Protective disc pressing plate and single crystal furnace

Abstract

The utility model relates to the field of monocrystalline silicon manufacturing, and discloses a protective disc pressing plate and a monocrystalline furnace. The protective disc pressing plate comprises a plate body, and a plurality of conical surface pits are formed in one face of the plate body. The single crystal furnace comprises a protective plate pressing plate arranged at the bottom of the furnace, and one surface of the protective plate pressing plate, which is provided with a conical surface pit, faces the inside of the furnace. According to the protective plate pressing plate provided by the utility model, one surface is provided with the conical surface pit, and the conical surface pit can contain a large amount of silicon liquid after a silicon leakage accident occurs, so that the silicon liquid is prevented from flowing into a furnace bottom to cause accident expansion; in addition, the conical surface pits are arranged to enlarge the surface area of the whole reflection, so that the heat retaining property of the furnace bottom is greatly enhanced, the stability of heat balance in the whole furnace is improved, and heat loss is reduced; the heat preservation performance is enhanced, so that the output heat of the heater is reduced, the generation of oxygen can be reduced, and the effect of reducing consumption and oxygen is achieved.

Description

Technical Field

[0001] The utility model relates to the field of manufacturing single crystal silicon, in particular to a disc protection pressure plate and a single crystal furnace. Background Art

[0002] The single crystal furnace for pulling single crystals can be divided into a furnace body device, a heating device, a heat preservation device, a cooling device and a lifting device; the raw silicon material is placed in a crucible and the solid is melted into liquid through a heating device. If the quartz crucible breaks during operation, the silicon liquid will leak out and flow into the lower part, causing the entire lower axis to be paralyzed and unable to operate. There is a protective plate at the bottom of the furnace, which can not only hold the leaked silicon liquid but also reflect part of the heat to ensure the stability of the bottom heat and prevent excessive heat loss.

[0003] However, the surface of the existing plate protection pressure plate is flat, and the silicon liquid cannot be contained in the event of a silicon leakage accident, and flows out to both sides to the bottom of the furnace, causing the accident to expand; close to the plane, the heat reflection amount is small.

[0004] In view of this, this application is hereby filed. Utility Model Content

[0005] The utility model aims to provide a disc protection pressure plate and a single crystal furnace, aiming to improve at least one problem mentioned in the background technology.

[0006] The embodiment of the utility model is achieved as follows:

[0007] In a first aspect, the utility model provides a disc protection pressure plate, comprising a plate body, and a plurality of conical pits are arranged on one side of the plate body.

[0008] In an optional embodiment, the depth of the conical surface pit is 4 to 6 mm.

[0009] In an optional embodiment, the opening diameter of the conical pit is 3 to 5 mm.

[0010] In an optional embodiment, the conical pits are evenly distributed on one side of the plate.

[0011] In an optional embodiment, the distance between adjacent conical surface pits is 0-2 mm.

[0012] In an optional embodiment, a plurality of assembly holes are further provided on the plate body.

[0013] In an optional embodiment, all the conical surface pits have the same size.

[0014] In a second aspect, the utility model provides a single crystal furnace, comprising a disc protection pressure plate as described in any of the above-mentioned embodiments arranged at the bottom of the furnace, wherein a side of the disc protection pressure plate provided with a conical pit faces the furnace.

[0015] The beneficial effects of the embodiments of the utility model are:

[0016] The utility model provides a protective disc pressure plate, on one side of which a conical pit is arranged. After a silicon leakage accident occurs, the conical pit can hold a large amount of silicon liquid to prevent the silicon liquid from flowing into the furnace bottom and causing the accident to expand. In addition, the arrangement of the conical pit increases the entire reflective surface area, so that the thermal insulation of the furnace bottom is greatly enhanced, the overall thermal balance stability in the furnace is improved, and heat loss is reduced; the enhancement of thermal insulation reduces the heat output of the heater, thereby reducing the generation of oxygen and achieving the effect of reducing consumption and oxygen. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 A schematic diagram of the structure of the disc protection pressure plate provided in an embodiment of the utility model;

[0019] Figure 2 A schematic diagram of the bottom structure of the plate protection pressure plate provided in an embodiment of the utility model;

[0020] Figure 3 A cross-sectional view of a disc protection pressure plate provided in an embodiment of the utility model;

[0021] Figure 4 for Figure 3 Magnified view of area A.

[0022] Icon: 100-plate pressure plate; 110-plate body; 111-conical pit; 112-assembly hole. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0026] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0027] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0028] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0029] like Figures 1 to 4 As shown, an embodiment of the utility model provides a disc protection pressure plate 100, which includes a plate body 110, and a plurality of conical pits 111 are arranged on one surface of the plate body 110.

[0030] The utility model arranges a plurality of conical pits 111 on the surface of the protective disc pressure plate 100. After a silicon leakage accident occurs, the conical pits 111 can contain a large amount of silicon liquid to prevent the silicon liquid from flowing into the furnace bottom and causing the accident to expand. In addition, the arrangement of the conical pits 111 increases the entire reflective surface area, which greatly enhances the thermal insulation of the furnace bottom, improves the overall thermal balance stability in the furnace, and reduces heat loss. The enhanced thermal insulation reduces the heat output of the heater, thereby reducing the generation of oxygen and achieving the effect of reducing consumption and oxygen.

[0031] Preferably, all the conical surface pits 111 have the same size.

[0032] When the sizes of all the conical pits 111 are the same, the uniformity of the plate body 110 is optimal, and the heat preservation and oxygen reduction effects are the best.

[0033] Furthermore, in order to ensure that the conical surface pit 111 can hold a sufficient amount of silicon liquid, and has good heat preservation and oxygen reduction effects, and does not affect other performances of the plate protection pressure plate 100, the conical surface pit 111 also has the following characteristics:

[0034] The depth of the conical pit 111 is 4-6 mm (eg, 4 mm, 5 mm or 6 mm).

[0035] The opening diameter of the conical pit 111 is 3-5 mm (eg, 4 mm, 5 mm or 6 mm).

[0036] The conical pits 111 are evenly distributed on one side of the plate body 110 .

[0037] Furthermore, in order to ensure that the conical surface pits 111 have a suitable density and thus ensure that the heat preservation and oxygen reduction effects are optimal, the distance between adjacent conical surface pits 111 is 0 to 2 mm.

[0038] Furthermore, a plurality of assembly holes 112 are provided on the plate body 110 .

[0039] The assembly hole 112 is conventionally arranged, and its arrangement is the same as that of the existing disc protection pressure plate 100. Its purpose is to enable the disc protection pressure plate 100 to be smoothly assembled in the single crystal furnace.

[0040] In summary, the disc protection pressure plate 100 provided in the embodiment of the utility model has the following characteristics:

[0041] A conical pit 111 is arranged on the surface, which increases the surface area of ​​the protective plate 100, that is, the heat reflection area is increased; the pit surface can hold more silicon liquid than the flat surface; the heat of the furnace body is lost and generated, and in order to smoothly pull the single crystal, the heat in the furnace is required to reach a dynamic balance, and the thermal insulation of the furnace bottom is enhanced, that is, the heat output of the heating device is reduced; the source of oxygen is the precipitation caused by the baking of the quartz crucible by the heater, which reduces the heat output of the heating device, that is, reduces the source of oxygen, thereby achieving the purpose of reducing oxygen and power consumption.

[0042] The utility model embodiment also provides a single crystal furnace, including a disc protection pressure plate provided by the utility model embodiment and arranged at the bottom of the furnace, and the disc protection pressure plate has a side with a conical pit facing the furnace.

[0043] Since the single crystal furnace is provided with the disc protection pressure plate provided by the utility model, the single crystal furnace has better safety and generates less oxygen.

[0044] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may be subject to various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A plate protection pressure plate, characterized in that: It comprises a plate body, and a plurality of conical pits are arranged on one side of the plate body.

2. The disc protection pressure plate according to claim 1, characterized in that: The depth of the conical surface pit is 4 to 6 mm.

3. The disc protection pressure plate according to claim 1, characterized in that: The opening diameter of the conical pit is 3 to 5 mm.

4. The disc protection pressure plate according to claim 1, characterized in that: The conical surface pits are evenly distributed on one side of the plate body.

5. The disc protection pressure plate according to claim 4, characterized in that: The distance between adjacent conical surface pits is 0 to 2 mm.

6. The disc protection pressure plate according to claim 1, characterized in that: The plate body is also provided with a plurality of assembly holes.

7. The disc protection pressure plate according to any one of claims 1 to 6, characterized in that: All of the conical surface pits have the same size.

8. A single crystal furnace, characterized in that: It comprises a disc protection pressure plate as described in any one of claims 1 to 7 arranged at the bottom of a furnace, wherein the side of the disc protection pressure plate provided with the conical surface pit faces the furnace.

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