Tail gas recovery device for trimethylsilane

Abstract

The utility model discloses a trimethylsilane tail gas recovery device which comprises a condenser and a gas-liquid cyclone separator which are communicated with each other, a first heat exchanger is arranged in the condenser, a second heat exchanger is arranged in the gas-liquid cyclone separator, the first heat exchanger and the second heat exchanger are both connected to a third heat exchanger, and the condenser and the gas-liquid cyclone separator are arranged on the mounting frame in a manner of sharing a flow channel. According to the system, the high-temperature fluid flowing out of the third heat exchanger can be used for central heating of office places such as parks, and therefore the purpose of fully utilizing heat energy is achieved.

Description

Technical Field

[0001] The utility model relates to a tail gas recovery device, in particular to a tail gas recovery device for trimethylsilane. Background Art

[0002] Trimethylsilane is an important silicon source gas in the production of semiconductor devices and is commonly used in the generation of Ge-Si-C layers in epitaxial chemical vapor deposition. Trimethylsilane can also be decomposed to generate SiC under high temperature conditions, so it can also be used as a precursor material for SiC coatings. Trimethylsilane has extremely important and unique uses in the electronics industry and the defense industry. The tail gas emitted by the manufacture of trimethylsilane contains hydrogen chloride and trimethylsilane, and direct emission will pollute the environment and cause waste of resources. Therefore, the present application aims to provide a tail gas recovery device for trimethylsilane that can fully utilize thermal energy. Utility Model Content

[0003] The utility model aims to overcome the shortcomings of the prior art and provide a tail gas recovery device for trimethylsilane.

[0004] The purpose of the utility model is achieved through the following technical scheme: a tail gas recovery device for trimethylsilane, comprising a condenser and a gas-liquid cyclone separator connected to each other, a first heat exchanger is arranged in the condenser, a second heat exchanger is arranged in the gas-liquid cyclone separator, the first heat exchanger and the second heat exchanger are both connected to a third heat exchanger, wherein the condenser and the gas-liquid cyclone separator are arranged on a mounting frame in a manner of a shared flow channel.

[0005] Preferably, the condenser comprises an outer shell and a first heat exchange tube, fins are arranged inside the first heat exchange tube, and the gas-liquid cyclone separator comprises a shell and a second heat exchange tube, and the first heat exchange tube and the second heat exchange tube are connected to each other.

[0006] Preferably, spiral sheets are provided on the outer wall of the second heat exchange cylinder.

[0007] Preferably, the tail gas recovery device further comprises a spray tank, an air intake assembly and a liquid spray assembly arranged in the spray tank, wherein the air intake assembly is arranged above the liquid spray assembly, and an exhaust channel is arranged at the bottom of the spray tank.

[0008] Preferably, the air intake assembly includes an air intake pipe and a porous flow equalizing plate, the gas-liquid cyclone separator is connected to the spray tank via the air intake pipe, and the porous flow equalizing plate is arranged above the liquid spray assembly.

[0009] Preferably, the liquid spray assembly comprises a liquid spray plate, a plurality of support rods, and a plurality of nozzles. The liquid spray plate is fixed to the inner wall of the shell via the support rods, and the nozzles are arranged on the liquid spray plate in an inclined upward manner.

[0010] Preferably, the exhaust gas recovery device further comprises a water pump, and the water pump is connected to the nozzle.

[0011] The utility model has the following advantages:

[0012] (1) The first heat exchanger, the second heat exchanger and the third heat exchanger are connected by pipelines. The lower temperature fluid first flows into the first heat exchanger to be heated, then enters the second heat exchanger for further heat exchange and heating, and finally enters the third heat exchanger for heat exchange and cooling. The lower temperature fluid flowing through the third heat exchanger is heated, and the high temperature fluid flowing out of the third heat exchanger can be used, for example, for heating office spaces in a park, thereby achieving the purpose of fully utilizing thermal energy.

[0013] (2) Compared with the traditional method of lower air intake and upper spraying, the present application adopts the method of upper air intake and lower spraying to achieve spray adsorption. The gas is discharged from the bottom, forcing the gas to move downward due to pressure, and the spray liquid first moves upward and then moves downward due to gravity. Both processes can fully contact with the exhaust gas, thereby improving the adsorption effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the structure of the tail gas recovery device of the utility model;

[0015] Figure 2 It is a schematic diagram of the structure of the liquid spraying assembly in a top view;

[0016] In the figure, 1-condenser, 2-gas-liquid cyclone separator, 3-first heat exchanger, 4-second heat exchanger, 5-third heat exchanger, 6-mounting frame, 7-fin, 1a-shell, 1b-first heat exchange tube, 2a-shell, 2b-second heat exchange tube, 8-inlet pipe, 9-spray tank, 10-inlet assembly, 11-liquid spray assembly, 12-exhaust channel, 13-multi-porous flow equalizing plate, 11a-liquid spray plate, 11b-support rod, 11c-nozzle, 14-water pump. DETAILED DESCRIPTION

[0017] The utility model is further described below in conjunction with the accompanying drawings, and the protection scope of the utility model is not limited to the following:

[0018] like Figure 1 and Figure 2As shown, the present application provides a tail gas recovery device for trimethylsilane, comprising a condenser 1 and a gas-liquid cyclone separator 2 connected to each other, a first heat exchanger 3 is arranged in the condenser 1, a second heat exchanger 4 is arranged in the gas-liquid cyclone separator 2, the first heat exchanger 3 and the second heat exchanger 4 are both connected to the third heat exchanger 5, wherein the condenser 1 and the gas-liquid cyclone separator 2 are arranged on the mounting frame 6 in a manner of a common flow channel. The first heat exchanger, the second heat exchanger and the third heat exchanger can all be existing fluid heat exchangers that are publicly sold. The first heat exchanger, the second heat exchanger and the third heat exchanger are connected through a pipeline, and the lower temperature fluid first flows into the first heat exchanger to heat up, then enters the second heat exchanger to further heat exchange and heat up, and finally enters the third heat exchanger 5 to heat exchange and cool down, so that the lower temperature fluid flowing through the third heat exchanger 5 is heated, and the high temperature fluid flowing out of the third heat exchanger 5 can be used for heating of office spaces in the park, for example, so as to achieve the purpose of fully utilizing thermal energy.

[0019] Preferably, the condenser 1 includes a shell 1a and a first heat exchange tube 1b, and the first heat exchange tube 1b is provided with fins 7. The gas-liquid cyclone separator 2 includes a shell 2a and a second heat exchange tube 2b, and the first heat exchange tube 1b and the second heat exchange tube 2b are connected to each other. It can be understood that an air inlet pipe can be provided at the bottom of the shell 1a, and the air inlet pipe can extend into the shell 1a for a certain distance (not shown). The high-temperature trimethylsilane tail gas to be recovered can enter the bottom air inlet pipe and enter the first heat exchange tube 1b to be cooled so that the methylsilane is condensed into droplets. The bottom of the shell can be provided with a drainage hole (not shown) so that the liquid methylsilane can be discharged from the drainage hole. The fin 7 can increase the heat exchange area, thereby improving the condensation effect of methylsilane.

[0020] Preferably, the outer wall of the second heat exchange tube 2b is provided with spiral blades, which can increase the heat exchange area and improve the condensation effect.

[0021] Preferably, the tail gas recovery device further comprises a spray tank 9, an air intake assembly 10 and a liquid spray assembly 11 arranged in the spray tank 9, wherein the air intake assembly 10 is arranged above the liquid spray assembly 11, wherein an exhaust passage 12 is arranged at the bottom of the spray tank 9. The air intake assembly 10 comprises an air intake pipe 8 and a porous flow equalizing plate 13, the gas-liquid cyclone separator 2 is connected to the spray tank 9 via the air intake pipe 8, and the porous flow equalizing plate 13 is arranged above the liquid spray assembly 11. The liquid spray assembly 11 comprises a liquid spray plate 11a, a plurality of support rods 11b, and a plurality of nozzles 11c, wherein the liquid spray plate 11a is fixed to the inner wall of the housing 2a via the support rods 11b, and the nozzles 11c are arranged on the liquid spray plate 11a in an inclined upward manner. The tail gas recovery device further comprises a water pump 14, which is connected to the nozzles 11c. Compared with the traditional method of lower air intake and upper spraying, the present application adopts the method of upper air intake and lower spraying to achieve spray adsorption. The gas is discharged from the bottom, forcing the gas to move downward based on pressure, and the spray liquid moves upward first and then moves downward based on gravity. Both processes can fully contact with the exhaust gas, thereby improving the adsorption effect.

[0022] The working principle of the present application is as follows: the trimethylsilane tail gas to be recovered enters the first heat exchange tube 1b, the shell 2a and the spray tank 9 from the bottom of the shell 1a in turn for adsorption recovery treatment, the temperature is lowered in the first heat exchange tube 1b and the first condensation is performed, the temperature is further lowered in the shell 2a, and the gas-liquid separation is further achieved by cyclone separation, so that the trimethylsilane droplets can eventually fall back into the first heat exchange tube 1b and be collected. The tail gas can be further recovered and treated in the spray tank 9 by spray adsorption, and the treated gas that meets the emission standards is finally discharged through the exhaust channel 12.

[0023] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A tail gas recovery device for trimethylsilane, characterized in that: The invention comprises a condenser (1) and a gas-liquid cyclone separator (2) which are connected to each other, wherein the condenser (1) is provided with a first heat exchanger (3), the gas-liquid cyclone separator (2) is provided with a second heat exchanger (4), the first heat exchanger (3) and the second heat exchanger (4) are both connected to a third heat exchanger (5), wherein the condenser (1) and the gas-liquid cyclone separator (2) are arranged on a mounting frame (6) in a manner of sharing a common flow channel.

2. The tail gas recovery device according to claim 1, characterized in that: The condenser (1) comprises an outer shell (1a) and a first heat exchange tube (1b), wherein the first heat exchange tube (1b) is provided with fins (7), and the gas-liquid cyclone separator (2) comprises a shell (2a) and a second heat exchange tube (2b), wherein the first heat exchange tube (1b) and the second heat exchange tube (2b) are connected to each other.

3. The tail gas recovery device according to claim 2, characterized in that: The outer wall of the second heat exchange cylinder (2b) is provided with spiral blades.

4. The tail gas recovery device according to claim 1, characterized in that: The tail gas recovery device further comprises a spray tank (9), an air intake assembly (10) and a liquid spray assembly (11) arranged in the spray tank (9), wherein the air intake assembly (10) is arranged above the liquid spray assembly (11), and an exhaust passage (12) is arranged at the bottom of the spray tank (9).

5. The tail gas recovery device according to claim 4, characterized in that: The air intake assembly (10) comprises an air intake pipe (8) and a porous flow equalizing plate (13); the gas-liquid cyclone separator (2) is connected to the spray tank (9) via the air intake pipe (8); and the porous flow equalizing plate (13) is arranged above the liquid spray assembly (11).

6. The tail gas recovery device according to claim 4, characterized in that: The liquid spray assembly (11) comprises a liquid spray disc (11a), a plurality of support rods (11b), and a plurality of nozzles (11c); the liquid spray disc (11a) is fixed to the inner wall of the housing (2a) via the support rods (11b); and the nozzles (11c) are arranged on the liquid spray disc (11a) in an upwardly inclined manner.

7. The tail gas recovery device according to claim 6, characterized in that: The exhaust gas recovery device further comprises a water pump (14), wherein the water pump (14) is in communication with the nozzle (11c).

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