments 700 of different lengths, effectively improving the adaptability of the welding jig to weldments 700 of different specifications. Furthermore, when the welding robot welds weldments 700 of different specifications, the length of the welding jig from the first clamping assembly 400 of the first fixing plate 200 can be adjusted, so that the welding jig can adapt to different welding products without changing different welding jigs, effectively improving the efficiency of welding the welding products. At the same time, since the weldment 700 is fixed by the welding jig, the consistency of the weld is effectively guaranteed during welding, and gaps in the weld are avoided, which effectively improves the welding quality.

[0048] For example, Figure 6 An example of a structural diagram of a welded part is shown in Figure 6Taking the structure of the welding piece 700 shown as an example, the welding piece 700 is provided with an opening 710. Before welding the welding piece 700, the first clamping assembly 400 is pushed away from or close to the first fixing plate 200 according to the size of the opening 710 of the welding piece 700 to adjust the distance between the first clamping assembly 400 and the first fixing plate 200. Subsequently, the opening 710 of the welding piece 700 is covered on the welding fixture, and the welding piece 700 is positioned by the first fixing plate 200 and the second fixing plate 300, and the first clamping assembly 400 and the second clamping assembly 500 are abutted against the inner wall surface of the welding piece 700 to fix the welding piece 700 on the welding fixture, so as to facilitate welding of the outer wall surface of the welding piece 700 by the welding robot, thereby ensuring the welding quality of the welding piece 700.

[0049] It should be noted that the predetermined angle is set according to the actual structure of the welding part 700. For example, when the welding part 700 is Figure 6 In the structure shown, that is, when the angle between the abutting surface of the first fixing plate 200 and the abutting surface of the second fixing plate 300 is 90°, the predetermined angle is preferably 90°.

[0050] Figure 3 The three-dimensional structural diagram of the first clamping assembly provided by the embodiment of the utility model is illustrated. Figure 4 The rear view structure diagram of the first clamping assembly provided by the embodiment of the utility model is illustrated as follows: Figure 3 and Figure 4 As shown, in the embodiment of the present utility model, the first clamping assembly 400 includes a first connecting member 410 and a first clamping member 420. The first connecting member 410 is slidably connected to the supporting assembly 100, the fixed end of the first clamping member 420 is connected to the first connecting member 410, the extended end of the first clamping member 420 is arranged opposite to the first fixing plate 200, and the extended end of the first clamping member 420 can move relative to the first fixing plate 200.

[0051] It is understandable that when the distance between the first clamping assembly 400 and the first fixed plate 200 needs to be adjusted, the first connecting member 410 can be pushed to slide relative to the support assembly 100 so that the first connecting member 410 drives the first clamping member 420 to move to a suitable position, thereby adjusting the distance between the first clamping member 420 and the first fixed plate 200.

[0052] When the welding part 700 needs to be clamped and fixed, the protruding end of the first clamping part 420 can be moved in the direction away from the first fixing plate 200, so that the first clamping part 420 abuts against the welding part 700, and at the same time, the first fixing plate 200 abuts against the welding part 700, so that the first fixing plate 200 and the first clamping part 420 cooperate with each other to achieve clamping of the welding part 700 in the direction from the first fixing plate 200 to the first clamping part 420.

[0053] Specifically, Figure 3 and Figure 4 As shown, the first clamping member 420 includes a first clamping plate 421 and a first cylinder 422. The fixed end of the first cylinder 422 is mounted on the first connecting member 410, and the first clamping plate 421 is mounted on the extended end of the first cylinder 422, so that the extended end of the first cylinder 422 is controlled to extend to drive the first clamping plate 421 to extend, so that the first clamping plate 421 abuts against the inner wall surface of the weldment 700, so as to utilize the mutual cooperation between the first clamping plate 421 and the first fixed plate 200 to achieve the clamping of the weldment 700.

[0054] In this embodiment, the first connecting member 410 can be an L-shaped connecting plate, one of the walls of the L-shaped connecting plate is slidably connected to the support assembly 100, the fixed end of the first cylinder 422 is detachably connected to the other wall of the L-shaped connecting plate through threaded cooperation, and the protruding end of the first cylinder 422 passes through the other wall of the L-shaped connecting plate and is connected to the first clamping plate 421.

[0055] Furthermore, if Figure 3 and Figure 4 As shown, in order to achieve the sliding fit between the first clamping member 420 and the supporting assembly 100 , the supporting assembly 100 is provided with a sliding member 110 , and the first connecting member 410 is slidably fitted with the sliding member 110 .

[0056] Among them, the sliding member 110 can be a guide rail, the slide rail is arranged on the support assembly 100, the first connecting member 410 is a slider slidably arranged on the guide rail, and the slider is connected to the first cylinder 422 through an L-shaped connecting plate, so as to adjust the position of the first clamping plate 421 and the first cylinder 422 in the support assembly 100 by pushing the slider to slide on the guide rail.

[0057] The sliding member 110 can also be a screw module, and the first connecting member 410 is a slider that cooperates with the screw. The slider and the first cylinder 422 are also connected by an L-shaped connecting plate to control the position of the slider on the guide rail to adjust the position of the first clamping plate 421 and the first cylinder 422 in the support assembly 100.

[0058] Of course, the sliding member 110 is not limited to the above-mentioned guide rail or screw module. A sliding groove may be directly set on the support component 100, and the first connecting member 410 can be slidably matched with the sliding groove. Other methods can also be used to achieve sliding matching between the first connecting member 410 and the support component 100.

[0059] In the embodiments of the present invention, Figure 1 and Figure 2As shown, the second clamping assembly 500 includes a second connecting member 510 and a second clamping member 520. The second connecting member 510 is connected to the supporting assembly 100, the fixed end of the second clamping member 520 is arranged on the second connecting member 510, the extended end of the second clamping member 520 is arranged opposite to the second fixing plate 300, and the extended end of the second clamping member 520 can move relative to the second fixing plate 300.

[0060] It can be understood that after the first clamping member 420 and the first fixed plate 200 cooperate to clamp the welding member 700, the extended end of the second clamping member 520 moves in a direction away from the second fixed plate 300, so that the second clamping member 520 abuts against the welding member 700, and at the same time, the second fixed plate 300 abuts against the welding member 700, thereby achieving clamping of the welding member 700 in the direction from the second fixed plate 300 to the second clamping member 520 through the mutual cooperation between the second fixed plate 300 and the second clamping member 520.

[0061] Specifically, from Figure 3 and Figure 4 As shown, the second clamping member 520 includes a second clamping plate 521 and a second cylinder 522. The fixed end of the second cylinder 522 is mounted on the second connecting member 510, and the second clamping plate 521 is mounted on the protruding end of the second cylinder 522, so that the second clamping plate 521 is extended by controlling the protruding end of the second cylinder 522 to extend, so that the second clamping plate 521 abuts against the inner wall surface of the weldment 700, so as to realize the clamping of the weldment 700 by utilizing the mutual cooperation between the second clamping plate 521 and the second fixing plate 300.

[0062] In this embodiment, the second connecting member 510 can be an L-shaped connecting plate, one of the walls of the L-shaped connecting plate is detachably connected to the supporting component, the fixed end of the second cylinder 522 is detachably connected to the other wall of the L-shaped connecting plate, and the protruding end of the second cylinder 522 passes through the other wall of the L-shaped connecting plate and is connected to the second clamping plate 521.

[0063] In the embodiment of the utility model, the first clamping member 420 is provided with a pressure sensor, and the pressure sensor is used to detect the pressure exerted on the first clamping member 420. When the first clamping member 420 and the first fixing plate 200 clamp the weldment 700, the pressure between the first clamping member 420 and the weldment 700 changes, and the pressure sensor can detect the corresponding pressure change and send a signal indicating that the clamping is successful. After detecting that the clamping is successful, the extended end of the first clamping member 420 stops extending, thereby preventing the first clamping member 420 from continuing to move and causing damage to the weldment 700.

[0064] In the embodiment of the present utility model, Figure 3 and Figure 4As shown, the welding tool also includes an auxiliary clamping assembly 600 , which is connected to the first clamping assembly 400 . There is a predetermined angle between the auxiliary clamping assembly 600 and the first clamping assembly 400 . The auxiliary clamping assembly 600 is suitable for abutting against the weldment 700 .

[0065] It is understandable that, since the auxiliary clamping assembly 600 is connected to the first clamping assembly 400, the auxiliary clamping assembly 600 can move with the first clamping assembly 400. When the length of the weldment 700 is too long, so that the second clamping assembly 500 cannot completely abut against the weldment 700, the auxiliary clamping assembly 600 can be used to perform auxiliary clamping on the weldment 700, so as to enhance the clamping force of the welding tool on the weldment 700, avoid the weldment 700 from shaking during welding, fix the placement angle of the weldment 700, improve the stability of the weldment 700 during welding, prevent the weldment 700 from being deformed during welding, and ensure the welding quality of the weldment 700.

[0066] Specifically, Figure 3 and Figure 4 As shown, the auxiliary clamping assembly 600 includes an auxiliary positioning member 610 and an auxiliary clamping member 620. The auxiliary positioning member 610 is disposed on the first connecting member 410, and the abutting surface of the auxiliary positioning member 610 is coplanar with the abutting surface of the second fixing plate 300. The fixed end of the auxiliary clamping member 620 is connected to the first connecting member 410, and the extended end of the auxiliary clamping member 620 is disposed opposite to the auxiliary positioning member 610. The extended end of the auxiliary clamping member 620 can move relative to the auxiliary positioning member 610 so that the auxiliary clamping member 620 abuts against the welding member 700.

[0067] That is, in this embodiment, when the second fixing plate 300 abuts against the welding piece 700, the auxiliary positioning piece 610 abuts against the welding piece 700. When the auxiliary clamping assembly 600 is required to perform auxiliary clamping on the welding piece 700, the extended end of the auxiliary clamping piece 620 can be moved away from the auxiliary positioning piece 610, so that the auxiliary clamping piece 620 abuts against the welding piece 700, and the auxiliary positioning piece 610 abuts against the welding piece 700, so that the welding piece 700 is auxiliary clamped by the auxiliary positioning piece 610 and the auxiliary clamping piece 620, so as to achieve the placement angle of the fixed welding piece 700 and improve the stability of the welding piece 700 during welding.

[0068] Specifically, Figure 3 and Figure 4As shown, the auxiliary clamping member 620 includes an auxiliary clamping plate 621 and an auxiliary cylinder 622. The fixed end of the auxiliary cylinder 622 is mounted on the first connecting member 410, and the auxiliary clamping plate 621 is mounted on the extended end of the auxiliary cylinder 622, so that the auxiliary clamping plate 621 is driven to extend by controlling the extended end of the auxiliary cylinder 622, so that the auxiliary clamping plate 621 abuts against the inner wall surface of the weldment 700, so as to realize the auxiliary clamping of the weldment 700 by utilizing the cooperation between the auxiliary clamping plate 621 and the auxiliary positioning member 610.

[0069] Among them, a protruding plate 411 is provided on the side of the first connecting member 410 facing away from the first clamping plate 421, the fixed end of the auxiliary cylinder 622 is detachably connected to the protruding plate 411, and the protruding end of the auxiliary cylinder 622 passes through the protruding plate 411 and is connected to the auxiliary mounting plate to realize the connection between the auxiliary cylinder 622 and the first connecting member 410.

[0070] In this embodiment, the auxiliary positioning member 610 may be a square plate structure, and the auxiliary positioning member 610 and the first connecting member 410 may be detachably connected through threaded cooperation.

[0071] In the embodiments of the present invention, Figure 1 and Figure 2 As shown, the support assembly 100 includes a substrate 120 and a support member 130 , the support member 130 is disposed on the substrate 120 , the first clamping assembly 400 is slidably connected to the substrate 120 , and the first fixing plate 200 , the second fixing plate 300 and the second clamping assembly 500 are all installed on the support member 130 .

[0072] It can be understood that by installing the first fixed plate 200, the second fixed plate 300 and the second clamping assembly 500 on the support member 130, and slidingly installing the first clamping assembly 400 on the substrate 120, the first clamping assembly 400 and the other fixed plates can be separated by the substrate 120 and the support member 130, so as to facilitate the separate operation of the first clamping assembly 400 and ensure that the first clamping assembly 400 will not interfere with the first fixed plate 200 when moving.

[0073] Specifically, Figure 5 The schematic diagram of the top view of the support member provided by the embodiment of the utility model is illustrated as follows: Figure 5 As shown, the support member 130 is a plate-shaped structure, and the support member 130 is formed with a first mounting groove 131 and a second mounting groove 132. The lower end of the first fixing plate 200 is inserted into the first mounting groove 131, and the first fixing plate 200 is fixed by bolts, so that the first fixing plate 200 can limit and fix the welding member 700. The lower end of the second fixing plate 300 is inserted into the second mounting groove 132, and the first fixing plate 200 is fixed by bolts, so that the second fixing plate 300 can limit and fix the welding member 700.

[0074] The support member 130 is further formed with a third mounting groove 133 , the lower end of the second connecting member 510 is inserted into the third mounting groove 133 , and the second connecting member 510 is fixed by bolts to complete the installation of the second connecting member 510 on the support member 130 .

[0075] It should be noted here that after the first connecting member 410 is pushed to move and the first clamping plate 421 is adjusted to a suitable position, the first connecting member 410 can be connected to the base plate 120 by bolts to fix the first connecting member 410, thereby fixing the first clamping plate 421 and the first cylinder 422.

[0076] Furthermore, if Figure 1 and Figure 2 As shown, a plurality of connecting blocks 140 are disposed between the substrate 120 and the support member 130. The plurality of connecting blocks 140 are disposed at intervals on the substrate 120. The support member 130 is raised by the connecting blocks 140 to prevent the support member 130 from interfering with the guide rail and affecting the movement of the first clamping assembly 400. Figure 1 As shown, the connection block 140 may be a block, and there are 11 blocks. The 11 blocks are detachably connected to the base plate 120 through bolts, and the 11 blocks are detachably connected to the support member 130 through bolts.

[0077] The second embodiment of the utility model provides a semiconductor welding device, which includes a welding robot, a pneumatic control element and the welding tooling described in the first embodiment. The pneumatic control element is electrically connected to the control system of the welding robot, and the first clamping assembly 400 and the second clamping assembly 500 are both connected to the pneumatic control element.

[0078] According to the semiconductor welding device provided by the embodiment of the utility model, when welding the welding piece 700, the welding piece 700 is clamped by the first clamping assembly 400 and the first fixed plate 200, and the welding piece 700 is clamped by the second clamping assembly 500 and the second fixed plate 300 at the same time, so as to fix the welding piece 700 so that the welding piece 700 cannot move or shake, and finally the welding robot is controlled to weld the welding piece 700 so that the weld seam of the welding piece 700 is continuous, which effectively avoids the appearance of gaps in the weld seam of the welding piece 700 and effectively improves the welding quality.

[0079] Specifically, in this embodiment, the pneumatic control element is connected to the first cylinder 422, the second cylinder 522 and the auxiliary cylinder 622 through the air pipe to control the movement of the first cylinder 422, the second cylinder 522 and the auxiliary cylinder 622. The control system of the welding robot can be connected to the pneumatic control element through a positioner.

[0080] Combine the following Figures 1 to 6The operation process of the welding tool provided in the embodiment of the utility model is described.

[0081] by Figure 6 As an example, after determining the size of the opening 710 of the welding piece 700, push the first connecting piece 410 to slide along the guide rail to adjust the first clamping plate 421 to a suitable position, ensuring that the distance between the first clamping plate 421 and the first fixing plate 200 can adapt to the size of the opening 710 of the welding piece 700. Cover the welding piece 700 with the welding tool, and abut one of the inner wall surfaces of the welding piece 700 against the first fixing plate 200, and abut the other inner wall surface of the welding piece 700 against the second fixing plate 300.

[0082] The control system of the welding robot controls the operation of the first cylinder 422 so that the extending end of the first cylinder 422 extends, driving the first clamping plate 421 to abut against the inner wall surface of the weldment 700, and clamping the weldment 700 through the first clamping plate 421 and the first fixing plate 200.

[0083] The control system of the welding robot controls the operation of the second cylinder 522 and the auxiliary cylinder 622, so that the extended end of the second cylinder 522 extends, driving the second clamping plate 521 to abut against the inner wall surface of the weldment 700, thereby clamping the weldment 700 through the second clamping plate 521 and the second fixing plate 300. At the same time, the extended end of the auxiliary cylinder 622 extends, driving the auxiliary clamping plate 621 to abut against the inner wall surface of the weldment 700, thereby clamping the weldment 700 through the auxiliary clamping plate 621 and the auxiliary positioning plate to ensure that the weldment 700 does not move or shake.

[0084] Furthermore, when the welding robot is used to weld the weldment 700, the weldment 700 will not move or shake, thereby ensuring the welding quality of the weldment 700 by the welding robot and effectively improving the welding efficiency of the welding product.

[0085] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A welding tool, It is characterized in that include: Support components; A first fixing plate, disposed on the supporting assembly; A second fixing plate, disposed on the supporting assembly, wherein the second fixing plate forms a predetermined angle with the first fixing plate; A first clamping assembly is slidably disposed on the supporting assembly, the first clamping assembly and the first fixing plate are disposed opposite to each other so that the first clamping assembly and the first fixing plate clamp the weldment; the first clamping assembly is suitable for moving away from or approaching the first fixing plate to change the distance between the first clamping assembly and the first fixing plate; The second clamping assembly is arranged on the supporting assembly. The second clamping assembly is arranged back to back with the second fixing plate. The second clamping assembly can move relative to the second fixing plate.

2. The welding tool according to claim 1, It is characterized in that The first clamping assembly comprises: a first connecting member, the first connecting member being slidably connected to the supporting assembly; A first clamping member, wherein a fixed end of the first clamping member is connected to the first connecting member, an extended end of the first clamping member is arranged opposite to the first fixing plate, and the extended end of the first clamping member is movable relative to the first fixing plate.

3. The welding tool according to claim 2, It is characterized in that The supporting assembly is provided with a sliding member, and the first connecting member is slidably matched with the sliding member.

4. The welding tool according to claim 2, It is characterized in that The second clamping assembly comprises: a second connecting member, the second connecting member being connected to the supporting assembly; A second clamping member, wherein the fixed end of the second clamping member is arranged on the second connecting member, the extended end of the second clamping member is arranged opposite to the second fixing plate, and the extended end of the second clamping member can move relative to the second fixing plate.

5. The welding tool according to any one of claims 2 to 4, It is characterized in that Also includes: An auxiliary clamping assembly is connected to the first clamping assembly, the auxiliary clamping assembly and the first clamping assembly form a predetermined angle therebetween, and the auxiliary clamping assembly is suitable for abutting against the weldment.

6. The welding tool according to claim 5, It is characterized in that The auxiliary clamping assembly comprises: an auxiliary positioning member, the auxiliary positioning member being arranged on the first connecting member, the abutting surface of the auxiliary positioning member being coplanar with the abutting surface of the second fixing plate; An auxiliary clamping piece, wherein the fixed end of the auxiliary clamping piece is connected to the first connecting piece, the extending end of the auxiliary clamping piece is arranged back to back with the auxiliary positioning piece, and the extending end of the auxiliary clamping piece can move relative to the auxiliary positioning piece so that the auxiliary clamping piece abuts against the welding piece.

7. The welding tool according to any one of claims 2 to 4, It is characterized in that The first clamping member is provided with a pressure sensor, and the pressure sensor is used to detect the pressure applied to the first clamping member.

8. The welding tool according to any one of claims 1 to 4, It is characterized in that The support assembly includes a base plate and a support member, the support member is arranged on the base plate, the first clamping assembly is slidably connected to the base plate, and the first fixing plate, the second fixing plate and the second clamping assembly are all installed on the support member.

9. The welding tool according to claim 8, It is characterized in that A plurality of connection blocks are arranged between the substrate and the support member, and the plurality of connection blocks are arranged on the substrate at intervals.

10. A semiconductor welding device, It is characterized in that It comprises a welding robot, a pneumatic control element and the welding tooling as described in any one of claims 1 to 9, wherein the pneumatic control element is electrically connected to the control system of the welding robot, and the first clamping assembly and the second clamping assembly are both connected to the pneumatic control element.

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