Diamond wire cooling liquid detection device

Abstract

The utility model provides a diamond wire cooling liquid detection device, belongs to the technical field of machinery, and solves the problem that an existing diamond wire detection device is poor in detection effect. The diamond wire cooling liquid detection device comprises a detection table; a feeder used for providing cooling liquid is arranged above the feeding frame; the detection frame is movably provided with a carrier, a silicon block used for receiving cooling liquid is embedded in the carrier, a plurality of through holes are vertically formed in the silicon block in a penetrating mode, and the diameter of each through hole is a single value; the number of the infrared sensors is two, the upper infrared sensor is aligned with the upper surface of the silicon block, the lower infrared sensor is aligned with the lower plane of the silicon block, cooling liquid in the feeder drips to the upper surface of the silicon block vertically and downwards and flows to the lower surface of the silicon block from top to bottom through one of the through holes, and the upper surface of the silicon block is aligned with the lower surface of the silicon block. The two infrared sensors respectively sense the nodes where the cooling liquid arrives at or leaves the silicon block and feed back information. The device has the characteristic of good detection effect.

Description

Technical Field

[0001] The utility model belongs to the field of mechanical technology and relates to a diamond wire coolant detection device, in particular to a detection device for simulating and detecting the wetting and penetration performance of diamond wire coolant during cutting. Background Art

[0002] Coolant is an industrial liquid generally used in the process of metal cutting and grinding to cool and lubricate tools and workpieces. It is used in the multi-wire cutting process of precision materials such as silicon wafers, crystals, quartz, glass, and ceramics. It plays the role of suspension, cooling, and lubrication during the cutting process to ensure that the cutting process proceeds smoothly.

[0003] Among them, diamond wire coolant is an auxiliary material and consumable product used in the process of diamond wire cutting silicon wafers. Its demand has gradually increased with the development of the photovoltaic solar energy industry and the silicon wafer processing industry.

[0004] In order to meet the requirements of efficient and high-quality production of silicon wafers, one of the characteristics that diamond wire coolant must have is excellent wetting and penetration. Having good wetting and penetration means that it can form a protective film on the surface of the silicon wafer, reduce cutting resistance, thereby improving cutting efficiency, reducing cutting consumption, and reducing the residual silicon powder particles on the surface of the cut silicon wafer, ensuring a smooth surface of the finished product.

[0005] In order to detect the wetting permeability of diamond wire coolant, the canvas sedimentation method is currently the most commonly used evaluation method. However, this method has many influencing factors and sometimes cannot meet the existing practical needs. It is difficult to test the permeability of silicon wafer cutting fluid under working conditions.

[0006] In summary, in order to solve the deficiencies in existing diamond wire coolant detection, the utility model designs a diamond wire coolant detection device with a reasonable structure and good detection effect. Summary of the invention

[0007] The utility model provides a diamond wire coolant detection device with reasonable structure and good detection effect to solve the problems existing in the prior art.

[0008] The purpose of the utility model can be achieved through the following technical solutions: A diamond wire coolant detection device, comprising:

[0009] Testing bench;

[0010] A feed rack is fixed on the testing table, and a feeder for providing coolant is arranged above the feed rack;

[0011] The detection rack is located on one side of the feeding rack, and a carrier rack is movably mounted on the detection rack, and a silicon block for receiving a coolant is embedded on the carrier rack, and a plurality of through holes are vertically penetrated on the silicon block, and the diameter of each through hole is a single value;

[0012] There are two infrared sensors, which are arranged in parallel. The center line of the upper infrared sensor is aligned with the upper surface of the silicon block, and the center line of the lower infrared sensor is aligned with the lower plane of the silicon block. The coolant in the feeder drips vertically downward to the upper surface of the silicon block and flows from top to bottom to the lower surface of the silicon block through one of the through holes. The two infrared sensors respectively sense the nodes where the coolant arrives at or leaves the silicon block and feed back information.

[0013] As a further improvement of the present case, a feed arm is horizontally arranged on the feed rack and the feed arm can move up and down along the feed rack, and the above-mentioned feeder is inserted through the end of the feed arm.

[0014] As another improvement of the present case, a detection arm extends outward from one side of the detection frame, and a movable block and a fixed block are sequentially arranged on the detection arm. One end of the above-mentioned carrier is movably connected to the fixed block. The movable block can drive the fixed block to move horizontally along the detection arm, and the carrier can move horizontally and longitudinally along the fixed block.

[0015] As a further improvement of the present invention, a slot for accommodating silicon blocks is provided on the carrier, and a “]”-shaped notch is provided at the bottom of the carrier.

[0016] As a further improvement of the present invention, a plurality of ferrules corresponding to the through holes are fixedly provided on the upper surface of the silicon block, and each ferrule is coaxially arranged with the corresponding through hole.

[0017] As a further improvement of the present invention, a support arm extends from the bottom of the feed rack, and a liquid receiving tray is placed on the support arm.

[0018] As a further improvement of the present case, a cleaning rack is provided in a corner of the inspection table, on which a nozzle and a spray gun are respectively provided, wherein the nozzle is connected to a cleaning liquid, and the spray gun is connected to an air pump.

[0019] Compared with the prior art, the utility model has a reasonable structural setting, and realizes the detection of the wetting permeability of the coolant through the coordinated setting of the feeder, the silicon block and the infrared sensor; wherein, the diameters of the through holes on the silicon block are different, which can simulate the different distances between silicon wafers during the cutting work; in addition, the coolant can use coolant with different silicon powder concentrations, and then detect the difference in wetting permeability of different coolants. Such a structural setting can obtain more experimental results and facilitate detection and analysis. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of the utility model.

[0021] Figure 2 yes Figure 1 Schematic diagram of part of the structure.

[0022] Figure 3 It is a structural schematic diagram of the object carrier and silicon blocks in the utility model.

[0023] In the figure, 10, detection table; 20, feeding rack; 21, feeding arm; 22, feeder; 23, supporting arm; 231, liquid receiving tray; 30, detection rack; 31, detection arm; 311, movable block; 312, fixed block; 32, loading rack; 321, slot; 322, "]"-shaped notch; 33, silicon block; 331, through hole; 332, ring; 40, cleaning rack; 41, nozzle; 42, spray gun; 50, infrared sensor. DETAILED DESCRIPTION

[0024] The technical solution of the utility model is further described below in conjunction with the embodiments and drawings.

[0025] like Figures 1 to 3 As shown, the diamond wire coolant detection device comprises:

[0026] Testing station 10;

[0027] A feed rack 20 is fixed on the testing platform 10, and a feeder 22 for providing a coolant is arranged above the feed rack 20;

[0028] The detection rack 30 is located at one side of the feeding rack 20. A carrier rack 32 is movably mounted on the detection rack 30. A silicon block 33 for receiving a coolant is embedded on the carrier rack 32. A plurality of through holes 331 are vertically penetrated through the silicon block 33. The diameter of each through hole 331 is a single value.

[0029] There are two infrared sensors 50, which are arranged in parallel. The center line of the upper infrared sensor 50 is aligned with the upper surface of the silicon block 33, and the center line of the lower infrared sensor 50 is aligned with the lower plane of the silicon block 33. The coolant in the feeder 22 drips vertically downward to the upper surface of the silicon block 33, and flows from top to bottom to the lower surface of the silicon block 33 through one of the through holes 331. The two infrared sensors 50 respectively sense the nodes where the coolant arrives at or leaves the silicon block 33 and feed back information.

[0030] Diamond wire coolant needs to have excellent wetting and penetration properties, so as to form a protective film on the surface of the silicon wafer during the cutting process, reduce cutting resistance, improve cutting efficiency, reduce cutting consumption, and reduce the residual silicon powder particles on the surface of the cut silicon wafer, ensuring a smooth surface of the finished product and efficient and high-quality production of silicon wafers.

[0031] At present, the method for testing the wetting permeability of diamond wire coolant is mostly the canvas sedimentation method, but this method has many influencing factors during testing, and sometimes it is difficult to meet actual needs and it is difficult to test the permeability of silicon wafer cutting fluid under working conditions.

[0032] The wetting and permeability of a coolant refers to its ability to accelerate the contact between the solid and liquid interfaces and increase the contact area, or to penetrate into the interior of an object. Diamond wire coolant is actually applied to silicon wafers. The fluidity in the finer pores of vertical silicon blocks can show the wetting and permeability of the coolant to silicon. If the performance is good, it can be quickly expanded and flow out in a short time.

[0033] To this end, the utility model provides a diamond wire coolant detection device, which realizes the detection of the wetting permeability of the coolant through the coordinated arrangement of the feeder 22, the silicon block 33 and the infrared sensor 50; wherein, the diameters of the through holes 331 on the silicon block 33 are different in size, which can simulate the different distances between silicon wafers during cutting work, facilitating detection and analysis.

[0034] Specifically, the utility model sets a feeding rack 20 and a detection rack 30 to install corresponding components. During actual operation, the feeder 22 filled with coolant drips vertically downward. The coolant drips onto the upper surface of the silicon block 33 under the action of gravity, enters the interior of the silicon block 33 through one of the through holes 331 until it flows out of the silicon block 33.

[0035] Here, it is preferred that the two infrared sensors 50 have a timing function respectively. During the detection process, when the coolant drips onto the upper surface of the silicon block 33, the upper infrared sensor 50 senses a signal and starts timing. When the coolant flows out of the lower surface of the silicon block 33, the lower infrared sensor 50 stops timing and feeds back information. The time difference between the two is the time it takes for the coolant to pass through the silicon block 33. The performance of the wetting permeability of the corresponding coolant can be obtained by analyzing the time it takes for the coolant to pass through different apertures.

[0036] In the present embodiment, the diameter of the through hole 331 is preferably a single value, that is, the diameters of the through holes 331 are different. The different diameters of the through holes 331 can simulate the distance between silicon wafers during the silicon wafer cutting process. The specific diameter size can be selected within a certain numerical range according to actual detection needs; the number of through holes 331 is also selected according to actual detection needs, so as to obtain an appropriate amount of data for analysis.

[0037] The through holes 331 on the silicon block 33 can be arranged according to the diameter, or can be selected at will, which is not limited here. Preferably, when the coolant drops onto the upper surface of the silicon block 33, the size of the droplet can cover the corresponding through hole 331, so that the coolant can flow down along the through hole 331.

[0038] Preferably, a feed arm 21 is horizontally arranged on the feed rack 20 and the feed arm 21 can move up and down along the feed rack 20 , and the feeder 22 is disposed at the end of the feed arm 21 .

[0039] The feed arm 21 is provided here to facilitate the installation of the feeder 22. At the same time, the feed arm 21 can move up and down along the feed rack 20, and can adjust the height of the feeder 22 in the vertical direction, thereby realizing flexible change of the position of the feeder 22. In actual operation, the height of the feeder 22 can be adjusted according to detection needs.

[0040] Among them, the feeder 22 is preferably a glass sample injector with fixed capacity, good airtightness and a flat needle, which is beneficial to ensure that the state is stable each time the liquid is dripped, and the size and shape of each droplet are basically consistent, which is beneficial to the detection work.

[0041] Furthermore, a detection arm 31 extends outward from one side of the detection frame 30, and a movable block 311 and a fixed block 312 are sequentially arranged on the detection arm 31. One end of the above-mentioned carrier 32 is movably connected to the fixed block 312. The movable block 311 can drive the fixed block 312 to move horizontally along the detection arm 31, and the carrier 32 can move horizontally and longitudinally along the fixed block 312.

[0042] In this embodiment, the movable block 311 and the fixed block 312 are provided to realize the lateral and longitudinal movement of the carrier 32 in the horizontal direction. When performing the detection work, the corresponding diameter of the through hole 331 is selected, and the carrier 32 is moved forward, backward, left and right, so that the corresponding through hole 331 is aligned with the feeder 22, so that the cooling liquid can drip into the through hole 331.

[0043] Preferably, a slide rail (not shown in the figure) is provided between the movable block 311 and the detection arm 31, and between the carrier 32 and the fixed block 312, and the fixed block 312 is fixedly connected to the movable block 311, so as to realize the front, back, left, and right movement of the carrier 32, wherein scale lines can also be provided at the detection arm 31, the movable block 311, the fixed block 312, and the end of the carrier 32, so as to accurately adjust the moving distance of the carrier 32. In actual use, the movement of the movable block 311 and the carrier 32 can also be realized by providing a cylinder or an oil cylinder, etc., which is not limited here.

[0044] Preferably, a slot 321 for accommodating the silicon block 33 is formed on the carrier 32 , and a “]”-shaped notch 322 is formed at the bottom of the carrier 32 .

[0045] The setting of the slot 321 facilitates the embedding of the silicon block 33, and can also maintain the stability of the silicon block 33, so that the detection work can proceed smoothly; at the same time, a "]"-shaped notch 322 is opened at the bottom of the carrier 32, and it is preferred that the opening of the "]"-shaped notch 322 faces the infrared sensor 50 below, so that the infrared sensor 50 can sense the time node when the coolant flows out of the silicon block 33 on time, ensuring that the detection work proceeds smoothly. Such a structural setting can achieve the support and protection of the silicon block 33, and at the same time does not affect the infrared sensor 50 to detect the coolant, and the use effect is good.

[0046] Furthermore, a plurality of collars 332 corresponding to the through holes 331 are fixed on the upper surface of the silicon block 33, and each collar 332 is coaxially arranged with the corresponding through hole 331. The arrangement of the collar 332 facilitates limiting the droplets of each dripping to the position of the corresponding through hole 331, thereby preventing the droplets from splashing and affecting the detection results.

[0047] Preferably, a support arm 23 extends from the bottom of the feed rack 20, and a liquid receiving tray 231 is placed on the support arm 23. Here, the liquid receiving tray 231 is preferably arranged below the silicon block 33 to receive the coolant flowing out of the silicon block 33, and then clean it up, so as to keep the whole detection device clean.

[0048] Preferably, the liquid receiving tray 231 is stably placed on the support arm 23 , and it is also convenient for operators to remove the liquid receiving tray 231 from the support arm 23 , so as to facilitate cleaning of the liquid receiving tray 231 .

[0049] Furthermore, a cleaning rack 40 is provided in a corner of the inspection table, and a nozzle 41 and a spray gun 42 are respectively provided on the cleaning rack 40. The nozzle 41 is connected to a cleaning liquid (not shown in the figure), and the spray gun 42 is connected to an air pump (not shown in the figure).

[0050] In this embodiment, a cleaning rack 40 (nozzle 41, spray gun 42) is preferably provided. After each inspection is completed, the silicon block 33 can be cleaned by the nozzle 41 on the cleaning rack 40 to avoid coolant residue; after cleaning, the silicon block 33 is blown dry by the high-pressure gas in the spray gun 42 to facilitate the next inspection. In practice, the nozzle 41 and the spray gun 42 can be connected to the corresponding cleaning liquid and air pump through a hose, which is not limited here.

[0051] The liquid receiving tray 231 can also receive the cleaning liquid flowing down the silicon block 33 during cleaning, which is convenient for subsequent cleaning work and is also conducive to further maintaining the cleanliness of the entire detection device. Preferably, when the silicon block 33 moves to different positions within the working range, the coolant and cleaning liquid flowing down the silicon block 33 can always drip onto the liquid receiving tray 231.

[0052] The diamond wire coolant detection device has a reasonable structure. Through the coordinated arrangement of the feeder 22, the silicon block 33 and the infrared sensor 50, the wetting and permeability detection of the coolant is realized. Among them, the diameters of the through holes 331 on the silicon block 33 are different, which can simulate the different distances between silicon wafers during the cutting work. In addition, the coolant can use coolants with different silicon powder concentrations to detect the difference in wetting and permeability of different coolants. Such a structural setting can obtain more experimental results and facilitate detection and analysis.

[0053] The preferred embodiments of the present invention are described herein, but the protection scope of the present invention is not limited thereto. Any modification or supplement or replacement of the specific embodiments described by technicians in the field of the present invention shall be included in the protection scope of the present invention.

Claims

1. A diamond wire coolant detection device, characterized in that: include: Testing bench; A feed rack is fixed on the testing table, and a feeder for providing coolant is arranged above the feed rack; The detection rack is located on one side of the feeding rack, and a carrier rack is movably mounted on the detection rack, and a silicon block for receiving a coolant is embedded on the carrier rack, and a plurality of through holes are vertically penetrated on the silicon block, and the diameter of each through hole is a single value; There are two infrared sensors, which are arranged in parallel. The center line of the upper infrared sensor is aligned with the upper surface of the silicon block, and the center line of the lower infrared sensor is aligned with the lower plane of the silicon block. The coolant in the feeder drips vertically downward to the upper surface of the silicon block and flows from top to bottom to the lower surface of the silicon block through one of the through holes. The two infrared sensors respectively sense the nodes where the coolant arrives at or leaves the silicon block and feed back information.

2. A diamond wire coolant detection device according to claim 1, characterized in that: A feeding arm is horizontally arranged on the feeding rack and can move up and down along the feeding rack, and the feeder is arranged through the end of the feeding arm.

3. A diamond wire coolant detection device according to claim 1, characterized in that: A detection arm extends outward from one side of the detection frame, and a movable block and a fixed block are arranged on the detection arm in sequence. One end of the above-mentioned carrier is movably connected to the fixed block. The movable block can drive the fixed block to move horizontally along the detection arm, and the carrier can move horizontally and longitudinally along the fixed block.

4. A diamond wire coolant detection device according to claim 1 or 3, characterized in that: The carrier is provided with a slot for accommodating silicon blocks, and a "]"-shaped notch is provided at the bottom of the carrier.

5. The diamond wire coolant detection device according to claim 1, characterized in that: A plurality of ferrules corresponding to the through holes are fixedly arranged on the upper surface of the silicon block, and each ferrule is coaxially arranged with the corresponding through hole.

6. The diamond wire coolant detection device according to claim 1, characterized in that: A support arm is extended from the bottom of the feed rack, and a liquid receiving pan is placed on the support arm.

7. The diamond wire coolant detection device according to claim 1, characterized in that: A cleaning rack is also provided in one corner of the inspection table, on which a nozzle and a spray gun are respectively provided, the nozzle is connected to a cleaning liquid, and the spray gun is connected to an air pump.

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