Flower basket placement state detection mechanism and semiconductor processing equipment

Abstract

The utility model belongs to the technical field of semiconductor processing, and discloses a flower basket placement state detection mechanism which comprises a sensor and a length-adjustable guide pillar, when the guide pillar is applied to semiconductor equipment, a first end of the guide pillar penetrates through a workbench in a sliding manner and is arranged below the workbench, and a second end of the guide pillar is arranged below the workbench. The first end of the guide column can trigger the sensor, the second end of the guide column protrudes out of the upper surface of the workbench and can make contact with the bottom of the flower basket, and the distance between the first end of the guide column and the workbench can be adjusted, so that the displacement of the second end of the guide column relative to the sensor is a fixed value. The length-adjustable guide pillars can be matched with flower baskets with different bottom surface shapes and different masses, so that the semiconductor equipment does not give a false alarm after the flower baskets are placed stably; or the conditions that the flower basket is misplaced and the semiconductor equipment does not give an alarm are avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a flower basket placement state detection mechanism and semiconductor processing equipment. Background Art

[0002] A semiconductor processing device is provided, which requires wafers to be placed in a basket, and the basket and wafers are placed on a workbench as a whole, so that a robot can pick up and deliver the wafers. In the prior art, a guide post is arranged between the bottom surface of the basket and a sensor, and the bottom surface of the basket has a protrusion higher than the bottom surface of the basket. When the basket is placed on the semiconductor processing device, the protrusion at the bottom of the basket first contacts the guide post, and the gravity of the basket and the wafer acts on the guide post. The guide post moves downward to place the basket stably on the workbench, and at the same time, the lower end of the guide post triggers the sensor. Whether the guide post can trigger the sensor reflects whether the basket is placed in the correct position. When the basket is not placed properly, the guide post cannot trigger the sensor, and at this time, the controller will control the alarm device to start.

[0003] For wafers of different sizes or materials, the weight of the wafers is different, the specifications of the wafers and the basket are different, and the number of wafers placed in the basket is different, resulting in an uncertain overall weight of the wafers and the basket. The different overall weights of the wafers and the basket will result in different displacements of the guide pillars when the wafers and the basket are pressed on the guide pillars. However, in the prior art, the travel of the guide post triggering the sensor is fixed, so there are the following problems: First, for a light flower basket loaded with wafers, the guide post is pressed down, and the downward displacement of the guide post is less than the travel of the guide post triggering the sensor, and the sensor is not triggered, resulting in a false alarm of the alarm device after the flower basket is placed; Second, for a heavy flower basket loaded with wafers, when it is not placed properly, the guide post is pressed down, and the downward travel of the guide post just triggers the travel of the sensor, resulting in the flower basket being misplaced, but the alarm device is not activated to alarm, causing the robot to collide with the wafer when taking and delivering the wafer, causing economic losses; Third, the different heights of the protrusions on the bottom of the flower basket will also result in different downward displacements of the guide post after the flower basket is placed on the workbench. During operation, the sensor cannot accurately detect whether the flower basket is placed correctly, and it is difficult for the operator to operate. Utility Model Content

[0004] The utility model aims to provide a flower basket placement state detection mechanism and semiconductor processing equipment to solve the problem of false alarm or no alarm of the semiconductor equipment after the flower basket is placed on the semiconductor equipment.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] On the one hand, a flower basket placement status detection mechanism is provided, which is arranged on a workbench, and the workbench is used to place the components to be tested. The flower basket placement status monitoring mechanism includes:

[0007] A sensor is arranged below the workbench;

[0008] A guide post, wherein the guide post is slidably arranged through the workbench, wherein the first end of the guide post is located below the workbench and is used to trigger the sensor, and the second end of the guide post is located above the workbench and is used to contact the bottom of the flower basket, wherein the length of the guide post is adjustable, and the distance between the second end of the guide post and the workbench is adjustable;

[0009] The elastic member is arranged between the guide column and the workbench, and is configured to reset the guide column when the flower basket does not apply force to the second end of the guide column.

[0010] Preferably, the guide column comprises a column body and a column head, one end of the column head is sleeved on the outside of one end of the column body, and the column head is screwed to the column body.

[0011] Preferably, the guide column further comprises a fastener, at least a portion of which is located in the column head and threadedly connected to the column head, and the fastener abuts against an end surface of the column body.

[0012] Preferably, a fixed plate is provided under the workbench, one end of the fixed plate is connected to a connecting plate, the connecting plate is connected to the lower surface of the workbench, the fixed plate is provided with an opening for the first end of the guide column to pass through, the sensor is arranged on the lower surface of the fixed plate, and the sensor is used to detect the first end of the guide column.

[0013] Preferably, the elastic member comprises a spring, the spring is sleeved on the guide column, a slot is provided on the guide column, a retaining spring is provided in the slot, one end of the spring is connected to the retaining spring, and the other end of the spring is connected to the fixing plate.

[0014] Preferably, the workbench is provided with a support, the support seat is provided with a groove for the protrusion at the bottom of the flower basket to pass through, and the second end of the guide column is placed in the groove.

[0015] Preferably, the support seat comprises two fixing blocks, and the two fixing blocks are arranged at an interval to form the groove.

[0016] Preferably, the shape of the groove matches the shape of the protrusion at the bottom of the flower basket.

[0017] On the other hand, a semiconductor processing device is provided, comprising a workbench, a robot and a basket placement detection mechanism as described in any one of the above, wherein the robot is used to take and deliver wafers in the basket on the placement status detection mechanism.

[0018] Preferably, a plurality of flower basket positioning members are spaced apart on the workbench, and the plurality of flower basket positioning members are used to support the bottom edge of the flower basket. The flower basket can be placed on the workbench through the flower basket positioning members, and the position of the flower basket positioning members relative to the workbench is adjustable.

[0019] Beneficial effects of the utility model:

[0020] The flower basket placement state detection mechanism provided by the utility model comprises a sensor and a guide column with adjustable length, wherein the guide column is used for contacting with the bottom of the flower basket, the first end of the guide column slides through the workbench and is placed below the workbench, the first end of the guide column can trigger the sensor, the distance between the second end of the guide column and the workbench is adjustable, the second end of the guide column is used for contacting with the bottom of the flower basket, and the adjustable length of the guide column can better adapt to flower baskets with different bottom surface protrusion shapes and different weights, so that after the flower basket is placed, the displacement of the guide column is a fixed value, that is, the displacement of the first end of the guide column relative to the sensor is a fixed value, which is convenient for workers to operate, avoids false alarms after the flower basket is placed, and avoids the situation that no alarm occurs when the flower basket is misplaced, avoids the collision between the manipulator and the semiconductor material in the flower basket, and reduces economic losses. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the structure of a semiconductor processing equipment provided by a specific embodiment of the utility model;

[0022] Figure 2 It is a cross-sectional view of a flower basket placement detection mechanism provided in a specific embodiment of the utility model;

[0023] Figure 3 It is an exploded view of a guide post provided in a specific embodiment of the utility model;

[0024] Figure 4 It is a structural schematic diagram of a flower basket placement detection mechanism provided in a specific embodiment of the utility model;

[0025] Figure 5 It is a schematic diagram of the distribution positions of the flower basket positioning pieces provided in a specific embodiment of the utility model.

[0026] In the figure:

[0027] 1. Workbench; 11. Flower basket positioning piece; 12. Slideway;

[0028] 2. Guide column; 21. First end; 22. Second end; 23. Column; 231. Slot; 24. Column head;

[0029] 3. Fastener; 4. Sensor; 5. Flower basket; 51. Protrusion; 6. Fixing plate; 7. Connecting plate; 8. Spring; 9. Support seat; 10. Wafer. DETAILED DESCRIPTION

[0030] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0031] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0033] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0034] like Figure 1As shown, the utility model provides a flower basket placement state detection mechanism, including a guide column 2 with adjustable length. When the guide column 2 is used in the flower basket placement state detection mechanism in semiconductor processing equipment, it needs to cooperate with the bottom surface of the flower basket 5 for accommodating semiconductor wafers 10. The guide column 2 is slidably penetrated through the workbench 1, and one end is used to contact the bottom surface of the flower basket 5. After the flower basket 5 is placed on the workbench 1, the guide column 2 is pressed down by the flower basket 5, and the other end of the guide column 2 can trigger the sensor 4 in the flower basket placement state detection mechanism. By adjusting the length of the guide column 2, when the guide column 2 cooperates with the flower basket 5 with different weights or different bottom surface shapes, the displacement of the guide column 2 pressed down by the flower basket 5 is the same, and then whether the guide column 2 can trigger the sensor 4 is determined to determine whether the flower basket 5 is placed in the correct position.

[0035] like Figure 1-2 As shown, a semiconductor processing equipment provided by a specific embodiment of the utility model includes a workbench 1, a manipulator and a basket placement detection mechanism, the manipulator is used to take and send wafers 10 in a basket 5 on the placement status detection mechanism, and the basket detection mechanism is used to detect whether the position of the basket 5 placed on the workbench 1 is accurate.

[0036] The flower basket placement state detection mechanism is arranged on the workbench 1, and the workbench 1 is used to place the flower basket 5. The flower basket placement state detection mechanism includes a sensor 4, a guide post 2 and an elastic member. The sensor 4 is arranged below the workbench 1; the guide post 2 slides through the workbench 1 and is placed below the workbench 1. The first end 21 of the guide post 2 is located below the workbench 1 and is used to trigger the sensor 4. The second end 22 of the guide post 2 is placed above the workbench 1 and is used to contact the bottom of the flower basket 5. The length of the guide post 2 is adjustable, and the distance between the second end 22 of the guide post 2 and the workbench 1 is adjustable; the elastic member is arranged between the guide post 2 and the workbench 1. When the flower basket 5 does not apply force on the second end 22 of the guide post 2, the elastic member is configured to reset the guide post 2.

[0037] The adjustable length of the guide post 2 can better adapt to the flower baskets 5 with different shapes of the bottom protrusions 51 and different weights, so that after the flower basket 5 is placed, the downward displacement of the guide post 2 is a fixed value, that is, the displacement of the first end 21 of the guide post 2 relative to the sensor 4 is a fixed value, which is convenient for workers to operate, avoids false alarms after the flower basket 5 is placed, and avoids no alarms when the flower basket 5 is misplaced, avoids collisions between the manipulator and the semiconductor materials in the flower basket 5, and reduces economic losses.

[0038] like Figure 3As shown, the guide column 2 includes a column body 23 and a column head 24, one end of the column head 24 is sleeved outside one end of the column body 23, and the column head 24 is screwed to the column body 23. The guide column 2 also includes a fastener 3, at least part of the fastener 3 is located in the column head 24 and is screwed to the column head 24, and the fastener 3 abuts against the end surface of one end of the column body 23. Specifically, the column head 24 rotates up or down along the column body 23 to adjust the overall length of the guide column 2. After adjusting to the desired length, the position of the column head 24 relative to the column body 23 is fixed by a locking member. In this embodiment, the fastener 3 is a top screw.

[0039] like Figure 2-4 As shown, a fixing plate 6 is provided below the workbench 1, one end of the fixing plate 6 is connected to a connecting plate 7, the connecting plate 7 is connected to the lower surface of the workbench 1, the fixing plate 6 is provided with an opening for the first end 21 of the guide post 2 to pass through, the sensor 4 is provided on the lower surface of the fixing plate 6, and the sensor 4 is used to detect the first end 21 of the guide post 2. Specifically, in this embodiment, the sensor 4 is a groove-type photoelectric counter-beam sensor, and based on the shape of the groove-type photoelectric counter-beam sensor, the fixing plate 6 is also provided with a fixing hole for part of the sensor 4 to pass through, and part of the sensor 4 passes through the fixing hole and is fixed to the connecting plate 7.

[0040] The elastic member includes a spring 8, which is sleeved on the guide column 2. The guide column 2 is provided with a slot 231, and a retaining spring is provided in the slot 231. One end of the spring 8 is connected to the retaining spring, and the other end of the spring 8 is connected to the fixing plate 6. This connection method is used to fix the spring 8, and when the guide column 2 descends, the retaining spring and the fixing plate 6 provide support for the compression of the spring 8.

[0041] In order to place the flower basket 5 stably on the workbench 1 and limit the flower basket 5 during the process of being placed on the workbench 1, a support seat 9 is provided on the workbench 1, and a groove is provided on the support seat 9 for the protrusion 51 at the bottom of the flower basket 5 to pass through, and the second end 22 of the guide column 2 is placed in the groove. Specifically, the support seat 9 includes two fixing blocks, and the two fixing blocks are arranged at intervals to form a groove, and the shape of the groove matches the shape of the protrusion 51 at the bottom of the flower basket 5, so that the flower basket 5 can be smoothly placed in the groove of the support seat 9.

[0042] like Figure 1 and Figure 5 As shown, in order to place the flower basket 5 stably and accurately on the workbench 1, a plurality of flower basket positioning members 11 are arranged at intervals on the workbench 1. The plurality of flower basket positioning members 11 are used to support the bottom edge of the flower basket 5 so that the flower basket 5 can be placed on the workbench 1 through the flower basket positioning members 11.

[0043] Furthermore, in order to make the plurality of flower basket positioning members 11 adaptable to flower baskets 5 of different sizes, the positions of the flower basket positioning members 11 relative to the workbench 1 are adjustable. Specifically, in the present embodiment, four flower basket positioning members 11 are provided on the workbench 1, which are respectively used to contact the four corners of the flower basket 5, and correspondingly, four slide grooves 12 for the flower basket positioning members 11 to slide are provided on the workbench 1, and a sliding member (not shown in the figure) is provided on the flower basket positioning member 11, and the relative positions of the four flower basket positioning members 11 can be adjusted by sliding the sliding member in the slide groove 12 to adapt to flower baskets 5 of different sizes, and two slide grooves 12 are provided corresponding to each flower basket positioning member 11, so that the sliding of the flower basket positioning member 11 is more stable.

[0044] Furthermore, in order to more intuitively reflect whether the flower basket 5 is placed in the correct position, the semiconductor processing equipment provided in this embodiment also includes a controller and an alarm device. The gravity of the flower basket 5 and the wafer 10 acts on the guide column 2. The guide column 2 moves downward to place the flower basket 5 stably on the workbench 1. At the same time, the first end 21 of the guide column 2 triggers the sensor 4. When the flower basket 5 is not placed properly, the guide column 2 cannot trigger the sensor 4. At this time, the controller will control the alarm device to start to prompt the operator that the flower basket 5 is misplaced.

[0045] In specific implementation, it is necessary to manually adjust the length of the guide pillars 2 according to the total weight of the flower basket 5 and the wafers 10 in the flower basket 5 and the height of the protrusions 51 at the bottom of the flower basket 5 .

[0046] When the total weight of the flower basket 5 and the wafer 10 is heavier, the pressure force of the flower basket 5 on the guide column 2 is relatively large, so that the displacement of the guide column 2 is relatively large. The guide column 2 needs to be shortened so that when the protrusion 51 on the bottom surface of the flower basket 5 just contacts the second end 22 of the guide column 2, the distance between the bottom surface of the flower basket 5 and the support seat 9 is relatively small. The support seat 9 is used to limit the bottom surface of the flower basket 5 to ensure that the amount of flower basket 5 descending is not too large. When the flower basket 5 is misplaced, the sensor 4 will not be triggered. At this time, the controller will control the alarm device to start to remind the operator that the flower basket 5 is misplaced.

[0047] When the total weight of the flower basket 5 and the wafer 10 is relatively light, the pressure force of the flower basket 5 on the guide column 2 is relatively small, so that the displacement of the guide column 2 is relatively small. It is necessary to lengthen the guide column 2 so that when the protrusion 51 on the bottom surface of the flower basket 5 just contacts the second end 22 of the guide column 2, the distance between the bottom surface of the flower basket 5 and the support seat 9 is relatively large. By utilizing the distance between the support seat 9 and the bottom surface of the flower basket 5, the amount of descent of the flower basket 5 is not too small to trigger the sensor 4. At this time, the controller will not control the alarm device to start, and no false alarm will occur.

[0048] When the protrusion 51 on the bottom of the flower basket 5 is relatively high, the guide column 2 needs to be shortened so that when the protrusion 51 on the bottom of the flower basket 5 just contacts the second end 22 of the guide column 2, the distance between the bottom of the flower basket 5 and the support seat 9 is small, and the bottom of the flower basket 5 is limited by the support seat 9 to ensure that the amount of the flower basket 5 falling is not too large. When the flower basket is misplaced, the sensor 4 will not be triggered. At this time, the controller will control the alarm device to start to remind the operator that the flower basket 5 is misplaced.

[0049] When the protrusion 51 on the bottom surface of the flower basket 5 is shorter, the guide column 2 needs to be lengthened so that when the protrusion 51 on the bottom surface of the flower basket 5 just contacts the second end 22 of the guide column 2, the distance between the bottom surface of the flower basket 5 and the support seat 9 is larger. By utilizing the distance between the support seat 9 and the bottom surface of the flower basket 5, the descending amount of the flower basket 5 is not too small to trigger the sensor 4. At this time, the controller will not control the alarm device to start, and no false alarm will occur.

[0050] In combination with the above four situations, the length-adjustable guide column 2 provided in the specific embodiment of the utility model can achieve the same displacement of the guide column 2 pressed down by the flower basket 5 when cooperating with the flower basket 5 with different weights and bottom protrusions 51 of different heights, so that the detection value detected by the sensor 4 is a fixed value, which adapts to the property that the travel of the guide column 2 that can be detected by the sensor 4 is a fixed value, and can more accurately judge whether the position of the flower basket 5 is accurate.

[0051] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A flower basket placement status detection mechanism, arranged on a workbench (1), the workbench (1) being used to place a component to be tested, characterized in that: The flower basket placement status monitoring mechanism comprises: A sensor (4) is arranged below the workbench (1); A guide column (2), wherein the guide column (2) is slidably arranged through the workbench (1), wherein a first end (21) of the guide column (2) is located below the workbench (1) and is used to trigger the sensor (4), and a second end (22) of the guide column (2) is located above the workbench (1) and is used to contact the bottom of the flower basket (5), wherein the length of the guide column (2) is adjustable, and a distance between the second end (22) of the guide column (2) and the workbench (1) is adjustable; An elastic member is arranged between the guide column (2) and the workbench (1), and when the flower basket (5) does not exert force on the second end (22) of the guide column (2), the elastic member is configured to reset the guide column (2).

2. According to the flower basket placement status detection mechanism according to claim 1, the guide column (2) comprises a column body (23) and a column head (24), one end of the column head (24) is sleeved on the outside of one end of the column body (23), and the column head (24) is screwed to the column body (23).

3. The flower basket placement status detection mechanism according to claim 2, characterized in that: The guide column (2) further comprises a fastener (3), at least part of which is located in the column head (24) and is threadedly connected to the column head (24), and the fastener (3) abuts against the end surface of the column body (23).

4. The flower basket placement status detection mechanism according to claim 1, characterized in that: A fixing plate (6) is provided below the workbench (1), one end of the fixing plate (6) is connected to a connecting plate (7), the connecting plate (7) is connected to the lower surface of the workbench (1), the fixing plate (6) is provided with an opening for the first end (21) of the guide column (2) to pass through, the sensor (4) is arranged on the lower surface of the fixing plate (6), and the sensor (4) is used to detect the first end (21) of the guide column (2).

5. The flower basket placement status detection mechanism according to claim 4, characterized in that: The elastic member comprises a spring (8), the spring (8) is sleeved on the guide column (2), a clamping groove (231) is provided on the guide column (2), a clamping spring is provided in the clamping groove (231), one end of the spring (8) is connected to the clamping spring, and the other end of the spring (8) is connected to the fixing plate (6).

6. The flower basket placement status detection mechanism according to claim 1, characterized in that: The workbench (1) is provided with a support seat (9), the support seat (9) is provided with a groove for the protrusion (51) at the bottom of the flower basket (5) to pass through, and the second end (22) of the guide column (2) is placed in the groove.

7. The flower basket placement status detection mechanism according to claim 6, characterized in that: The support seat (9) comprises two fixing blocks, and the two fixing blocks are arranged at an interval to form the groove.

8. The flower basket placement status detection mechanism according to any one of claims 6-7, characterized in that: The shape of the groove matches the shape of the protrusion (51) at the bottom of the flower basket (5).

9. A semiconductor processing equipment, comprising a workbench (1), a robot and a basket placement detection mechanism according to any one of claims 1 to 8, wherein the robot is used to take and deliver wafers (10) in the basket (5) on the placement status detection mechanism.

10. The semiconductor processing equipment according to claim 9, characterized in that A plurality of flower basket positioning members (11) are arranged at intervals on the workbench (1), and the plurality of flower basket positioning members (11) are used to support the bottom edge of the flower basket (5). The flower basket (5) can be placed on the workbench (1) through the flower basket positioning members (11), and the position of the flower basket positioning members (11) relative to the workbench (1) is adjustable.

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