Classification device and corrosion device

Abstract

The utility model belongs to the technical field of semiconductor production equipment, and particularly relates to a grading device and a corrosion device. The grading device comprises containing boxes, containing cavities are formed in the upper end faces of the containing boxes, a plurality of screening holes are formed in the bottom faces of the containing cavities and extend out of the bottom faces of the containing boxes, the multiple containing boxes are sequentially arranged in the vertical direction, and the diameters of the screening holes of the multiple containing boxes are sequentially decreased from top to bottom; and the connecting device is used for relatively fixing the plurality of accommodating boxes in the vertical direction. According to the broken germanium grading device, the containing boxes which are sequentially distributed in the vertical direction are arranged, the screening holes are formed in the containing cavities of the containing boxes, and the hole diameters of the screening holes of the containing boxes are limited to be sequentially decreased from top to bottom, so that broken germanium can be graded according to the diameter, and it is guaranteed that the broken germanium in each containing box is uniform in size; and gaps are formed between the broken germanium in the same containing box, the corrosive liquid can make full contact with the broken germanium, air can be exhausted easily, and the broken germanium is prevented from being oxidized.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor production equipment, and specifically relates to a grading device and an etching device. Background Art

[0002] At room temperature, metallic germanium is very brittle and will slowly oxidize. Operational contamination during the germanium purification process and surface impurities at the tail of the zone melting germanium ingot will affect the zone melting purification effect and the resistivity of germanium polycrystalline. Therefore, the reduced germanium ingot and the unqualified zone melting germanium ingot tail need to be surface-etched and cleaned before being put into the subsequent process.

[0003] Before etching and cleaning, large pieces of germanium ingots are broken up according to process requirements. Then the broken materials are collected in containers and put into reactors for etching. However, due to the different sizes of broken germanium, after being piled up in the container, on the one hand, the broken germanium cannot be fully contacted with the etching liquid; on the other hand, it may also cause air to remain in the broken germanium, and the residual air will oxidize the germanium and affect the corrosion effect. Utility Model Content

[0004] The technical problem to be solved by the utility model is to provide a grading device and a corrosion device, which can grade broken germanium according to particle size, ensure that there are gaps between the broken germanium, so that the corrosion liquid can fully contact with the broken germanium, and at the same time, it can also evacuate the air to ensure that the broken germanium will not contact with the air during the corrosion process, thereby preventing the germanium from being oxidized.

[0005] The technical solution proposed by the utility model is:

[0006] In a first aspect, the utility model provides a grading device, comprising:

[0007] A containing box, wherein a containing cavity is formed on the upper end surface of the containing box, and a plurality of sieve holes are formed on the bottom surface of the containing cavity, and the sieve holes extend out of the bottom surface of the containing box. The plurality of containing boxes are arranged in sequence along the vertical direction, and the apertures of the sieve holes of the plurality of containing boxes decrease in sequence from top to bottom;

[0008] A connecting device is used to relatively fix the multiple containing boxes in the vertical direction.

[0009] Optionally, the connecting device is a bracket, and the bracket includes a plurality of support rods, and the support rods are connected to the outer side walls of a plurality of receiving boxes, and there is a gap between two adjacent receiving boxes.

[0010] Optionally, also include:

[0011] The hand-held part is fixedly connected to the upper end of the support rod.

[0012] Optionally, there is a gap between the bottom surface of the lowermost receiving box and the supporting surface.

[0013] Optionally, the connecting device is a connecting ring and a connecting hole;

[0014] The connecting ring and the connecting hole are located at two ends of the receiving box, and the connecting hole and the connecting ring cooperate with each other to stack a plurality of receiving boxes in a vertical direction.

[0015] Optionally, a drainage structure is provided on the bottom surface of the receiving box.

[0016] Optionally, the drainage structure is a drainage trough.

[0017] Optionally, an outer side wall of the accommodation box is provided with a through hole, and the through hole extends into the accommodation cavity along the outer side wall of the accommodation box.

[0018] Optionally, the aperture of the through hole is not larger than the aperture of the screening hole of the lowermost containing box.

[0019] In a second aspect, the utility model provides a corrosion device, comprising:

[0020] The cylinder body has a drain pipe at the bottom of the outer wall of the cylinder body, and the drain pipe is connected to the cylinder body;

[0021] The classification device described in the first aspect can be inserted into the cylinder.

[0022] Compared with the prior art, the beneficial effects of the utility model are:

[0023] The utility model provides a plurality of receiving boxes distributed in sequence along the vertical direction, provides screening holes in the receiving chambers of the receiving boxes, and limits the apertures of the screening holes of the plurality of receiving boxes to decrease in sequence from top to bottom, thereby being able to classify the broken germanium according to the diameter, ensuring that the broken germanium in each receiving box is uniform in size, and allowing gaps between the broken germanium in the same receiving box, so that the etching liquid can fully contact the broken germanium, and is conducive to exhausting the air, thereby preventing the broken germanium from being oxidized. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation to the present invention.

[0025] Figure 1 This is a schematic diagram of the structure of the grading device of the utility model;

[0026] Figure 2 This is a schematic diagram of the structure of the connecting device of the utility model, which is a connecting ring and a connecting hole;

[0027] Figure 3 This is a schematic diagram of the structure of the bottom surface of the container box of the utility model using a plate;

[0028] Figure 4 This is a schematic diagram of the structure of the utility model in which the bottom surface of the container box adopts a screen;

[0029] Figure 5 This is a schematic diagram of the structure of the corrosion device of the utility model.

[0030] In the figure: 1. accommodating box; 2. accommodating cavity; 3. screening hole; 4. supporting rod; 5. mounting rod; 6. connecting ring; 7. connecting hole; 8. drainage groove; 9. through hole; 10. cylinder; 11. cavity; 12. drainage pipe. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0033] Example 1

[0034] Please refer to Figure 1-5 The utility model provides a grading device, comprising:

[0035] A containing box 1, wherein a containing cavity 2 is formed on the upper end surface of the containing box 1, and a plurality of sieve holes 3 are formed on the bottom surface of the containing cavity 2, and the sieve holes 3 extend out of the bottom surface of the containing box 1, and the plurality of containing boxes 1 are arranged in sequence along the vertical direction, and the apertures of the sieve holes 3 of the plurality of containing boxes 1 decrease in sequence from top to bottom;

[0036] A connecting device is used to relatively fix the multiple receiving boxes 1 in the vertical direction.

[0037] As a further solution, the accommodating box 1 is provided with a through hole 9 , and the through hole 9 extends into the accommodating cavity 2 along the outer side wall of the accommodating box 1 .

[0038] By providing the through hole 9, during the corrosion process, the efficiency of liquid entering and exiting the accommodating chamber 2 is improved. Obviously, the aperture of the through hole 9 cannot be larger than the aperture of the sieve hole 3 on the same accommodating box 1.

[0039] As a further solution, the diameter of the through hole 9 is not larger than the diameter of the sieve hole 3 of the lowermost receiving box 1 .

[0040] During the classification process, this design can ensure that the size of the broken germanium discharged from the through hole 9 is smaller than the minimum value of the screening range, and prevent the broken germanium with a particle size within the screening range from being discharged from the through hole 9 (the broken germanium with a size smaller than the screening range can be recycled after being collected. If the broken germanium with a size within the screening range is screened out and recycled in large quantities, although it will not cause material waste, it will cause some materials to be processed repeatedly).

[0041] During the screening process, the grading device of the utility model is placed in a container, or a film is laid on the support surface, and then the grading device of the utility model is placed on the film (to facilitate the collection of broken germanium with a size smaller than the screening range). Then the broken germanium is poured into the uppermost container box 1, and the container box 1 is shaken (manually or by a vibration pump), and the small particles of broken germanium pass through the screening holes 3 of the uppermost container box 1 and fall into the container box 1 of the next layer, thereby achieving screening.

[0042] It should be noted that the shape and size of the container box 1 of the present invention are not limited, as long as there is a gap with the cavity 11 of the cylinder 10. The sizes of multiple container boxes 1 of the present invention can be consistent, or the sizes of multiple container boxes 1 and the accommodating cavity 2 can be set to increase from top to bottom.

[0043] Example 2

[0044] refer to Figure 1 , describe the structure of the connecting device in detail.

[0045] The connecting device is a bracket, which includes a plurality of support rods 4 . The support rods 4 are connected to the outer side walls of the plurality of receiving boxes 1 , and there is a gap between two adjacent receiving boxes 1 .

[0046] The number of the support rods 4 is two or more, preferably 3 to 6.

[0047] A plurality of support rods 4 are arranged at intervals on the outer side walls of the plurality of receiving boxes 1. Preferably, the plurality of support rods 4 are evenly distributed along the circumferential direction.

[0048] The connection method between the support rod 4 and the multiple containing boxes 1 is not limited. Taking the multiple containing boxes 1 with the same size as an example, the support rod 4 can be arranged in the vertical direction or spirally wound around the outer walls of the multiple containing boxes 1 .

[0049] As a further embodiment, the support further comprises:

[0050] The hand-held part is fixedly connected to the upper end of the support rod 4. By grasping the hand-held part, the grading device can be conveniently moved.

[0051] There are many ways to set the handheld part. In this embodiment, the handheld part adopts a mounting rod 5, and the mounting rod 5 is connected to the upper end of the support rod 4. When one mounting rod 5 is adopted, the two ends of the mounting rod 5 are connected to the upper ends of one pair of support rods 4. When two mounting rods 5 are adopted, the two ends of the mounting rod 5 are connected to the upper ends of one pair of support rods 4, and the two mounting rods 5 are perpendicular to each other. Preferably, two U-shaped rods are adopted, the middle part of the rod is the mounting rod 5, the two ends of the rod are the support rods 4, the middle parts of the two rods are perpendicular to each other, and are fixed by welding.

[0052] As a further solution, there is a gap between the bottom surface of the bottommost receiving box 1 and the supporting surface. In this way, on the one hand, broken germanium smaller than the screening range can be discharged from the bottommost receiving box 1. On the other hand, during the etching process, it is also convenient for the etching liquid to flow in and out.

[0053] Example 3

[0054] refer to Figure 2 , providing a connecting device different from Example 2.

[0055] The connecting device is a connecting ring 6 and a connecting hole 7;

[0056] The connecting ring 6 and the connecting hole 7 are located at two ends of the receiving box 1 , and the connecting hole 7 and the connecting ring 6 cooperate with each other to stack a plurality of receiving boxes 1 in a vertical direction.

[0057] It should be noted that when the connecting ring 6 is located on the upper end surface of the receiving box 1, the connecting hole 7 is located on the bottom surface of the receiving box 1. When the connecting ring 6 is located on the bottom surface of the receiving box 1, the connecting hole 7 is located on the upper end surface of the receiving box 1. The connecting ring 6 is inserted into the connecting hole 7 to relatively fix two adjacent receiving boxes 1.

[0058] As a further solution, a drainage structure is provided on the bottom surface of the container box 1. The drainage structure can also be provided on the outer side wall of the container box 1, and can connect the connection ring 6 or the connection hole 7 at the bottom of the container box 1 with the outside.

[0059] As a further solution, the drainage structure is a drainage groove 8. Taking the connection hole 7 being arranged on the bottom surface of the receiving box 1 as an example, the drainage groove 8 extends into the connection hole 7 along the outer side wall of the receiving box 1. The shape of the drainage groove 8 is not limited, and can be rectangular, semicircular, triangular, elliptical, etc. The number of drainage grooves 8 is also not limited. On the premise that the receiving box 1 can be stably placed, the more drainage grooves 8 there are, the higher the efficiency of liquid entry and discharge.

[0060] Example 4

[0061] Based on the same utility model concept, the utility model also provides a corrosion device, which includes the grading device provided by any of the above embodiments, that is, includes the technical features of the above grading device, and therefore has the beneficial effects of the above grading device. The similarities can be referred to the above description.

[0062] The corrosion equipment includes:

[0063] The cylinder 10 has a cavity 11, which extends upward from the upper end surface of the cylinder 10. A drain pipe 12 is provided at the bottom of the outer wall of the cylinder 10, and the drain pipe 12 is connected to the cavity 11;

[0064] The aforementioned staging device can be inserted into the cavity 11 .

[0065] Specifically, the grading device containing crushed germanium and completed grading is placed in the cavity 11, and then the drain pipe 12 is closed, and the corrosive liquid is injected into the cavity 11, and the corrosive liquid needs to immerse the uppermost containing box 1. After a certain period of corrosion, clean water is injected, and the drain pipe 12 is opened, and the corrosive liquid is discharged from the cavity 11, realizing the discharge and the intake at the same time. The drainage speed of the drain pipe 12 needs to be controlled to ensure that the crushed germanium is always in the liquid to avoid oxidation caused by contact with air.

[0066] It should be noted that the corrosive liquid adopts an alkaline corrosive liquid, and its density is greater than that of water. Simultaneously, the drain pipe 12 is located at the bottom, and the alkaline corrosive liquid is discharged first, and the broken germanium can be thoroughly cleaned.

[0067] It should be noted that the bottom surface of the accommodating cavity 2 of the lowermost accommodating box 1 should be higher than the drain pipe 12 .

[0068] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A classification device, characterized in that: include: A containing box, wherein a containing cavity is formed on the upper end surface of the containing box, and a plurality of sieve holes are formed on the bottom surface of the containing cavity, and the sieve holes extend out of the bottom surface of the containing box. The plurality of containing boxes are arranged in sequence along the vertical direction, and the apertures of the sieve holes of the plurality of containing boxes decrease in sequence from top to bottom; A connecting device is used to relatively fix the multiple containing boxes in the vertical direction.

2. The classification device according to claim 1, characterized in that: The connecting device is a bracket, and the bracket includes a plurality of support rods, and the support rods are connected to the outer side walls of a plurality of accommodating boxes, and there is a gap between two adjacent accommodating boxes.

3. The classification device according to claim 2, characterized in that: The bracket also includes: The hand-held part is fixedly connected to the upper end of the support rod.

4. The classification device according to claim 2, characterized in that: There is a gap between the bottom surface of the lowermost storage box and the supporting surface.

5. The classification device according to claim 1, characterized in that: The connecting device is a connecting ring and a connecting hole; The connecting ring and the connecting hole are located at two ends of the receiving box, and the connecting hole and the connecting ring cooperate with each other to stack a plurality of receiving boxes in a vertical direction.

6. The classification device according to claim 5, characterized in that The bottom surface of the containing box is provided with a drainage structure.

7. The classification device according to claim 6, characterized in that The drainage structure is a drainage trough.

8. The classification device according to claim 1, characterized in that: The outer side wall of the storage box is provided with a through hole.

9. The classification device according to claim 8, characterized in that The aperture of the through hole is not larger than the aperture of the screening hole of the lowermost containing box.

10. A corrosion device, characterized in that: include: The cylinder body has a drain pipe at the bottom of the outer wall of the cylinder body, and the drain pipe is connected to the cylinder body; The classification device according to any one of claims 1 to 9 can be inserted into the cylinder.

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