Monocrystalline silicon rod processing and cooling device

Abstract

The utility model discloses a silicon single crystal rod processing and cooling device which comprises a cooling box, a protective cover shell is connected to the cooling box through a hinge, the protective cover shell is connected with the cooling box through a connecting rod kit, the overall strength is improved, material ports are formed in the two sides of the protective cover shell, traction mechanisms are arranged at the two ends of the cooling box, and silicon rods are driven to be conveyed through the traction mechanisms. A water cooling bin and an air drying bin are arranged in the cooling box and are independently distinguished through a water retaining partition plate arranged in the cooling box, a cooling mechanism is arranged in the water cooling bin, a plurality of air outlets are formed in the air drying bin, the upper portions of the multiple air outlets directly face the silicon rods, a draught fan is installed in each air outlet, and a guide cylinder is arranged between every two adjacent air outlets. The silicon rod cooling device has the advantages that stable cleaning, automatic conveying, rapid water cooling and automatic water absorption and air drying can be carried out on the silicon rod, surface cleaning can be carried out while cooling is guaranteed, and the overall quality of the silicon rod is greatly improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of single crystal silicon rod processing, and more specifically, particularly relates to a single crystal silicon rod processing cooling device. Background Art

[0002] At present, single crystal silicon rods are used to manufacture semiconductor devices and solar cells. Single crystal silicon rods are shaped or pulled in the furnace through zone melting or direct pulling processes. They are silicon single crystal rods in which silicon atoms are rearranged according to the lattice arrangement direction of the seed crystal. During the production process, single crystal silicon rods need to be cooled to assist their shaping, so cooling equipment is used to process them.

[0003] Existing cooling equipment usually uses water cooling. Although it can be cooled quickly, the silicon rod will absorb external dust due to surface overheating before cooling. At the same time, there are water droplets on the surface after water cooling, which is easy to stick to dust and cause surface contamination. The cleanliness of the silicon rod during the cooling process cannot be guaranteed, and timely processing cannot be carried out. The staff cannot observe the cooling status and cannot conduct real-time inspections, and the cooling stability of the silicon rod cannot be guaranteed. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a single crystal silicon rod processing cooling device to solve the problems raised in the above background technology.

[0005] To achieve the above objectives, the utility model is implemented through the following technical solutions: a single crystal silicon rod processing cooling device, including a cooling box, a protective cover shell is connected to the cooling box through a hinge, and the protective cover shell is connected to the cooling box through a connecting rod kit, material ports are arranged on both sides of the protective cover shell, and traction mechanisms are arranged at both ends of the cooling box, and the silicon rods are driven to be transported by the traction mechanism, a water cooling bin and an air drying bin are arranged in the cooling box, and are independently separated by a water retaining baffle arranged in the cooling box, a cooling mechanism is arranged in the water cooling bin, and a plurality of air outlets are arranged in the air drying bin, and the plurality of air outlets are directly opposite to the silicon rods, a fan is installed in each air outlet, and a guide cylinder is arranged between two adjacent air outlets, and the guide cylinder is clearance-matched with the silicon rods.

[0006] As an optional solution of the utility model, an observation port is arranged on the top of the protective cover shell, and tempered glass is installed in the observation port.

[0007] As an optional solution of the utility model, brush plates are symmetrically arranged on the material opening, and the silicon rods are cleaned by the brush plates.

[0008] As an optional solution of the utility model, the traction mechanism includes a guide frame, which is symmetrically installed on both sides of the silicon rod. A drive motor is arranged on the top of the guide frame, and a conveying wheel is arranged at the driving end of the drive motor, so that the single crystal silicon rod can be stably conveyed through the conveying wheel.

[0009] As an optional solution of the utility model, the cooling mechanism includes a water supply pipe group, which is divided into three pipe openings, and two of the pipe openings are symmetrically distributed and are both equipped with a first nozzle, the first nozzle is obliquely facing the silicon rod piece, and the first nozzle is fixedly installed by a support frame, and a second nozzle is arranged on the top of the other pipe opening, and the second nozzle is directly facing the silicon rod piece. A water leakage hole is arranged in the water cooling bin, a drain outlet is arranged at the bottom of the water cooling bin, and a water inlet is arranged on one side of the water cooling bin for continuous water supply.

[0010] As an optional solution of the utility model, a symmetrical electric cylinder is installed on one side of the water retaining baffle, a sponge block is provided at the pushing end of the electric cylinder, a card slot is provided in the sponge block, and water is quickly absorbed through the sponge block.

[0011] The utility model provides a single crystal silicon rod processing cooling device, which has the following beneficial effects:

[0012] The drive motor is set to drive the silicon rods to be transported to the cooling box, and water is continuously supplied through the water inlet. Under the setting of the first nozzle and the second nozzle, comprehensive cooling is carried out, and the silicon rods pass through the water retaining baffle and enter the guide cylinder. During this period, the sponge block is driven by the electric cylinder to quickly absorb water, which is convenient for subsequent air drying. The fan is set to continuously air dry the silicon rods passing through. The brush plates set at both ends can quickly clean the silicon rods entering and leaving, avoiding dust on the surface of the silicon rods before and after cooling, and improving the cooling stability and surface quality of the silicon rods. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the structure of the utility model;

[0014] Figure 2 It is a partial enlarged view of area A of the utility model;

[0015] Figure 3 It is a partial enlarged view of area B of the utility model;

[0016] Figure 4 It is a side view of the utility model;

[0017] Figure 5 It is the AA cross-sectional view of the present utility model.

[0018] In the figure: 1. cooling box; 101. connecting rod kit; 102. drain outlet; 103. water inlet; 2. protective cover shell; 201. observation port; 202. brush plate; 3. water cooling chamber; 301. support frame; 302. water leakage hole; 4. water supply pipe group; 401. first nozzle; 402. second nozzle; 5. water baffle; 6. electric cylinder; 7. sponge block; 8. guide frame; 801. driving motor; 9. conveying wheel; 10. silicon rod piece; 11. air drying chamber; 111. air outlet; 12. guide cylinder; 13. fan. DETAILED DESCRIPTION

[0019] The following is a further detailed description of the implementation of the present utility model in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present utility model, but cannot be used to limit the scope of the present utility model.

[0020] In the description of the present invention, unless otherwise specified, "multiple" means two or more; the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0021] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0022] See also Figures 1 to 5 The utility model provides a technical solution: a single crystal silicon rod processing cooling device, including a cooling box 1, a protective cover shell 2 is connected to the cooling box 1 through a hinge, and the protective cover shell 2 is connected to the cooling box 1 through a connecting rod kit 101 to improve the overall strength, an observation port 201 is arranged on the top of the protective cover shell 2, and tempered glass is installed in the observation port 201 to facilitate observation of the internal cooling situation, material ports are arranged on both sides of the protective cover shell 2, and brush plates 202 are symmetrically arranged on the material ports, and the silicon rod pieces 10 can be cleaned in and out by the brush plates 202 to avoid dust adhesion, and traction mechanisms are arranged at both ends of the cooling box 1, and the silicon rod pieces 10 are driven for transportation by the traction mechanisms.

[0023] The traction mechanism includes a guide frame 8, which is symmetrically installed on both sides of the silicon rod 10. A driving motor 801 is arranged on the top of the guide frame 8. A conveying wheel 9 is arranged at the driving end of the driving motor 801. The single crystal silicon rod is stably conveyed by the conveying wheel 9. A water cooling bin 3 and an air drying bin 11 are arranged in the cooling box 1, and are independently separated by a water retaining baffle 5 arranged in the cooling box 1. A cooling mechanism is arranged in the water cooling bin 3. The cooling mechanism includes a water supply pipe group 4. The water supply pipe group 4 is divided into three pipe openings, and among them The two pipe openings are symmetrically distributed and are both equipped with a first nozzle 401. The first nozzle 401 is obliquely facing the silicon rod 10 and is fixedly installed by a support frame 301. A second nozzle 402 is arranged on the top of the other pipe opening. The upper part of the second nozzle 402 faces the silicon rod 10, so that the silicon rod is water-cooled in all directions. A water leakage hole 302 is arranged in the water cooling bin 3, a drain port 102 is arranged at the bottom of the water cooling bin 3, and a water inlet 103 is arranged on one side of the water cooling bin 3 for continuous water supply.

[0024] A symmetrical electric cylinder 6 is installed on one side of the water-retaining baffle 5, and a sponge block 7 is provided at the pushing end of the electric cylinder 6. A card groove is provided in the sponge block 7, which fits the outer surface of the silicon rod 10 and quickly absorbs water through the sponge block 7. A plurality of air outlets 111 are provided in the air-drying bin 11, and the silicon rod 10 is directly above the plurality of air outlets 111. A fan 13 is installed in each air outlet 111 for continuous air drying. A guide cylinder 12 is provided between two adjacent air outlets 111, and the guide cylinder 12 is clearance-matched with the silicon rod 10 to facilitate stable transportation of the silicon rod 10.

[0025] The specific usage and function of this embodiment are as follows: First, the silicon rod 10 to be heated is introduced between the conveying wheels 9, and the driving motor 801 is started to drive the silicon rod 10 to be conveyed into the cooling box 1. Water is continuously supplied through the water inlet 103. Under the setting of the first nozzle 401 and the second nozzle 402, comprehensive cooling is performed. The silicon rod 10 passes through the water retaining baffle 5 and enters the guide cylinder 12. During this period, the electric cylinder 6 is started to drive the sponge block 7 to absorb water quickly, which is convenient for subsequent air drying. The fan 13 is started to continuously air dry the silicon rod 10 passing through. The brush plates 202 set at both ends can quickly clean the silicon rods 10 entering and leaving, avoid dust sticking on the surface of the silicon rods 10 before and after cooling, and improve the cooling stability and surface quality of the silicon rods 10.

[0026] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A single crystal silicon rod processing cooling device, characterized in that: The invention comprises a cooling box (1), wherein a protective cover shell (2) is connected to the cooling box (1) via a hinge, and the protective cover shell (2) is connected to the cooling box (1) via a connecting rod set (101), material ports are arranged on both sides of the protective cover shell (2), traction mechanisms are arranged at both ends of the cooling box (1), and silicon rods (10) are driven to be transported via the traction mechanisms, a water cooling bin (3) and an air drying bin (11) are arranged in the cooling box (1), and are independently separated by a water retaining baffle (5) arranged in the cooling box (1), a cooling mechanism is arranged in the water cooling bin (3), a plurality of air outlets (111) are arranged in the air drying bin (11), the plurality of air outlets (111) are directly opposite to the silicon rods (10), a fan (13) is installed in each air outlet (111), a guide cylinder (12) is arranged between two adjacent air outlets (111), and the guide cylinder (12) is clearance-matched with the silicon rods (10).

2. A single crystal silicon rod processing and cooling device according to claim 1, characterized in that: The top of the protective cover shell (2) is provided with an observation port (201), and tempered glass is installed in the observation port (201).

3. The single crystal silicon rod processing and cooling device according to claim 1, characterized in that: Brush plates (202) are symmetrically arranged on the material opening, and the silicon rods (10) are cleaned by the brush plates (202).

4. The single crystal silicon rod processing and cooling device according to claim 1, characterized in that: The traction mechanism comprises a guide frame (8), the guide frame (8) is symmetrically mounted on both sides of the silicon rod (10), a driving motor (801) is arranged on the top of the guide frame (8), and a conveying wheel (9) is arranged at the driving end of the driving motor (801), and the single crystal silicon rod is stably conveyed by the conveying wheel (9).

5. The single crystal silicon rod processing and cooling device according to claim 1, characterized in that: The cooling mechanism comprises a water supply pipe group (4), the water supply pipe group (4) is divided into three pipe openings, two of which are symmetrically distributed and both are equipped with a first nozzle (401), the first nozzle (401) is obliquely facing the silicon rod member (10), and the first nozzle (401) is fixedly installed by a support frame (301), a second nozzle (402) is arranged at the top of the other pipe opening, and the second nozzle (402) is directly facing the silicon rod member (10) above, a water leakage hole (302) is arranged in the water cooling bin (3), a drainage port (102) is arranged at the bottom of the water cooling bin (3), and a water inlet (103) is arranged on one side of the water cooling bin (3) for continuous water supply.

6. The single crystal silicon rod processing and cooling device according to claim 1, characterized in that: A symmetrical electric cylinder (6) is installed on one side of the water retaining baffle (5), a sponge block (7) is provided at the push-out end of the electric cylinder (6), a slot is provided in the sponge block (7), and water is quickly absorbed through the sponge block (7).

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