The utility model discloses a stable gripping scratch-proof
wafer handling arm, relates to
wafer processing technical field, including mounting
cantilever and gripping subassembly, mounting
cantilever rear end middle part is equipped with mounting through-hole, mounting
cantilever front end is equipped with protection disc, protection disc upper end is equipped with gripping subassembly, and mounting cantilever rear end middle part is equipped with the mounting through-hole through-hole, and the gripping subassembly is equipped with the mounting through-hole through-hole through-hole through-hole through-hole through-hole through-hole through-hole through-hole through-hole through-hole through-hole. The grabbing
assembly comprises a carrying disc, a movable connecting plate, an air extracting pump, an air suction
nozzle, a wedge-shaped net, a pneumatic rod, a clamping ring and a limiting groove, the movable connecting plate is installed at the lower end of the carrying disc, the air extracting pump is installed at the upper end of the carrying disc, the air suction
nozzle is connected to the front end of the air extracting pump, and meanwhile the wedge-shaped net is additionally arranged at the front end of the air suction
nozzle. According to the stable-grabbing scratch-proof
wafer carrying arm, through the arrangement of the grabbing
assembly, the problem that follow-up
machining of wafers is affected due to the fact that the surfaces of the wafers are prone to being scratched due to the fact that large
friction force is easily generated between the wafers in most carrying arms is solved, and the overall practicability of the carrying arm is conveniently improved.