Semiconductor cleaning device

Abstract

The utility model discloses a semiconductor cleaning device, and relates to the technical field of semiconductor cleaning, the semiconductor cleaning device comprises a box body, and a cleaning mechanism comprises a connecting pipe, an external thread, a limiting plate, a filter plate, a threaded rod and a fixing block. A fixing block is in threaded connection with the exterior of a threaded rod and attached to the surface of a filter plate, at the moment, a water outlet valve is in threaded connection with the exterior of a connecting pipe through an external thread, when water flows out of the cleaning device, a handle outside the water outlet valve is rotated to enable cleaning liquid to flow out of a water outlet pipe, and at the moment, the cleaning liquid is filtered by the filter plate to block fixed impurities; after the work is finished, the water outlet valve is rotated to release the connection between the water outlet valve and the connecting pipe, and the filter plate and the connecting pipe can be cleaned by dismounting the filter plate at the moment, so that solid impurities in the cleaning liquid can be conveniently removed before the cleaning liquid is collected, a worker does not need to collect the cleaning liquid and then filter the cleaning liquid, and the subsequent treatment efficiency of the cleaning liquid is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor cleaning, in particular to a semiconductor cleaning device. Background Art

[0002] Semiconductors refer to materials whose electrical conductivity at room temperature is between that of conductors and insulators.

[0003] At present, an existing semiconductor process ultrasonic cleaning machine (such as patent number: CN216441264U) discloses a semiconductor cleaning equipment, including: a box body, universal wheels, a controller, a support rod, a mounting seat, and an electric push rod; the four corners of the bottom of the box body are fixedly connected to universal wheels; the front side of the box body is fixedly connected to the controller; the tops of the left and right sides of the box body are fixedly connected to support rods; the bottoms of the left and right sides are fixedly connected to the mounting seats; the beneficial effect is that the quartz insulating ring to be cleaned can be put on the cleaning rod through the cleaning rod, and then the anti-drop cover is embedded on the top of the cleaning rod to prevent the quartz insulating ring from floating up and running out from the top of the cleaning rod during cleaning; the bolts and the threaded holes are threadedly connected, so that the cleaning rod is easy to disassemble from the inside of the cleaning rack, so that the cleaning rod is easy to disassemble and assemble; at the same time, the quartz insulating ring is easy to take; thus, by setting the cleaning rod, it is convenient to install and clean the quartz insulating ring, so that the quartz insulating ring can be put on the cleaning rod in an orderly manner.

[0004] However, during the implementation of the above technical solution, it was found that there were at least the following problems: after the semiconductor was cleaned, the cleaning liquid flowed out of the box through the outlet pipe. At this time, the cleaning liquid contained fixed impurities and other impurities. In order to recycle the cleaning liquid, the staff needed to process the cleaning liquid. Before other treatments were performed on the cleaning liquid, the fixed impurities in the cleaning liquid needed to be removed, which increased the steps of cleaning liquid treatment and reduced the cleaning liquid treatment efficiency. Utility Model Content

[0005] 1. Technical issues to be resolved

[0006] In view of the deficiencies in the prior art, the utility model provides a semiconductor cleaning device, which solves the technical problem that fixed impurities in the cleaning liquid need to be removed before other treatments are performed on the cleaning liquid, resulting in an increase in the cleaning liquid treatment steps and a reduction in the cleaning liquid treatment efficiency.

[0007] (II) Technical solution

[0008] In order to achieve the above objectives, the present invention is implemented through the following technical solutions:

[0009] A semiconductor cleaning device comprises a box body, a water outlet pipe is fixedly installed on the outside of the box body, a cleaning mechanism is arranged on the outside of the water outlet pipe, the cleaning mechanism comprises a connecting pipe, an external thread, a limiting plate, a filter plate, a threaded rod and a fixing block, the connecting pipe is arranged on the outside of the water outlet pipe, the external thread is opened on the outside of the connecting pipe away from the water outlet pipe, the limiting plate is fixedly installed on the inside of one end of the connecting pipe away from the water outlet pipe, the filter plate is clamped on the outside of the limiting plate, the threaded rod is fixedly installed on the outside of the limiting plate, the fixing block is threadedly connected to the outside of the threaded rod, the filter plate is located between the fixing block and the limiting plate, and the limiting plate is close to the filter plate. A spring is provided on one side, and a block is fixedly installed on the outside of the spring, and the block fits with the outside of the filter plate. A groove is provided on the outside of the limit plate, and the block is slidably connected to the inside of the groove. The end of the spring away from the block is fixedly connected to the inside of the groove. Two built-in grooves are provided inside the groove, and a built-in plate is slidably connected to the inside of each built-in groove. The two built-in plates are respectively fixedly installed on both ends of the block. An internal thread is provided on the end of the connecting pipe close to the water outlet pipe, and the connecting pipe is threadedly connected to the outside of the water outlet pipe through the internal thread. A cleaning plate is slidably connected to the inside of the connecting pipe, and the cleaning plate is arranged on the outside of the filter plate.

[0010] Preferably, both ends of the filter plate are provided with connecting holes, and both ends of the cleaning plate are respectively clamped in the two connecting holes.

[0011] Preferably, both ends of the cleaning plate are provided with thread grooves, the interior of each thread groove is threadedly connected with a fixing bolt, and the fixing bolt is fitted with the filter plate.

[0012] (III) Beneficial effects

[0013] 1. By setting the filter plate and cooperating with the connecting pipe, the filter plate is clamped on the outside of the limit plate. At this time, the fixing block is threadedly connected to the outside of the threaded rod and fits with the surface of the filter plate. At this time, the water outlet valve is threadedly connected to the outside of the connecting pipe through the external thread. When the cleaning device discharges water, the handle on the outside of the water outlet valve is turned to make the cleaning liquid flow out from the water outlet pipe. At this time, the cleaning liquid is filtered by the filter plate and the fixed impurities are blocked. When the work is completed, the water outlet valve is turned to release the connection between the water outlet valve and the connecting pipe. At this time, the filter plate can be disassembled to clean the filter plate and the connecting pipe, which is convenient for removing solid impurities in the cleaning liquid before collecting it. There is no need for staff to collect it and then filter it, which improves the subsequent treatment efficiency of the cleaning liquid.

[0014] 2. By setting a cleaning plate and cooperating with fixing bolts, when the filter plate is pulled to release the connection between the filter plate and the connecting pipe, the cleaning plate will scratch the bottom surface inside the connecting pipe to loosen the impurities attached to the bottom surface. At the same time, the impurities are pushed out of the connecting pipe by the cleaning plate, which is convenient for the staff to clean the connecting pipe and reduces the difficulty of cleaning the inside of the connecting pipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings.

[0016] Figure 1 It is a structural diagram of the utility model;

[0017] Figure 2 For this utility model Figure 1 A cross-sectional structural diagram of the middle connecting pipe;

[0018] Figure 3 For this utility model Figure 1 A magnified structural diagram of the middle part;

[0019] Figure 4 For this utility model Figure 2 The enlarged structure of B in the middle;

[0020] Figure 5 For this utility model Figure 4 The enlarged structure of C in the middle;

[0021] Figure 6 For this utility model Figure 4 The enlarged structure of D in the middle.

[0022] Legend: 1. Box body; 2. Water outlet pipe; 3. Connecting pipe; 4. External thread; 5. Limiting plate; 6. Filter plate; 7. Threaded rod; 8. Fixing block; 9. Spring; 10. Block; 11. Groove; 12. Built-in groove; 13. Built-in plate; 14. Internal thread; 15. Cleaning plate; 16. Connecting hole; 17. Threaded groove; 18. Fixing bolt. DETAILED DESCRIPTION

[0023] The embodiment of the present application provides a semiconductor cleaning device, which effectively solves the technical problem that fixed impurities in the cleaning liquid need to be removed before the cleaning liquid is subjected to other treatments, resulting in an increase in the cleaning liquid treatment steps and a reduction in the cleaning liquid treatment efficiency.

[0024] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6 The technical solution in the embodiment of the present application effectively solves the technical problem that the fixed impurities in the cleaning liquid need to be removed before the cleaning liquid is subjected to other treatments, which increases the number of cleaning liquid treatment steps and reduces the cleaning liquid treatment efficiency. The overall idea is as follows:

[0025] In view of the problems existing in the prior art, the utility model provides a semiconductor cleaning device, which comprises a box body 1, a water outlet pipe 2 is fixedly installed on the outside of the box body 1, and a cleaning mechanism is arranged on the outside of the water outlet pipe 2;

[0026] The cleaning mechanism includes a connecting pipe 3, an external thread 4, a limiting plate 5, a filter plate 6, a threaded rod 7 and a fixing block 8;

[0027] The connecting pipe 3 is arranged on the outside of the water outlet pipe 2, the external thread 4 is opened on the outside of the connecting pipe 3 away from the water outlet pipe 2, the limiting plate 5 is fixedly installed on the inside of the end of the connecting pipe 3 away from the water outlet pipe 2, the filter plate 6 is clamped on the outside of the limiting plate 5, the threaded rod 7 is fixedly installed on the outside of the limiting plate 5, the fixing block 8 is threadedly connected to the outside of the threaded rod 7, and the filter plate 6 is located between the fixing block 8 and the limiting plate 5.

[0028] By setting the filter plate 6 and cooperating with the connecting pipe 3, the filter plate 6 is clamped on the outside of the limit plate 5. At this time, the fixing block 8 is threadedly connected to the outside of the threaded rod 7 and fits the surface of the filter plate 6. At this time, the water outlet valve is threadedly connected to the outside of the connecting pipe 3 through the external thread 4. When the cleaning device discharges water, the handle on the outside of the water outlet valve is turned to make the cleaning liquid flow out from the water outlet pipe 2. At this time, the cleaning liquid is filtered by the filter plate 6 and the fixed impurities are blocked. When the work is completed, the water outlet valve is turned to release the connection between the water outlet valve and the connecting pipe 3. At this time, the filter plate 6 can be disassembled to clean the filter plate 6 and the connecting pipe 3, so as to remove the solid impurities in the cleaning liquid before collecting it. There is no need for the staff to collect it and then filter it, which improves the subsequent treatment efficiency of the cleaning liquid.

[0029] A spring 9 is provided on one side of the limit plate 5 close to the filter plate 6, and a block 10 is fixedly installed outside the spring 9;

[0030] The block 10 fits with the outside of the filter plate 6, so that the filter plate 6 can be easily moved outward when the filter plate 6 is disassembled.

[0031] The outer portion of the limiting plate 5 is provided with a groove 11, and the block 10 is slidably connected inside the groove 11;

[0032] The end of the spring 9 away from the block 10 is fixedly connected to the inside of the groove 11 to facilitate the sliding of the block 10 .

[0033] Two built-in grooves 12 are formed inside the groove 11, and a built-in plate 13 is slidably connected inside each built-in groove 12;

[0034] The two built-in plates 13 are respectively fixedly mounted at two ends of the block 10 to limit the moving range of the block 10 .

[0035] An inner thread 14 is formed on one end of the connecting pipe 3 close to the water outlet pipe 2;

[0036] The connecting pipe 3 is threadedly connected to the outside of the water outlet pipe 2 via the internal thread 14 , so as to facilitate the disassembly and assembly of the connecting pipe 3 .

[0037] A cleaning plate 15 is slidably connected inside the connecting pipe 3. An end of the cleaning plate 15 away from the filter plate 6 has an opening so that the movement of the cleaning plate 15 is not affected by the limiting plate 5.

[0038] The cleaning plate 15 is arranged outside the filter plate 6 to facilitate cleaning of impurities inside the connecting pipe 3 .

[0039] Both ends of the filter plate 6 are provided with connection holes 16;

[0040] The two ends of the cleaning plate 15 are respectively clamped in the two connecting holes 16 , so as to facilitate the disassembly and assembly of the cleaning plate 15 .

[0041] Both ends of the cleaning plate 15 are provided with thread grooves 17, and the interior of each thread groove 17 is threadedly connected with a fixing bolt 18;

[0042] The fixing bolt 18 is in contact with the filter plate 6 , and the fixing bolt 18 and the fixing block 8 are located on the same side of the filter plate 6 , so as to facilitate fixing the cleaning plate 15 .

[0043] By setting the cleaning plate 15 and cooperating with the fixing bolts 18, when the filter plate 6 is pulled to release the connection between the filter plate 6 and the connecting pipe 3, the cleaning plate 15 scratches the bottom surface inside the connecting pipe 3 to loosen the impurities attached to the bottom surface. At the same time, the impurities are pushed out of the connecting pipe 3 by the cleaning plate 15, which makes it easier for the staff to clean the connecting pipe 3 and reduces the difficulty of cleaning the inside of the connecting pipe 3.

[0044] Working principle:

[0045] The first step is to set the filter plate 6, match the connecting pipe 3, put the cleaning plate 15 into the connecting pipe 3, and clamp the filter plate 6 on the outside of the limit plate 5. At this time, the two ends of the cleaning plate 15 are respectively clamped in the inside of the two connecting holes 16. At the same time, the filter plate 6 presses the block 10 so that the block 10 enters the inside of the groove 11. At this time, the fixing block 8 is threadedly connected to the outside of the threaded rod 7 and fits with the surface of the filter plate 6. At this time, the fixing bolt 18 is threadedly connected to the inside of the thread groove 17 to fix the cleaning plate 15. At this time, the water outlet valve is threadedly connected to the outside of the connecting pipe 3 through the external thread 4;

[0046] In the second step, when the cleaning device discharges water, turn the handle outside the water outlet valve to make the cleaning liquid flow out from the water outlet pipe 2. At this time, the cleaning liquid is filtered by the filter plate 6 to block the fixed impurities. When the work is completed, turn the water outlet valve to release the connection between the water outlet valve and the connecting pipe 3. At this time, the connection between the fixing block 8 and the threaded rod 7 is released. Under the action of the spring 9, the block 10 moves to the outside of the groove 11. At this time, the filter plate 6 is pushed by the block 10 to release the connection with the limit plate 5. At this time, the staff can pull the filter plate 6 out of the connecting pipe 3. During the movement of the filter plate 6, the cleaning plate 15 scratches the bottom end surface inside the connecting pipe 3 to loosen the impurities attached to the bottom end surface. At the same time, the impurities are pushed out of the connecting pipe 3 by the cleaning plate 15. When the cleaning plate 15 and the filter plate 6 are completely disassembled, the staff can clean the filter plate 6 and the connecting pipe 3.

[0047] Finally, it should be noted that: Obviously, the above embodiments are only examples for clearly explaining the present invention, and are not intended to limit the implementation methods. For ordinary technicians in the relevant field, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from this are still within the scope of protection of the present invention.

Claims

1. A semiconductor cleaning device, comprising a housing (1), wherein a water outlet pipe (2) is fixedly mounted on the outside of the housing (1), characterized in that: A cleaning mechanism is provided on the outside of the water outlet pipe (2); The cleaning mechanism comprises a connecting pipe (3), an external thread (4), a limiting plate (5), a filter plate (6), a threaded rod (7) and a fixing block (8); The connecting pipe (3) is arranged outside the water outlet pipe (2), the external thread (4) is formed outside the connecting pipe (3) away from the water outlet pipe (2), the limiting plate (5) is fixedly mounted inside the end of the connecting pipe (3) away from the water outlet pipe (2), the filter plate (6) is clamped on the outside of the limiting plate (5), the threaded rod (7) is fixedly mounted on the outside of the limiting plate (5), the fixing block (8) is threadedly connected to the outside of the threaded rod (7), and the filter plate (6) is located between the fixing block (8) and the limiting plate (5).

2. A semiconductor cleaning device as claimed in claim 1, characterized in that: A spring (9) is provided on one side of the limit plate (5) close to the filter plate (6), and a block (10) is fixedly mounted on the outside of the spring (9); The block (10) is fitted onto the outside of the filter plate (6).

3. A semiconductor cleaning device as claimed in claim 1, characterized in that: The outer portion of the limiting plate (5) is provided with a groove (11), and the block (10) is slidably connected inside the groove (11); The end of the spring (9) away from the block (10) is fixedly connected to the inside of the groove (11).

4. A semiconductor cleaning device as claimed in claim 3, characterized in that: Two built-in grooves (12) are formed inside the groove (11), and a built-in plate (13) is slidably connected inside each built-in groove (12); The two built-in plates (13) are respectively fixedly mounted on two ends of the block (10).

5. A semiconductor cleaning device as claimed in claim 1, characterized in that: An end of the connecting pipe (3) close to the water outlet pipe (2) is provided with an internal thread (14); The connecting pipe (3) is threadedly connected to the outside of the water outlet pipe (2) via an internal thread (14).

6. A semiconductor cleaning device as claimed in claim 1, characterized in that: A cleaning plate (15) is slidably connected inside the connecting pipe (3); The cleaning plate (15) is arranged outside the filter plate (6).

7. A semiconductor cleaning device as claimed in claim 1, characterized in that: Both ends of the filter plate (6) are provided with connection holes (16); The two ends of the cleaning plate (15) are respectively clamped inside the two connecting holes (16).

8. A semiconductor cleaning device as claimed in claim 6, characterized in that: Both ends of the cleaning plate (15) are provided with threaded grooves (17), and the interior of each threaded groove (17) is threadedly connected with a fixing bolt (18); The fixing bolt (18) is fitted onto the filter plate (6).

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