High-precision glass wafer CNC engraving and milling device

Abstract

The utility model discloses a high-precision glass wafer CNC (computer numerical control) engraving device, which belongs to the technical field of wafer processing, and comprises a casing and a switching mechanism, the top of the casing is bolted with an engraving machine head, the inner side of the casing is clamped with a loading disc, the inner side of the loading disc is bolted with a servo motor, and the servo motor is connected with the switching mechanism. The rear side of the inner side of the loading disc is in bolted connection with a hydraulic rod, the top of the hydraulic rod is in bolted connection with a chuck, the switching mechanism is rotationally connected to the inner side of the chuck, the machine shell and the switching mechanism are arranged, the machine shell can be matched with the engraving and milling machine head, glass wafers in the main clamping sleeve and the auxiliary clamping sleeve are subjected to engraving and milling, the loading disc can be matched with a servo motor, and the loading disc can be matched with the servo motor. The replacement wheel disc can be limited and can be driven to rotate, so that the replacement wheel disc can switch the glass wafers in the main clamping sleeve and the auxiliary clamping sleeve, and the hydraulic rod can be matched with the chuck to support and limit the replacement wheel disc.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a high-precision glass wafer CNC fine carving device. Background Art

[0002] The high-precision glass wafer CNC engraving device is a device used to perform high-precision CNC engraving processing on the surface of glass wafers. Glass wafers are key materials used in semiconductor manufacturing, optical device manufacturing and other fields. Complex and precise processing is required during the manufacturing process to meet the requirements of precision and optical performance. The high-precision glass wafer CNC engraving device is a device specifically used for this type of processing needs.

[0003] At present, a Chinese utility model with publication number: CN219901337U discloses a high-precision CNC automated multi-head precision engraving machine, which aims to solve the technical problem that debris will accumulate in the groove of the machine tool under the prior art, and if it is not cleaned for a long time, the debris will continue to stack, affecting the placement of the plate. The precision engraving machine includes a machine table, a CNC box and a machine tool. A precision engraving head is installed on the surface of the CNC box, and a cleaning device is provided on the surface of the machine tool. The cleaning device includes two guide rails, the guide rails are fixedly connected to the surface of the machine tool, a slider is slidably connected to the surface of the guide rail, and a support plate is slidably connected to the surface of the slider, a cleaning brush is placed on the side of the two support plates close to each other, a baffle is fixedly connected to the side wall of the support plate, a screw is threadedly connected to the surface of the baffle, a circular groove is opened on the side wall of the cleaning brush, the size of the screw is matched with the size of the circular groove on the side wall of the cleaning brush, and a plurality of magnet blocks are fixedly connected to the surface of the cleaning brush.

[0004] When performing high-precision processing on glass wafers, high-precision CNC engraving processing equipment will be used, and high-precision glass wafer CNC engraving device is one of them. However, the existing high-precision glass wafer engraving equipment lacks a switchable structure for loading different types of wafers, and cannot adjust the wafer position in real time according to the required engraving method, which reduces the wafer processing. Utility Model Content

[0005] The utility model provides a high-precision glass wafer CNC engraving device, which aims to solve the problem that the existing high-precision glass wafer engraving equipment lacks a switchable structure for loading different types of wafers and cannot adjust the wafer position in real time according to the required engraving method, thereby reducing the problem of wafer processing.

[0006] The utility model is implemented as follows: a high-precision glass wafer CNC engraving device comprises a housing and a switching mechanism, wherein the top of the housing is bolted with an engraving head, the inner side of the housing is clamped with a loading tray, the inner side of the loading tray is bolted with a servo motor, the rear side of the inner side of the loading tray is bolted with a hydraulic rod, the top of the hydraulic rod is bolted with a chuck, and the switching mechanism is rotatably connected to the inner side of the chuck;

[0007] The switching mechanism includes a replacement wheel, a main ferrule and a secondary ferrule. The replacement wheel is clamped on the output end of the top of the servo motor. The surface of the replacement wheel is rotatably connected to the inner side of the chuck. The main ferrule is bolted to the front side of the top of the replacement wheel, the rear side of the top and both sides of the top, and the secondary ferrule is bolted to the inner side of the main ferrule.

[0008] In order to increase the stability of the connection structure between the servo motor and the replacement wheel, as a preferred high-precision glass wafer CNC engraving device of the utility model, the output end of the top of the servo motor is bolted with an auxiliary sleeve, and the top of the auxiliary sleeve is clamped with the bottom of the replacement wheel.

[0009] In order to increase the stability of the connection between the loading plate and the chuck, as a preferred high-precision glass wafer CNC engraving device of the utility model, a limiting ring plate is bolted to the inner side of the loading plate, and the top of the limiting ring plate contacts the bottom of the chuck.

[0010] In order to facilitate the removal of the loading tray, as a preferred high-precision glass wafer CNC engraving device of the utility model, a handle is bolted to the front side of the loading tray, and anti-slip patterns are engraved on the inner side of the handle.

[0011] In order to increase the airtightness of the connection between the loading tray and the casing, as a preferred high-precision glass wafer CNC engraving device of the utility model, the top and bottom of the front side of the loading tray are bolted with sealing gaskets, and the surface of the sealing gaskets is engraved with anti-slip patterns.

[0012] In order to increase the stability when the loading tray is connected to the casing, as a preferred high-precision glass wafer CNC engraving device of the utility model, guide grooves are opened on both sides of the loading tray, and the inner sides of the guide grooves are slidably connected to the inner sides of the casing.

[0013] In order to protect the surface of the chuck, as a preferred high-precision glass wafer CNC engraving device of the utility model, the surface of the chuck is provided with a protective ring, and the surface of the protective ring is engraved with guiding lines.

[0014] In order to protect the connection between the replacement wheel disc and the servo motor, as a preferred high-precision glass wafer CNC engraving device of the utility model, a protective cover is bolted to the top of the replacement wheel disc, and the top of the protective cover is set to an arc surface.

[0015] Compared with the prior art, the beneficial effects of the utility model are:

[0016] The high-precision glass wafer CNC engraving device is provided with a casing and a switching mechanism. The casing can cooperate with the engraving head to perform engraving processing on the glass wafers in the main ferrule and the auxiliary ferrule. The loading plate can cooperate with the servo motor to limit the replacement wheel and drive the replacement wheel to rotate, so that the replacement wheel can switch the glass wafers in the main ferrule and the auxiliary ferrule. The hydraulic rod can cooperate with the chuck to support and limit the replacement wheel, and the replacement wheel can be lifted after the glass wafer is processed to facilitate turning over the glass wafer. The main ferrule can cooperate with the auxiliary ferrule to limit glass wafers of different sizes respectively, thereby improving the flexibility of glass wafer engraving processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is the overall structure diagram of the high-precision glass wafer CNC engraving device of the utility model;

[0018] Figure 2 It is a schematic diagram of the connection between the loading disc and the chuck in the utility model;

[0019] Figure 3 It is a structural schematic diagram of the guide groove in the utility model;

[0020] Figure 4 It is a structural schematic diagram of the protective ring in the utility model;

[0021] Figure 5 It is a structural schematic diagram of the switching mechanism in the utility model.

[0022] In the figure, 1, housing; 2, engraving head; 3, loading plate; 4, servo motor; 5, hydraulic rod; 6, chuck; 7, switching mechanism; 701, replacement wheel; 702, main ferrule; 703, secondary ferrule; 8, auxiliary ferrule; 9, limit ring plate; 10, handle; 11, sealing gasket; 12, guide groove; 13, protective ring; 14, protective cover. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0024] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, in the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0025] See also Figure 1-5 The utility model provides a technical solution: a high-precision glass wafer CNC engraving device, comprising a housing 1 and a switching mechanism 7, a fine engraving head 2 is bolted to the top of the housing 1, a loading tray 3 is clamped to the inner side of the housing 1, a servo motor 4 is bolted to the inner side of the loading tray 3, a hydraulic rod 5 is bolted to the rear side of the inner side of the loading tray 3, a chuck 6 is bolted to the top of the hydraulic rod 5, and the switching mechanism 7 is rotatably connected to the inner side of the chuck 6;

[0026] The switching mechanism 7 includes a replacement wheel 701, a main ferrule 702 and a secondary ferrule 703. The replacement wheel 701 is clamped on the output end of the top of the servo motor 4. The surface of the replacement wheel 701 is rotatably connected to the inner side of the chuck 6. The main ferrule 702 is bolted to the front side of the top of the replacement wheel 701, the rear side of the top and both sides of the top. The secondary ferrule 703 is bolted to the inner side of the main ferrule 702.

[0027] In this embodiment: by setting the housing 1 and the switching mechanism 7, the housing 1 can cooperate with the precision engraving head 2 to perform precision engraving processing on the glass wafers in the main ferrule 702 and the auxiliary ferrule 703, the loading plate 3 can cooperate with the servo motor 4 to limit the replacement wheel 701, and can drive the replacement wheel 701 to rotate, so that the replacement wheel 701 can switch the glass wafers in the main ferrule 702 and the auxiliary ferrule 703, the hydraulic rod 5 can cooperate with the chuck 6 to support and limit the replacement wheel 701, and can lift the replacement wheel 701 after the glass wafer is processed to facilitate turning over the glass wafer, the main ferrule 702 can cooperate with the auxiliary ferrule 703 to limit glass wafers of different sizes respectively, thereby improving the flexibility of precision engraving processing of glass wafers.

[0028] As a technical optimization solution of the utility model, the output end at the top of the servo motor 4 is bolted with an auxiliary sleeve 8, and the top of the auxiliary sleeve 8 is clamped with the bottom of the replacement wheel 701.

[0029] In this embodiment: by providing an auxiliary sleeve 8, it can cooperate with the servo motor 4 to auxiliary reinforce the connection between the polytetrafluoroethylene pad area and the replacement wheel disc 701, further increasing the stability of the connection between the replacement wheel disc 701 and the servo motor 4.

[0030] As a technical optimization solution of the utility model, a limiting ring plate 9 is bolted to the inner side of the loading plate 3 , and the top of the limiting ring plate 9 contacts the bottom of the chuck 6 .

[0031] In this embodiment, by providing a limiting ring plate 9, it can cooperate with the loading tray 3 to further buffer the connection between the loading tray 3 and the chuck 6, thereby further increasing the stability of the loading tray 3 and the chuck 6 when in contact.

[0032] As a technical optimization solution of the present invention, a handle 10 is bolted to the front side of the loading tray 3 , and anti-slip patterns are engraved on the inner side of the handle 10 .

[0033] In this embodiment, the handle 10 is provided to cooperate with the loading tray 3 , so that the user can take out the loading tray 3 by pulling the handle 10 , which further increases the flexibility of the user in taking out the loading tray 3 .

[0034] As a technical optimization solution of the present invention, the top and bottom of the front side of the loading tray 3 are both bolted with sealing pads 11, and the surface of the sealing pads 11 is engraved with anti-slip patterns.

[0035] In this embodiment, by providing a sealing gasket 11, it can cooperate with the loading tray 3 to further seal the connection between the loading tray 3 and the housing 1, and the anti-slip texture can further increase the stability of the loading tray 3 after being connected to the housing 1.

[0036] As a technical optimization solution of the present invention, guide grooves 12 are provided on both sides of the loading tray 3 , and the inner sides of the guide grooves 12 are slidably connected to the inner sides of the housing 1 .

[0037] In this embodiment, by providing the guide groove 12, it can cooperate with the loading tray 3, and can guide the movement of the loading tray 3 when the loading tray 3 is connected to the casing 1, thereby further increasing the stability of the loading tray when it is loaded into the casing 1.

[0038] As a technical optimization solution of the present invention, a protective ring 13 is sleeved on the surface of the chuck 6 , and a guide pattern is engraved on the surface of the protective ring 13 .

[0039] In this embodiment: by providing a protection ring 13, it can cooperate with the chuck 6, and when the chuck 6 moves in the loading plate 3, the surface of the chuck 6 is protected, and the guiding lines can further increase the stability of the chuck 6 when it moves.

[0040] As a technical optimization solution of the present invention, a protective cover 14 is bolted to the top of the replacement wheel 701, and the top of the protective cover 14 is set as an arc surface.

[0041] In this embodiment: by providing a protective cover 14, it can cooperate with the replacement wheel disc 701 to protect the connection between the replacement wheel disc 701 and the servo motor 4, further increasing the safety of the replacement wheel disc 701 when in use.

[0042] Working principle: First, place the glass wafers of different sizes that need to be finely engraved into the main ferrule 702 and the auxiliary ferrule 703 respectively, the larger glass wafer is placed in the main ferrule 702, and the smaller wafer is placed in the auxiliary ferrule 703, and then place the loading tray 3 into the casing 1, and then energize and start the hydraulic rod 5, the hydraulic rod 5 will drive the chuck 6 to move the replacement wheel 701 downward until the bottom of the replacement wheel 701 contacts the servo motor 4, and then energize and start the servo motor 4, the servo motor 4 will drive the replacement wheel 701 to move the glass wafer to be processed to the fine engraving head 2, and then energize and start the fine engraving head 2, and the fine engraving head 2 will process the glass wafer.

[0043] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A high-precision glass wafer CNC engraving device, comprising a housing (1) and a switching mechanism (7), characterized in that: The top of the housing (1) is bolted with a precision engraving machine head (2), the inner side of the housing (1) is clamped with a loading tray (3), the inner side of the loading tray (3) is bolted with a servo motor (4), the rear side of the inner side of the loading tray (3) is bolted with a hydraulic rod (5), the top of the hydraulic rod (5) is bolted with a chuck (6), and the switching mechanism (7) is rotatably connected to the inner side of the chuck (6); The switching mechanism (7) includes a replacement wheel (701), a main ferrule (702) and a secondary ferrule (703), wherein the replacement wheel (701) is clamped on the output end of the top of the servo motor (4), the surface of the replacement wheel (701) is rotatably connected to the inner side of the chuck (6), the main ferrule (702) is bolted to the front side of the top of the replacement wheel (701), the rear side of the top and both sides of the top, and the secondary ferrule (703) is bolted to the inner side of the main ferrule (702).

2. A high-precision glass wafer CNC engraving device according to claim 1, characterized in that: An auxiliary sleeve (8) is bolted to the output end at the top of the servo motor (4), and the top of the auxiliary sleeve (8) is clamped to the bottom of the replacement wheel disc (701).

3. A high-precision glass wafer CNC engraving device according to claim 1, characterized in that: A limiting ring plate (9) is bolted to the inner side of the loading plate (3), and the top of the limiting ring plate (9) is in contact with the bottom of the chuck (6).

4. A high-precision glass wafer CNC engraving device according to claim 1, characterized in that: A handle (10) is bolted to the front side of the loading tray (3), and the inner side of the handle (10) is engraved with anti-slip patterns.

5. The high-precision glass wafer CNC engraving device according to claim 1, characterized in that: The top and bottom of the front side of the loading tray (3) are both bolted with sealing pads (11), and the surface of the sealing pads (11) is engraved with anti-slip patterns.

6. A high-precision glass wafer CNC engraving device according to claim 1, characterized in that: Guide grooves (12) are provided on both sides of the loading plate (3), and the inner sides of the guide grooves (12) are slidably connected to the inner sides of the casing (1).

7. A high-precision glass wafer CNC engraving device according to claim 1, characterized in that: A protective ring (13) is sleeved on the surface of the chuck (6), and a guiding pattern is engraved on the surface of the protective ring (13).

8. The high-precision glass wafer CNC engraving device according to claim 1, characterized in that: A protective cover (14) is bolted to the top of the replacement wheel disc (701), and the top of the protective cover (14) is designed to be a curved surface.

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