Low-hydroxyl quartz glass raw material purification device
By using adjustable storage racks and guide components in the quartz glass purification device, the problems of long downtime of traditional equipment and limitations of the size of the placement rack are solved, and flexible processing and efficient purification of quartz glass raw materials are achieved.
Patent Information
- Application Number
- CN202421094052.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-20
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2034-05-20
AI Technical Summary
The equipment is shut down for a long time after the dehydroxylation of traditional semiconductor quartz glass products, and the fixed size of the placing rack limits the flexibility of the vessel, which can easily cause the quartz glass raw materials to fall.
A low-hydroxy quartz glass raw material purification device is designed, using adjustable storage racks and guide components, and the height adjustment and movement of the storage racks are achieved through electric push rods and screw barrels. Combined with the limiting assembly, the insulation plate is prevented from rotating, ensuring that the quartz is Safe placement and purification of glass raw materials.
It improves the flexibility and efficiency of the equipment, reduces downtime, ensures the safe treatment and efficient purification of quartz glass raw materials, and adapts to quartz glass raw materials of different heights.
Smart Images
Figure CN222250421U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of quartz glass purification, and in particular relates to a low-hydroxy quartz glass raw material purification device. Background Art
[0002] Quartz glass is made by melting various pure natural quartz (such as crystal, quartz sand, etc.). Hydroxyl is the most important structural defect among various microscopic defects of quartz glass. The presence of hydroxyl changes the continuity of the quartz glass network structure, thus affecting its performance. Therefore, it is necessary to purify and dehydroxylate quartz glass.
[0003] Chinese patent CN215712589U discloses a vacuum dehydroxylation furnace for semiconductor quartz glass products, which relates to the technical field of vacuum dehydroxylation furnaces. The vacuum dehydroxylation furnace for semiconductor quartz glass products comprises a base and a furnace body, wherein the furnace body is fixedly arranged on the upper surface of the base, and both ends of the left side wall of the furnace body are provided with slide grooves, and slide rods are slidably arranged inside the two slide grooves, and a cover plate is arranged between the left ends of the two slide rods, and both ends of the cover plate are rotatably connected to the corresponding slide rods through a rotating rod, and support plates are fixedly arranged on both sides of the lower end of the cover plate, and placement racks are placed on the surfaces of the two support plates, and a limiting mechanism for fixing the cover plate is arranged in the middle of the upper surface of the furnace body.
[0004] In a conventional vacuum dehydroxylation furnace for semiconductor quartz glass products, the rack containing the product needs to be unloaded after the dehydroxylation is completed. Since the rack and the product have just been processed and have a high temperature, unloading takes a long time, that is, the equipment needs to be shut down for a long time, which greatly reduces the processing efficiency. In the above document, support plates and racks are provided on both sides of the cover plate. By rotating the cover plate, unloading and processing can be performed simultaneously on the racks on both sides of the cover plate, which greatly reduces the equipment downtime. However, the size of the rack is fixed. When using vessels of different heights to hold quartz glass raw materials, some higher vessels cannot enter the rack, and the use has certain limitations. At the same time, since there is no infinite position component on the cover plate, unnecessary rotation is prone to occur, which may cause the quartz glass raw materials on the rack to fall off.
[0005] Currently, no effective solution has been proposed for the problems in the related technologies. Utility Model Content
[0006] In view of the problems in the related technology, the utility model proposes a low-hydroxy quartz glass raw material purification device to overcome the above technical problems existing in the existing related technology.
[0007] In order to solve the above technical problems, the utility model is achieved through the following technical solutions:
[0008] The utility model discloses a low-hydroxy quartz glass raw material purification device, comprising a heating furnace, wherein a displacement component is arranged inside the heating furnace, the outer surface of the displacement component is rotatably connected with a heat insulation board, the outer surface of the heat insulation board is fixedly connected with a sealing cover, the outer surface of the sealing cover is fixedly connected with a loading plate, the top of the loading plate is plugged with an adjustment component and a guide component, the ends of the adjustment component and the guide component are fixedly connected with a storage rack, the adjustment component is used to adjust the height of the storage rack, and the guide component is used to limit and guide the movement of the storage rack.
[0009] Furthermore, the displacement assembly includes an electric push rod, which is fixedly connected to the inside of the heating furnace. The movable end of the electric push rod is fixedly connected to a moving plate, and a pulley is fixedly installed on the bottom of the moving plate.
[0010] Furthermore, the adjustment assembly includes a first round rod, which is inserted into the outer surface of the loading plate, and the end of the first round rod is rotatably connected to a screw barrel, the internal thread of the screw barrel is connected to a screw rod, and the screw rod is fixedly connected to the bottom of the rack.
[0011] Furthermore, the guide assembly includes a second round rod, the end of the second round rod is fixedly connected to a fixed tube, the interior of the fixed tube is slidably connected to a limit plate and a sliding rod, the limit plate and the sliding rod are fixedly connected, and the sliding rod is fixedly connected to the bottom of the rack.
[0012] Furthermore, a movable component is disposed on the outer surface of the sealing cover, a limiting component is disposed inside the movable plate, the limiting component is used to fix the heat insulation plate, and a base is fixedly connected to the bottom of the heating furnace.
[0013] Furthermore, the movable component includes a rotating shaft, which is rotatably connected to the inside of the sealing cover, and the outer surface of the rotating shaft is fixedly connected to a movable plate. The outer surface of the sealing cover is provided with a sliding groove, and the inside of the sliding groove is slidably connected to a slider, and the slider is plugged into the movable plate.
[0014] Furthermore, the limiting assembly includes a cross bar, which is slidably connected to the inside of the movable plate, and the inside of the movable plate is slidably connected to a vertical bar, the end of the vertical bar is fixedly connected to a spring, and the outer surface of the vertical bar is provided with a slot, and the cross bar is plugged into the vertical bar through the slot.
[0015] The utility model has the following beneficial effects:
[0016] 1. The utility model connects the guide assembly and the rack, and the guide assembly is plugged into the loading plate. When the adjusting assembly rotates, the rack connected to the adjusting assembly will be blocked by the guide assembly and the loading plate, thereby preventing the rack from rotating with the adjusting assembly. By connecting the adjusting assembly and the rack, the bottom of the adjusting assembly is plugged into the loading plate, and the adjusting assembly is rotated to extend the total length of the adjusting assembly. The top of the adjusting assembly pushes the rack to move upward, thereby increasing the spacing between multiple groups of racks, and vice versa, reducing the spacing between the racks. It can be adjusted according to actual needs, and is more flexible to use.
[0017] 2. The utility model is connected through the cross bar and the slot. When the cross bar is separated from the slot, the spring pulls the vertical bar to move downward, and the vertical bar is separated from the insulation board, releasing the limit fixation of the insulation board. When the cross bar is located in the slot, the cross bar limits the vertical bar, so that the vertical bar remains in a state of being plugged into the insulation board, thereby achieving the limit fixation of the insulation board and preventing the insulation board from rotating.
[0018] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] In order to more clearly illustrate the technical solutions of the utility model embodiments, the drawings required for describing the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.
[0020] Figure 1 It is a schematic diagram of the external contour structure of the utility model;
[0021] Figure 2 It is a cutaway view of the mobile frame of the utility model;
[0022] Figure 3 For the utility model Figure 2 A schematic diagram of the structure enlargement in the middle;
[0023] Figure 4 This is a schematic diagram of the cross-sectional structure of the movable plate of the utility model;
[0024] Figure 5 For the utility model Figure 2 Enlarged schematic diagram of the structure at point B in the middle.
[0025] In the accompanying drawings, the components represented by the reference numerals are listed as follows:
[0026] 1. Heating furnace; 2. Displacement assembly; 201. Electric push rod; 202. Moving plate; 203. Pulley; 3. Heat insulation board; 4. Sealing cover; 5. Loading plate; 6. Adjustment assembly; 601. First round rod; 602. Screw barrel; 603. Screw; 7. Guide assembly; 701. Second round rod; 702. Fixed barrel; 703. Sliding plate; 704. Sliding rod; 8. Storage rack; 9. Movable assembly; 901. Rotating shaft; 902. Movable plate; 903. Slide groove; 904. Sliding block; 10. Limit assembly; 1001. Cross bar; 1002. Vertical bar; 1003. Spring; 1004. Plug slot; 11. Base. DETAILED DESCRIPTION
[0027] The following will be combined with the drawings in the utility model embodiments to clearly and completely describe the technical solutions in the utility model embodiments. Obviously, the described embodiments are only part of the utility model embodiments, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0028] In the description of the present utility model, it should be understood that the terms "opening", "upper", "lower", "top", "middle", "inside" and the like indicating orientation or positional relationship are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model.
[0029] See also Figure 1-Figure 5 As shown, the utility model is a low-hydroxy quartz glass raw material purification device, including a heating furnace 1, a displacement component 2 is arranged inside the heating furnace 1, the outer surface of the displacement component 2 is rotatably connected to a heat insulation board 3, the outer surface of the heat insulation board 3 is fixedly connected to a sealing cover 4, the outer surface of the sealing cover 4 is fixedly connected to a loading plate 5, the top of the loading plate 5 is plugged with an adjustment component 6 and a guide component 7, the ends of the adjustment component 6 and the guide component 7 are fixedly connected to a rack 8, the adjustment component 6 is used to adjust the height of the rack 8, and the guide component 7 is used to limit and guide the movement of the rack 8.
[0030] Start the displacement assembly 2 to push the heat insulation board 3 to move, so that the heat insulation board 3 and the sealing cover 4 are separated from the heating furnace 1, and the rack 8 is placed on the loading plate 5 on the left side of the sealing cover 4. The adjustment assembly 6 and the guide assembly 7 at the bottom of the rack 8 are plugged into the loading plate 5. The adjustment assembly 6 is rotated according to the height of the container containing the quartz glass raw material. When the adjustment assembly 6 is raised, the rack 8 is lifted up, so that the gap between the multiple groups of racks 8 is increased. When the adjustment assembly 6 is lowered, the rack 8 falls. After placing the container containing the quartz glass raw material on the rack 8, the heat insulation board 3 is pushed to drive the rack 8 to rotate, so that the rack 8 rotates to the side close to the heating furnace 1. The displacement assembly 2 drives the heat insulation board 3, the sealing cover 4, the loading plate 5 and the rack 8 to move to the right, so that the rack with the quartz glass raw material is placed. 8 enters the heating furnace 1, and the heating furnace 1 is started to heat the quartz glass raw material. At this time, the quartz glass raw material that needs to be purified next time can be placed on the empty shelf 8 on the left side of the insulation board 3. The quartz glass raw material is heated in the heating furnace 1. The hydroxyl and water molecules are released by high-temperature treatment, thereby eliminating impurities on the surface of the quartz crystal and obtaining low-hydroxyl quartz glass. After the heating is completed, the displacement component 2 pushes the insulation board 3 away from the heating furnace 1, and the insulation board 3 drives the shelf 8 and the quartz glass to move out of the heating furnace 1. The insulation board 3 is rotated to make the purified quartz glass rotate to the side away from the heating furnace 1, while the unpurified quartz glass approaches the heating furnace 1, and the displacement component 2 drives the insulation board 3 to move, and the insulation board 3 drives the unpurified quartz glass to enter the heating furnace 1.
[0031] The utility model connects the guide assembly 7 and the rack 8, and the guide assembly 7 is plugged into the loading plate 5. When the adjusting assembly 6 rotates, the rack 8 connected to the adjusting assembly 6 will be blocked by the guide assembly 7 and the loading plate 5, thereby preventing the rack 8 from rotating with the adjusting assembly 6. Through the connection of the adjusting assembly 6 and the rack 8, the bottom of the adjusting assembly 6 is plugged into the loading plate 5, and the adjusting assembly 6 is rotated to extend the total length of the adjusting assembly 6. The top of the adjusting assembly 6 pushes the rack 8 to move upward, thereby increasing the spacing between the multiple groups of racks 8, and vice versa, the spacing between the racks 8 is reduced. The utility model can be adjusted according to actual needs, and is more flexible to use.
[0032] In one embodiment, for the above-mentioned electric push rod 201, the displacement assembly 2 includes an electric push rod 201, the electric push rod 201 is fixedly connected to the inside of the heating furnace 1, the movable end of the electric push rod 201 is fixedly connected to a moving plate 202, and a pulley 203 is fixedly installed on the bottom of the moving plate 202.
[0033] The started electric push rod 201 pushes the movable plate 202 to drive the pulley 203 to move when the electric push rod 201 extends, so that the movable plate 202 is away from the heating furnace 1. When the electric push rod 201 retracts, it can drive the movable plate 202 close to the heating furnace 1. Through the connection between the movable plate 202 and the pulley 203, the pulley 203 can support the movable plate 202, thereby preventing the electric push rod 201 from being subjected to a large radial force due to the heavy weight of the movable plate 202.
[0034] In one embodiment, for the above-mentioned first round rod 601, the adjustment assembly 6 includes a first round rod 601, the first round rod 601 is inserted into the outer surface of the loading plate 5, the end of the first round rod 601 is rotatably connected to a screw barrel 602, the internal thread of the screw barrel 602 is connected to a screw 603, and the screw 603 is fixedly connected to the bottom of the storage rack 8.
[0035] The screw barrel 602 is rotated, and the screw barrel 602 drives the screw rod 603 to move, and the screw rod 603 can drive the storage rack 8 to move up and down. Through the connection between the first round rod 601 and the loading plate 5, the loading plate 5 can limit the first round rod 601 to prevent the first round rod 601 from driving the screw barrel 602 and the storage rack 8 to move unnecessary.
[0036] In one embodiment, for the above-mentioned second round rod 701, the guide assembly 7 includes a second round rod 701, the end of the second round rod 701 is fixedly connected with a fixed cylinder 702, the internal sliding connection of the fixed cylinder 702 is a limiting plate 703 and a sliding rod 704, the limiting plate 703 and the sliding rod 704 are fixedly connected, and the sliding rod 704 is fixedly connected to the bottom of the storage rack 8.
[0037] When the screw barrel 602 is rotated, the rotation tendency of the screw 603 and the rack 8 driven by the screw barrel 602 will be blocked by the sliding rod 704 and the second round rod 701, thereby preventing the screw 603 and the rack 8 from rotating with the screw barrel 602. When the screw barrel 602 rotates and the screw 603 does not rotate, the screw 603 can drive the rack 8 to move, and the rack 8 drives the sliding rod 704 to slide in the fixed barrel 702.
[0038] In one embodiment, for the above-mentioned movable component 9, the outer surface of the sealing cover 4 is provided with the movable component 9, the interior of the movable plate 202 is provided with a limiting component 10, the limiting component 10 is used to fix the insulation board 3, and the bottom of the heating furnace 1 is fixedly connected with a base 11.
[0039] Release the limit fixation of the movable component 9 and push it to rotate, so that the movable component 9 is parallel to the loading plate 5. At this time, the storage rack 8 can be placed on the movable component 9, and the limit component 10 is pulled to move. The limit fixation of the insulation board 3 is released, and the insulation board 3 can be pushed to rotate. When the limit component 10 is plugged into the insulation board 3, it can limit the insulation board 3 to prevent the insulation board 3 from unnecessary rotation when the heating furnace 1 is working. By connecting the heating furnace 1 with the base 11, the grounding area between the heating furnace 1 and the ground is increased, making the heating furnace 1 more stable.
[0040] In one embodiment, for the above-mentioned rotating shaft 901, the movable component 9 includes a rotating shaft 901, and the rotating shaft 901 is rotatably connected to the inside of the sealing cover 4. The outer surface of the rotating shaft 901 is fixedly connected with a movable plate 902. The outer surface of the sealing cover 4 is provided with a sliding groove 903, and the inside of the sliding groove 903 is slidably connected with a slider 904, and the slider 904 is plugged into the movable plate 902.
[0041] Push the slider 904 upward in the slide groove 903 to separate the slider 904 from the movable plate 902, and the movable plate 902 can rotate around the rotating shaft 901. Through the connection between the slider 904 and the movable plate 902, when the slider 904 is located in the movable plate 902, the movable plate 902 is limited and fixed to prevent the movable plate 902 from rotating.
[0042] In one embodiment, for the above-mentioned cross bar 1001, the limiting assembly 10 includes a cross bar 1001, and the cross bar 1001 is slidably connected to the inside of the movable plate 202. The inside of the movable plate 20 is slidably connected with a vertical bar 1002, and the end of the vertical bar 1002 is fixedly connected with a spring 1003. The outer surface of the vertical bar 1002 is provided with a slot 1004, and the cross bar 1001 is plugged into the vertical bar 1002 through the slot 1004.
[0043] Pull the cross bar 1001 to move, so that the cross bar 1001 is separated from the slot 1004 on the vertical bar 1002, and the spring 1003 at the bottom of the vertical bar 1002 pulls the vertical bar 1002 to move downward, and the vertical bar 1002 is separated from the insulation board 3. Through the connection between the cross bar 1001 and the slot 1004, when the cross bar 1001 is located in the slot 1004, the cross bar 1001 limits the vertical bar 1002, so that the vertical bar 1002 remains in a state of being plugged into the insulation board 3, thereby realizing the limiting fixation of the insulation board 3 and preventing the insulation board 3 from rotating.
[0044] In summary, with the aid of the above technical solution of the utility model, the spacing between the racks 8 is first adjusted according to the height of the quartz glass raw material containers, and the screw barrel 602 is rotated. The rotation trend of the screw 603 and the rack 8 driven by the rotating screw barrel 602 will be blocked by the sliding rod 704 and the second round rod 701, thereby preventing the screw 603 and the rack 8 from rotating with the screw barrel 602. When the screw barrel 602 rotates and the screw 603 does not rotate, the screw 603 can drive the rack 8 to move, and the spacing between the racks 8 is adjusted. After the spacing between the heat insulating board 3 and the heat insulating board 3 is adjusted, the container containing the quartz glass raw material is placed on the storage rack 8 on the left side of the heat insulating board 3, and the horizontal bar 1001 is found on the movable plate 202 below the heat insulating board 3. The horizontal bar 1001 is pulled to separate it from the vertical bar 1002. The spring 1003 pulls the vertical bar 1002 down to separate it from the heat insulating board 3, and the limit fixation of the heat insulating board 3 is released. The heat insulating board 3 is pushed to drive the storage rack 8 to rotate, so that the storage rack 8 with the quartz glass is close to the heating furnace 1, and the electric push rod 201 is started to drive the movable plate 202 and the heat insulating board 3 moves, the heat insulation board 3 pushes the rack 8 into the heating furnace 1, and the heating furnace 1 is started to heat the quartz glass. At this time, the rack 8 and the quartz glass raw material can be placed on the loading plate 5 away from the heating furnace 1. The hydroxyl and water molecules are released by high temperature treatment in the heating furnace 1, thereby eliminating impurities on the surface of the quartz crystal and obtaining low-hydroxyl quartz glass. After the heating is completed, the electric push rod 201 pushes the heat insulation board 3 away from the heating furnace 1, and the heat insulation board 3 drives the rack 8 and the quartz glass to move out of the heating furnace 1. The heat insulation board 3 is rotated to make The purified quartz glass rotates to the side away from the heating furnace 1, while the unpurified quartz glass approaches the heating furnace 1, and the electric push rod 201 drives the insulation board 3 to move, and the insulation board 3 drives the unpurified quartz glass into the heating furnace 1. When the gap between the racks 8 is small, the slider 904 in the sealing cover 4 on the surface of the insulation board 3 is pushed to move upward, so that the slider 904 is separated from the movable plate 902, and the movable plate 902 can rotate around the rotating shaft 901. At this time, more racks 8 can be placed on the movable plate 902.
[0045] Through the above technical solution, 1. Through the connection between the guide component 7 and the rack 8, the guide component 7 is plugged into the carrier plate 5. When the adjustment component 6 rotates, the rack 8 connected to the adjustment component 6 will be blocked by the guide component 7 and the carrier plate 5, thereby preventing the rack 8 from rotating with the adjustment component 6. Through the connection between the adjustment component 6 and the rack 8, the bottom of the adjustment component 6 is plugged into the carrier plate 5, and the adjustment component 6 is rotated to extend the total length of the adjustment component 6. The top of the adjustment component 6 pushes the rack 8 to move upward, thereby increasing the spacing between the multiple groups of racks 8, and vice versa. The spacing is reduced and can be adjusted according to actual needs, making it more flexible to use; 2. Through the connection between the cross bar 1001 and the slot 1004, when the cross bar 100 is separated from the slot 1004, the spring 1003 pulls the vertical rod 1002 to move downward, and the vertical rod 1002 is separated from the insulation board 3, releasing the limit fixation of the insulation board 3. When the cross bar 1001 is located in the slot 1004, the cross bar 1001 limits the vertical rod 1002, so that the vertical rod 1002 remains in a state of being plugged in with the insulation board 3, thereby realizing the limit fixation of the insulation board 3 and preventing the insulation board 3 from rotating.
[0046] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.
[0047] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.
Claims
1. A low-hydroxyl quartz glass raw material purification device, comprising a heating furnace (1), characterized in that: A displacement assembly (2) is arranged inside the heating furnace (1); the outer surface of the displacement assembly (2) is rotatably connected to a heat insulation board (3); the outer surface of the heat insulation board (3) is fixedly connected to a sealing cover (4); the outer surface of the sealing cover (4) is fixedly connected to a loading plate (5); the top of the loading plate (5) is plugged with an adjustment assembly (6) and a guide assembly (7); the ends of the adjustment assembly (6) and the guide assembly (7) are fixedly connected to a storage rack (8); the adjustment assembly (6) is used to adjust the height of the storage rack (8); and the guide assembly (7) is used to limit and guide the movement of the storage rack (8).
2. A low-hydroxy quartz glass raw material purification device according to claim 1, characterized in that: The displacement assembly (2) comprises an electric push rod (201), the electric push rod (201) is fixedly connected to the inside of the heating furnace (1), the movable end of the electric push rod (201) is fixedly connected to a moving plate (202), and a pulley (203) is fixedly installed at the bottom of the moving plate (202).
3. A low-hydroxy quartz glass raw material purification device according to claim 1, characterized in that: The adjustment assembly (6) comprises a first round rod (601), the first round rod (601) is inserted into the outer surface of the loading plate (5), the end of the first round rod (601) is rotatably connected to a screw barrel (602), the internal thread of the screw barrel (602) is connected to a screw rod (603), and the screw rod (603) is fixedly connected to the bottom of the storage rack (8).
4. A low-hydroxy quartz glass raw material purification device according to claim 1, characterized in that: The guide assembly (7) comprises a second round rod (701), the end of the second round rod (701) is fixedly connected to a fixed cylinder (702), the interior of the fixed cylinder (702) is slidably connected to a limit plate (703) and a sliding rod (704), the limit plate (703) and the sliding rod (704) are fixedly connected, and the sliding rod (704) is fixedly connected to the bottom of the storage rack (8).
5. A low-hydroxy quartz glass raw material purification device according to claim 2, characterized in that: The outer surface of the sealing cover (4) is provided with a movable component (9), the interior of the movable plate (202) is provided with a limit component (10), the limit component (10) is used to fix the heat insulation plate (3), and the bottom of the heating furnace (1) is fixedly connected with a base (11).
6. A low-hydroxy quartz glass raw material purification device according to claim 5, characterized in that: The movable component (9) comprises a rotating shaft (901), wherein the rotating shaft (901) is rotatably connected to the inside of the sealing cover (4), and the outer surface of the rotating shaft (901) is fixedly connected to a movable plate (902), and the outer surface of the sealing cover (4) is provided with a sliding groove (903), and the inside of the sliding groove (903) is slidably connected to a slider (904), and the slider (904) is plugged into the movable plate (902).
7. A low-hydroxy quartz glass raw material purification device according to claim 5, characterized in that: The limit assembly (10) comprises a cross bar (1001), wherein the cross bar (1001) is slidably connected to the inside of a movable plate (202), the inside of the movable plate (202) is slidably connected to a vertical bar (1002), the end of the vertical bar (1002) is fixedly connected to a spring (1003), a slot (1004) is provided on the outer surface of the vertical bar (1002), and the cross bar (1001) is plugged into the vertical bar (1002) through the slot (1004).