Magnetic field lifting device

Abstract

The utility model provides a magnetic field lifting device. The magnetic field lifting device comprises a magnetic field component, a driving component, N lifting components and N weighing components, wherein N is a natural number greater than or equal to 3; the driving assembly drives the lifting blocks on the lifting assemblies to ascend and descend. The lifting block supports the magnetic field component and drives the magnetic field component to ascend and descend. The weighing parts are arranged between the lifting blocks and the magnetic field part in a one-to-one correspondence mode and sense the weight of the magnetic field part. One weighing sensor is additionally arranged between each lifting block and the magnetic field component to monitor whether the lifting of the magnetic field is synchronous or not, so that the risk of accidents caused by uneven load bearing of the magnetic field is reduced, and the injury to personnel is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment production, in particular to a magnetic field lifting device. Background Art

[0002] In the development process of semiconductor silicon single crystals, the diameter of silicon single crystals is getting larger and larger, which makes the demand for feed amount increase sharply. After increasing the feed amount, there is intense thermal convection in the molten silicon liquid in the quartz crucible. These thermal convections will not only affect the distribution of oxygen content in the crystal and generate defects, but also destroy the growth of single crystals. By introducing a magnetic field into the crystal growth equipment, the flow of the melt can be effectively controlled, the distribution of impurities in the crystal can be improved, and the shape of the solid-liquid interface and the temperature stability of the melt can be further effectively controlled. The distribution of magnetic lines of force on the molten liquid surface directly affects the convection in the solution. In order to produce crystals with different quality requirements, the position of the magnetic field relative to the liquid surface needs to be adjusted and adapted. Therefore, the single crystal furnace should be equipped with a device for adjusting the position of the magnetic field so that the magnetic field can be adjusted to any height synchronously according to demand.

[0003] At present, the single crystal growth furnaces for producing 300mm large silicon wafers are equipped with superconducting magnetic fields. These commonly used horizontal magnetic fields or CUSP magnetic fields (hook-shaped magnetic fields) weigh more than 10 tons. During the single crystal growth process, the molten liquid level needs to reduce the interference of the external environment as much as possible, so the magnetic field needs to be stably fixed on the magnetic field lifting structure. At present, the magnetic field is usually lifted by 3 to 4 lifting screws that lift synchronously. In the long-term operation process, these lifting screws may have the risk of failure. In addition, the lifting screws may have the risk of asynchronous lifting during the long-term operation. Once the lifting screws are not synchronized, the more than 10 tons of magnetic field will tilt, resulting in a large safety hazard and prone to accidents. It will cause serious harm to personnel and increase the cost of producing products.

[0004] The existing monitoring of magnetic field lifting synchronization is to monitor the synchronous rotation of several lifting screws or the rotation of several driving servo motors to achieve the synchronous operation of the magnetic field lifting mechanism. However, both of these device settings are prone to false alarms and cannot intuitively feedback whether the magnetic field level has changed.

[0005] It should be noted that the above introduction to the technical background is only for the convenience of providing a clear and complete description of the technical solutions of the present application and for the convenience of understanding by those skilled in the art. It cannot be considered that the above technical solutions are well known to those skilled in the art simply because they are described in the background technology section of the present application. Utility Model Content

[0006] In view of the shortcomings of the prior art mentioned above, the purpose of the utility model is to provide a magnetic field lifting device, which is used to solve the difficulties and technical problems in the prior art that multiple lifting screws are prone to failure during long-term operation, and there is also a risk of asynchronous lifting, causing magnetic field tilt, resulting in greater safety hazards, causing harm to personnel and increasing the cost of producing products.

[0007] In order to achieve the above-mentioned purpose and other related purposes, the utility model provides a magnetic field lifting device, which comprises: a magnetic field component, a driving component, N lifting components and N weighing components; wherein N is a natural number greater than or equal to 3;

[0008] The driving component drives the lifting blocks on each lifting component to lift; the lifting blocks support the magnetic field component and drive the magnetic field component to lift; each weighing component is arranged one by one between each lifting block and the magnetic field component to sense the weight of the magnetic field component.

[0009] Optionally, each lifting assembly also includes a reducer and a lifting screw; the input end of each reducer is connected to the driving assembly; the output end of each reducer is connected to the corresponding lifting screw; a lifting nut is provided on the lifting screw, one end of the lifting block is fixed on the lifting nut, and the weighing component is placed on the other end.

[0010] Optionally, the magnetic field lifting device further comprises a fixed support block for fixing the top end of each lifting component.

[0011] Optionally, the magnetic field lifting device also includes N-2 transmission components; the driving assembly includes a reducer and a motor; the input end of the reducer is connected to the output end of the motor, and the output end of the reducer is connected to the input end of the corresponding lifting assembly through each transmission component to change the output direction of the drive.

[0012] Optionally, each transmission component is configured as a commutator.

[0013] Optionally, each lifting assembly and each transmission component are connected by a hard shaft.

[0014] Optionally, the driving assembly includes N reducers and N motors; the input end of each reducer is connected to the output end of each motor in a one-to-one correspondence, and the output end of each reducer is connected to the input end of each lifting assembly in a one-to-one correspondence.

[0015] Optionally, the weighing component is configured as a weighing sensor.

[0016] Optionally, the measuring range of the weighing sensor is set to 4T to 8T.

[0017] Optionally, the lifting magnetic field device further includes a host computer, and the host computer is electrically connected to the weighing component.

[0018] As described above, the utility model provides a magnetic field lifting device, which has the following beneficial effects:

[0019] The magnetic field lifting device of the utility model adds a weighing sensor between each lifting block and the magnetic field component. In the process of lifting the magnetic field, the weighing sensor can intuitively feedback the weight of the magnetic field borne by the lifting block in real time. In long-term use, failure of any link in the magnetic field lifting device will cause abnormal changes in the output value of the weighing sensor that directly bears the weight of the magnetic field. By connecting with the host computer, the purpose of real-time monitoring is achieved, which facilitates the discovery of abnormalities in the magnetic field lifting device at the first time, further avoids the loss of the magnetic field, reduces production costs and the risk of accidents, and reduces harm to personnel. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 Shown is a structural block diagram of a magnetic field lifting device of prior art.

[0021] Figure 2 Shown is a structural block diagram of a second magnetic field lifting device of the prior art.

[0022] Figure 3 Shown is a structural schematic diagram of the magnetic field lifting device of the present utility model.

[0023] Figure 4 It is a schematic flow chart of a method implemented by the magnetic field lifting device of the utility model.

[0024] Component number description

[0025] 1 Prior art magnetic field lifting device

[0026] 10 Output motor

[0027] 11. Speed ​​reduction and torque increase structure

[0028] 12 First commutator

[0029] 13 Second commutator

[0030] 14 First worm gear reducer

[0031] 15 Second worm gear reducer

[0032] 16 Third worm gear reducer

[0033] 17 Fourth worm gear reducer

[0034] 18 Lifting screw

[0035] 2 Prior Art Magnetic Field Lifting Device II

[0036] 20a First output motor

[0037] 20b Second output motor

[0038] 20c Third output motor

[0039] 21a First deceleration torque increasing structure

[0040] 21b Second deceleration torque increasing structure

[0041] 21c Third deceleration torque increasing structure

[0042] 22a First worm gear reducer

[0043] 22b Second worm gear reducer

[0044] 22c Third worm gear reducer

[0045] 23a First lifting screw

[0046] 23b Second lifting screw

[0047] 23c Third lifting screw

[0048] 3 Magnetic field lifting device

[0049] 30 Magnetic Field Components

[0050] 31 Drive components

[0051] 310 Reducer

[0052] 311 Motor

[0053] 32 Transmission parts

[0054] 32a First transmission component

[0055] 32b Second transmission component

[0056] 33a First lifting assembly

[0057] 33b Second lifting assembly

[0058] 33c Third lifting assembly

[0059] 33d Fourth lifting assembly

[0060] 330 reducer

[0061] 331 Lifting Screw

[0062] 332 lifting block

[0063] 332a Nut

[0064] 332b Spherical plain bearing

[0065] 333 Fixed block

[0066] 34 Weighing components

[0067] 35 Hard Shaft DETAILED DESCRIPTION

[0068] The following is a specific example to illustrate the implementation of the present invention. People familiar with the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

[0069] See also Figures 1 to 4 . It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings attached to this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the utility model, so they have no substantial technical significance. Any structural decoration, change in proportional relationship or adjustment of size should still fall within the scope of the technical content disclosed by the utility model without affecting the effects and purposes that can be achieved by the utility model. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of the utility model. Changes or adjustments in their relative relationships should also be regarded as the scope of the implementation of the utility model without substantially changing the technical content.

[0070] Comparative Example 1

[0071] like Figure 1 As shown, this comparison column provides a magnetic field lifting device 1, which at least includes an output motor 10, a deceleration and torque increasing structure 11, a first commutator 12, a second commutator 13, a first worm gear reducer 14, a second worm gear reducer 15, a third worm gear reducer 16, a fourth worm gear reducer 17, and a lifting screw 18.

[0072] Specifically, the output motor 10 transmits the motor driving force to the first commutator 12 through the deceleration and torque-increasing structure 11; the first commutator 12 divides the motor torque into two, and transmits the motor torque to the first worm gear reducer 14 and the second commutator 13 through a hard shaft connection; the first worm gear reducer 14 directly outputs the motor torque to the second worm gear reducer 15 synchronously through a hard shaft connection. The second commutator 13 commutates the motor driving force and outputs it to the third worm gear reducer 16 through a hard shaft connection, and the third worm gear reducer 16 synchronously inputs the motor torque to the fourth worm gear reducer 17 through a hard shaft connection. Through two commutators and hard shaft connections, the output of the output motor 10 is synchronously input to four worm gear reducers, and each worm gear reducer corresponds to a lifting screw 18 one by one; the four lifting screws 18 are synchronously driven to rotate together. In order to monitor the synchronous lifting and lowering of the magnetic field, a resolution ring and a contact switch are provided on each lifting screw 18. The resolution ring is fixed on the lifting screw and rotates together with the lifting screw. The resolution ring will contact the contact switch X times for each rotation of the lifting screw. N is determined by the number of triggering parts on the resolution ring that can trigger the contact switch. Generally, the value of X is 2 to 5. Finally, the abnormal situation of the signal difference of the four contact switches is used to determine whether the magnetic field is synchronized.

[0073] Comparison column 2

[0074] like Figure 2 As shown, this comparison column provides a magnetic field lifting device 2, which at least includes a synchronous linkage system, 3 output motors, 3 speed reduction and torque increase structures, 3 worm gear reducers and 3 corresponding lifting screws.

[0075] Specifically, the three output motors are controlled to operate in the same working state through the synchronous linkage system. That is, the first output motor 20a is connected to the first deceleration and torque-increasing structure 21a, the first deceleration and torque-increasing structure 21a is connected to the first worm gear reducer 22a, and the first worm gear reducer 22a is connected to the first lifting screw 23a; the second output motor 20b is connected to the second deceleration and torque-increasing structure 21b, the second deceleration and torque-increasing structure 21b is connected to the second worm gear reducer 22b, and the second worm gear reducer 22b is connected to the second lifting screw 23b; the third output motor 20c is connected to the third deceleration and torque-increasing structure 21c, the third deceleration and torque-increasing structure 21c is connected to the third worm gear reducer 22c, and the third worm gear reducer 22c is connected to the third lifting screw 23c. The synchronous linkage system controls the synchronous movement of multiple servo motors, and the synchronous rotation of the lifting screws is ensured by the synchronous movement of multiple servo motors, thereby ensuring the horizontal improvement of the magnetic field.

[0076] However, the designs of the above two comparative examples may easily cause the device to generate false alarms, and cannot directly and truly reflect whether the magnetic field level changes and cannot detect the failure of the lead screw nut.

[0077] This embodiment

[0078] like Figure 3 As shown, this embodiment provides a magnetic field lifting device 3, including: a magnetic field component 30, a driving component 31, N lifting components and N weighing components 34; wherein N is a natural number greater than or equal to 3.

[0079] like Figure 3 As shown, the driving assembly 31 drives the lifting blocks 332 on each lifting assembly to move up and down; the lifting blocks 332 support the magnetic field component 30 and drive the magnetic field component 30 to move up and down.

[0080] Specifically, in this embodiment, each lifting assembly 33 further includes a reducer 330 and a lifting screw 331. The input end of each reducer 330 is connected to the driving assembly 31; the output end of each reducer 330 is connected to the corresponding lifting screw 331; so as to convert the driving force into the rotational power of the lifting screw 331 and transmit it to the lifting screw 331. As an example, the reducer 330 is set to a worm gear reducer with a compact structure, small size, easy installation, flexibility, superior performance, and easy maintenance and repair. In actual applications, the type of reducer can be arbitrarily set according to needs, and will not be described one by one here.

[0081] More specifically, in this embodiment, a lifting nut 332a is provided on the lifting screw 331, and one end of the lifting block 332 is fixed on the lifting nut 332a of the lifting screw 331. Figure 3 As shown, the lifting block 332 is fixed on the lifting nut 332a through the joint bearing 332b, and the lifting nut 332a cooperates with the thread of the outer wall of the lifting screw 331 to drive the magnetic field component 30 to move up and down on the lifting screw. In actual use, the structure of the lifting block that can move linearly up and down on the lifting screw is applicable to the utility model, and will not be described one by one here.

[0082] As example one, the magnetic field lifting device also includes N-2 transmission components; the driving component 31 includes a reducer 310 and a motor 311; the input end of the reducer 310 is connected to the output end of the motor 311, and the output end of the reducer 310 is connected to the input end of the corresponding lifting component through each transmission component to change the output direction of the drive. Each lifting component and each transmission component are connected through a hard shaft 35. The transmission component 32 is configured as a commutator, which divides the motor torque generated by the driving component 31 into several parts through the commutator, and transmits the motor torque to each lifting component according to the direction of each connected lifting component. In actual practice, any device that can divide the motor torque into several parts and change the transmission direction of the motor torque is suitable for the transmission component of the utility model, and they are not described one by one here. Figure 3 As shown, when the transmission component 32 is set to 2, the lifting components are set to 4, and each lifting component is set around the magnetic field component 30; the driving component 31 includes a reducer 310 and a motor 311; the reducer 310 is set to a belt drive reducer, and the belt drive reducer has good elasticity, which can alleviate impact and vibration, make the transmission more stable, reduce noise, and further avoid interference with the magnetic field component 30. In actual use, any device that can transmit power and control speed at the same time is suitable for the utility model, which will not be described one by one here. The input end of the reducer 310 is connected to the output end of the motor 311. The input end of the first transmission component 32a is connected to the output end of the reducer 310, the first torque output end of the first transmission component 32a is connected to the input end of the first lifting component 33a, and the second torque output end is connected to the input end of the second transmission component 32b; the output end of the second transmission component 32b is connected to the input end of the second lifting component 33b. The output end of the first lifting assembly 33a is connected to the input end of the fourth lifting assembly 33d through a hard shaft 35; the output end of the second lifting assembly 33b is connected to the input end of the third lifting assembly 33c through a hard shaft 35. That is, the corresponding lifting assemblies are connected through a motor and a plurality of transmission components, and the output of the motor is synchronously input to each lifting assembly, and the lifting screw on each lifting assembly is synchronously driven to rotate together. In actual practice, the number of lifting assemblies is set according to the ability to stably support the magnetic field device, which is not limited to this embodiment. In actual practice, the number of transmission components and the placement position of the transmission components are arbitrarily set as needed, which is not limited to this embodiment. The use of a hard shaft 35 connection can ensure accurate torque and motion transmission, and almost no elastic deformation will occur; at the same time, the hard shaft 35 is designed to be sturdy and can withstand long-term working operation. In actual practice, any structure that can connect the lifting assembly and transmit torque and motion to it is applicable to the utility model, and will not be repeated here.

[0083] As a second example, the driving assembly 31 includes N reducers and N motors; the input end of each reducer 310 is connected to the output end of each motor 311 in a one-to-one correspondence, and the output end of each reducer 310 is connected to the input end of each lifting assembly in a one-to-one correspondence. Through the synchronous movement of multiple motors, the same motor torque is provided to each corresponding lifting assembly, and the lifting screw on each lifting assembly is synchronously driven to rotate together. In actual practice, any assembly that can synchronously drive the lifting screw is applicable to the utility model, and will not be described one by one here.

[0084] like Figure 3 As shown, the magnetic field lifting device 3 also includes a fixed support block 333 for fixing the top of each lifting component 33

[0085] Specifically, in this embodiment, a fixed support block 333 is provided at the top of each lifting screw 331. The diameter of each fixed support block 333 is larger than the diameter of the corresponding lifting screw 331. The shape of the fixed support block 333 includes but is not limited to a circle and a square. In actual use, any shape of the fixed support block that can fix the top of the lifting screw is applicable to the present utility model, and will not be described one by one here.

[0086] like Figure 3 As shown, the weighing component 34 is placed at the other end of the lifting block 332 ; each weighing component 34 is correspondingly arranged between each lifting block 332 and the magnetic field component 30 to sense the weight of the magnetic field component 30 .

[0087] Specifically, in the present embodiment, the weighing component 34 is set as a weighing sensor. In actual use, any device that can sense the weight of the magnetic field component is applicable to the present utility model, not limited to the present embodiment. The range of the weighing sensor is set to 4T to 8T. As an example, the range of the weighing sensor is set to 4T, 6T, and 8T; in actual use, the range of the weighing sensor can be set as needed, which is not described here one by one. The magnetic field lifting device 3 also includes a host computer, which electrically connects the host computer to the weighing component 34. The magnetic field weight sensed by each weighing sensor is obtained through the host computer, and it is more convenient and quick to monitor whether the magnetic field weight is evenly distributed. If it is not uniform, that is, there is an abnormal situation, the equipment will sound an alarm and stop operating. In actual practice, the host computer includes but is not limited to computers and tablets, which are not described here one by one.

[0088] The detection method of magnetic field rise and fall synchronization is realized based on the magnetic field rise and fall device of the utility model, such as Figure 4 As shown, it includes the following steps:

[0089] S1. Unify the lifting acceleration of each lifting component;

[0090] S2. Debug and determine the weighing fluctuation range of the qualified weighing sensor;

[0091] S3. Set the weighing fluctuation range of the qualified weighing sensor on the host computer;

[0092] S4. The upper computer monitors whether the weight fluctuation range of the weighing sensor exceeds the weight fluctuation range of the qualified weighing sensor;

[0093] S5. If exceeded, the magnetic field raising and lowering operation will be stopped immediately and an alarm signal will be issued.

[0094] In summary, the utility model provides a magnetic field lifting device, including: a magnetic field component, a driving component, N lifting components and N weighing components; wherein N is a natural number greater than or equal to 3; the driving component drives the lifting blocks on each lifting component to lift; the lifting blocks support the magnetic field component and drive the magnetic field component to lift; each weighing component is arranged one by one between each lifting block and the magnetic field component to sense the weight of the magnetic field component. The utility model determines whether the magnetic field is synchronized by adding a weighing sensor between each lifting block and the magnetic field component. In the process of lifting and lowering the magnetic field, the weighing sensor can intuitively feedback the weight of the magnetic field borne by the corresponding lifting block in real time. In long-term use, failure of any link in the magnetic field lifting device will cause abnormal changes in the output value of the weighing component that directly bears the weight of the magnetic field. By connecting with the host computer, the purpose of real-time monitoring is achieved, which facilitates the first-time discovery of the abnormality of the magnetic field lifting device, further avoids the loss of the magnetic field, reduces the production cost and the risk of accidents, and reduces the harm to personnel. Therefore, the utility model effectively overcomes the various shortcomings of the prior art and has a high industrial utilization value.

[0095] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. A magnetic field lifting device, characterized in that: The magnetic field lifting device comprises: A magnetic field component, a driving component, N lifting components and N weighing components; wherein N is a natural number greater than or equal to 3; The driving component drives the lifting blocks on each lifting component to lift; the lifting blocks support the magnetic field component and drive the magnetic field component to lift; each weighing component is arranged one by one between each lifting block and the magnetic field component to sense the weight of the magnetic field component.

2. The magnetic field lifting device according to claim 1, characterized in that: Each lifting assembly also includes a reducer and a lifting screw; the input end of each reducer is connected to the driving assembly; the output end of each reducer is connected to the corresponding lifting screw; a lifting nut is provided on the lifting screw, one end of the lifting block is fixed on the lifting nut, and the weighing component is placed on the other end.

3. The magnetic field lifting device according to claim 1 or 2, characterized in that: The magnetic field lifting device also includes a fixed support block for fixing the top end of each lifting component.

4. The magnetic field lifting device according to claim 1, characterized in that: The magnetic field lifting device also includes N-2 transmission components; the driving assembly includes a reducer and a motor; the input end of the reducer is connected to the output end of the motor, and the output end of the reducer is connected to the input end of the corresponding lifting assembly through each transmission component to change the output direction of the drive.

5. The magnetic field lifting device according to claim 4, characterized in that: Each transmission component is configured as a commutator.

6. The magnetic field lifting device according to claim 4, characterized in that: Each lifting assembly and each transmission component are connected via a hard shaft.

7. The magnetic field lifting device according to claim 1, characterized in that: The driving assembly includes N reducers and N motors; the input end of each reducer is connected to the output end of each motor in a one-to-one correspondence, and the output end of each reducer is connected to the input end of each lifting assembly in a one-to-one correspondence.

8. The magnetic field lifting device according to claim 1, characterized in that: The weighing component is configured as a weighing sensor.

9. The magnetic field lifting device according to claim 8, characterized in that: The measuring range of the weighing sensor is set to 4T to 8T.

10. The magnetic field lifting device according to claim 1, characterized in that: The magnetic field lifting device also includes a host computer, and the host computer is electrically connected to the weighing component.

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