Air floating guide rail motion platform and wafer detection equipment
By designing the airfloating guide rail motion platform in the wafer detection equipment, using the combination of air gap components and airfloating springs, the problem of long-stroke marble airfloating guide rails forming a cantilever structure is solved, ensuring the normal use and stability of the moving platform.
Patent Information
- Application Number
- CN202420949096.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-30
- Publication Date
- 2025-01-03
- Estimated Expiration
- 2034-04-30
AI Technical Summary
In existing wafer testing equipment, long-stroke marble air-floating guides form cantilever structures, affecting the normal use of the moving platform.
Design an air-floating guide rail movement platform. By setting two first Y-axis air-floating guide rails and a Y-axis linear module on a marble base, the two ends of the Y-axis slider are slidably installed on the first Y-axis air-floating guide rail, and An air gap assembly is provided on the X-axis air-floating guide rail to avoid the Y-axis slide forming a cantilever structure, and an iron square pass frame and air-floating spring are used to adjust and stabilize the marble base.
The Y-axis slider is effectively avoided to form a cantilever structure, ensure the normal use of the moving platform, and ensure the stability and movement accuracy of the platform through air-floating springs and reverse foot support.
Smart Images
Figure CN222300629U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of wafer detection technology, and in particular to an air-floating guide rail motion platform and wafer detection equipment. Background Art
[0002] The production of chips needs to go through wafer testing, and the wafer testing equipment has high requirements for the motion accuracy of the motion platform. At present, there is a high-precision motion platform driven by a linear motor and an air-floating guide rail, including a Y-axis linear module and an X-axis linear module set on the Y-axis linear module. The wafer fixture is installed on the slider of the X-axis linear module. In order to ensure that the X-axis linear module has sufficient travel, the X-axis guide rail is a long-stroke marble air-floating guide rail with a large mass, forming a cantilever structure that causes the guide rail to be stressed, resulting in changes in appearance, which in turn affects the normal use of the motion platform. Utility Model Content
[0003] Based on this, the present application provides an air-floating guide rail motion platform and a wafer detection device, which can avoid the long-stroke marble air-floating guide rail from forming a cantilever structure and ensure the normal use of the motion platform.
[0004] The technical solution adopted in this application is as follows:
[0005] A kind of air-floating guide motion platform comprises: a marble base; a first Y-axis air-floating guide rail, on which two first Y-axis air-floating guide rails are arranged opposite to each other on the marble base; a Y-axis slider, on which two ends of the Y-axis slider are slidably mounted on the two first Y-axis air-floating guide rails in a one-to-one correspondence; a Y-axis linear module, on which at least one Y-axis linear module is arranged between the two first Y-axis air-floating guide rails on the marble base, the Y-axis linear module comprises a Y-axis linear motor and a second Y-axis air-floating guide rail arranged on one side of the Y-axis linear motor, the mover of the Y-axis linear motor is connected to the Y-axis slider, and the Y-axis slider is slidably mounted on the second Y-axis air-floating guide rail; an X-axis air-floating guide rail, which is arranged on the Y-axis slider; an X-axis slider, which is slidably mounted on the X-axis air-floating guide rail; an X-axis linear module, which is arranged on the Y-axis slider, the X-axis linear module comprises an X-axis linear motor, and the mover of the X-axis linear motor is connected to the X-axis slider.
[0006] Furthermore, a first air gap component is provided on the first Y-axis air-floating guide rail, the second Y-axis air-floating guide rail is a marble guide rail, the Y-axis slider is a marble slider, and a second air gap component is provided on the Y-axis slider. An air gap structure is formed between the first Y-axis air-floating guide rail and the end of the Y-axis slider through the first air gap component, and an air gap structure is formed between the Y-axis slider and the second Y-axis air-floating guide rail through the second air gap component.
[0007] Furthermore, the two first Y-axis air-floating guide rails are symmetrically arranged on the upper surface of the marble base, and the two first Y-axis air-floating guide rails and the marble base form a receiving cavity for accommodating the Y-axis slider. A receiving groove is formed by a downward depression on the upper surface of the marble base, and the Y-axis linear module is arranged in the receiving groove.
[0008] Furthermore, the X-axis air-floating guide rail is a marble guide rail, and the X-axis slider is provided with a third air gap component, and an air gap structure is formed between the X-axis air-floating guide rail and the X-axis slider through the third air gap component.
[0009] Furthermore, the X-axis air-floating guide rail is a concave guide rail with a groove in the middle, the X-axis linear module is arranged in the groove of the concave guide rail, the X-axis slider includes an upper cover plate and two side plates oppositely arranged at both ends of the upper cover plate, and the concave guide rail passes through the accommodating cavity surrounded by the upper cover plate and the two side plates.
[0010] Furthermore, it also includes an iron square tube frame and four air floating springs, the air floating springs are connected to a regulating valve, the four air floating springs are arranged one by one at the four corners of the upper end of the iron square tube frame, and the marble base is installed on the four air floating springs.
[0011] Furthermore, a reverse foot support is provided at the upper end of the iron square tube frame and beside the air floating spring.
[0012] Furthermore, adjustable foot supports and pulleys are provided at the four corners of the lower end of the iron square tube frame.
[0013] A wafer inspection device comprises any one of the above-mentioned air-floating guide rail motion platforms.
[0014] Furthermore, it also includes a marble column and a Z-axis linear module for driving the detection unit to move on the Z-axis, the marble column is arranged on the marble base and is located on one side of the two first Y-axis air-floating guide rails, the Z-axis linear module includes a Z-axis linear motor, a Z-axis air-floating guide rail and a Z-axis slider, the Z-axis air-floating guide rail and the Z-axis linear motor are installed on the marble column, the Z-axis slider is slidably installed on the Z-axis air-floating guide rail, and the mover of the Z-axis linear motor is connected to the Z-axis slider; the Z-axis air-floating guide rail is a marble guide rail, and the Z-axis slider is provided with a fourth air gap component, and an air gap structure is formed between the Z-axis air-floating guide rail and the Z-axis slider through the fourth air gap component.
[0015] The air-floating guide motion platform of the present application is provided with two first Y-axis air-floating guides and at least one Y-axis linear module between the two first Y-axis air-floating guides. The two ends of the Y-axis slider are slidably mounted on the two first Y-axis air-floating guides in a one-to-one correspondence, and the Y-axis slider is slidably mounted on the second Y-axis air-floating guide of the Y-axis linear module. Therefore, when the X-axis air-floating guide is longer, the Y-axis slider can be prevented from forming a cantilever structure, thereby ensuring the normal use of the motion platform. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0017] Figure 1 A schematic diagram of the three-dimensional structure of the air-floating guide rail motion platform of the present application;
[0018] Figure 2 A front view of the air-floating guide rail motion platform of the present application;
[0019] Figure 3 This is a schematic diagram of the three-dimensional structure of the wafer inspection equipment of the present application.
[0020] Description of reference numerals:
[0021] 10. Marble base; 11. Receiving groove; 21. First Y-axis air-floating guide rail; 22. Y-axis slider; 231. Y-axis linear motor; 232. Second Y-axis air-floating guide rail; 31. X-axis air-floating guide rail; 32. X-axis slider; 321. Upper cover plate; 322. Side plate; 331. X-axis linear motor; 41. Iron square frame; 42. Air-floating spring; 43. Regulating valve; 44. Reverse foot support; 45. Adjustable foot support; 46. Pulley; 50. Marble column; 61. Z-axis linear motor; 62. Z-axis air-floating guide rail; 63. Z-axis slider; 64. Undamped cylinder. DETAILED DESCRIPTION
[0022] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below with reference to the accompanying drawings. The present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.
[0023] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.
[0024] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.
[0025] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0026] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.
[0027] refer to Figure 1 and Figure 2 The present application provides an air-floating guide motion platform, including a marble base 10, a first Y-axis air-floating guide 21, a Y-axis slider 22, a Y-axis linear module, an X-axis air-floating guide 31, an X-axis slider 32 and an X-axis linear module.
[0028] There are two first Y-axis air-floating guide rails 21 , and the two first Y-axis air-floating guide rails 21 are separated and oppositely arranged on the marble base 10 , and both ends of the Y-axis slider 22 are slidably installed on the two first Y-axis air-floating guide rails 21 in a one-to-one correspondence.
[0029] The Y-axis linear module is arranged on the marble base 10 and is located between the two first Y-axis air-floating guide rails 21. The Y-axis linear module includes a Y-axis linear motor 231 and a second Y-axis air-floating guide rail 232 arranged on one side of the Y-axis linear motor 231. The mover of the Y-axis linear motor 231 is connected to the Y-axis slider 22, and the Y-axis slider 22 is slidably mounted on the second Y-axis air-floating guide rail 232. At least one Y-axis linear module is arranged, preferably two. When one Y-axis linear module is arranged, it is arranged in the middle of the two first Y-axis air-floating guide rails 21 as much as possible. When two Y-axis linear modules are arranged, they are symmetrically distributed with the middle of the two first Y-axis air-floating guide rails 21 as the center as much as possible.
[0030] The X-axis air-floating guide rail 31 and the X-axis linear module are arranged on the Y-axis slider 22 , the X-axis slider 32 is slidably mounted on the X-axis air-floating guide rail 31 , and the X-axis linear module includes an X-axis linear motor 331 , and the mover of the X-axis linear motor 331 is connected to the X-axis slider 32 .
[0031] The air-floating guide motion platform of the present application is provided with two first Y-axis air-floating guides 21 and at least one Y-axis linear module between the two first Y-axis air-floating guides 21. The two ends of the Y-axis slider 22 are slidably mounted on the two first Y-axis air-floating guides 21 in a one-to-one correspondence, and the Y-axis slider 22 is slidably mounted on the second Y-axis air-floating guide 232 of the Y-axis linear module. Therefore, when the X-axis air-floating guide 31 is long, the Y-axis slider 22 can be prevented from forming a cantilever structure, thereby ensuring the normal use of the motion platform.
[0032] Specifically, a first air gap component is provided on the first Y-axis air-floating guide rail 21, the second Y-axis air-floating guide rail 232 is a marble guide rail, the Y-axis slider 22 is a marble slider, and a second air gap component is provided on the Y-axis slider 22, and an air gap structure is formed between the first Y-axis air-floating guide rail 21 and the end of the Y-axis slider 22 through the first air gap component, and an air gap structure is formed between the Y-axis slider 22 and the second Y-axis air-floating guide rail 232 through the second air gap component.
[0033] Furthermore, the two first Y-axis air-floating guide rails 21 are symmetrically arranged on the upper surface of the marble base 10, and the two first Y-axis air-floating guide rails 21 and the marble base 10 form a receiving cavity for accommodating the Y-axis slider 22. A receiving groove 11 is formed by recessing downward on the upper surface of the marble base 10, and the Y-axis linear module is arranged in the receiving groove 11. The second Y-axis air-floating guide rail 232 can be integrally formed and arranged on the marble base 10. Under the premise of ensuring that the thickness of the marble base 10 meets the quality requirements, such a setting can save installation space and improve the compactness of the structure.
[0034] Furthermore, the first Y-axis air-floating guide rail 21 is an inverted L-shaped guide rail. In this case, the first air gap component includes air inlet holes and air outlet holes arranged on the first Y-axis air-floating guide rail 21 and the marble base 10 on the surface area opposite to the surface of the Y-axis slider 22.
[0035] Specifically, the X-axis air-floating guide rail 31 can be a marble guide rail, which can be integrally formed on the Y-axis slider 22 , and a third air gap component is provided on the X-axis slider 32 , and an air gap structure is formed between the X-axis air-floating guide rail 31 and the X-axis slider 32 through the third air gap component.
[0036] For further reference, Figure 1 The X-axis air-floating guide rail 31 is a concave guide rail with a groove in the middle. The X-axis linear module is arranged in the groove of the concave guide rail. The X-axis slider 32 includes an upper cover plate 321 and two side plates 322 arranged opposite to each other at both ends of the upper cover plate 321. The concave guide rail passes through the accommodating cavity surrounded by the upper cover plate 321 and the two side plates 322. The third air gap component includes an air inlet and an exhaust hole arranged on the surface of the upper cover plate 321 that is opposite to the surface of the concave guide rail and the inner side surfaces of the two side plates 322.
[0037] For specific settings, refer to Figure 1 and Figure 2 The air-floating guide rail motion platform of the present application also includes an iron square tube frame 41 and four air-floating springs 42, the air-floating springs 42 are connected to regulating valves 43, and the four air-floating springs 42 are arranged one by one at the four corners of the upper end of the iron square tube frame 41, and the marble base 10 is installed on the four air-floating springs 42. The marble base 10 is separated from the iron square tube frame 41 by arranging the air-floating springs 42 to avoid vibrations transmitted from the ground to the marble base 10, thereby ensuring the stable movement of the mechanism arranged on the marble base 10. The marble base 10 can be leveled by adjusting the air pressure of three of the four air-floating springs 42 through the corresponding regulating valves 43.
[0038] Further, a reverse foot support 44 is provided at the upper end of the iron square tube frame 41 beside the air floating spring 42. The reverse foot support 44 is used to prevent the marble base 10 from acting on the air floating spring 42 and damaging the air floating spring 42 when the air of the air floating spring 42 is cut off, thereby increasing the life of the air floating spring 42.
[0039] Optionally, adjustable foot supports 45 and pulleys 46 are provided at the four corners of the lower end of the iron square tube frame 41. The adjustable foot supports 45 are used for coarse horizontal adjustment, and the pulleys 46 are used to facilitate the transportation of the motion platform.
[0040] The present application also provides a wafer inspection device, referring to Figure 3 The wafer inspection equipment includes the air-floating guide motion platform as described above, and a mechanism composed of a first Y-axis air-floating guide 21, a Y-axis slider 22, a Y-axis linear module, an X-axis air-floating guide 31, an X-axis slider 32 and an X-axis linear module is used to drive the wafer to move on the XY plane, and the X-axis slider 32 is used to set a fixture for loading the wafer.
[0041] refer to Figure 3 The wafer detection equipment also includes a marble column 50 and a Z-axis linear module for driving the detection unit to move on the Z-axis. The marble column 50 is arranged on the marble base 10 and is located on one side of the two first Y-axis air-floating guide rails 21. The Z-axis linear module includes a Z-axis linear motor 61, a Z-axis air-floating guide rail 62 and a Z-axis slider 63. The Z-axis air-floating guide rail 62 and the Z-axis linear motor 61 are installed on the marble column 50, and the Z-axis slider 63 is slidably installed on the Z-axis air-floating guide rail 62. The mover of the Z-axis linear motor 61 is connected to the Z-axis slider 63; the Z-axis air-floating guide rail 62 is a marble guide rail, and the Z-axis slider 63 is provided with a fourth air gap component, and an air gap structure is formed between the Z-axis air-floating guide rail 62 and the Z-axis slider 63 through the fourth air gap component.
[0042] The arrangement of the Z-axis linear motor 61, the Z-axis air-floating guide rail 62 and the Z-axis slider 63 may be the same as that of the X-axis linear motor 331, the X-axis air-floating guide rail 31 and the X-axis slider 32 described above.
[0043] Preferably, the Z-axis slider 63 is an aluminum alloy slider, which can reduce the load on the Z-axis while satisfying the hardness condition, so that the Z-axis movement performance can be better exerted.
[0044] Preferably, the Z-axis slider 63 is connected to a non-damping cylinder 64, and the non-damping cylinder 64 is used to balance the gravity caused by the Z-axis load, so that the Z-axis movement performance reaches the level of the horizontal axis.
[0045] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0046] The above-described embodiments only express several implementation methods of the present application and should not be construed as limiting the scope of the patent application. It should be noted that, for a person of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present application, and these all fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be subject to the attached claims.
Claims
1. An air-floating guide rail motion platform, characterized in that: include: marble base; A first Y-axis air-floating guide rail, wherein two first Y-axis air-floating guide rails are arranged opposite to each other on the marble base; A Y-axis slider, both ends of which are slidably mounted on the two first Y-axis air-floating guide rails in a one-to-one correspondence; Y-axis linear module, at least one Y-axis linear module is provided on the marble base between the two first Y-axis air-floating guide rails, the Y-axis linear module comprises a Y-axis linear motor and a second Y-axis air-floating guide rail provided on one side of the Y-axis linear motor, the mover of the Y-axis linear motor is connected to the Y-axis slider, and the Y-axis slider is slidably mounted on the second Y-axis air-floating guide rail; An X-axis air-floating guide rail is arranged on the Y-axis slider; An X-axis slider is slidably mounted on the X-axis air-floating guide rail; The X-axis linear module is arranged on the Y-axis slider. The X-axis linear module includes an X-axis linear motor. The mover of the X-axis linear motor is connected to the X-axis slider.
2. The air-floating guide rail motion platform according to claim 1, characterized in that: A first air gap component is provided on the first Y-axis air-floating guide rail, the second Y-axis air-floating guide rail is a marble guide rail, the Y-axis slider is a marble slider, and a second air gap component is provided on the Y-axis slider. An air gap structure is formed between the first Y-axis air-floating guide rail and the end of the Y-axis slider through the first air gap component, and an air gap structure is formed between the Y-axis slider and the second Y-axis air-floating guide rail through the second air gap component.
3. The air-floating guide rail motion platform according to claim 2, characterized in that: The two first Y-axis air-floating guide rails are symmetrically arranged on the upper surface of the marble base. The two first Y-axis air-floating guide rails and the marble base form a receiving cavity for accommodating the Y-axis slider. A receiving groove is formed by a downward depression on the upper surface of the marble base, and the Y-axis linear module is arranged in the receiving groove.
4. The air-floating guide rail motion platform according to claim 1, characterized in that: The X-axis air-floating guide rail is a marble guide rail, and a third air gap component is provided on the X-axis slider, and an air gap structure is formed between the X-axis air-floating guide rail and the X-axis slider through the third air gap component.
5. The air-floating guide rail motion platform according to claim 4, characterized in that: The X-axis air-floating guide rail is a concave guide rail with a groove in the middle. The X-axis linear module is arranged in the groove of the concave guide rail. The X-axis slider includes an upper cover plate and two side plates arranged opposite to each other at both ends of the upper cover plate. The concave guide rail passes through the accommodating cavity surrounded by the upper cover plate and the two side plates.
6. The air-floating guide rail motion platform according to claim 1, characterized in that: It also includes an iron square tube frame and four air floating springs, the air floating springs are connected to a regulating valve, the four air floating springs are arranged at four corners of the upper end of the iron square tube frame in a one-to-one correspondence, and the marble base is installed on the four air floating springs.
7. The air-floating guide rail motion platform according to claim 6, characterized in that: A reverse foot support is provided at the upper end of the iron square tube frame and beside the air floating spring.
8. The air-floating guide rail motion platform according to claim 6, characterized in that: Adjustable foot supports and pulleys are arranged at four corners of the lower end of the iron square tube frame.
9. A wafer inspection device, characterized in that: It comprises an air-floating guide rail motion platform as described in any one of claims 1 to 8.
10. The wafer inspection device according to claim 9, characterized in that: It also includes a marble column and a Z-axis linear module for driving the detection unit to move on the Z-axis, the marble column is arranged on the marble base and is located on one side of the two first Y-axis air-floating guide rails, the Z-axis linear module includes a Z-axis linear motor, a Z-axis air-floating guide rail and a Z-axis slider, the Z-axis air-floating guide rail and the Z-axis linear motor are installed on the marble column, the Z-axis slider is slidably installed on the Z-axis air-floating guide rail, and the mover of the Z-axis linear motor is connected to the Z-axis slider; the Z-axis air-floating guide rail is a marble guide rail, and the Z-axis slider is provided with a fourth air gap component, and an air gap structure is formed between the Z-axis air-floating guide rail and the Z-axis slider through the fourth air gap component.