Metal target material casting equipment

Abstract

The utility model relates to metal target material casting equipment which comprises a bearing plate and a surrounding plate arranged on the periphery of the bearing plate, and the bearing plate is used for loading melt; the water storage cavity is formed in the bottom of the bearing plate, and the bearing plate forms the upper cavity wall of the water storage cavity; the water inlet is formed in the bottom of the water storage cavity; and the water outlet is formed in the side part of the water storage cavity. Through the cooperation of the water storage cavity and the action of the water inlet and the water outlet which are formed in the water storage cavity, a water source can be introduced into the water storage cavity and is continuously and circularly discharged, so that water flow is directly contacted with the surface of the bearing plate, and the water flow can be directly discharged under the action of the water flow even under the condition that the bottom of the bearing plate is not flat enough. The water flow can still extrude redundant air, so that the bottom of the bearing plate is in full contact with the water body, and the whole plate bottom is uniformly cooled, so that all parts of the bottom of the melt are uniformly cooled, and the density uniformity of the finally cooled and molded target material is better ensured.

Description

Technical Field

[0001] The utility model belongs to the technical field of target material manufacturing equipment, in particular to a metal target material casting and pouring equipment. Background Art

[0002] Plane metal target is a kind of vacuum sputtering coating target that is widely used. Its production process usually adopts casting method. The disadvantage of this method is that after the liquid metal is cast, the casting liquid is generally cooled naturally. During the cooling process of the metal liquid, it is generally cooled from the outermost part that contacts the air, and then to the inside. After the outermost part is cooled, its metal material has begun to harden, so that the appearance of the entire casting body has been basically formed. Therefore, during the cooling process of the inside, due to the shrinkage, the internal material will become loose, resulting in uneven density of the entire target;

[0003] In response to this problem, after searching, the Chinese utility model patent with publication number CN219443355U has disclosed a casting device for planar targets. Please read its original document for details. Specifically, the patent sets a movable water-cooling plate under the heating platform and a heating plate above the mold. When the molten liquid is poured into the mold, the temperature of the upper layer of the molten liquid is maintained by the heating plate, and the water-cooling plate contacts the bottom of the heating platform, so as to cool the bottom of the molten liquid by heat conduction, so as to achieve the effect of gradually cooling the molten liquid from bottom to top, thereby reducing the occurrence of uneven material density caused by uneven cooling inside and outside. The inventor believes that the structure can effectively solve the problem of uneven density inside and outside the target material caused by the material cooling process, but the structure still has certain defects. Specifically, the water in the water-cooling plate is not directly in contact with the bottom of the heating platform, but is in contact with the bottom of the heating platform through the top of the water-cooling plate. This requires that there must be absolute flatness between the surfaces of the two to ensure full fit. When the flatness is not enough and the fit is not in place, the water-cooling plate can only achieve local cooling of the bottom of the heating platform, which will still lead to uneven cooling and uneven cooling of the bottom of the melt, thereby affecting the uniformity of the target material density. Utility Model Content

[0004] The purpose of this section is to summarize some aspects of the embodiments of the utility model and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the specification abstract and utility model name of this application to avoid blurring the purpose of this section, specification abstract and utility model name, and such simplifications or omissions cannot be used to limit the scope of the utility model.

[0005] In view of the following technical problems in the prior art: in the above-mentioned patent disclosure, when the water cooling plate cools the bottom of the heating platform, it is difficult to absolutely guarantee the uniformity of the cooling process because it cannot absolutely guarantee the flatness between the water cooling plate and the bottom surface of the heating platform. To solve this technical problem, the utility model provides the following technical solutions:

[0006] A metal target casting device, comprising:

[0007] A carrying plate and a surrounding plate arranged around the carrying plate, wherein the carrying plate is used to load the melt;

[0008] A water storage cavity is arranged at the bottom of the bearing plate, and the bearing plate forms an upper cavity wall of the water storage cavity;

[0009] A water inlet is arranged at the bottom of the water storage chamber and a water outlet is arranged at the side of the water storage chamber.

[0010] As an optimal technical solution for metal target casting equipment, there are multiple water inlets and multiple drainage outlets, and the multiple water inlets are evenly distributed on the bottom surface of the water storage chamber, and the multiple drainage outlets are evenly distributed on the side of the water storage chamber.

[0011] As a preferred technical solution for a metal target casting equipment, the drainage path of the drainage port is higher than the height of the water storage chamber.

[0012] As a preferred technical solution for metal target casting equipment, the utility model also includes a pushing component arranged in the water storage chamber, and the coolant diffuses and flows in the water storage chamber under the action of the pushing component.

[0013] As an optimal technical solution for a metal target casting equipment, the pushing assembly includes an axis rod rotatably arranged in a water storage chamber, and spiral blades and force-bearing plates arranged thereon, the spiral blades act on the water body, and the force-bearing plates are located at the water inlet.

[0014] As a preferred technical solution for a metal target casting equipment, the support plate and the water storage chamber are formed as one body, and a plurality of support columns are fixedly arranged in the water storage chamber and contact the support plate.

[0015] As a preferred technical solution for metal target casting equipment, in the utility model, at least one of the enclosures is detachably arranged from the other enclosures or from the supporting plate.

[0016] As a preferred technical solution for a metal target casting equipment, in the utility model, at least a plurality of the enclosures are fixedly connected to the carrier plate, and at least one of the enclosures is assembledly connected to a plurality of enclosures.

[0017] The metal target casting and pouring equipment provided by the utility model has the beneficial effects that: through the cooperation of the water storage chamber, through the action of the water inlet and the drain outlet arranged thereon, water can be introduced into the water storage chamber, and continuously circulated and discharged, so that the water flow directly contacts the surface of the supporting plate, and through the action of the water flow, even if the bottom of the supporting plate is not flat enough, the water flow can still squeeze out the excess air, so that the bottom of the supporting plate is fully contacted by the water body, so that the entire bottom of the plate is evenly cooled, thereby achieving uniform cooling of the bottom of the molten liquid, so as to better ensure the density uniformity of the target material finally cooled and formed. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following briefly introduces the drawings required for the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

[0019] Figure 1 It is a three-dimensional diagram of the utility model.

[0020] Figure 2 It is another three-dimensional diagram of the utility model.

[0021] Figure 3 This is a diagram of the longitudinal distribution relationship between the water storage cavity and the bearing plate in the utility model.

[0022] Figure 4 It is a schematic diagram of the internal structure of the water storage chamber in the utility model.

[0023] Figure numerals: 1. bearing plate; 2. enclosure; 3. water storage chamber; 4. water inlet; 5. drain outlet; 6. pushing assembly; 601. shaft rod; 602. spiral blade; 603. force-bearing plate; 7. support column. DETAILED DESCRIPTION

[0024] In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below in conjunction with the accompanying drawings.

[0025] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0026] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure or characteristic that may be included in at least one implementation of the present invention. The term "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive with other embodiments.

[0027] Secondly, the present invention is described in detail with reference to the schematic diagram. When describing the embodiments of the present invention, for the sake of convenience, the cross-sectional diagrams showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0028] Reference Figure 1-3 One embodiment of the utility model provides a metal target casting device, comprising the following parts:

[0029] A carrier plate 1 and a surrounding plate 2 arranged around the carrier plate 1, the surrounding plate 2 and the carrier plate 1 cooperate to form a mold structure, and the carrier plate 1 is used to load the melt with cooling, and its function is consistent with that of the heating platform in the prior art;

[0030] A water storage chamber 3 is provided at the bottom of the carrier plate 1, which is used to load cooling liquid, and the carrier plate 1 directly constitutes the upper cavity wall of the water storage chamber 3;

[0031] A water inlet 4 is provided at the bottom of the water storage chamber 3 and a water outlet 5 is provided at the side of the water storage chamber 3, the water inlet 4 and the water outlet are used for the coolant in the water storage chamber 3 to enter and flow out respectively;

[0032] In addition to the above structure, the utility model also includes a heating plate located on the upper part of the support, which is used to maintain the temperature of the upper part of the melt. The water inlet 4 should also be equipped with a pump assembly, which is used to pump water or coolant into the water inlet 4 when connected to a water source. The heating plate and the pump assembly are omitted in the figure and will not be described later;

[0033] When the utility model is casting and cooling the molten metal, the molten metal is cast on the carrier plate 1, and the temperature of the upper part of the molten metal is maintained by the heating plate. When the lower part is cooled, the coolant enters the water storage chamber 3 from the water inlet 4. When the space in the water storage chamber 3 is filled with the coolant, the coolant is discharged from the drain port 5, so that the coolant is in full contact with the bottom of the carrier plate 1, thereby uniformly cooling all parts of the bottom of the carrier plate 1, and through the flow of the coolant, even when the bottom of the carrier plate 1 is uneven, the flow of the coolant can squeeze out the air in the unfilled areas, thereby maintaining the coolant in full contact with all parts of the bottom of the carrier plate 1. Compared with the prior art, the utility model can further improve the uniformity of cooling the bottom of the molten metal, thereby better ensuring the uniform effect of the molten metal being cooled successively from bottom to top as a whole, so as to ensure the uniformity of the material density of the finally formed target material.

[0034] Further, see Figure 1-4 There are multiple water inlets 4 and multiple drainage ports 5. The multiple water inlets 4 are evenly distributed on the bottom surface of the water storage chamber 3, so that when the coolant enters the water storage chamber 3, it can avoid the coolant from spraying out in one place, thereby causing the coolant to contact the local position of the carrier plate 1 in advance. The multiple drainage ports 5 are evenly distributed on the side of the water storage chamber 3, so as to cooperate with the position distribution of the water inlet 4, so that the coolant flows evenly from all places to ensure that the heat is evenly taken away by the coolant to prevent the heat from accumulating in one place.

[0035] Further, see Figure 3 The drainage path of the drainage port 5 is higher than the height of the water storage chamber 3, so that when the coolant flows out of the water storage chamber 3, it will completely fill the water storage chamber 3, to ensure that the coolant can completely fill the water storage chamber 3, thereby improving the contact uniformity with the supporting plate 1.

[0036] Further, see Figure 3 and Figure 4 The utility model also includes a pushing component 6 arranged in the water storage chamber 3. Under the action of the pushing component 6, the coolant will diffusely flow in the water storage chamber 3, thereby reducing the generation of local undercurrents and allowing the heat to be fully dispersed, thereby further preventing the occurrence of local heat accumulation and improving the uniformity of cooling.

[0037] Further, see Figure 4The pushing component 6 includes a shaft 601 rotatably arranged in the water storage chamber 3, and a spiral blade 602 and a force-bearing plate 603 arranged thereon. When the spiral blade 602 rotates, it can push the water body, thereby stirring the coolant. The force-bearing plate 603 is located at the water inlet 4. When coolant enters the water inlet 4, the liquid forms a thrust on the force-bearing plate 603, thereby driving the shaft 601 to rotate, so as to realize the rotation of the spiral blade 602.

[0038] Further, see Figure 3 and Figure 4 The supporting plate 1 and the water storage chamber 3 are integrally formed, and a plurality of supporting columns 7 are fixedly arranged in the water storage chamber 3, which are in contact with the supporting plate 1, thereby further increasing the structural strength of the supporting plate 1, making it less likely to undergo microscopic deformation when subjected to the gravity of the molten liquid, thereby effectively maintaining its own flatness.

[0039] Further, see Figure 1 In the utility model, at least one of the enclosures 2 is detachably connected to the other enclosures 2 or to the carrier plate 1, so that when the formed target material is taken out from the carrier plate 1, one or more enclosures 2 can be removed, thereby improving the convenience in the final material removal and improving the practical effect of the equipment.

[0040] Further, see Figure 1 Regarding the disassembly method of the enclosure 2, in the present invention, at least a plurality of the enclosures 2 are fixedly connected to the carrier plate 1, and the fixing here can be integrally formed, as shown in the following example. Figure 3 As shown, at least one of the enclosure panels 2 is assembled with the multiple enclosure panels 2, and the assembly can be performed by bolt connection or slot clamping. Figure 1 The slot-jointing method is given in the figure for reference. The convenient assembly and disassembly process of the enclosure 2 can be realized through the assembly connection, so as to facilitate the operation.

[0041] It will be appreciated that in the development of any actual implementation, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort may be complex and time-consuming, but will be a routine task of design, fabrication, and production for those of ordinary skill having the benefit of this disclosure without undue experimentation.

[0042] It should be noted that the above embodiments are only used to illustrate the technical solution of the utility model rather than to limit it. Although the utility model has been described in detail with reference to the preferred embodiments, ordinary technicians in the field should understand that the technical solution of the utility model can be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the utility model, which should be included in the scope of the claims of the utility model.

Claims

1. A metal target casting equipment, characterized in that: include: A carrying plate (1) and a surrounding plate (2) arranged around the carrying plate (1), wherein the carrying plate (1) is used for carrying molten metal; A water storage cavity (3) is arranged at the bottom of the carrying plate (1), and the carrying plate (1) forms an upper cavity wall of the water storage cavity (3); A water inlet (4) is arranged at the bottom of the water storage chamber (3) and a water outlet (5) is arranged at the side of the water storage chamber (3).

2. The metal target casting equipment according to claim 1, characterized in that: The water inlets (4) and the drainage outlets (5) are both multiple in number, the multiple water inlets (4) are evenly distributed on the bottom surface of the water storage chamber (3), and the multiple drainage outlets (5) are evenly distributed on the side of the water storage chamber (3).

3. The metal target casting equipment according to claim 1, characterized in that: The drainage path of the drainage port (5) is higher than the height of the water storage chamber (3).

4. The metal target casting equipment according to claim 1, characterized in that: It also includes a pushing component (6) disposed in the water storage chamber (3), and the coolant diffuses and flows in the water storage chamber (3) under the action of the pushing component (6).

5. The metal target casting equipment according to claim 4, characterized in that: The pushing assembly (6) comprises a shaft (601) rotatably arranged in the water storage chamber (3), and a spiral blade (602) and a force-bearing plate (603) arranged thereon, wherein the spiral blade (602) acts on the water body, and the force-bearing plate (603) is located at the water inlet (4).

6. The metal target casting equipment according to claim 1, characterized in that: The bearing plate (1) and the water storage chamber (3) are formed as one body, and a plurality of support columns (7) are fixedly arranged in the water storage chamber (3) and are in contact with the bearing plate (1).

7. The metal target casting equipment according to claim 1, characterized in that: At least one of the enclosure panels (2) is detachably arranged from the other enclosure panels (2) or from the bearing plate (1).

8. The metal target casting equipment according to claim 7, characterized in that: At least a plurality of the enclosures (2) are fixedly connected to the bearing plate (1), and at least one of the enclosures (2) is assembledly connected to a plurality of enclosures (2).

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