Checking and proofreading device for ion implanter

Abstract

The utility model discloses a checking and proofreading device for an ion implanter, which comprises a shell, a movable cavity is arranged in the shell in a hollow manner, a workbench fixedly connected with the shell is arranged at the top of the movable cavity, a plurality of sliding groove openings are formed in the workbench in a penetrating manner, sliding blocks are clamped in the sliding groove openings in a sliding manner, and one end of each sliding block is fixedly connected with a clamping block. The other ends of the sliding blocks are fixedly connected with movable columns which are movably arranged in the movable cavities, the movable columns are fixedly connected with adjusting assemblies which are fixedly connected with movable cylinders, one ends of the movable cylinders are slidably connected with guide rods in a sleeved mode, and the guide rods are fixedly connected with the bottom wall of the workbench. The other end of the air cylinder is fixedly connected with the inner wall of the bottom of the movable cavity. The air cylinder drives the movable cylinder to move, the movable cylinder drives the adjusting assembly to work, the adjusting assembly further drives the movable columns to get away from each other or get close to each other, and then positioning correction of the workpiece is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of ion implanters, in particular to an inspection and calibration device for ion implanters. Background Art

[0002] Ion implantation is a key equipment in the pre-manufacturing process of integrated circuits. Ion implantation is a technology for doping areas near the surface of semiconductors, with the purpose of changing the carrier concentration and conductivity type of semiconductors. Compared with conventional thermal doping processes, ion implantation can precisely control the implantation dose, implantation angle, implantation depth, lateral diffusion, etc., overcoming the limitations of conventional processes, improving the integration, start-up speed, yield and life of the circuit, and reducing costs and power consumption. Ion implantation is widely used in doping processes, which can meet the requirements of shallow junction, low temperature and precise control, and has become an indispensable key equipment in the integrated circuit manufacturing process.

[0003] For example, a Chinese patent with publication number CN209298060U discloses a calibration device for an ion implanter, comprising a casing and a 2XZ-1 type vacuum pump, two groups of ion source systems are correspondingly installed inside two correspondingly punched grooves on one side of the top of the casing, a discharge chamber is installed on the inner side of the casing just below the two groups of ion source systems, and a suppression electrode is horizontally installed on the inner side of the casing just below the lead-out slit. The utility model utilizes a Y80M1-2 type drive motor in the calibration mechanism to drive the lead screw to rotate, and the rotation of the lead screw drives the lead screw nut to move, and the movement of the lead screw nut adjusts the position of the calibration target, so as to obtain the calibration ion beam moving trajectory, control the injection position of the ion beam, and improve the ion injection quality; utilizes the MQ23120H type electromagnet inside the purification mechanism to work and absorb the metal ions inside the ion beam, so as to improve the ion injection quality; utilizes multiple partitions carved on the surface of the calibration target, so as to accurately obtain the moving trajectory of the ion beam and to calibrate the ion injection position.

[0004] The device calibrates the ion beam trajectory through a calibration mechanism. However, when positioning and correcting the part to be injected, the traditional positioning structure needs to be positioned by multiple bolts, resulting in a long time required to clamp or release the part to be injected. For this reason, we propose an inspection and calibration device for an ion implanter to solve the above problem. Utility Model Content

[0005] The purpose of the utility model is to provide a testing and calibration device for an ion implanter to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an inspection and proofreading device for an ion implanter, comprising a shell, a hollow movable cavity is provided in the shell, a workbench fixedly connected to the shell is provided on the top of the movable cavity, a plurality of slide grooves are penetrated on the workbench, sliders are slidably clamped in the slide grooves, one end of the sliders is fixedly connected to clamping blocks, the clamping blocks are slidably arranged on the top surface of the workbench, the other ends of the sliders are fixedly connected to movable columns, the movable columns are movably arranged in the movable cavity, the movable columns are fixedly connected with adjustment components, the adjustment components are fixedly connected to a movable cylinder, one end of the movable cylinder is slidably sleeved on a guide rod, the guide rod is fixedly connected to the bottom wall of the workbench, the other end of the movable cylinder is fixedly connected to one end of a cylinder, and the other end of the cylinder is fixedly connected to the bottom inner wall of the movable cavity.

[0007] Preferably, the slide groove openings are evenly distributed around the central circumference of the workbench.

[0008] Preferably, an anti-slip rubber block is fixedly connected to one end surface of the clamping block.

[0009] Preferably, the adjustment assembly includes an articulated seat, a connecting rod, and a T-bar, wherein the articulated seat is fixedly connected to the outer wall of the movable cylinder, the articulated seat is articulated to one end of the connecting rod, the other end of the connecting rod is articulated to the T-bar, and the T-bar is fixedly connected to the movable column.

[0010] Preferably, the connecting rods on the same plane are arranged in parallel, and the hinge seats are fixedly connected to the top and bottom sides of the outer wall of the movable cylinder respectively.

[0011] Compared with the prior art, the beneficial effects of the utility model are: through the cylinder drive, the movable cylinder is driven to move, the movable cylinder drives the adjustment component to work, and the adjustment component then drives the movable columns to move away from or closer to each other, thereby realizing the positioning correction of the workpiece; the single cylinder drive method is more convenient to operate than the traditional multiple bolt positioning method, and the clamping or releasing of the workpiece is more efficient, and the workpiece can be quickly centered and corrected following the movement of the clamp. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the structure of the utility model;

[0013] Figure 2 This is a schematic diagram of the internal structure of the housing of the utility model;

[0014] Figure 3 It is a schematic diagram of the internal planar structure of the shell of the utility model.

[0015] In the figure: housing 1, workbench 2, clamping block 3, slide groove 4, cylinder 5, movable column 6, slider 61, movable cylinder 7, adjustment assembly 8, hinge seat 81, connecting rod 82, T-bar 83, guide rod 9, movable cavity 10. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0017] Example 1

[0018] Reference Figure 1 , 2 , which is the first embodiment of the utility model, and provides an inspection and proofreading device for an ion implanter, comprising a shell 1, a hollow movable chamber 10 is provided in the shell 1, a workbench 2 fixedly connected to the shell 1 is provided on the top of the movable chamber 10, a plurality of slide grooves 4 are provided through the workbench 2, and slide blocks 61 are slidably engaged in the slide grooves 4, one end of the slide blocks 61 is fixedly connected to the clamping blocks 3, the clamping blocks 3 are slidably arranged on the top surface of the workbench 2, the other end of the slide blocks 61 is fixedly connected to the movable column 6, the movable column 6 is movably arranged in the movable chamber 10, the movable column 6 is fixedly connected with an adjustment component 8, the adjustment component 8 is fixedly connected to the movable cylinder 7, one end of the movable cylinder 7 is slidably sleeved with a guide rod 9, the guide rod 9 is fixedly connected to the bottom wall of the workbench 2, the other end of the movable cylinder 7 is fixedly connected to one end of the cylinder 5, and the other end of the cylinder 5 is fixedly connected to the bottom inner wall of the movable chamber 10.

[0019] A control panel is fixedly installed on the outer wall of the shell 1, which is used to control the operation of the cylinder 5. The axis of the movable cylinder 7 coincides with the center position of the workbench 2. When it is necessary to clamp the workpiece to be injected, the cylinder 5 retracts to drive the movable cylinder 7 fixed to the driving end to move downward, and the movable cylinder 7 drives the adjusting component 8 to work. The adjusting component 8 drives the movable column 6 to move, and the movable column 6 drives the slider 61 fixed to the top to move in the slide groove mouth 4. The slider 61 drives the fixed clamping block 3 to clamp the workpiece. At the same time, when clamping, the clamping block 3 shifts the workpiece to move the workpiece toward the center position of the workbench to achieve clamping of the workpiece. When it is necessary to release the workpiece, the cylinder 5 extends to work, and the clamping block 3 is driven away from the center position through the cooperation of various components to achieve the release of the workpiece. This effectively solves the technical problems that the existing ion implanter takes a long time to clamp or release the injected workpiece when positioning and correcting the injected workpiece, and the operation is inconvenient. The present application can be achieved only by the drive of the cylinder 5, and the operation is more convenient and quick.

[0020] Example 2

[0021] Reference Figure 1-3, which is the second embodiment of the utility model, and this embodiment is based on the previous embodiment. Specifically, the slide groove openings 4 are evenly distributed on the central circumference of the workbench 2. The evenly distributed circumference can realize the synchronous movement of the slider 61. At least three slide groove openings 4 can be provided to facilitate the clamping operation of the workpiece.

[0022] Specifically, one end face of the clamping block 3 is fixedly connected with an anti-skid rubber block. The provision of the anti-skid rubber block prevents the clamping block 3 from directly contacting the workpiece, thereby preventing the clamping block 3 from causing damage to the workpiece. At the same time, when clamping, the anti-skid rubber block has a large friction force in contact with the workpiece, thereby ensuring the stability of the workpiece when clamping.

[0023] Specifically, the adjustment assembly 8 includes an articulated seat 81, a connecting rod 82, and a T-shaped rod 83. The articulated seat 81 is fixedly connected to the outer wall of the movable cylinder 7, the articulated seat 81 is hinged to one end of the connecting rod 82, the other end of the connecting rod 82 is hinged to the T-shaped rod 83, and the T-shaped rod 83 is fixedly connected to the movable column 6.

[0024] Furthermore, the connecting rods 82 in the same plane are arranged in parallel, and the hinge seats 81 are fixedly connected to the top and bottom sides of the outer wall of the movable cylinder 7 respectively. A parallelogram structure is formed between the movable cylinder 7, the connecting rods 82 arranged in parallel up and down in the same plane, and the movable column 6, thereby facilitating deformation and movement while maintaining the stability of the position after positioning.

[0025] When it is necessary to clamp the workpiece to be injected, the cylinder 5 retracts and drives the movable cylinder 7 fixed to the driving end to move downward, and the movable cylinder 7 drives the adjusting assembly 8 to work. The hinged seat 81 of the adjusting assembly 8 is fixedly connected to the movable cylinder 7, and then when the movable cylinder 7 moves downward, the hinged seat 81 moves downward synchronously with the movable cylinder 7, and the hinged seat 81 drives the hinged connecting rod 82 to pull down, and the connecting rod 82 drives the T-bar 83 hinged at the end to move toward the movable cylinder 7, and the T-bar 83 drives the fixed movable column 6 to move synchronously, and the movable column 6 drives the slider 61 fixed to the top to move in the slide groove mouth 4, and the slider 61 drives the fixed clamping block 3 to clamp the workpiece. At the same time, when clamping, the clamping block 3 shifts the workpiece to move the workpiece toward the center position of the workbench to achieve clamping of the workpiece. When it is necessary to release the workpiece, the cylinder 5 extends and works, and drives the clamping block 3 away from the center position through the cooperation of various components to achieve the release of the workpiece.

[0026] Example 3

[0027] Reference Figure 1-3, which is the third embodiment of the utility model. This embodiment is based on the above two embodiments. When in use, a control panel is fixedly installed on the outer wall of the shell 1 to control the operation of the cylinder 5. The axis of the movable cylinder 7 coincides with the center position of the workbench 2. When it is necessary to clamp the workpiece to be injected, the cylinder 5 retracts to drive the movable cylinder 7 fixed to the driving end to move downward, and the movable cylinder 7 drives the adjusting assembly 8 to work. The hinged seat 81 of the adjusting assembly 8 is fixed to the movable cylinder 7, and then when the movable cylinder 7 moves downward, the hinged seat 81 moves downward synchronously with the movable cylinder 7, and the hinged seat 81 drives the hinged connecting rod 82 to pull down, and the connecting rod 82 drives the T-shaped rod 83 hinged at the end to move toward the movable cylinder 7, and the T-shaped rod 83 then brings The movable column 6 fixedly connected moves synchronously, and the movable column 6 drives the slider 61 fixed at the top to move in the slide groove mouth 4. The slider 61 drives the fixed clamping block 3 to clamp the workpiece. At the same time, when clamping, the clamping block 3 shifts the workpiece to move the workpiece toward the center position of the workbench to achieve clamping of the workpiece. When the workpiece needs to be released, the cylinder 5 extends out to work, and through the cooperation of various components, drives the clamping block 3 away from the center position to achieve the release of the workpiece. This effectively solves the technical problems of the existing ion implantation machine that when positioning and correcting the implanted part, it takes a long time to clamp or release the implanted part, and the operation is inconvenient. The present application can be achieved only by the drive of the cylinder 5, and the operation is more convenient and quick.

[0028] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A testing and calibration device for an ion implanter, comprising a housing (1), characterized in that: The shell (1) is hollow and provided with an active chamber (10). The top of the active chamber (10) is provided with a workbench (2) fixed to the shell (1). The workbench (2) is penetrated with a plurality of slide grooves (4). Slide blocks (61) are slidably clamped in the slide grooves (4). One end of the slide block (61) is fixedly connected to a clamping block (3). The clamping block (3) is slidably arranged on the top surface of the workbench (2). The other end of the slide block (61) is fixedly connected to a movable column (6). The movable column (6) is movably arranged in the active chamber (10). The movable column (6) is fixedly connected with an adjustment component (8). The adjustment component (8) is fixedly connected to a movable cylinder (7). One end of the movable cylinder (7) is slidably sleeved on a guide rod (9). The guide rod (9) is fixedly connected to the bottom wall of the workbench (2). The other end of the movable cylinder (7) is fixedly connected to one end of a cylinder (5). The other end of the cylinder (5) is fixedly connected to the bottom inner wall of the active chamber (10).

2. The inspection and calibration device for an ion implanter according to claim 1, characterized in that: The slide groove openings (4) are evenly distributed around the central circumference of the workbench (2).

3. The inspection and calibration device for an ion implanter according to claim 1, characterized in that: One end surface of the clamping block (3) is fixedly connected to an anti-slip rubber block.

4. The inspection and calibration device for an ion implanter according to claim 1, characterized in that: The adjustment assembly (8) comprises an articulated seat (81), a connecting rod (82), and a T-shaped rod (83); the articulated seat (81) is fixedly connected to the outer wall of the movable cylinder (7); the articulated seat (81) is articulated to one end of the connecting rod (82); the other end of the connecting rod (82) is articulated to the T-shaped rod (83); and the T-shaped rod (83) is fixedly connected to the movable column (6).

5. The inspection and calibration device for an ion implanter according to claim 4, characterized in that: The connecting rods (82) on the same plane are arranged in parallel, and the hinge seats (81) are respectively fixedly connected to the top and bottom sides of the outer wall of the movable cylinder (7).

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