Crystal growing furnace

Abstract

The utility model discloses a crystal growing furnace. The crystal growing furnace comprises a rack, a main furnace chamber, an auxiliary furnace chamber and a lifting assembly, at least part of the main furnace chamber is arranged on the rack, the auxiliary furnace chamber is arranged above the main furnace chamber, and the lifting assembly is arranged above the auxiliary furnace chamber and used for lifting a crystal bar; the lifting assembly comprises a dynamic lifting mechanism and a lifting rope, the dynamic lifting mechanism is arranged in the auxiliary furnace chamber and can move relative to the auxiliary furnace chamber in the vertical direction, the dynamic lifting mechanism comprises a supporting frame, a lifting motor and a containing device, the lifting motor and the containing device are arranged on the supporting frame, and the lifting motor is in transmission connection with the containing device; the lifting rope is arranged in the auxiliary furnace chamber, and at least part of the lifting rope is wound around the containing device. Through the arrangement, the soft lifting rope is prevented from swinging in the process of lifting the crystal bar upwards, and the stability of the crystal bar is improved.

Description

Technical Field

[0001] The present application relates to the technical field of crystal growth, and in particular to a crystal growth furnace. Background Art

[0002] When the crystal grows, the material to be refined is placed in a container and heated to melt it into a solution. A seed crystal of the same material is placed under the weight, and the winding wheel rotates to move the seed crystal downward to the surface of the solution. The seed crystal is rotated by the rotation of the pulling head, and the seed crystal is slowly pulled. The solution solidifies in an orderly manner on the surface of the seed crystal, and a solid large-sized crystal material can be grown. During the pulling process of the crystal material, due to the influence of factors such as the rotation of the soft shaft, the vibration of the furnace body, the flow of protective gas, and the irregular flow of the melt, the soft shaft will swing in a single pendulum, affecting the quality of the crystal. Utility Model Content

[0003] In order to solve the deficiencies of the prior art, the purpose of the present application is to provide a crystal growth furnace, which can solve the problem of crystal rod shaking during the process of pulling the crystal rod.

[0004] To achieve the above objectives, this application adopts the following technical solutions:

[0005] A crystal growth furnace, comprising: a frame; at least part of a main furnace chamber is arranged on the frame; an auxiliary furnace chamber is arranged above the main furnace chamber; a pulling assembly is arranged above the auxiliary furnace chamber and is used to pull a crystal rod; the pulling assembly comprises: a dynamic pulling mechanism and a pulling rope, the dynamic pulling mechanism is arranged in the auxiliary furnace chamber and can move relative to the auxiliary furnace chamber in a vertical direction, the dynamic pulling mechanism comprises a support frame, a pulling motor and a receiving device, the pulling motor and the receiving device are both arranged on the support frame, and the pulling motor is transmission-connected to the receiving device; the pulling rope is arranged in the auxiliary furnace chamber, and the end of the pulling rope facing away from the crystal rod is arranged on the receiving device.

[0006] Furthermore, a first guide rail extending in a vertical direction is provided on the side wall of the auxiliary furnace chamber, and the first guide rail is located in the auxiliary furnace chamber, and the dynamic lifting mechanism is slidably connected to the first guide rail through a support frame.

[0007] Furthermore, the dynamic lifting mechanism is arranged on the side wall of the auxiliary furnace chamber and is located outside the space surrounded by the auxiliary furnace chamber. The dynamic lifting mechanism can move relative to the auxiliary furnace chamber in the vertical direction. The lifting rope connected to the dynamic lifting mechanism is passed through the side wall of the auxiliary furnace chamber and extends into the auxiliary furnace chamber.

[0008] Furthermore, a slot extending in the vertical direction is opened on the side wall of the auxiliary furnace chamber, and the space inside and outside the auxiliary furnace chamber is connected through the slot. The lifting rope connected to the dynamic lifting mechanism passes through the slot and extends into the auxiliary furnace chamber. The slot is filled with magnetic fluid to seal the auxiliary furnace chamber.

[0009] Furthermore, at least a portion of the support frame is disposed in the notch and is slidably connected to the side wall of the auxiliary furnace chamber at the outer edge of the notch, and the dynamic lifting mechanism can slide relative to the auxiliary furnace chamber along the extension direction of the notch.

[0010] Furthermore, a second guide rail extending in the vertical direction is provided on the side wall of the auxiliary furnace chamber, and the second guide rail is located outside the space surrounded by the auxiliary furnace chamber, and the dynamic lifting mechanism is slidably connected to the second guide rail through a support frame.

[0011] Furthermore, a limiting member for adjusting the extension direction of the pulling rope is provided in the auxiliary furnace chamber, at least a portion of the limiting member intersects with the axial center line of the auxiliary furnace chamber, and at least a portion of the pulling rope is overlapped on the limiting member.

[0012] Furthermore, the cross-section of the auxiliary furnace chamber in the horizontal direction is a polygon.

[0013] Furthermore, the auxiliary furnace chamber includes a plurality of furnace walls extending in a vertical direction, wherein the outer side surface of the furnace wall is a vertical plane, and the plurality of furnace walls are arranged to form a side wall of the auxiliary furnace chamber, and the angle between any two adjacent furnace walls is the same.

[0014] Furthermore, a reinforcement member is provided on the side wall of the auxiliary furnace chamber, the reinforcement member is arranged in the auxiliary furnace chamber, and two ends of the reinforcement member are respectively connected to two adjacent furnace walls.

[0015] Through the above arrangement, the crystal growth furnace includes a dynamic pulling component that can move relative to the auxiliary furnace chamber. During the process of pulling the crystal rod, the position of the dynamic pulling component is lowered at the same time to prevent the flexible pulling rope from causing the crystal rod to shake during the storage process, thereby improving the stability of the crystal rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of a crystal growth furnace in an embodiment of the present application;

[0017] Figure 2 This is a partial cross-sectional view of the auxiliary furnace chamber in the first embodiment of the present application;

[0018] Figure 3 In the implementation mode of this application Figure 2 A magnified image of point A;

[0019] Figure 4 This is a partial cross-sectional view of the auxiliary furnace chamber in the second embodiment of the present application;

[0020] Figure 5 It is a top view of the auxiliary furnace chamber in the embodiment of the present application. DETAILED DESCRIPTION

[0021] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the specific implementation manner of the present application will be clearly and completely described below in conjunction with the drawings in the implementation manner of the present application.

[0022] like Figure 1 As shown, the present application provides a crystal growth furnace 100 for producing crystal rods, wherein the crystal growth furnace 100 comprises a frame 10 , a pulling assembly 20 , an auxiliary furnace chamber 30 , a main furnace chamber 40 and a rotary valve assembly 50 .

[0023] Specifically, the frame 10 serves as a basic frame of the crystal growth furnace 100 and is used to support the pulling assembly 20 , the auxiliary furnace chamber 30 , the main furnace chamber 40 , and the rotary valve assembly 50 .

[0024] The pulling assembly 20 is at least partially disposed on the frame 10. The pulling assembly 20 can be lifted and rotated so that the pulling assembly 20 can be inserted into the auxiliary furnace chamber 30 and the main furnace chamber 40 as required. The pulling assembly 20 is used to pull the crystal rod.

[0025] When the crystal growth furnace 100 starts to work, the pulling assembly 20 first passes through the auxiliary furnace chamber 30 and then enters the main furnace chamber 40, so as to realize the pulling growth of the crystal rod.

[0026] The auxiliary furnace chamber 30 is located at the lower side of the pulling assembly 20 , and the main furnace chamber 40 is located at the lower side of the auxiliary furnace chamber 30 . The auxiliary furnace chamber 30 is used to place the grown crystal rods, and the main furnace chamber 40 is used to grow the crystal rods.

[0027] The rotary valve assembly 50 is located between the main furnace chamber 40 and the auxiliary furnace chamber 30, and is used to connect the main furnace chamber 40 and the auxiliary furnace chamber 30, so that the rotary valve assembly 50 can close or connect the passage between the main furnace chamber 40 and the auxiliary furnace chamber 30. During the growth of the crystal ingot, the rotary valve assembly 50 can connect the passage between the main furnace chamber 40 and the auxiliary furnace chamber 30, so that the pulling assembly 20 can extend from the auxiliary furnace chamber 30 into the main furnace chamber 40, or after the growth of the crystal ingot is completed, when the pulling assembly 20 pulls the crystal ingot into the auxiliary furnace chamber 30, the rotary valve assembly 50 can close the passage between the main furnace chamber 40 and the auxiliary furnace chamber 30, so as to facilitate the removal of the crystal ingot.

[0028] Furthermore, the crystal growth furnace 100 also includes a rotating lifting assembly 60 and a crucible (not shown). The rotating lifting assembly 60 is at least partially disposed in the main furnace chamber 40, and one end of the rotating lifting assembly 60 is connected to the crucible. The rotating lifting assembly 60 is located at the lower side of the crucible and supports the crucible. The rotating lifting assembly 60 is used to drive the rotation and lifting of the crucible.

[0029] The crucible is located in the main furnace chamber 40, and the crucible is filled with melt. During the growth of the crystal rod, the pulling assembly 20 extends the seed crystal into the crucible so that the seed crystal contacts the melt in the crucible. At this time, the pulling assembly 20 rotates the seed crystal and reverses the crucible by rotating the lifting assembly 60. At the same time, the pulling assembly 20 pulls the seed crystal upward, and then goes through the processes of seeding, enlargement, shoulder rotation, equal diameter growth, etc. to obtain the desired crystal rod. Among them, the seed crystal is a small crystal with the same crystal orientation as the desired crystal rod, which is the seed for growing a single crystal.

[0030] It should be noted that when the crystal rod is a single crystal silicon rod, the melt in the crucible is a silicon melt.

[0031] like Figure 2 As shown, as an implementation, the lifting assembly 20 includes:

[0032] The dynamic lifting mechanism 21 is disposed in the auxiliary furnace chamber 30 , and at least a portion of the dynamic lifting mechanism 21 can move relative to the auxiliary furnace chamber 30 in a vertical direction.

[0033] A pulling rope 22, one end of which is connected to the dynamic pulling mechanism 21, and the other end of which is connected to the crystal rod. The dynamic pulling mechanism 21 drives the crystal rod to move up and down in the vertical direction.

[0034] It should be noted that since the pulling rope 22 is made of flexible material, the rotating pulling rope 22 may cause the crystal ingot to shake during the pulling process. In addition, the vibration of the crystal growth furnace 100, the flow of protective gas, the irregular flow of silicon melt and other factors may also cause the pulling rope 22 to swing in a single pendulum.

[0035] In order to solve the problems that may exist in the process of pulling the crystal rod by the pulling rope 22, a dynamic pulling mechanism 21 is provided. The length of the pulling rope 22 between the crystal rod and the dynamic pulling mechanism 21 can be shortened, thereby reducing the swing angle of the pulling rope 22 when a single pendulum swing occurs. In the process of pulling the crystal rod, the dynamic pulling mechanism 21 moves upward in the vertical direction relative to the auxiliary furnace chamber 30.

[0036] Specifically, the lifting assembly 20 includes a transmission mechanism (not shown) for driving the dynamic lifting mechanism 21 to move. The transmission mechanism can be a motor and a transmission belt that cooperates with the motor. The dynamic lifting mechanism 21 moves relative to the auxiliary furnace chamber 30 in the vertical direction under the drive of the transmission belt. Here, the driving method of the dynamic lifting mechanism 21 is not specifically limited. This application intends to protect a dynamic lifting mechanism 21 that can move relative to the auxiliary furnace chamber 30, which has the function of lifting and rotating the crystal rod, and can also shorten the length of the lifting rope 22, thereby reducing the shaking angle of the lifting rope 22 when the single pendulum swing occurs.

[0037] like Figure 3As shown, as an implementation method, the dynamic lifting mechanism 21 includes a support frame 211, a lifting motor 212 and a receiving device 213.

[0038] The support frame 211 is used to support the lifting motor 212 and the receiving device 213. At least a part of the support frame 211 is arranged above the auxiliary furnace chamber 30 and closes the space surrounded by the auxiliary furnace chamber 30 in the vertical direction.

[0039] The lifting motor 212 is installed on the support frame 211, and the lifting motor 212 is connected to the receiving device 213. In some examples, the lifting motor 212 and the receiving device 213 can be gear-driven or chain-driven. There is no limitation on the specific transmission mode, and a suitable transmission mode can be flexibly selected according to the space of the crystal growth furnace 100.

[0040] The end of the pulling rope 22 away from the crystal rod is fixed on the receiving device 213, and the receiving device 213 is driven to rotate by the pulling motor 212, thereby driving the pulling rope 22 to be wound around the outer edge of the receiving device 213 to pull the crystal rod upward.

[0041] In the embodiment of the present application, when the pulling assembly 20 pulls the crystal rod upward, the pulling motor 212 drives the receiving device 213 to rotate, and the pulling rope 22 is wound around the outer edge of the receiving device 213, shortening the length of the pulling rope 22 between the crystal rod and the dynamic pulling mechanism 21, and at the same time, the dynamic pulling mechanism 21 moves upward relative to the auxiliary furnace chamber 30 in the vertical direction, thereby pulling the crystal rod upward. The above arrangement reduces the swing angle of the pulling rope 22 when a single pendulum swing occurs, and can also effectively control the pulling speed of the crystal rod.

[0042] like Figure 3 As shown, as an implementation, the side wall 31 of the auxiliary hearth stone is provided with a first guide rail 32 extending in the vertical direction, and the first guide rail 32 is located in the space surrounded by the auxiliary hearth stone. The dynamic lifting mechanism 21 is movably connected to the first guide rail 32 through the support frame 211.

[0043] Illustratively, during the process of pulling the crystal rod upward, the pulling motor 212 drives the receiving device 213 to reel in the pulling rope 22 , and the support frame 211 drives the pulling motor 212 and the receiving device 213 to slide upward relative to the auxiliary furnace stone along the extension direction of the first guide rail 32 .

[0044] The first guide rail 32 is used to limit the dynamic lifting mechanism 21 , thereby preventing the dynamic lifting mechanism 21 from shaking during the sliding process, thereby preventing the shaking angle of the lifting rope 22 from increasing.

[0045] like Figure 4As shown, as another optional implementation, the dynamic lifting mechanism 21 is arranged on the side wall 31 of the auxiliary furnace chamber 30, and the dynamic lifting mechanism 21 is located outside the space surrounded by the auxiliary furnace chamber 30. The dynamic lifting mechanism 21 can slide relative to the auxiliary furnace chamber 30 in the vertical direction, and the lifting rope 22 connected to the dynamic lifting mechanism 21 is passed through the side wall 31 of the auxiliary furnace chamber 30 and extends into the auxiliary furnace chamber 30.

[0046] Specifically, a slot 33 extending in the vertical direction is formed on the side wall 31 of the auxiliary furnace chamber 30 , and the spaces inside and outside the auxiliary furnace chamber 30 are connected through the slot 33 .

[0047] In the example of the present application, the pulling rope 22 passes through the notch 33 and extends to the inside of the auxiliary furnace chamber 30. In order to ensure the sealing of the auxiliary furnace chamber 30 during the crystal pulling process, the notch 33 is filled with magnetic fluid to isolate the space inside and outside the auxiliary furnace chamber 30 to achieve a sealing effect, and the pulling rope 22 can move up and down along the extension direction of the notch 33.

[0048] like Figure 4 As shown, further, at least part of the support frame 211 is arranged in the notch 33, and the side wall 34 distributed around the outer edge of the notch 33 and the support frame 211 can be slidably connected, or the two can be set to be rollingly connected, that is, a pulley and a bearing structure are provided between the support frame 211 and the side wall 34 distributed around the notch 33. This ensures that the support frame 211 can slide relative to the auxiliary furnace chamber 30 along the extension direction of the notch 33.

[0049] The above arrangement also limits the dynamic lifting mechanism 21 by means of the side walls 34 distributed around the notch 33 .

[0050] Optionally, a second guide rail (not shown) extending in the vertical direction is provided on the side wall 31 of the auxiliary furnace chamber 30. Compared with the first guide rail 32 in the above solution, the second guide rail is arranged outside the space surrounded by the auxiliary furnace chamber 30. The dynamic lifting mechanism 21 is slidably connected to the second guide rail through the support frame 211.

[0051] The second guide rail is used to limit the dynamic lifting mechanism 21 , thereby preventing the dynamic lifting mechanism 21 from shaking during the sliding process, thereby preventing the shaking angle of the lifting rope 22 from increasing.

[0052] It should be noted that, in the above technical solution, the dynamic pulling mechanism 21 is arranged outside the space surrounded by the auxiliary furnace chamber 30 , and the pulling rope 22 passes through the side wall 31 of the auxiliary furnace chamber 30 and is easily affected by the gravity of the crystal rod and hung on the inner wall of the auxiliary furnace chamber 30 .

[0053] In order to avoid the above problems, a stopper 214 is further provided in the auxiliary furnace chamber 30 in the embodiment of the present application. The stopper 214 is connected to the support frame 211 and can keep synchronous movement with the support frame 211 in the vertical direction, wherein the stopper 214 is specifically used to adjust the extension direction of the pull rope 22. At least part of the stopper 214 intersects with the axial center line of the auxiliary furnace chamber 30, and the pull rope 22 passes through the side wall 31 of the auxiliary furnace chamber 30 and overlaps the stopper 214.

[0054] like Figure 4 As shown, specifically, the stopper 214 is a cross bar extending along the radial direction of the auxiliary furnace chamber 30, and the two ends of the cross bar are respectively connected to the inner wall of the auxiliary furnace chamber 30, and the cross bar passes through the axial center line of the auxiliary furnace chamber 30. The pull rope 22 passes through the side wall 31 of the auxiliary furnace chamber 30 and then overlaps the cross bar, thereby changing the extension direction of the pull rope 22.

[0055] Optionally, the limiting member 214 may also be a pulley structure, and the sliding structure is fixedly disposed on the inner wall of the auxiliary furnace chamber 30 , or the sliding structure is connected to at least a portion of the lifting assembly 20 above the auxiliary furnace chamber 30 .

[0056] Through the above arrangement, it is ensured that the axis of the crystal rod is substantially coincident with the axial center line of the auxiliary furnace chamber 30 , and the probability of collision between the crystal rod and the inner wall of the auxiliary furnace chamber 30 is reduced during the process of pulling the crystal rod.

[0057] like Figure 5 As shown, as an implementation, the cross-section of the auxiliary furnace chamber 30 in the horizontal direction is a polygon.

[0058] Specifically, the auxiliary furnace chamber 30 includes a plurality of furnace walls 311 extending in a vertical direction, wherein the outer side surface of the furnace wall 311 is a vertical plane, and the plurality of furnace walls 311 are arranged to form the side wall 31 of the auxiliary furnace chamber 30 described above.

[0059] Furthermore, the angles between two adjacent furnace walls 311 are the same. That is, the cross section of the auxiliary furnace chamber 30 in the horizontal direction is a regular polygon. Thus, the rigidity of the auxiliary furnace chamber 30 in all directions remains basically the same. Since the auxiliary furnace chamber 30 extends in a relatively long length in the vertical direction, the above arrangement can prevent the auxiliary furnace chamber 30 from bending and deforming in a direction with a relatively small rigidity.

[0060] In the example of the present application, the side wall 31 of the auxiliary furnace chamber 30 is a regular hexagon when viewed from the vertical direction. In other examples, the side wall 31 of the auxiliary furnace chamber 30 may also be a regular quadrilateral or a regular octagon, and the shape of the side wall 31 of the auxiliary furnace chamber 30 is not specifically limited. The auxiliary furnace chamber 30 with a polygonal cross section is provided with ribs extending in the vertical direction between two adjacent furnace walls 311 to improve the overall structural strength of the auxiliary furnace chamber 30.

[0061] Furthermore, a reinforcing member 312 is provided on the side wall 31 of the auxiliary furnace chamber 30. The reinforcing member 312 is integrally formed with the side wall 31 of the auxiliary furnace chamber 30 and is located in the space surrounded by the auxiliary furnace chamber 30. Both ends of the reinforcing member 312 are connected to two adjacent furnace walls 311 respectively.

[0062] A plurality of reinforcement members 312 distributed in the vertical direction can be arranged in the auxiliary furnace chamber 30. The overall structural strength of the auxiliary furnace chamber 30 is further improved by the ribs extending in the vertical direction between two adjacent furnace walls 311 and the reinforcement members 312 arranged between two adjacent furnace walls 311.

[0063] In summary, by providing a dynamic pulling mechanism 21 that can move in the vertical direction relative to the auxiliary furnace chamber 30, wherein the dynamic pulling mechanism 21 is also used to wind the pulling rope 22, the length of the pulling rope 22 between the dynamic pulling mechanism 21 and the crystal rod is shortened. In the process of pulling the crystal rod, the dynamic pulling mechanism 21 is driven to move upward to pull the crystal rod, thereby reducing the shaking generated during the pulling process of the crystal rod.

[0064] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to this application.

Claims

1. A crystal growth furnace, comprising: frame; a main furnace chamber, at least a portion of which is disposed on the frame; A secondary furnace chamber, the secondary furnace chamber being arranged above the main furnace chamber; A pulling assembly, which is arranged above the auxiliary furnace chamber and is used for pulling a crystal rod; Characterized in that the lifting component comprises: A dynamic lifting mechanism, which is arranged in the auxiliary furnace chamber and can move relative to the auxiliary furnace chamber in a vertical direction, and comprises a support frame, a lifting motor and a receiving device, wherein the lifting motor and the receiving device are both arranged in the support frame, and the lifting motor is transmission-connected to the receiving device; A pulling rope is arranged in the auxiliary furnace chamber, and one end of the pulling rope away from the crystal rod is arranged on the receiving device.

2. The crystal growth furnace according to claim 1, characterized in that: A first guide rail extending in a vertical direction is provided on the side wall of the auxiliary furnace chamber, and the first guide rail is located in the auxiliary furnace chamber, and the dynamic lifting mechanism is slidably connected to the first guide rail through the support frame.

3. The crystal growth furnace according to claim 1, characterized in that: The dynamic lifting mechanism is arranged on the side wall of the auxiliary furnace chamber and is located outside the space surrounded by the auxiliary furnace chamber. The dynamic lifting mechanism can move relative to the auxiliary furnace chamber in the vertical direction. The lifting rope connected to the dynamic lifting mechanism is passed through the side wall of the auxiliary furnace chamber and extends into the auxiliary furnace chamber.

4. The crystal growth furnace according to claim 3, characterized in that: A slot extending in a vertical direction is provided on the side wall of the auxiliary furnace chamber, and the space inside and outside the auxiliary furnace chamber is connected through the slot. The lifting rope connected to the dynamic lifting mechanism passes through the slot and extends into the auxiliary furnace chamber. The slot is filled with magnetic fluid to seal the auxiliary furnace chamber.

5. The crystal growth furnace according to claim 4, characterized in that: At least a portion of the support frame is disposed in the notch and is slidably connected to the side wall of the auxiliary furnace chamber at the outer edge of the notch, and the dynamic lifting mechanism can slide relative to the auxiliary furnace chamber along the extension direction of the notch.

6. The crystal growth furnace according to claim 3, characterized in that: A second guide rail extending in a vertical direction is provided on the side wall of the auxiliary furnace chamber, and the second guide rail is located outside the space surrounded by the auxiliary furnace chamber, and the dynamic lifting mechanism is slidably connected to the second guide rail through the support frame.

7. The crystal growth furnace according to claim 3, characterized in that: A limiting member for adjusting the extension direction of the pulling rope is provided in the auxiliary furnace chamber, at least a portion of the limiting member intersects with the axial center line of the auxiliary furnace chamber, and at least a portion of the pulling rope is overlapped on the limiting member.

8. The crystal growth furnace according to claim 1, characterized in that: The cross section of the auxiliary furnace chamber in the horizontal direction is a polygon.

9. The crystal growth furnace according to claim 8, characterized in that: The auxiliary furnace chamber includes a plurality of furnace walls extending in a vertical direction, wherein the outer side surface of the furnace wall is a vertical plane, and the plurality of furnace walls are arranged to form the side wall of the auxiliary furnace chamber, and the angle between any two adjacent furnace walls is the same.

10. The crystal growth furnace according to claim 9, characterized in that: A reinforcing member is provided on the side wall of the auxiliary furnace chamber. The reinforcing member is arranged in the auxiliary furnace chamber, and two ends of the reinforcing member are respectively connected to two adjacent furnace walls.

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