Photomask plate box convenient for mechanical opening and closing
By designing the torsion spring and locking assembly in the mask box, the rapid mechanical opening and closing of the mask box and simplified operation are achieved, solving the problems of inefficiency and cumbersome operation in the prior art, and improving the convenience of use Sex and efficiency.
Patent Information
- Application Number
- CN202421096189.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-20
- Publication Date
- 2024-12-31
- Estimated Expiration
- 2034-05-20
AI Technical Summary
The mechanical opening and closing efficiency of existing optical mask plate boxes is low, and it requires manual movement of the box cover to use the optical mask plate. The closing process is cumbersome, which affects the convenience of use.
A locking assembly including a first plate, a second plate, a torsion spring, a movable groove, a button rod, a compression spring and an elbow rod are designed, and the upper box cover and the lower box body are realized by the torque force of the torsion spring. It can be rotatably connected, and the mask plate is directly removed by mechanical force, and the button rod and the matching member of the compression spring is simply pressed and reset structure to simplify the opening and closing operation.
The manual operation steps after mechanical opening and closing are greatly reduced, the rapid access efficiency of the mask version is improved, and the closing operation volume is reduced, which improves the convenience of use and mechanical opening and closing efficiency.
Smart Images
Figure CN222281042U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of photomask box, in particular to a photomask box which is easy to open and close mechanically. Background Art
[0002] As an important process in semiconductor technology, photolithography uses a photoresist layer with a specific pattern as a mask to perform photolithography on the wafer to obtain a specific fine structure in order to realize the manufacture of semiconductor structure. The photolithography process requires high precision, so the mask is generally stored in a mask box to prevent the mask from being exposed to dirt. When it is needed, the mask box is opened and the mask is taken out.
[0003] For example, the Chinese patent number CN219872109U is a photomask box that is easy to open and close mechanically. In this utility model, a spring buckle is arranged on the outside of the side wall of the box cover, and a bayonet is opened on the extension plate on the side of the box lining. When the box cover is set on the box lining, the spring buckle can be flipped and snapped into the bayonet. When opening the cover, the mechanical hook in the lithography machine can hook the flange at the lower end of the spring buckle to flip up the spring buckle and release the lock. However, in this utility model, after releasing the lock, it is necessary to manually move the box cover to remove the photomask inside. The efficiency of mechanical locking is low, which is not convenient for users to quickly take it out. At the same time, spring locking structures are arranged on both sides, which results in the need to connect them in sequence when fixing, which increases the cumbersomeness when closing and is not conducive to user use. Therefore, a photomask box that is easy to open and close mechanically is proposed to solve the above problems. Utility Model Content
[0004] In view of this, the purpose of the utility model is to propose a mask plate box that is easy to open and close mechanically and has the advantages of simple operation, convenient placement and access, and convenient operation, so as to solve the problems existing in the comparative documents such as low efficiency of loading and unloading, the need to manually remove the box cover when taking it out, and the cumbersome closing operation.
[0005] Based on the above purpose, the utility model provides a photomask box that is easy to open and close mechanically, including a lower box body, the top of the lower box body is connected to an upper box cover, and the inner and outer sides of the lower box body and the upper box cover are connected with a locking assembly;
[0006] The locking assembly includes a first support plate, a second support plate, a torsion spring, a movable groove, a button rod, a compression spring, an elbow rod and a locking groove. Two first support plates are installed on the right side of the lower box body, and two second support plates are installed on the right side of the upper box cover. A torsion spring is installed between the rear sides of the two first support plates and the front sides of the two second support plates. A movable groove is provided on the top of the lower box body, and a button rod is connected to the left side of the lower box body. A compression spring is installed on the inner right wall of the movable groove, an elbow rod is installed on the right end of the button rod, and a locking groove is provided on the inner left wall of the upper box cover.
[0007] Furthermore, a rotating shaft is rotatably connected between the rear sides of the two first supporting plates and the front sides of the two second supporting plates, and the two torsion springs are respectively sleeved on the outside of the two rotating shafts.
[0008] Furthermore, a first sliding hole is provided between the inner left wall of the movable groove and the left side of the lower box body, and a second sliding hole is provided between the inner right wall of the movable groove and the inner left wall of the lower box body.
[0009] Furthermore, the first sliding hole is coaxial and concentric with the second sliding hole, and the inner diameter of the first sliding hole is the same as the inner diameter of the second sliding hole. The right end of the button rod passes through the first sliding hole and the second sliding hole in sequence and extends to the interior of the lower box body, and the button rod is slidably connected to the first sliding hole and the second sliding hole.
[0010] Furthermore, the compression spring is sleeved on the outside of the button rod, a pressure ring is installed on the outer surface of the button rod, and the pressure ring is located inside the movable groove, and the left end of the compression spring contacts the right side of the pressure ring.
[0011] Furthermore, the top of the elbow rod passes through the opening at the bottom of the upper box cover and extends to the interior of the upper box cover, and the left end of the elbow rod passes through the opening of the locking groove and extends to the interior of the locking groove, and is engaged with the locking groove.
[0012] Beneficial effects of the utility model:
[0013] 1. The photomask box that is easy to open and close mechanically has a torsion spring installed between the first support plate and the second support plate, and uses a rotating shaft to make the upper box cover and the lower box body achieve a rotatable connection relationship through the first support plate and the second support plate, and then under the torque force of the torsion spring, the upper box cover can be moved away from the top of the lower box body by mechanical force to expose the opening at the top of the lower box body, so that it is convenient for staff to directly take out the photomask located inside the lower box body without manually moving other structures, greatly reducing the steps of manual operation after mechanical opening and closing, making it convenient for users to quickly take out the photomask, and further facilitating the use of staff.
[0014] 2. The mask plate box that is easy to open and close mechanically utilizes the cooperation of a button rod, a compression spring and a movable groove, and has a simple push-reset structure. After pressing, the staff can move the elbow rod to separate from the locking groove, thereby releasing the lock between the upper box cover and the lower box body. At the same time, when closing, it is only necessary to press the upper box cover in an arc shape to move it above the lower box body so that the two sides are fitted together. When the pressure applied to the button rod is released, the elbow rod can be automatically reset and engaged with the locking groove, thereby locking the position of the upper box cover, greatly reducing the amount of operation and operating steps required for closing, further improving the convenience of staff in actual use, accelerating the efficiency of mechanical opening and closing of mask plates, and increasing convenience in use. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0016] Figure 1 This is a schematic diagram of the three-dimensional structure of an embodiment of the utility model;
[0017] Figure 2 This is a front cross-sectional schematic diagram of an embodiment of the utility model;
[0018] Figure 3 It is a top view cross-sectional schematic diagram of an embodiment of the utility model;
[0019] Figure 4 For the utility model embodiment Figure 2 Enlarged view of point A in the middle.
[0020] The markings in the figure are:
[0021] 1. Lower box body; 2. Upper box cover; 3. Locking assembly; 301. First support plate; 302. Second support plate; 303. Torsion spring; 304. Movable slot; 305. Button rod; 306. Compression spring; 307. Elbow rod; 308. Locking slot. DETAILED DESCRIPTION
[0022] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments.
[0023] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.
[0024] like Figure 1 , Figure 2As shown, the photomask box that is easy to open and close mechanically includes a lower box body 1, the top of the lower box body 1 is connected to an upper box cover 2, and the inner and outer sides of the lower box body 1 and the upper box cover 2 are connected with a locking assembly 3.
[0025] like Figure 2 , Figure 3 and Figure 4 As shown, the locking assembly 3 is composed of eight components, namely, a first support plate 301, a second support plate 302, a torsion spring 303, a movable groove 304, a button rod 305, a compression spring 306, an elbow rod 307 and a locking groove 308, so as to achieve the advantages of simple operation, convenient placement and easy operation.
[0026] like Figure 2 , Figure 3 As shown, two first support plates 301 are installed on the right side of the lower box body 1, and two second support plates 302 are installed on the right side of the upper box cover 2. Torsion springs 303 are installed between the rear sides of the two first support plates 301 and the front sides of the two second support plates 302. By setting the rotating shaft, the upper box cover 2 can move in an arc to leave the top of the lower box body 1 through the rotation connection between the second support plates 302 and the first support plates 301, thereby exposing the photomask located inside the lower box body 1.
[0027] like Figure 2 , Figure 4 As shown, a movable groove 304 is provided on the top of the lower box body 1, a button rod 305 is connected to the left side of the lower box body 1, a compression spring 306 is installed on the inner right wall of the movable groove 304, an elbow rod 307 is installed on the right end of the button rod 305, and a locking groove 308 is provided on the inner left wall of the upper box cover 2, forming an elastic limiting structure.
[0028] It should be noted that this section is intended to provide a background or context for the implementation methods stated in the claims, and detailed descriptions of known functions and known components are omitted. At the same time, fixed and movable installations are determined according to actual application methods. To ensure the compatibility of the equipment, the operating methods used are consistent with the parameters of marketed equipment. The description here is not admitted to be prior art because it is included in this section.
[0029] When in use, pressing the button rod 305 toward the right pushes the button rod 305 to slide to the right, so that the button rod 305 pushes the pressure ring to squeeze the compression spring 306 to contract, thereby moving the button rod 305 to the right, and then the button rod 305 will drive the elbow rod 307 connected to it to move synchronously, so that the elbow rod 307 leaves the locking groove 308 to release the restriction on the upper box cover 2, and finally, the torsion spring 303 now realizes the arc movement of the second support plate 302 through the torque force, so that the second support plate 302 drives the upper box cover 2 to move synchronously, leaving the top of the lower box body 1, exposing the mask plate located inside the lower box body 1.
[0030] To summarize, the photomask box that is easy to open and close mechanically has a torsion spring 303 installed between the first support plate 301 and the second support plate 302, and with the help of a rotating shaft, the upper box cover 2 and the lower box body 1 are rotatably connected through the first support plate 301 and the second support plate 302, and then under the torque force of the torsion spring 303, the upper box cover 2 can be moved away from the top of the lower box body 1 by mechanical force to expose the opening at the top of the lower box body 1, so that it is convenient for the staff to directly take out the photomask located inside the lower box body 1 without manually moving other structures, which greatly reduces the steps of manual operation after mechanical opening and closing, makes it convenient for users to quickly take out the photomask, and further facilitates the use of the staff.
[0031] The lock 308 of the upper and lower box bodies 1 is released by the staff after the upper and lower box bodies 1 are closed.
[0032] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present invention (including the claims) is limited to these examples. Under the concept of the present invention, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity.
[0033] The utility model is intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the utility model should be included in the scope of protection of the utility model.
Claims
1. A photomask box that is easy to open and close mechanically, comprising a lower box body (1), characterized in that: The top of the lower box body (1) is connected to an upper box cover (2), and the inner and outer sides of the lower box body (1) and the upper box cover (2) are connected to a locking assembly (3); The locking assembly (3) comprises a first support plate (301), a second support plate (302), a torsion spring (303), a movable groove (304), a button rod (305), a compression spring (306), an elbow rod (307) and a locking groove (308); two first support plates (301) are installed on the right side of the lower box body (1); two second support plates (302) are installed on the right side of the upper box cover (2); the two first support plates (301) ) and the front sides of the two second support plates (302), a torsion spring (303) is installed between the rear side of the lower box body (1) and the front sides of the two second support plates (302), a movable groove (304) is opened on the top of the lower box body (1), a button rod (305) is connected to the left side of the lower box body (1), a compression spring (306) is installed on the inner right wall of the movable groove (304), an elbow rod (307) is installed on the right end of the button rod (305), and a locking groove (308) is opened on the inner left wall of the upper box cover (2).
2. The photomask box that is easy to open and close mechanically according to claim 1, characterized in that: A rotating shaft is rotatably connected between the rear sides of the two first supporting plates (301) and the front sides of the two second supporting plates (302), and the two torsion springs (303) are respectively sleeved on the outside of the two rotating shafts.
3. The photomask box that is easy to open and close mechanically according to claim 1, characterized in that: A first sliding hole is provided between the inner left wall of the movable groove (304) and the left side of the lower box body (1), and a second sliding hole is provided between the inner right wall of the movable groove (304) and the inner left wall of the lower box body (1).
4. The photomask box that is easy to open and close mechanically according to claim 3, characterized in that: The first sliding hole is coaxial and concentric with the second sliding hole, and the inner diameter of the first sliding hole is the same as the inner diameter of the second sliding hole. The right end of the button rod (305) passes through the first sliding hole and the second sliding hole in sequence and extends to the interior of the lower box body (1), and the button rod (305) is slidably connected to the first sliding hole and the second sliding hole.
5. The photomask box that is easy to open and close mechanically according to claim 1, characterized in that: The compression spring (306) is sleeved on the outside of the button rod (305), a pressure ring is installed on the outer surface of the button rod (305), and the pressure ring is located inside the movable groove (304), and the left end of the compression spring (306) is in contact with the right side of the pressure ring.
6. The photomask box that is easy to open and close mechanically according to claim 1, characterized in that: The top of the elbow rod (307) passes through the opening at the bottom of the upper box cover (2) and extends to the interior of the upper box cover (2); the left end of the elbow rod (307) passes through the opening of the locking groove (308) and extends to the interior of the locking groove (308), and is engaged with the locking groove (308).