Carrier frame and processing device

Abstract

The utility model provides a carrier and a processing device, and relates to the technical field of semiconductor processing. The carrying frame comprises a carrying beam and two supports, the supports are provided with Z-direction driving pieces, the Z-direction driving pieces are connected with connecting bases, the connecting bases are rotationally connected with rotating bases through rotating shafts, and the rotating shafts extend in the Y direction; the carrying beam extends in the X direction and is connected between the two rotating seats, and at least one end, in the X direction, of the carrying beam serves as a sliding end and is in sliding connection with the top of the corresponding rotating seat in the X direction. The machining device comprises a working table and the carrying frame, the carrying frame is installed on the working table, and the carrying beam of the carrying frame is connected with a machining assembly. According to the carrier frame, the machining accuracy and consistency of parts on the working face can be guaranteed, the structural stability of a sliding rotating mechanism formed by the sliding end and the corresponding rotating base is high, the carrier beam and a machining assembly on the carrier beam can be stably borne, and therefore stable operation of the sliding rotating mechanism and the direction stability of the carrier beam are guaranteed; and the stable operation of the processing device is correspondingly ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a carrier and a processing device. Background Art

[0002] When processing some parts, it is necessary to place the parts on the working surface of the workbench. A carrier is built above the working surface, and the carrier beam of the carrier carries the processing components to process the parts. The orientation of the carrier beam and the processing components relative to the working surface directly determines the processing accuracy of the processing components on the parts.

[0003] In the prior art, the relative position of the carrier beam as a rigid part and the workbench is generally fixed or can only be adjusted in height up and down along the Z direction as a whole. There are errors in the flatness of the working surface of the workbench and the installation accuracy when the carrier beam is connected to the workbench, which makes it impossible to guarantee the relative orientation of the processing assembly and the working surface, resulting in low processing accuracy of the parts on it. In addition, the working surfaces of different workbenches have different flatnesses. When the carrier beam is connected to different workbenches, the relative orientation of its processing assembly and different working surfaces is also different, resulting in the inability to guarantee the processing consistency of parts on different working surfaces. Although the orientation of the carrier beam relative to the working surface in some carriers can be adjusted, the setting of the adjustment mechanism makes the stability of the carrier beam poor. During use, the carrier beam is easy to tilt, and in severe cases, it may even break and fall. Utility Model Content

[0004] The utility model aims to provide a carrier and a processing device to solve the technical problem that although the position of the carrier beam relative to the working surface in some existing carriers can be adjusted, the setting of the adjustment mechanism makes the stability of the carrier beam poor. During use, the carrier beam is easy to tilt and even break and fall.

[0005] In order to solve the above problems, the utility model provides a carrier, comprising a carrier beam and two brackets, wherein the bracket is provided with a Z-direction driving member, the Z-direction driving member is connected to a connecting seat, the connecting seat is rotatably connected to a rotating seat via a rotating shaft, and the rotating shaft extends along the Y direction;

[0006] The carrier beam extends along the X direction and is connected between the two rotating seats, and at least one end of the carrier beam in the X direction serves as a sliding end and is slidably connected with the top of the corresponding rotating seat along the X direction.

[0007] Optionally, a sliding seat is detachably fixed to the sliding end of the carrier beam, and the sliding seat is slidably engaged with the top of the corresponding rotating seat along the X direction.

[0008] Optionally, a receiving groove is provided on a side of the connecting seat facing the carrier beam, and the rotating seat is received in the receiving groove.

[0009] Optionally, the top of the accommodating groove is opened.

[0010] Optionally, the connecting seat is divided into an upper seat body and a lower seat body from top to bottom, the accommodating groove is located in the upper seat body, and the side wall of the lower seat body is inclined from top to bottom away from the load beam to form an escape zone.

[0011] Optionally, a connecting plate is provided on a side of the lower seat body facing the Z-direction driving member, and the connecting plate is connected to a driving end of the Z-direction driving member.

[0012] Optionally, the bracket includes a base and a frame body arranged on the top of the base, and an adjustment seat is provided on the side of the base facing the carrier beam, and a first Z-direction distance adjustment component is detachably connected between the adjustment seat and the corresponding connecting plate.

[0013] Optionally, a second Z-direction distance adjusting component is detachably connected between the adjusting seat and the corresponding connecting seat.

[0014] Optionally, a Z-direction guiding mechanism is connected between the bracket and the connecting plate.

[0015] The utility model also provides a processing device, comprising a workbench and the above-mentioned carrier, wherein the carrier is installed on the workbench, and a carrying beam of the carrier is connected with a processing component.

[0016] In the carrier provided by the utility model, a connecting seat and a rotating seat capable of relative rotation around the Y axis are arranged at both ends of the carrier beam, and at least one end of the carrier beam is arranged as a sliding end capable of overlapping and slidingly connected to the top of the rotating seat on the same side along the X direction, thereby releasing a rotational degree of freedom at both ends of the carrier beam and a moving degree of freedom at at least one end of the carrier beam, and then realizing the offset adjustment of the two ends of the carrier beam along the Z direction on the basis of the bracket, the Z-direction driving member and the connecting seat being fixed in the X direction, and correspondingly realizing the adjustment of the flatness of the processing surface of the carrier beam relative to the working surface, thereby ensuring the relative orientation of the processing component carried by the carrier beam and the working surface, and correspondingly improving the processing accuracy of the processing component relative to the parts placed on the working surface, and the processing consistency of the parts placed on different working surfaces; at the same time, the sliding and rotating mechanism formed by the sliding end and the corresponding rotating seat has high structural stability, and can stably carry the carrier beam and the processing component thereon, thereby ensuring the stable operation of the sliding and rotating mechanism and the orientation stability of the carrier beam, and correspondingly ensuring the stable operation of the processing device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 A three-dimensional schematic diagram of a carrier provided in an embodiment of the utility model;

[0019] Figure 2 A cross-sectional view of a carrier provided in an embodiment of the utility model;

[0020] Figure 3 A partial schematic diagram of a carrier provided in an embodiment of the utility model;

[0021] Figure 4 A schematic diagram of a bracket in a carrier provided by an embodiment of the utility model, in which components such as a guide rail, a slider and a connecting plate are installed;

[0022] Figure 5 A schematic diagram of the connection between the carrier beam, the rotating seat and the connecting seat in the carrier provided in an embodiment of the utility model.

[0023] Description of reference numerals:

[0024] 20-carrier; 100-carrier beam; 110-sliding end; 120-fixed end; 200-connecting component; 210-connecting seat; 211-accommodating groove; 212-fourth threaded hole; 213-second countersunk hole; 214-upper seat body; 215-lower seat body; 216-avoidance area; 220-rotating axis; 230-rotating seat; 240-bearing; 250-sliding seat; 300-bracket; 310-base; 320-frame; 330-adjusting seat; 331-first through hole; 332-first threaded hole; 333-second through hole; 334-third threaded hole; 340-upper anti-collision member; 350-lower anti-collision member; 400-Z-direction driving member; 510-guide rail; 520-slider; 530-connecting plate; 531-second threaded hole; 532-first countersunk hole. DETAILED DESCRIPTION

[0025] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0027] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] This embodiment provides a carrier, such as Figure 1 and Figure 5 As shown, it includes a load beam 100 and two brackets 300, the bracket 300 is provided with a Z-direction driving member 400, the Z-direction driving member 400 is connected to a connecting seat 210, the connecting seat 210 is rotatably connected to a rotating seat 230 via a rotating shaft 220, and the rotating shaft 220 extends along the Y direction; the load beam 100 extends along the X direction and is connected between the two rotating seats 230, and at least one end of the load beam 100 in the X direction serves as a sliding end 110 and is slidably connected with the top of the corresponding rotating seat 230 along the X direction.

[0029] This embodiment further provides a processing device, including a workbench and the above-mentioned carrier 20, the carrier 20 is installed on the workbench, and the carrier beam 100 of the carrier 20 is connected to the processing component.

[0030] The present embodiment provides a carrier 20 and a processing device, wherein in the carrier 20, both ends of the carrier beam 100 can rotate relative to each other around the rotation axis 220 with the connecting seat 210 through the corresponding rotating seat 230, that is, the carrier beam 100 can rotate in the XZ plane to adjust the height of both ends of the carrier beam 100 along the Z direction; at the same time, the sliding end 110 of the carrier beam 100 can also slide relative to the corresponding rotating seat 230 along the X direction, and the rotation adjustment of the carrier beam 100 in the XZ plane is ensured by compensating for the length change of the carrier beam 100 in the X direction; two brackets 300 are respectively supported at both ends of the carrier beam 100, and the Z-direction driving member 400 on the bracket 300 can drive the connecting seat 210 at the corresponding end of the carrier beam 100 to move along the Z direction to achieve the adjustment of the Z-direction height of the end of the carrier beam 100. Among them, in the processing device, the two brackets 300 of the carrier 20 are relatively fixed to the workbench, the carrier beam 100 of the carrier 20 is located above the working surface of the workbench, and the processing components installed on the carrier beam 100 are used to process the parts placed on the working surface.

[0031] When in use, the assembled carrier 20 is installed on the workbench, and then the corresponding connecting seat 210 is driven to move and adjust along the Z direction through two Z-direction driving members 400, so as to adjust the height of the two ends of the carrier beam 100 along the Z direction, so that the relative levelness of the bottom processing surface of the carrier beam 100 and the top working surface of the workbench can reach the required range, thereby ensuring the relative orientation of the processing components installed on the carrier beam 100 and the working surface, and further ensuring the processing accuracy of the processing components on the same working surface, and the processing consistency of the processing components on different working surfaces when the carrier 20 is installed on different workbenches.

[0032] Specifically, when the relative horizontality between the processing surface and the working surface does not meet the required range, the Z-direction driving member 400 can be started to drive the connecting seat 210 at the corresponding end to move along the Z direction based on the working surface. Specifically, only one of the connecting seats 210 can be driven and adjusted, or both connecting seats 210 can be driven and adjusted at the same time. When the relative positions of the two connecting seats 210 along the Z direction change, since the positions of the Z-direction driving member 400 and the connecting seat 210 in the X direction are fixed, the two ends of the carrier beam 100 are While the rotating seat 230 and the connecting seat 210 at the same end are driven to rotate around the rotating axis 220 under the limiting action of the other end, the sliding end 110 of the load beam 100 and the rotating seat 230 at the same end slide along the X direction to compensate for the rotation of the load beam 100 so that its length change in the X direction between the two connecting seats 210 is completed. On the basis of the two brackets 300 being fixed, the misalignment adjustment of the two ends of the load beam 100 in the Z direction is completed, and the relative horizontal adjustment of the processing surface of the load beam 100 and the working surface of the workbench is realized accordingly.

[0033] Among them, the sliding end 110 of the beam 100 and the rotating seat 230 are arranged up and down, and the sliding end 110 is overlapped on the top of the rotating seat 230. In addition to the above-mentioned X-direction sliding relationship between the sliding end 110 and the rotating seat 230, the rotating seat 230 also plays a role in supporting the sliding end 110 and the beam 100 upward. Then, the sliding rotation mechanism formed by the sliding end 110 and the rotating seat 230 is connected between the beam 100 and the connecting seat 210. On the basis of realizing the lifting and lowering of the beam 100 in the Z direction, rotating around the rotating shaft 220, and sliding along the X direction to realize the azimuth adjustment of the beam 100 relative to the workbench, the extension length of the sliding rotation mechanism in the axial direction (i.e., the Y direction) of the rotating shaft 220 is It is only the length of the rotating shaft 220. Accordingly, the weight of the carrier beam 100 and the processing assembly is applied to the rotating seat 230 and the rotating shaft 220 through its sliding end 100 to form a torque which is the effective length between the rotating shaft 220 connected to the carrier beam 100 and the connecting seat 210. The torque is small, the bearing stability of the rotating shaft 220 to the carrier beam 100 is high, and the structural stability and connection stability of the sliding rotation mechanism are both high, thereby ensuring the stable operation of the sliding rotation mechanism and the azimuth stability of the carrier beam, and correspondingly improving the processing accuracy of the processing assembly for the parts placed on the working surface, the processing consistency of the parts placed on different working surfaces, and ensuring the stable operation of the processing device.

[0034] Specifically, one end of the carrier beam 100 can be fixedly connected to the corresponding rotating seat 230 as a fixed end 120, and the other end can be slidably connected to the corresponding rotating seat 230 along the X direction as a sliding end 110; or, both ends of the carrier beam 100 in the X direction can be used as sliding ends 110 to be slidably connected to the two rotating seats 230 in a one-to-one correspondence along the X direction. In the process of driving the two connecting seats 210 to move along the Z direction by two Z-direction driving members 400, both ends of the carrier beam 100 can slide along the X direction with the corresponding rotating seats 230 to compensate for the change in the X-direction length between the two connecting seats 210 during the rotation process of the carrier beam 100, and when the sliding connection length of the rotating seat 230 and the sliding end 110 of the carrier beam 100 is the same, the double-sided compensation length is twice the single-sided compensation range, which can correspondingly increase the range of up and down misalignment adjustment of the two ends of the carrier beam 100, thereby increasing the application range of the carrier beam 100 and the processing device.

[0035] In the carrier provided in this embodiment, by providing a connecting seat 210 and a rotating seat 230 that can rotate relative to each other around the Y axis at both ends of the carrier beam 100, and providing at least one end of the carrier beam 100 as a sliding end 110 that can overlap and slide along the X direction on the top of the rotating seat 230 on the same side, a rotational degree of freedom is released at both ends of the carrier beam 100 and a movement degree of freedom is released at at least one end of the carrier beam 100, and then on the basis that the bracket 300, the Z-direction driving member 400 and the connecting seat 210 are fixed in the X direction, the misalignment adjustment of the two ends of the carrier beam 100 in the Z direction is realized, and accordingly , which can adjust the flatness of the processing surface of the carrier beam 100 relative to the working surface, thereby ensuring the relative orientation of the processing components carried by the carrier beam 100 and the working surface, and correspondingly improving the processing accuracy of the parts placed on the working surface by the processing components, as well as the processing consistency of the parts placed on different working surfaces; at the same time, the sliding and rotating mechanism formed by the sliding end 110 and the corresponding rotating seat 230 has high structural stability, and can stably carry the carrier beam 100 and the processing components thereon, thereby ensuring the stable operation of the sliding and rotating mechanism and the orientation stability of the carrier beam, and correspondingly ensuring the stable operation of the processing device.

[0036] Optionally, in this embodiment, if Figure 2 and Figure 5 As shown, the sliding end 110 of the carrier beam 100 is detachably fixed with a sliding seat 250, and the sliding seat 250 is slidably engaged with the top of the corresponding rotating seat 230 along the X direction. The setting of the sliding seat 250, on the one hand, does not need to directly set a sliding groove on the sliding end 110 of the carrier beam 100 to achieve sliding connection with the rotating seat 230, thereby ensuring the overall strength of the carrier beam 100 and its stability and position accuracy in carrying the processing components; on the other hand, during assembly, the sliding seat 250, the rotating seat 230 and the connecting seat 210 can be assembled as a connecting component 200 in priority, and then the assembled connecting component 200 is connected to the driving end of the Z-direction driving member 400 and the carrier beam 100, thereby improving the convenience of assembly of the carrier; and when there is a problem with the sliding connection structure between the sliding seat 250 and the rotating seat 230, the entire connecting component 200 can be directly detached from the carrier beam 100 for maintenance, thereby reducing the operation of the large-volume carrier beam 100 and improving the convenience of subsequent maintenance.

[0037] Specifically, in this embodiment, Figure 2As shown, a receiving groove 211 is provided on the side of the connecting seat 210 facing the carrier beam 100, and the rotating seat 230 is received in the receiving groove 211. The sliding end 110 of the carrier beam 100 is detachably fixed with a sliding seat 250, and the sliding seat 250 is received in the receiving groove 211 and slidably engaged with the rotating seat 230. The rotating seat 230 located at one end of the fixed end 120 of the carrier beam 100 is received in the receiving groove 211, and the rotating shaft 220 is plugged into the groove wall of the receiving groove 211 and the rotating seat 230 along the Y direction, and the rotating shaft 220 is rotatably plugged into at least one of the two, thereby realizing the rotatable connection between the connecting seat 210 and the rotating seat 230, and the connecting seat 210 can not only isolate and protect the rotating seat 230 and the rotatable connection structure of the two, but also reduce the exposure of components and connection structures to the overall appearance of the carrier. Similarly, the sliding seat 250 and the rotating seat 230 located at one end of the sliding end 110 of the carrier beam 100 are both accommodated in the accommodating groove 211, and the rotating seat 230 is rotatably connected with the groove wall of the accommodating groove 211 through the rotating shaft 220, and the sliding seat 250 and the rotating seat 230 are slidably engaged along the X direction. The connecting seat 210 can not only isolate and protect the sliding seat 250 and the rotating seat 230 as well as the rotating connection structure and the sliding connection structure between the three, but also improve the overall appearance of the carrier.

[0038] Specifically, both ends of the rotating shaft 220 may be fixedly connected to the groove wall of the accommodating groove 211 , and the rotating shaft 220 is rotatably connected to the rotating seat 230 via the bearing 240 .

[0039] Of course, it should be noted that gaps need to be left between the two ends of the load beam 100 and the corresponding connecting seats 210 and between the rotating seat 230 and the groove wall of the accommodating groove 211 to allow the two to rotate relative to each other.

[0040] Preferably, if Figure 2 As shown, the connection seat 210 is divided into an upper seat body 214 and a lower seat body 215 from top to bottom, the accommodating groove 211 is located in the upper seat body 214, and the lower seat body 215 is inclined from top to bottom away from the load beam 100 toward the side wall of the load beam 100 to form an escape area 216. The escape area 216 can allow the lower corner of the load beam 100 to rotate, thereby ensuring the smooth rotation of the load beam 100 and reducing the occurrence of the situation where the lower corner of the load beam 100 cannot be adjusted due to interference with the connection seat 210.

[0041] In this embodiment, a connecting plate 530 is provided on the side of the lower seat body 215 facing the Z-direction driving member 400, and the connecting plate 530 is connected to the driving end of the Z-direction driving member 400. On the one hand, the shape of the connecting plate 530 can be adjusted according to the form of the driving end of the Z-direction driving member 400 and the structure of the connecting seat 210, so as to improve the convenience of connecting the Z-direction driving member 400 and the connecting seat 210; on the other hand, when the moving stroke of the connecting seat 210 in the Z direction is determined, the driving end of the Z-direction driving member 400 is connected to the lower seat body 215 of the connecting seat 210, and the driving stroke of the driving end of the Z-direction driving member 400 is generally close to the lower area. Accordingly, the support height of the bracket 300 for the Z-direction driving member 400 is relatively small, thereby reducing the height requirement of the bracket 300, reducing the center of the overall carrier, and improving the stability of the carrier on the basis of ensuring the lifting height of the carrier beam 100.

[0042] Specifically, in this embodiment, Figure 1 , Figure 2 and Figure 5 As shown, the top of the receiving groove 211 is open. When the connecting seat 210 and the rotating seat 230 and the rotating seat 230 and the sliding seat 250 are assembled, the rotating seat 230 and the sliding seat 250 can be installed through the opening at the top of the receiving groove 211; accordingly, during subsequent maintenance, the rotating seat 230 and the sliding seat 250 can also be disassembled and assembled through the opening at the top of the receiving groove 211; at the same time, during use, the operator can also visually check the operation of the sliding seat 250 and the rotating seat 230 through the top opening of the receiving groove 211, thereby improving the convenience of disassembly and assembly of the carrier and the convenience of use.

[0043] In this embodiment, Figure 1-Figure 4 As shown, a Z-direction guide mechanism is connected between the bracket 300 and the connecting plate 530. Specifically, the Z-direction guide mechanism may include a guide rail 510 extending along the Z-direction and provided on the bracket 300, and a slider 520 provided on the corresponding connecting seat 210, and the slider 520 is slidably connected to the guide rail 510. In the process of the Z-direction driving member 400 driving the corresponding connecting seat 210 to move along the Z-direction, the slider 520 moves synchronously with the connecting seat 210, and at the same time, the guide rail 510 can guide and limit the moving stroke of the slider 520, and correspondingly guide and limit the movement of the connecting seat 210 and the end of the carrier beam 100 along the Z-direction, thereby improving the position accuracy of the horizontal adjustment of the processing surface of the carrier beam 100 and reducing the displacement of the carrier beam 100 along the Y-direction during the adjustment process.

[0044] Specifically, in this embodiment, Figure 1-Figure 4As shown, the same bracket 300 is provided with two guide rails 510, and the two guide rails 510 are arranged at intervals along the Y direction; the sliders 520 located on the same bracket 300 are all connected to the connecting plate 530, and the connecting plate 530 is detachably fixed to the corresponding connecting seat 210. On the one hand, the two guide rails 510 arranged at intervals along the Y direction can guide and limit different parts of the connecting seat 210 along the Y direction, so as to improve the position stability of the connecting seat 210 and the end of the carrier beam 100 connected to the driving end of the Z-direction driving member 400 in different regions along the Y direction, as well as the position stability and accuracy of the connecting seat 210 and the carrier beam 100 moving up and down in different regions along the Y direction, and reduce the occurrence of possible deviation of the local force of the carrier beam 100 in the Y direction; on the other hand, during installation, the connecting plate 530 can be first connected to the multiple sliders 520 located on the same side, and then the connecting plate 530 can be connected to the connecting seat 210 to improve the convenience of connection.

[0045] Specifically, the number of the sliding blocks 520 slidably connected to the same guide rail 510 may be one or two.

[0046] In this embodiment, Figure 1-Figure 3 As shown, the bracket 300 includes a base 310 and a frame body 320 arranged on the top of the base 310, the guide rail 510 is arranged on the frame body 320, and an adjustment seat 330 is provided on the side of the base 310 facing the load beam 100, and a first Z-axis distance adjustment component is detachably connected between the adjustment seat 330 and the corresponding connecting plate 530.

[0047] Specifically, the adjustment seat 330 is provided with a first through hole 331 and a first threaded hole 332, and the bottom surface of the corresponding connecting plate 530 is provided with a second threaded hole 531 corresponding to the first through hole 331 along the Z direction; the first Z-direction distance adjustment component includes two first screws, one of which has a screw rod passing through the first through hole 331 and screwed to the second threaded hole 531, and the screw head abuts against the bottom end surface of the first through hole 331, and the other has a screw rod screwed to the first threaded hole 332 and abuts against the bottom surface of the connecting plate 530.

[0048] When assembling the loading frame 20, it can be first determined that the connecting plate 530 is located at the Z-direction position of the bracket 300, and the first screw inserted into the first through hole 331 is defined as the first pull-down screw, and the first screw screwed into the first threaded hole 332 is defined as the first abutment screw. When the connecting plate 530 is connected to the slider 520, the first abutment screw is screwed into the first threaded hole 332 from bottom to top and extends upward, and at the same time, the screw rod of the first pull-down screw passes through the first through hole 331 from bottom to top and is screwed into the second threaded hole 531. When the height of the connecting plate 530 is too low, the top end of the first abutment screw is rotated to abut against the connecting plate 530. The bottom surface of the connecting plate 530 is connected, and there is an adjustment gap between the screw head of the first pull-down screw and the bottom end surface of the first through hole 331. Then the first push screw is rotated to adjust the length of its screw rod extending upward from the adjustment seat 330, and the corresponding push screw is pushed against the connecting plate 530 to adjust its Z-direction position. When the position of the connecting plate 530 reaches the target position, the first pull-down screw is rotated until its screw head is in contact with the bottom end surface of the first through hole 331. At this time, the first pull-down screw pulls the connecting plate 530 downward, and at the same time, the first push screw pushes the connecting plate 530 upward, thereby adjusting and limiting the upward movement of the connecting plate 530 in the Z-direction. When the height of the connecting plate 530 is too high, there is an adjustment gap between the top of the first abutting screw and the bottom surface of the connecting plate 530, and the screw head of the first pull-down screw abuts against the bottom end surface of the first through hole 331. The first pull-down screw is continued to be rotated to drive the connecting plate 530 to move downward. When the position of the connecting plate 530 reaches the target position, the first abutting screw is rotated until its top abuts against the bottom surface of the connecting plate 530, thereby completing the downward adjustment and limiting of the connecting plate 530 in the Z direction.

[0049] Among them, the Z-direction position of the connecting plate 530 is adjusted in the form of a screw, which can convert the larger circumferential rotation stroke of the screw into the smaller Z-direction movement stroke of the connecting plate 530, thereby improving the adjustment accuracy of the Z-direction position of the connecting plate 530; preferably, the two first screws are arranged at intervals along the Y direction, and after the first screw is adjusted, the azimuth accuracy of each area of ​​the connecting plate 530 in the Y direction is ensured, and the occurrence of local area deviation in the Y direction is reduced. Preferably, the bottom surface of the connecting plate 530 can be provided with a first countersunk hole 532 in a flared shape, and the first countersunk hole 532 corresponds to the upper and lower positions of the first threaded hole 332. The top of the first abutting screw can be inserted into the first countersunk hole 532 to push the connecting plate 530 upward, and the first countersunk hole 532 can limit the top of the first abutting screw to reduce the occurrence of the first abutting screw deflecting or slipping with the bottom surface of the connecting plate 530.

[0050] When the positions of the two connecting plates 530 are determined, the two ends of the carrier beam 100 are connected to the two connecting plates 530 one by one, so as to preliminarily determine the orientation of the carrier beam 100 installed on the bracket 300, and accordingly ensure that when the carrier 20 is connected to the workbench, the deviation in horizontality between the machined surface of the carrier beam 100 and the working surface of the workbench is within an adjustable range, thereby reducing the large orientation deviation between the machined surface of the carrier beam 100 and the working surface of the workbench when the carrier 20 is installed on the workbench, which makes adjustment difficult or even exceeds the measurable adjustable range.

[0051] Specifically, the top surface of the adjustment seat 330 is coplanar with the top surface of the base 310, and the bottom surface of the adjustment seat 330 is coplanar with the bottom surface of the base 310. By measuring the relative flatness of the bottom surface of the connecting plate 530 and the top surface of the adjustment seat 330, the relative flatness of the bottom surface of the connecting plate 530 and the bottom surface of the base 310 can be measured, thereby determining the orientation of the connecting plate 530 installed on the bracket 300; specifically, the relative flatness of the bottom surface of the connecting plate 530 and the top surface of the adjustment plate can be measured by a micrometer or a distance sensor.

[0052] Similarly, in this embodiment, if Figure 3 As shown, a second Z-direction distance adjustment component is detachably connected between the adjustment seat 330 and the corresponding connection seat 210. Specifically, the adjustment seat 330 may also be provided with a second through hole 333 and a third threaded hole 334, and the bottom surface of the corresponding connection seat 210 is provided with a fourth threaded hole 212 corresponding to the second through hole 333 along the Z direction; the second Z-direction distance adjustment component includes two second screws, wherein the screw rod of one of the second screws passes through the second through hole 333 and is screwed to the fourth threaded hole 212, and the screw head abuts against the bottom end surface of the second through hole 333, and the screw rod of the other second screw is screwed to the third threaded hole 334 and abuts against the bottom surface of the connection seat 210.

[0053] The second screw inserted into the second through hole 333 is defined as the second pull-down screw, and the second screw screwed into the third threaded hole 334 is defined as the second abutting screw. After the carrier 20 is assembled, the second abutting screw is screwed into the third threaded hole 334 from bottom to top and extends upward, and at the same time, the screw rod of the second pull-down screw passes through the second through hole 333 from bottom to top and is screwed into the fourth threaded hole 212; then the connecting seat 210 can be pulled down by tightening the second pull-down screw downward, or the connecting seat 210 can be lifted up by screwing the second abutting screw upward, thereby achieving the connection of the connecting seat 210. 0 is connected to the connecting plate 530 for a secondary adjustment of the Z-direction position, which further improves the orientation accuracy of the load beam 100 installed on the bracket 300 accordingly; and when the orientation of the connecting seat 210 is determined, the screw head of the second pull-down screw abuts against the bottom end surface of the second through hole 333, and the top end of the second abutting screw abuts against the bottom surface of the connecting seat 210, thereby limiting the Z-direction position of the connecting seat 210 to reduce the occurrence of the situation in which the connecting plate 530 and the connection of the connecting plate 530 are offset due to vibration during the transportation or installation of the carrier 20, thereby affecting the installation orientation of the load beam 100.

[0054] Preferably, in this embodiment, the first through hole 331 and the first threaded hole 332 are arranged at intervals along the Y direction and are located on both sides of the Y-direction centerline of the support beam 100, the third threaded hole 334 is consistent with the first through hole 331 in the Y-direction position, and the second through hole 333 is consistent with the first threaded hole 332 in the Y-direction position. Correspondingly, the two second screws are arranged at intervals along the Y direction, and the second pull-down screw and the first abutting screw are located at the same position in the Y direction, and the second abutting screw and the first pull-down screw are located at the same position in the Y direction. When adjusting the connecting seat 210, the first pull-down screw and the second pull-down screw are located at different positions of the connecting plate 530 and the connecting seat 210 along the Y direction, specifically on both sides of the transverse Y-direction centerline. According to the measurement results, the first pull-down screw can be selected to pull down the connecting plate 530 and drive the connecting seat 210 and the support beam 100Y to bend down to the first end, or the second pull-down screw can be selected to pull down the connecting seat 210 and drive the support beam 100Y to bend down to the second end; similarly, the first abutting screw The nail and the second abutment screw are located at different positions of the connecting plate 530 and the connecting seat 210 along the Y direction, specifically on both sides of the transverse Y-direction center line. According to the measurement results, the first abutment screw can be selected to push the connecting plate 530 and drive the connecting seat 210 and the carrier beam 100Y to tilt up toward the second end, or the second abutment screw can be selected to push the connecting seat 210 and drive the carrier beam 100Y to tilt up toward the first end, thereby realizing the installation adjustment of the Z-direction height of the carrier beam 100 through four screws, as well as the secondary pitch adjustment of the two ends of the Y direction after the carrier beam 100 is installed on the bracket 300, which further improves the orientation accuracy of the carrier beam 100 relative to the base 310 after it is installed on the bracket 300.

[0055] Preferably, if Figure 3As shown, the bottom surface of the connecting seat 210 can be provided with a second countersunk hole 213 in a flared shape, and the second countersunk hole 213 corresponds to the upper and lower positions of the third threaded hole 334. The top end of the second abutting screw can be inserted into the second countersunk hole 213 to push the connecting seat 210 upward. The second countersunk hole 213 can limit the top end of the second abutting screw to reduce the occurrence of the second abutting screw offset or slipping with the bottom surface of the connecting seat 210.

[0056] After the carrier 20 is connected to the workbench, the first Z-axis distance adjusting component and the second Z-axis distance adjusting component need to be removed, and then the Z-axis driving member 400 is used to make a final adjustment on the horizontality of the processing surface of the carrier beam 100 relative to the working surface of the workbench.

[0057] Optionally, in this embodiment, if Figure 4 As shown, an upper anti-collision member 340 can also be provided in the upper area of ​​the frame 320, and the upper anti-collision member 340 is located above the connecting plate 530; similarly, a lower anti-collision member 350 is provided in the lower area of ​​the frame 320, and the lower anti-collision member 350 is located below the connecting plate 530. When the Z-direction driving member 400 drives the connecting plate 530 to adjust in the Z direction, the connecting plate 530 drives the connecting seat 210 and the carrier beam 100 to move up and down synchronously, and the upper anti-collision member 340 and the lower anti-collision member 350 can limit the upward movement and the downward movement end point of the connecting plate 530. On the one hand, it can limit the sliding of the moving guide rail 510 of the slider 520, and correspondingly ensure the sliding cooperation between the slide rail and the slider 520; on the other hand, it can limit the travel of the carrier beam 100 in the Z direction, thereby reducing the occurrence of collision and interference between the carrier beam 100 and its processing components and the lower working surface or the upper other components when the driving travel of the Z-direction driving member 400 is too large, and correspondingly ensure the normal operation of the processing device. Among them, the setting of the lower anti-collision member 350 will cause interference with the first through hole 331 and the first threaded hole 332. The carrier 20 can be connected to the workbench, and the lower anti-collision member 350 can be connected to the frame 320 or the base 310 after the first screw and the second screw are removed.

[0058] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A carrier, characterized in that: The invention comprises a load beam (100) and two brackets (300), wherein the bracket (300) is provided with a Z-direction driving member (400), wherein the Z-direction driving member (400) is connected to a connecting seat (210), wherein the connecting seat (210) is rotatably connected to a rotating seat (230) via a rotating shaft (220), and wherein the rotating shaft (220) extends along the Y direction; The carrier beam (100) extends along the X direction and is connected between the two rotating seats (230), and at least one end of the carrier beam (100) in the X direction serves as a sliding end (110) and is slidably connected with the top of the corresponding rotating seat (230) in the X direction.

2. The carrier according to claim 1, characterized in that: The sliding end (110) of the carrier beam (100) is detachably fixedly connected with a sliding seat (250), and the sliding seat (250) is slidably connected with the top of the corresponding rotating seat (230) along the X direction.

3. The carrier according to claim 1, characterized in that: A receiving groove (211) is provided on a side of the connecting seat (210) facing the carrier beam (100), and the rotating seat (230) is received in the receiving groove (211).

4. The carrier according to claim 3, characterized in that: The top of the accommodating groove (211) is open.

5. The carrier according to claim 3, characterized in that: The connecting seat (210) is divided into an upper seat body (214) and a lower seat body (215) from top to bottom, the accommodating groove (211) is located in the upper seat body (214), and the lower seat body (215) is inclined from top to bottom away from the load beam (100) toward the side wall of the load beam (100) to form an avoidance area (216).

6. The carrier according to claim 5, characterized in that: A connecting plate (530) is provided on one side of the lower seat body (215) facing the Z-direction driving member (400), and the connecting plate (530) is connected to the driving end of the Z-direction driving member (400).

7. The carrier according to claim 6, characterized in that: The support (300) comprises a base (310) and a frame body (320) arranged on the top of the base (310); an adjustment seat (330) is provided on a side of the base (310) facing the carrier beam (100); a first Z-direction distance adjustment component is detachably connected between the adjustment seat (330) and the corresponding connecting plate (530).

8. The carrier according to claim 7, characterized in that: A second Z-direction distance adjustment component is detachably connected between the adjustment seat (330) and the corresponding connection seat (210).

9. The carrier according to claim 6, characterized in that: A Z-direction guiding mechanism is connected between the bracket (300) and the connecting plate (530).

10. A processing device, characterized in that: It comprises a workbench and a carrier (20) as claimed in any one of claims 1 to 9, wherein the carrier (20) is installed on the workbench, and a carrying beam (100) of the carrier (20) is connected to a processing component.

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