Multi-station welding tool and semiconductor welding device

Abstract

The utility model relates to the technical field of semiconductor product welding, and provides a multi-station welding tool. The multi-station welding tool comprises a base plate, a plurality of driving pieces and a plurality of sets of clamping assemblies, and the driving pieces are arranged on the base plate at intervals so that a plurality of welding stations can be formed on the base plate. Each clamping assembly is arranged on the corresponding driving part, and the driving parts are used for driving the clamping assemblies to clamp the welding parts so that the welding robot can weld the welding parts. The utility model provides a multi-station welding tool which can fix a plurality of welding parts at the same time and enable a welding robot to weld the welding parts according to the same parameters, so that welding seams of the welding parts can be kept consistent, and the phenomenon that the welding seams are inconsistent in fusion depth is avoided. And it is effectively guaranteed that the welding quality of the multiple welding pieces is kept consistent.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor product welding, in particular to a multi-station welding tool. Background Art

[0002] The high-end waste gas treatment equipment in the semiconductor industry has extremely high requirements for air tightness. Welding leaks are not allowed when welding the waste gas treatment equipment. The quality requirements for the depth of welds and other aspects of welding are extremely high during welding. Welded products must not have unqualified phenomena such as wavy depth of weld and inconsistent depth of weld.

[0003] Currently, manual welding is the main method for welding welded parts. However, in the case of manual welding, human factors may cause the welded parts to have wavy penetration depths that cannot be controlled, resulting in inconsistent welding quality of different welded parts. Utility Model Content

[0004] The utility model aims to solve at least one of the problems existing in the related art. To this end, the utility model proposes a multi-station welding tool, which can fix multiple welding parts at the same time, and enables the welding robot to weld multiple welding parts according to the same parameters, so that the welds of multiple welding parts can be consistent, and the phenomenon of inconsistent melting depth of the welds can be avoided, effectively ensuring that the welding quality of multiple welding parts remains consistent.

[0005] The utility model also provides a semiconductor welding device.

[0006] The first aspect of the utility model provides a multi-station welding tool, comprising:

[0007] substrate;

[0008] A plurality of driving members, wherein the plurality of driving members are arranged at intervals on the substrate so that the substrate forms a plurality of welding stations;

[0009] A plurality of groups of clamping assemblies, each group of the clamping assemblies is arranged on the corresponding driving member, and the driving member is used to drive the clamping assemblies to clamp the weldment, so that the welding robot welds the weldment.

[0010] According to a multi-station welding tool provided by an embodiment of the utility model, the clamping assembly includes at least three clamping members, the clamping members are connected to the corresponding driving members, and a preset angle is formed between any two adjacent clamping members.

[0011] According to a multi-station welding tool provided by an embodiment of the utility model, the clamping member is formed with a clamping surface, and the clamping surface is a V-shaped surface or an arc-shaped surface.

[0012] According to a multi-station welding tool provided by an embodiment of the utility model, the clamping piece is provided with a pressure sensor, and the pressure sensor is used to detect the pressure applied to the clamping piece.

[0013] According to a multi-station welding tool provided by an embodiment of the utility model, the driving member is provided with at least three connecting members, any two adjacent connecting members form the preset angle, and each clamping member is connected to the corresponding connecting member.

[0014] According to a multi-station welding tool provided by an embodiment of the utility model, the clamping assembly also includes a guide positioning member, the guide positioning member is connected to the driving member, and at least three clamping members are arranged around the guide positioning member.

[0015] According to a multi-station welding tool provided by an embodiment of the utility model, at least three fins are protruding from the side wall of the guide positioning member, and there is a preset angle between any two adjacent fins, and the fins are located between any two adjacent clamping members.

[0016] According to a multi-station welding tool provided by an embodiment of the utility model, the clamping assembly also includes a support member, and the support member is arranged between the guide positioning member and the driving member.

[0017] According to a multi-station welding tool provided by an embodiment of the utility model, a sink groove is provided on a side of the support member facing the guide positioning member, and the guide positioning member is connected to the support member through the sink groove.

[0018] A semiconductor welding device provided in an embodiment of the second aspect of the utility model comprises a welding robot, a pneumatic control element and a multi-station welding tool as described in any one of the above items, wherein the pneumatic control element is electrically connected to the control system of the welding robot, and the drive element is connected to the pneumatic control element.

[0019] The above one or more technical solutions in the embodiments of the utility model have at least one of the following technical effects:

[0020] According to the multi-station welding tool provided by the embodiment of the utility model, multiple driving members are arranged at intervals on the substrate to form multiple welding stations on the substrate, and clamping assemblies are arranged on the corresponding driving members, so that the clamping assemblies can be driven by the driving members to clamp the welding parts, so that the substrate can fix multiple welding parts. Then, the welding robot can weld multiple welding parts according to the same parameters, so that the welds of multiple welding parts can be kept consistent, and the phenomenon of inconsistent melting depth of the welds can be avoided, effectively ensuring that the welding quality of multiple welding parts is kept consistent.

[0021] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 It is a three-dimensional structural schematic diagram of a multi-station welding tool provided by an embodiment of the utility model;

[0024] Figure 2 It is a schematic diagram of the top view of the structure of the multi-station welding tool provided by the embodiment of the utility model;

[0025] Figure 3 It is a schematic diagram of the connection structure of the driving member and the clamping assembly provided in an embodiment of the utility model;

[0026] Figure 4 It is a three-dimensional structural schematic diagram of the guide positioning member provided in the embodiment of the utility model;

[0027] Figure 5 It is a schematic diagram of the top view of the structure of the support member provided in the embodiment of the utility model.

[0028] Reference numerals:

[0029] 10. Base plate; 11. Weight reduction groove; 20. Driving member; 21. Connecting member; 30. Clamping assembly; 31. Clamping member; 32. Guide and positioning member; 33. Fin; 34. Support member; 35. Sink. DETAILED DESCRIPTION

[0030] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0031] In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0032] In the description of the embodiments of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0033] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0034] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model embodiment. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0035] Combine the following Figures 1 to 5 The multi-station welding tool provided by the embodiment of the first aspect of the utility model is described.

[0036] Figure 1 The three-dimensional structural diagram of the multi-station welding tool provided by the embodiment of the utility model is illustrated. Figure 2 The schematic diagram of the top view of the multi-station welding tool provided by the embodiment of the utility model is illustrated as follows: Figure 1 and Figure 2 As shown, the multi-station welding tool comprises a base plate 10, a plurality of driving members 20 and a plurality of clamping assemblies 30. The plurality of driving members 20 are arranged at intervals on the base plate 10 so that the base plate 10 forms a plurality of welding stations. Each clamping assembly 30 is arranged on a corresponding driving member 20, and the driving member 20 is used to drive the clamping assembly 30 to clamp the welded part so that the welding robot welds the welded part.

[0037] According to the multi-station welding tool provided by the embodiment of the utility model, multiple driving members 20 are arranged at intervals on the substrate 10 to form multiple welding stations on the substrate 10, and clamping assemblies 30 are arranged on the corresponding driving members 20, so that the clamping assemblies 30 can be driven by the driving members 20 to clamp the welding parts, so that the substrate 10 can fix multiple welding parts. Then, the welding robot can weld multiple welding parts according to the same parameters, so that the welds of the multiple welding parts can be kept consistent, and the phenomenon of inconsistent melting depth of the welds can be avoided, effectively ensuring that the welding quality of the multiple welding parts is kept consistent.

[0038] Figure 3 The schematic diagram of the connection structure of the driving member and the clamping assembly provided in the embodiment of the utility model is illustrated as follows: Figure 1 and Figure 3 As shown, in the embodiment of the utility model, the clamping assembly 30 includes at least three clamping members 31, and the clamping members 31 are connected to the corresponding driving members 20, and a preset angle is formed between any two adjacent clamping members 31. Then, after the welding part is clamped by the clamping members 31, a stable clamping effect can be provided for the welding part, ensuring that the welding part will not move or shake during welding, thereby ensuring the welding quality of the welding part.

[0039] For example, Figure 3 As shown, in the present embodiment, each group of clamping assemblies 30 includes three clamping members 31, and the preset angle between any two adjacent clamping members 31 is 120°, so that the three clamping members 31 form a three-finger centering mechanism, and the three clamping members 31 are used to center and clamp the weldment, thereby ensuring that the center of the weldment is fixed, so that the welding robot can accurately determine the position of the weldment, so as to perform accurate welding operations on the weldment, and ensure that the weld position and weld angle of the weldment meet the welding requirements, thereby further ensuring the welding quality.

[0040] Furthermore, the clamping member 31 is formed with a clamping surface, which is a V-shaped surface or an arc-shaped surface. When the clamping surface is a V-shaped surface, the multiple clamping members 31 can provide stable positioning for the weldment, and at the same time, the clamping members 31 can adapt to the sizes and shapes of different weldments, so that the multiple clamping members 31 can generate stable friction force on the weldment to ensure that the weldment remains stable during the processing.

[0041] When the clamping surface is an arc-shaped surface, when the weld is clamped, the clamping surfaces of multiple clamps 31 form a circle, so that the clamping force on the weld is distributed relatively evenly, effectively avoiding excessive pressure on the weld at certain positions, thereby protecting the weld from damage.

[0042] In the embodiment of the utility model, the clamping member 31 is provided with a pressure sensor, and the pressure sensor is used to detect the pressure exerted on the clamping member 31. When the clamping member 31 clamps the weldment, the pressure between the clamping member 31 and the weldment changes, and the pressure sensor detects the corresponding pressure change. Therefore, after the pressure sensor detects that the clamping member 31 clamps the weldment, the driving member 20 stops running, so that the clamping member 31 stops moving toward the weldment, thereby preventing the clamping member 31 from damaging the weldment.

[0043] In the embodiment of the present utility model, Figure 3 As shown, the driving member 20 is provided with at least three connecting members 21, and a preset angle is formed between any two adjacent connecting members 21, and each clamping member 31 is connected to the corresponding connecting member 21. When the clamping member 31 is needed to clamp the weldment, the driving member 20 can drive the connecting member 21 to move toward the weldment, so that the connecting member 21 drives the clamping member 31 to move toward the weldment, so that the clamping member 31 completes the clamping of the weldment, so as to ensure that the weldment will not move or shake.

[0044] For example, in this embodiment, the driving member 20 is a finger cylinder, and the connecting member 21 is a finger part of the finger cylinder. When the finger cylinder is driven to move, the piston in the cylinder is driven by compressed air to reciprocate in the cylinder, and the piston is connected to the finger part through a connecting rod, so that the piston can drive the finger part to open and close.

[0045] When the clamping member 31 is needed to clamp the weldment, the piston drives the finger member to move toward the weldment, thereby driving the clamping member 31 to move toward the weldment, so that the clamping member 31 completes clamping the weldment. When the clamping member 31 needs to release the weldment, the piston drives the finger member to move away from the weldment, thereby driving the clamping member 31 to release the weldment.

[0046] Figure 4 The three-dimensional structure diagram of the guide positioning member provided by the embodiment of the utility model is illustrated as follows: Figure 1and Figure 4 As shown, in the embodiment of the utility model, the clamping assembly 30 also includes a guide positioning member 32, the guide positioning member 32 is connected to the driving member 20, and at least three clamping members 31 are arranged around the guide positioning member 32. In this embodiment, the guide positioning member 32 is preferably a cylindrical member, and the welding member is preferably a sleeve-shaped member. When the clamping assembly 30 needs to clamp the welding member, the welding member can be sleeved on the outer wall surface of the guide positioning member 32, so that the positioning effect of the welding member is achieved through the guide positioning member 32, further ensuring the accurate and stable position of the welding member during the welding process, and at the same time using the guide positioning member 32 to support and protect the welding member, reduce the deformation of the welding member, and effectively avoid the damage to the welding member caused by high temperature and pressure during welding.

[0047] It should be noted here that the axis of the guide positioning member 32 coincides with the axis of the driving member 20, so that when the clamping member 31 does not clamp the weld part, the clamping surface of the clamping member 31 can be abutted against the guide positioning member 32, so that the clamping center of the clamping member 31 is located on the axis of the guide positioning member 32 by adjusting the positions of the clamping member 31 and the connecting member 21 on the driving member 20, that is, the clamping center of the clamping member 31 is located at the axis of the driving member 20, and further, when the clamping member 31 clamps the weld part, the central axis of the weld part can coincide with the axis of the driving member 20, so that the welding robot can determine the position of the weld part by confirming the position of the axis of the driving member 20.

[0048] Furthermore, in order to enable the guide positioning member 32 to support welded parts of different pipe diameters, in this embodiment, at least three fins 33 are protruded from the side wall of the guide positioning member 32, and a preset angle is formed between any two adjacent fins 33, and the fins 33 are located between any two adjacent clamping members 31. In this embodiment, the number of fins 33 is the same as the number of clamping members 31, and the angle between any two adjacent fins 33 is also the same as the angle between any two adjacent clamping members 31, that is, when the number of clamping members 31 is 3 and the angle between any two adjacent clamping members 31 is 120°, the number of fins 33 is also 3, and the angle between any two adjacent fins 33 is also 120°. By protruding fins 33 on the side walls of the guide positioning member 32, the adaptability of the welding tooling to welding parts of different specifications can be improved. That is, when the diameter of the actual welding part is larger than the diameter of the guide positioning member 32, the actual welding part can be supported and positioned by at least three fins 33 so that the clamping member 31 can clamp the welding part.

[0049] Figure 5 The schematic diagram of the top view of the support member provided by the embodiment of the utility model is illustrated as follows: Figure 1 , Figure 2 and Figure 5As shown, in the embodiment of the utility model, the clamping assembly 30 further includes a support member 34, which is disposed between the guide positioning member 32 and the driving member 20, so as to support the guide positioning member 32 through the support member 34, raise the clamping height of the guide positioning member 32, and ensure that the guide positioning member 32 does not shake when the guide positioning member 32 is clamped. Furthermore, when the guide positioning member 32 is used to support and position the welded part, the guide positioning member 32 can be raised by the support member 34, thereby indirectly raising the height of the welded part, so that the welding point of the welded part is higher than the clamping member 31, so as to facilitate welding of the welded part.

[0050] Furthermore, when the diameter of the welded part is larger than the diameter of the guide positioning member 32, and the clamping member 31 clamps the welded part, the clamping force of the clamping member 31 acts on the welded part, but not on the guide fixing member. In order to ensure that the guide fixing member does not rotate during the welding process, in this embodiment, Figure 5 As shown, a recessed groove 35 is provided on one side of the support member 34 facing the guide positioning member 32, and the guide positioning member 32 is connected to the support member 34 via the recessed groove 35, so that the guide positioning member 32 is limited by the recessed groove 35, so that the guide positioning member 32 will not move or shake during the welding process to interfere with the welding of the welded parts, thereby further ensuring the welding quality of the welded parts.

[0051] In the embodiment of the utility model, a weight-reducing groove 11 is provided on the substrate 10. The substrate 10 can be formed by cutting, or by stamping or other forming processes. By providing the weight-reducing groove 11 on the substrate 10, the weight of the substrate 10 is reduced, thereby reducing the weight of the welding tooling and improving the transfer efficiency of the welding tooling.

[0052] The second embodiment of the utility model provides a semiconductor welding device, which includes a welding robot, a pneumatic control element and the multi-station welding tooling described in the first embodiment. The pneumatic control element is electrically connected to the control system of the welding robot, and the drive element 20 is connected to the pneumatic control element.

[0053] According to the semiconductor welding device provided by the embodiment of the utility model, when welding a tubular weldment, after placing the tubular weldment on the welding fixture, the control system of the welding robot controls the movement of the driving members 20 of multiple welding stations through the pneumatic control element, so that the driving members 20 can drive the corresponding clamping assemblies 30 to clamp the weldment, complete the fixation of the weldment, and ensure that the weldment cannot move or shake. Then the welding robot is controlled to weld the weldment of one of the welding stations to ensure the welding quality of the corresponding weldment. After completing the welding of the corresponding weldment, the control system of the welding robot controls the movement of the welding robot to weld the weldments of other welding stations using the same welding parameters, thereby ensuring the consistency of the welding quality of multiple weldments.

[0054] Specifically, in this embodiment, the pneumatic control element is connected to the driving cylinder through the air pipe to control the movement of the driving cylinder. The control system of the welding robot can be connected to the positioner, and the positioner is controlled to control the welding robot to weld the welding parts at different positions.

[0055] In this embodiment, the welded parts can be transported by a transport robot to transfer the welded parts to a target workstation, or to transfer the welded parts that have been welded from the target workstation to the next process.

[0056] Combine the following Figures 1 to 5 The specific working process of the welding tool provided by the utility model is described.

[0057] The welding parts are transferred to the target station by the transport robot, and the control system of the welding robot controls the driving cylinder to operate, so as to drive the clamping member 31 to move toward the welding parts, so as to clamp the welding parts. After the welding of the welding parts at the target station is completed, the welding robot is transferred to the next station, and the welding parts at the next station are welded. At the same time, the welding parts that have been welded are moved out of the corresponding welding station by the transport robot, and then the transport robot transfers the unwelded welding parts to the corresponding welding station, so that the welding robot can perform cyclic welding on the welding parts at multiple stations on the substrate 10, so as to ensure the consistency of the welding quality of the same batch of welding parts.

[0058] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A multi-station welding tool, characterized in that: include: substrate; A plurality of driving members, wherein the plurality of driving members are arranged at intervals on the substrate so that the substrate forms a plurality of welding stations; A plurality of groups of clamping assemblies, each group of the clamping assemblies is arranged on the corresponding driving member, and the driving member is used to drive the clamping assemblies to clamp the weldment, so that the welding robot welds the weldment.

2. The multi-station welding tool according to claim 1, characterized in that: The clamping assembly includes at least three clamping members, each of which is connected to the corresponding driving member, and a preset angle is formed between any two adjacent clamping members.

3. The multi-station welding tool according to claim 2, characterized in that: The clamping piece is formed with a clamping surface, and the clamping surface is a V-shaped surface or an arc-shaped surface.

4. The multi-station welding tool according to claim 2, characterized in that: The clamping member is provided with a pressure sensor, and the pressure sensor is used to detect the pressure applied to the clamping member.

5. The multi-station welding tool according to any one of claims 2 to 4, characterized in that: The driving member is provided with at least three connecting members, and any two adjacent connecting members form the preset angle, and each clamping member is connected to the corresponding connecting member.

6. The multi-station welding tool according to any one of claims 2 to 4, characterized in that: The clamping assembly also includes a guide positioning member, which is connected to the driving member, and at least three clamping members are arranged around the guide positioning member.

7. The multi-station welding tool according to claim 6, characterized in that: At least three fins are protruding from the side wall of the guide positioning member, and there is a preset angle between any two adjacent fins. The fins are located between any two adjacent clamping members.

8. The multi-station welding tool according to claim 6, characterized in that: The clamping assembly also includes a supporting member, which is arranged between the guiding positioning member and the driving member.

9. The multi-station welding tool according to claim 8, characterized in that: A sinking groove is provided on one side of the support member facing the guide positioning member, and the guide positioning member is connected to the support member through the sinking groove.

10. A semiconductor welding device, characterized in that: It comprises a welding robot, a pneumatic control element and the multi-station welding tool as described in any one of claims 1 to 9, wherein the pneumatic control element is electrically connected to the control system of the welding robot, and the drive element is connected to the pneumatic control element.

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