Automatic feeding and discharging system

Abstract

The utility model relates to an automatic feeding and discharging system which solves the problems that in the prior art, equipment occupies the ground space of a plant, the size of the equipment is large, cost is high, working efficiency is low, materials are prone to being collided, and the percent of pass is affected. The control mechanism is used for controlling the up-and-down material taking device to work, the up-and-down material taking device comprises a base and an up-and-down material taking mechanism arranged on the base, the up-and-down material taking mechanism comprises a lifting mechanism arranged on the base and a taking and placing mechanism arranged on the lifting mechanism, the base is provided with a moving guide assembly, and the moving guide assembly is arranged on the base. The moving guide assembly enables the base to move on the air track so that the positions of the upper material taking mechanism and the lower material taking mechanism can be changed, the lifting mechanism is used for enabling the taking and placing mechanism to descend for downward discharging and ascend for resetting or upward material taking, and the taking and placing mechanism is opened for discharging materials and tightened for grabbing materials.

Description

Technical Field

[0001] The utility model relates to the technical field of loading and unloading equipment, in particular to an automatic loading and unloading system. Background Art

[0002] In the process of making silicon wafers, the crystal rod is sent to the slicing equipment for slicing (called loading) or the sliced ​​crystal rod is taken out of the slicing equipment (called unloading or taking out, the so-called "material" is the crystal rod or the wafer still fixed on the wafer tray after slicing, collectively referred to as materials). There are usually two transportation modes: Mode 1, manual mode: the operator drives a special cart, grabs the crystal rod through the robot installed on the special cart, and manually controls the robot to load or unload (referred to as loading and unloading); Mode 2, automated mode: up and down taking out is achieved through automated means (such as unmanned carts, conveyor lines with robots and other automated equipment).

[0003] For the manual mode, due to the large individual differences in each operation, at least the operating efficiency and safety are difficult to guarantee, and fragments (i.e. chip breakage) often occur during the unloading process, affecting the chip qualification rate and being unfavorable to the mass production of products. In addition, the dedicated trolley occupies a large space, reducing the effective utilization rate of the factory, which is not conducive to the cost control of chip product production; the silicon mist generated after the crystal rod is cut affects the factory environment and has a certain adverse effect on the health of the operator.

[0004] For the automation mode, the mechanical structure of the conveyor line is complex, the equipment is large in size, and occupies a large amount of ground space on site. The automation equipment is expensive and difficult to maintain, and the automation equipment requires high control accuracy. This is not only not conducive to the control of chip product production costs, but also prone to failures in loading and unloading materials. It is necessary to stop the machine in time to check the problem, which affects production efficiency.

[0005] In addition, the existing means of up and down material removal are all for the lateral up and down material removal of the slicing equipment. When the material is removed horizontally, it is easy to bump into it, thereby affecting the chip qualification rate. Summary of the invention

[0006] The purpose of the utility model is to solve the above-mentioned problems existing in the prior art and to provide an automatic loading and unloading system, which promotes the movement of the base through the cooperation of the third power drive mechanism and the aerial track, and is used for longitudinally taking and placing materials to avoid damage of materials due to collisions. The track and the upper and lower material taking devices are all arranged above the slicing equipment to avoid occupying the floor space of the factory building, which is beneficial to improving the utilization rate of the factory building and avoiding interference with the operators. The corresponding mechanisms on the upper and lower material taking devices are automated through the various driving mechanisms, which is beneficial to not only improving work efficiency but also improving work accuracy.

[0007] The above technical purpose of the utility model is mainly solved by the following technical solutions: an automatic loading and unloading system, characterized in that it includes an aerial track, an upper and lower material picking device arranged on the aerial track, and a control mechanism for controlling the operation of the upper and lower material picking device. The upper and lower material picking device includes a base, an upper and lower material picking mechanism arranged on the base, the upper and lower material picking mechanism includes a lifting mechanism arranged on the base and a pick-and-place mechanism arranged on the lifting mechanism, a movable guide assembly is arranged on the base, and the movable guide assembly enables the base to move on the aerial track for changing the position of the upper and lower material picking mechanism, the lifting mechanism is used to make the pick-and-place mechanism descend for downward unloading, ascend for resetting or upward picking, and the pick-and-place mechanism is opened for releasing and tightened for grabbing.

[0008] The third power drive mechanism cooperates with the track to push the base to move, so that the upper and lower material taking devices are located above the slicing device to feed the crystal rod into the slicing device from top to bottom for slicing, or to take materials from the slicing device from bottom to top and push the base through the third power drive mechanism to move the materials to a suitable position.

[0009] Since the method of taking and placing materials vertically is adopted, the materials can be effectively prevented from being damaged by collisions during the taking and placing process. The tracks and the upper and lower material taking devices are all arranged above the slicing equipment to avoid occupying the floor space of the factory, which is beneficial to improving the utilization rate of the factory and avoiding interference with the operators. The corresponding mechanisms on the upper and lower material taking devices are automated through various driving mechanisms, which is not only beneficial to improving work efficiency, but also to improving work accuracy.

[0010] As a further improvement and supplement to the above technical solution, the utility model adopts the following technical measures:

[0011] Preferably, the aerial track is at least two tracks arranged at intervals, and a rack is provided on at least one of the aerial tracks. The movable guide assembly includes a guide member arranged at the bottom of the base, a third gear, a second reducer and a second power source. The third gear is meshed with the rack, and the second power source and the second reducer cooperate to drive the third gear to rotate and drive the base to move on the aerial track.

[0012] Preferably, an intermediate track is provided between two adjacent aerial tracks, an opening and closing door is provided in the intermediate track, an opening and closing assembly for opening or closing the opening and closing door is provided between the opening and closing door and the aerial track, the opening and closing assembly comprises an opening and closing door mounting seat and a supporting roller seat respectively installed under the two aerial tracks, a third power source is provided on the opening and closing door mounting seat, a transfer block is provided on one side of the opening and closing door, and a supporting roller is provided on the other side, the transfer block is connected to the power output shaft of the third power source, the supporting roller cooperates with the supporting roller seat, and the third power source enables the opening and closing door to move along the straight line direction of the opening and closing door mounting seat and the supporting roller seat to achieve the purpose of opening and closing the door. After the crystal rod is sliced, a proper amount of water is attached to the crystal rod, and the attached water drops on the intermediate track, which is received by the intermediate track to avoid dripping to the ground and polluting the ground or causing adverse effects on pedestrians on the ground.

[0013] Preferably, a water conducting hole is provided on the opening and closing door, and the lower end of the water conducting hole is used to connect a water conducting pipe to guide the dripping water received on the middle track. When the opening and closing door is closed, both ends of the opening and closing door are connected to the middle track, and the water received by the middle track flows to the opening and closing door and is guided out through the water conducting hole.

[0014] Preferably, a notch positioning block and a travel hard limit block are provided on the aerial track, and a second proximity switch is provided on the base. There are several notch positioning blocks, which are arranged along the length direction of the aerial track. The notch positioning block and the second proximity switch are used to position the base, and the travel hard limit blocks are provided at appropriate positions at both ends of the aerial track. The travel hard limit block is used to limit the upper and lower material taking devices, which is beneficial to improve work safety. The notch positioning block and the second proximity switch are used to accurately position the base at the appropriate position of the slicing device, which is convenient for upper and lower material taking.

[0015] Preferably, two sets of movable guide assemblies are respectively arranged on the base on opposite sides of the moving direction of the base, so as to enable the base to move back and forth along the aerial track. The movable guide assembly comprises a guide seat, a guide member arranged at the bottom of the guide seat, and a third power drive mechanism arranged on the guide seat. The guide seat extends outwardly from the outside of the base to avoid the upper and lower material taking mechanism. The third power drive mechanism is used to cooperate with the track to push the base to move, and the guide member is used to cooperate with the track for guidance.

[0016] Preferably, the upper and lower material taking mechanisms are in two groups, which are respectively arranged on opposite sides of the base and are arranged corresponding to the moving direction of the base. Arranging two groups of upper and lower material taking mechanisms on one base is conducive to improving the base utilization rate, so that facing the same number of slicing equipment, it is conducive to reducing the number of upper and lower material taking devices, which is conducive to controlling the cost of the upper and lower material taking devices, and further conducive to controlling the final cost of the wafer, and is also conducive to improving the working efficiency of upper and lower material taking, that is, one group of upper and lower material taking mechanisms on the same base is used to take materials from the slicing equipment, and after the base moves slightly, the other group of upper and lower material taking mechanisms can put materials into the slicing equipment.

[0017] Preferably, the lifting mechanism comprises at least a first-stage lifting frame, a first-stage driving mechanism for driving the first-stage lifting frame to move longitudinally, and a first-stage longitudinal guiding assembly is arranged between the first-stage lifting frame and the base, and the first-stage longitudinal guiding assembly is used to make the first-stage lifting frame move longitudinally and linearly. When the lifting mechanism is provided with only a first-stage lifting frame, the pick-and-place mechanism is arranged at the bottom of the first-stage lifting frame, and extends into the inner cavity of the slicing device through the downward movement of the first-stage lifting frame, and the material is taken or put out through the pick-and-place mechanism, and when the first-stage lifting frame moves downward, the pick-and-place mechanism leaves the inner cavity of the slicing device.

[0018] Preferably, the primary driving mechanism includes a first power source, a screw rod that cooperates with the first power source through a first reducer, and a screw nut arranged on the primary lifting frame. The first power source and the first reducer cooperate to drive the screw rod to rotate, and the screw rod cooperates with the screw nut to make the primary lifting frame rise or fall. The cooperation of the screw rod, the screw nut and the first reducer can accurately control the accuracy of the primary lifting frame moving up or down, so as to achieve the purpose of accurately taking and placing materials.

[0019] Preferably, in order to further improve control accuracy and safety and avoid displacement deviation under the action of inertia, a limit structure and a limit control switch are arranged between the first-level lifting frame and the base, the limit structure includes an upper limit block and / or a lower limit block arranged in an upper and lower manner on the base, and a limit baffle plate arranged on the first-level lifting frame, the upper end of the first-level lifting frame cooperates with the upper limit block for limiting, and the limit baffle plate cooperates with the lower limit block for limiting, and the limit control switch includes a first proximity switch and a first sensor plate selectively arranged on the base and the first-level lifting frame, and the proximity switch and the proximity switch sensor plate cooperate for soft lifting limit.

[0020] Preferably, the lifting mechanism further comprises a secondary lifting frame arranged on the primary lifting frame, a secondary longitudinal guide assembly arranged between the secondary lifting frame and the primary lifting frame, and a linkage mechanism for making the secondary lifting frame move longitudinally. The secondary longitudinal guide assembly is used to make the secondary lifting frame move longitudinally and linearly, and the linkage mechanism makes the secondary lifting frame perform applicable lifting actions along with the lifting actions of the primary lifting frame. The setting of the secondary lifting frame is conducive to reducing the length of the lifting mechanism in the stacked state, thereby reducing the height of the base, reducing the overall height of the upper and lower material taking devices, and thus reducing the overall volume, which is conducive to saving occupied space and preparation costs.

[0021] Preferably, the linkage mechanism includes a chain and a sprocket wheel meshed with the chain, the sprocket wheel is fixed to the primary lifting frame, one end of the chain is fixed to the base, and the other end is fixed to the secondary lifting frame, and as the primary lifting frame moves, the chain drives the secondary lifting frame to move synchronously. The sprocket wheel in this technical solution plays the role of a fixed pulley, and the primary lifting frame moves down or up, driving the sprocket wheel to move down or up, so that the secondary lifting frame moves down or up, and the moving speed of the secondary lifting frame is twice that of the primary lifting frame, which is further conducive to improving the upper and lower material taking efficiency of the upper and lower material taking device.

[0022] Preferably, the linkage mechanism further comprises a chain adjustment seat arranged on the base or the secondary lifting frame, the corresponding end of the chain is fixed on the chain adjustment seat, and the chain adjustment seat is used to adjust the length of the chain.

[0023] Preferably, the pick-and-place mechanism includes a pick-and-place seat arranged at the bottom of the lifting mechanism, a pick-and-place member arranged on the pick-and-place seat, a second power drive mechanism for driving the pick-and-place member to grab or release materials, and a linear guide assembly for guiding the movement of the pick-and-place member.

[0024] The utility model has the following beneficial effects: 1. The upper and lower material taking device is located above the slicing device, and feeds the crystal rod into the slicing device from top to bottom for slicing, or takes the material from the slicing device from bottom to top, which is conducive to reducing the possibility of material collision. 2. The upper and lower material taking device is used in conjunction with the track arranged above the slicing device, and the base is pushed to move through the third power drive mechanism and the track, so that the upper and lower material taking device is located above the slicing device for upper and lower material taking, or the base is pushed to move the material to a suitable position. 3. The linkage mechanism of the "fixed pulley" mode is adopted to make the secondary lifting frame move synchronously with the primary lifting frame, and the moving speed of the secondary lifting frame is twice the moving speed of the primary lifting frame, which is further conducive to improving the upper and lower material taking efficiency of the upper and lower material taking device. 4. The upper and lower material taking mechanism is divided into two groups, which are respectively arranged on the opposite sides of the base, and are arranged corresponding to the moving direction of the base, which is conducive to improving the efficiency of upper and lower material taking. 5. In order to improve the precision of the upper and lower material taking device to control the upper and lower material taking and improve the safety and reliability of work, a variety of hard limit and soft limit modes are set. 6. It is helpful to improve the efficiency of loading and unloading materials, and to reduce labor costs and wafer production and processing costs. 7. The water attached to the crystal rod after slicing is received through the middle track to avoid polluting the environment or causing pedestrians to slip and fall, and is discharged through the water guide hole on the opening and closing door. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a structural schematic diagram of the utility model.

[0026] Figure 2 It is a structural schematic diagram of the utility model from another viewing angle.

[0027] Figure 3 yes Figure 2 Schematic diagram of the structure viewed from above.

[0028] Figure 4 It is a structural schematic diagram of the cooperation between the opening and closing door and the opening and closing assembly involved in the utility model.

[0029] Figure 5 It is a structural schematic diagram of an embodiment of the utility model.

[0030] Figure 6 It is a structural schematic diagram of another embodiment of the utility model.

[0031] Figure 7 yes Figure 6 Schematic diagram of the top view structure.

[0032] Figure 8 yes Figure 6 A structural schematic diagram after the first-level lifting mechanism and the second-level lifting mechanism are both moved downward.

[0033] Fig. 9 yes Figure 8 A schematic diagram of the structure from another perspective.

[0034] Fig.10 It is a structural diagram that hides a set of lifting mechanisms.

[0035] Fig.11 It is a cross-sectional structural schematic diagram cut along the plane where the axis of the pick-and-place mechanism is located.

[0036] In the figure: 1, base; 2, first-stage lifting frame; 3, first power source; 4, first reducer; 5, lead screw; 6, lead screw nut; 7, upper limit stopper; 8, lower limit stopper; 9, limit baffle; 10, first proximity switch fixing seat; 11, first induction plate; 12, second-stage lifting frame; 13, chain; 14, chain wheel; 15, chain adjustment seat; 16, pick-and-place seat; 17, guide seat; 18, guide member; 19, third gear; 20, second reducer; 21, second power source; 22, second proximity switch fixing seat; 23, lifting drive mounting seat; 24, bearing inner fixing plate; 25, second bearing; 26, shaft stopper; 27, first linear guide rail assembly ; 28. Second linear guide rail group; 29. ​​Pick-up and placement member; 30. Third linear guide rail group; 31. Grab plate moving seat; 32. Grab drive fixed seat; 33. Trapezoidal screw; 34. Fourth bearing; 35. First gear; 36. Third power source; 37. Second gear; 38. Limit end plate; 39. Chain fixed seat; 40. Aerial track; 41. Rack; 42. Opening and closing door; 43. Third power source; 44. Opening and closing door mounting seat; 45. Support roller seat; 46. Adapter block; 47. Support roller; 48. Water guide hole; 49. Notch positioning block; 50. Travel hard limit block; 51. Control mechanism; 52. Slicing equipment; 53. Upper and lower material taking device. DETAILED DESCRIPTION

[0037] The technical solution of the utility model is further specifically described below through embodiments and in conjunction with the accompanying drawings.

[0038] Example 1: Figure 1 and Fig.11As shown, an automatic loading and unloading system includes an aerial track 40, an upper and lower material-collecting device 53 arranged on the aerial track 40, and a control mechanism 51 for controlling the operation of the upper and lower material-collecting device. The upper and lower material-collecting device includes a base, an upper and lower material-collecting mechanism arranged on the base, and the upper and lower material-collecting mechanism includes a lifting mechanism arranged on the base and a pick-up and drop mechanism arranged on the lifting mechanism. A movable guide assembly is arranged on the base, and the movable guide assembly enables the base to move on the aerial track 40 to change the position of the upper and lower material-collecting mechanism. The lifting mechanism is used to make the pick-up and drop mechanism descend for downward material discharge, ascend for resetting or upward material collection, and the pick-up and drop mechanism is opened for material discharge and tightened for material grabbing. Among them, the control mechanism 51 automatically receives and processes each limit signal and controls the operation of each power source to realize automatic control of the operation of the upper and lower material-collecting device 53.

[0039] The third power drive mechanism cooperates with the track to push the base to move, so that the upper and lower material taking devices are located above the slicing device 52 to feed the crystal rod into the slicing device 52 from top to bottom for slicing, or to take materials from the slicing device 52 from bottom to top and push the base through the third power drive mechanism to move the materials to a suitable position.

[0040] Since the method of taking and placing materials vertically is adopted, the materials can be effectively prevented from being damaged by collisions during the taking and placing process. The tracks and the upper and lower material taking devices are all arranged above the slicing equipment 52 to avoid occupying the floor space of the factory building, which is beneficial to improving the utilization rate of the factory building and avoiding interference with the operators. The corresponding mechanisms on the upper and lower material taking devices are automated through various driving mechanisms, which is not only beneficial to improving work efficiency, but also to improving work accuracy.

[0041] In actual applications, the automatic loading and unloading system is generally adapted to twelve slicing devices 52, and the twelve slicing devices 52 are arranged in a straight line. An appropriate number of slicing devices 52 can also be adapted according to the actual size of the factory.

[0042] In practical applications, the aerial track 40 can be suspended on the upper part of a factory building, or can be positioned above the slicing equipment 52 via a supporting stand.

[0043] Preferably, the aerial track 40 is at least two tracks arranged at intervals, and a rack 41 is provided on at least one of the aerial tracks 40. The movable guide assembly includes a guide member arranged at the bottom of the base, a third gear, a second reducer and a second power source. The third gear is meshed with the rack 41, and the second power source and the second reducer cooperate to drive the third gear to rotate and drive the base to move on the aerial track 40.

[0044] Preferably, an intermediate track is arranged between two adjacent aerial tracks 40, an opening and closing door 42 is arranged in the intermediate track, an opening and closing assembly for opening or closing the opening and closing door 42 is arranged between the opening and closing door 42 and the aerial track 40, the opening and closing assembly comprises an opening and closing door mounting seat 44 and a supporting roller seat 45 respectively installed under the two aerial tracks 40, a third power source 43 arranged on the opening and closing door mounting seat 44, an adapter block 46 is arranged on one side of the opening and closing door 42, and a supporting roller 47 is arranged on the other side, the adapter block 46 is connected to the power output shaft of the third power source 43, the supporting roller 47 cooperates with the supporting roller seat 45, and the third power source 43 enables the opening and closing door 42 to move along the straight line direction of the opening and closing door mounting seat 44 and the supporting roller seat 45 to achieve the purpose of opening and closing the door. After the crystal rod is sliced, a proper amount of water is attached to the crystal rod. The attached water drops onto the middle track and is received by the middle track to prevent it from dripping onto the ground and polluting the ground or causing adverse effects on pedestrians on the ground.

[0045] Preferably, a water conducting hole is provided on the opening and closing door 42, and the lower end of the water conducting hole 48 is used to connect a water conducting pipe to guide the dripping water received on the middle track. When the opening and closing door 42 is closed, both ends of the opening and closing door 42 are connected to the middle track, and the water received by the middle track flows to the opening and closing door 42 and is guided out through the water conducting hole.

[0046] Preferably, a notch positioning block 49 and a travel hard limit block 50 are provided on the aerial track 40, and a second proximity switch is provided on the base. The notch positioning block 49 is a plurality of notch positioning blocks 49 arranged along the length direction of the aerial track 40. The notch positioning block 49 cooperates with the second proximity switch to position the base, and the travel hard limit block 50 is provided at appropriate positions at both ends of the aerial track 40. The travel hard limit block 50 is used to limit the upper and lower material taking devices, which is beneficial to improve work safety. The notch positioning block 49 and the second proximity switch cooperate to accurately position the base at the appropriate position of the slicing device, which is convenient for upper and lower material taking.

[0047] In this embodiment, the upper and lower material taking mechanisms are a group and are arranged on one side of the base 1.

[0048] In actual application, two sets of moving guide components are respectively arranged on the base 1 on opposite sides of the moving direction of the base 1, so as to enable the base 1 to move back and forth along the aerial track. The moving guide component includes a guide seat 17, a guide member 18 arranged at the bottom of the guide seat 17, and a third power drive mechanism arranged on the guide seat 17. The guide seat 17 extends outwardly from the outside of the base 1 to avoid the upper and lower material taking mechanism. The third power drive mechanism is used to cooperate with the track to push the base 1 to move, and the guide member 18 is used to cooperate with the track for guidance.

[0049] In practical applications, the mobile guide assembly is a walking linear guide group, which includes a slider (i.e., a guide member 18), a third gear 19 (the third gear is a helical gear, which is meshed with a rack arranged on an aerial track above the slicing device to drive the base 1 to move), a second reducer 20 and a second power source 21 (a motor in this embodiment), the slider is installed under the guide seat 17 by screws, the helical gear is installed on the fixed seat, and the fixed seat is installed on the outer side of the guide seat 17 by screws, the second reducer 20 is installed in the fixed seat by a set screw, the set screw is installed in the threaded hole of the fixed seat and supports the second reducer 20, the second power source 21 is installed on the second reducer 20 by screws, the helical gear is installed on the lower part of the second reducer 20 by a key, the fixed plate is installed on the lower part of the helical gear by screws and supports the helical gear, the second proximity switch fixed seat 22 is installed on the side of the guide seat 17 by screws, and the second proximity switch is installed on the second proximity switch fixed seat 22.

[0050] In actual application, the picking and placing mechanism includes a picking and placing seat 16 arranged at the bottom of the lifting mechanism, a picking and placing member 29 arranged on the picking and placing seat 16, a second power drive mechanism for driving the picking and placing member 29 to grab materials or release materials, and a linear guide component for guiding the movement of the picking and placing member 29.

[0051] In actual application, the third linear guide rail group 30 is arranged inside the pick-and-place seat 16 and is installed on the pick-and-place seat 16 by screws, the grab plate moving seat 31 is installed on the third linear guide rail group 30 by screws, the pick-and-place member 29 (or the grab plate) is installed on the grab plate moving seat 31 by screws, the grab drive fixed seat 32 is installed on the pick-and-place seat 16 by screws, the fourth bearing 34 is assembled in the grab drive fixed seat 32, the reverse trapezoidal lead screws 3333 at both ends are inserted into the shaft hole of the fourth bearing 34, the first gear 35 is installed on the reverse trapezoidal lead screws 33 at both ends by keys, and supports the fourth bearing 34, the round nuts are installed on the reverse trapezoidal lead screws 33 at both ends, and fixedly support the fourth bearing 34 and the first gear 35. A gear 35, a driving fixed seat is installed on the grabbing driving fixed seat 32 by screws, a third power source 36 is installed on the driving fixed seat by screws, a second gear 37 is meshed with the first gear 35, and is installed on the third power source 36 by a key, a second gear 37 fixing baffle is installed on the third power source 36 and supports the second gear 37, a limiting end plate 38 is installed on the reverse trapezoidal lead screw 33 at both ends by screws, a trapezoidal lead screw 33 nut and a reverse threaded trapezoidal lead screw 33 nut are installed on the reverse trapezoidal lead screw 33 at both ends by matching, a trapezoidal lead screw 33 nut is installed on the grab plate moving seat 31 by screws, and a reverse threaded trapezoidal lead screw 33 nut is installed on the other side grab plate moving seat 31 by screws.

[0052] During operation, the third power source drives the meshed first gear 35 and the second gear 37 to rotate, driving the opposite trapezoidal lead screws 33 at both ends to rotate. Since the threads at both ends are in opposite directions, the grab plate moving seat 31 can be driven to move inward or outward at the same time to achieve the clamping and loosening operation of the grab plate. This grab plate structure can be adjusted accordingly according to the bar material structure interface to adapt to the material collection of different materials.

[0053] Example 2: Figure 6-Figure 11 As shown, the difference from Example 1 is that two sets of upper and lower material taking mechanisms are provided, which are respectively provided on opposite sides of the base 1 and are provided corresponding to the moving direction of the base 1. The two sets of upper and lower material taking mechanisms provided on one base 1 are conducive to improving the utilization rate of the base 1, so that when facing the same number of slicing devices, the number of upper and lower material taking devices is reduced, the cost of the upper and lower material taking devices is controlled, and the final cost of the wafer is controlled. It is also conducive to improving the working efficiency of upper and lower material taking, that is, one set of upper and lower material taking mechanisms on the same base 1 is used to take materials from the slicing device, and after the base 1 is slightly moved, the other set of upper and lower material taking mechanisms can put materials into the slicing device.

[0054] Embodiment 3: Based on Embodiment 1 and Embodiment 2, the lifting mechanism is further optimized. In this embodiment, the lifting mechanism includes a primary lifting frame 2, a primary driving mechanism driving the primary lifting frame 2 to move longitudinally, and a primary longitudinal guide assembly is arranged between the primary lifting frame 2 and the base 1, and the primary longitudinal guide assembly is used to make the primary lifting frame 2 move longitudinally and linearly. The pick-and-place mechanism is arranged at the bottom of the primary lifting frame 2, and extends into the inner cavity of the slicing device through the downward movement of the primary lifting frame 2, and the material is picked up or put down through the pick-and-place mechanism. When the primary lifting frame 2 moves downward, the pick-and-place mechanism leaves the inner cavity of the slicing device.

[0055] The primary driving mechanism includes a first power source 3, a screw rod 5 that cooperates with the first power source 3 through a first reducer 4, and a screw nut 6 provided on the primary lifting frame 2. The first power source 3 and the first reducer 4 cooperate to drive the screw rod 5 to rotate, and the screw rod 5 cooperates with the screw nut 6 to make the primary lifting frame 2 rise or fall. The cooperation of the screw rod 5, the screw nut 6 and the first reducer 4 can accurately control the accuracy of the primary lifting frame 2 moving up or down, so as to achieve the purpose of accurately taking and placing materials.

[0056] In order to further improve the control accuracy and safety, and avoid displacement deviation under the action of inertia, a limit structure and a limit control switch are set between the first-level lifting frame 2 and the base 1. The limit structure includes an upper limit stopper 7 and / or a lower limit stopper 8 arranged on the base 1 in an up-down manner, and a limit baffle 9 arranged on the first-level lifting frame 2. The upper end of the first-level lifting frame 2 cooperates with the upper limit stopper 7 for limiting, and the limit baffle 9 cooperates with the lower limit stopper 8 for limiting. The limit control switch includes a first proximity switch and a first induction plate 11, which are selectively set on the base 1 and the first-level lifting frame 2. The proximity switch and the proximity switch induction plate are used for soft lifting limit. That is, the first proximity switch fixing seat 10 is installed on the base 1 by screws, the first proximity switch is set on the first proximity switch fixing seat 10, and the first induction plate 11 is set on the first-level lifting frame 2. The first induction plate 11 cooperates with the first proximity switch to perform soft limit on the first-level lifting frame 2.

[0057] In actual application, the first power source 3 is installed on the first reducer 4 by screws, the lead screw 5 (which can be a ball screw or a trapezoidal lead screw 33) is installed at the lower part of the first reducer 4, the first reducer 4 is installed on the lifting drive mounting seat 23 by screws, the lifting drive mounting seat 23 is fixed at a suitable position on the top of the base 1 by screws, the bearing inner fixing plate 24 is assembled in the lifting drive mounting seat 23, the second bearing 25 is assembled between the bearing inner fixing plate 24 and the lead screw, the shaft stop 26 of the second bearing 25 is installed outside the lead screw below the second bearing 25, and the third bearing is installed inside the lifting drive mounting seat 23 outside the lead screw and below the shaft stop 26 of the second bearing 25.

[0058] In actual application, the first-level longitudinal guide assembly includes a first linear guide rail group 27 longitudinally fixed on the base 1, and a first guide structure arranged on the first-level lifting frame 2. The first guide structure cooperates with the first linear guide rail group 27 to enable the first-level lifting frame 2 to move longitudinally. The guide block is fixed to the first-level lifting frame by screws.

[0059] Example 4: Figure 6-Figure 11As shown, the difference from Example 3 is that the lifting mechanism further includes a secondary lifting frame 12 arranged on the primary lifting frame 2, a secondary longitudinal guide assembly arranged between the secondary lifting frame 12 and the primary lifting frame 2, and a linkage mechanism for making the secondary lifting frame 12 move longitudinally. The secondary longitudinal guide assembly is used to make the secondary lifting frame 12 move longitudinally and linearly, and the linkage mechanism makes the secondary lifting frame 12 perform an applicable lifting action along with the lifting action of the primary lifting frame 2. The setting of the secondary lifting frame 12 is conducive to reducing the length of the lifting mechanism in the stacked state under the premise of ensuring that the total lifting length remains unchanged, thereby reducing the height of the base 1, reducing the overall height of the upper and lower material taking devices, thereby reducing the overall volume, and saving occupied space and preparation costs.

[0060] In actual application, the secondary longitudinal guide assembly includes a second linear guide rail group 28 installed on the primary lifting frame 2 by screws. The secondary lifting frame is provided with a second guide structure, and the second guide structure cooperates with the second linear guide rail group 28 to enable the secondary lifting frame 12 to move longitudinally and linearly.

[0061] In practical applications, the linkage mechanism includes a chain 13 and a sprocket wheel 14 meshing with the chain 13, the sprocket wheel 14 is fixed on the primary lifting frame 2, one end (i.e., the fixed end) of the chain 13 is fixed on the chain fixing seat 39 on the base 1, and the other end (i.e., the adjusting end) is fixed on the secondary lifting frame 12, and as the primary lifting frame 2 moves, the chain 13 drives the secondary lifting frame 12 to move synchronously. The sprocket wheel 14 in this technical solution achieves the role of a fixed pulley, and the primary lifting frame 2 moves down or up, driving the sprocket wheel 14 to move down or up, so that the secondary lifting frame 12 moves down or up, and the moving speed of the secondary lifting frame 12 is twice that of the moving speed of the primary lifting frame 2, which is further conducive to improving the efficiency of the upper and lower material taking device.

[0062] In practical applications, the linkage mechanism further includes a chain adjustment seat 15 disposed on the base 1 or the secondary lifting frame 12 , and the corresponding end of the chain 13 is fixed on the chain adjustment seat 15 , and the chain adjustment seat 15 is used to adjust the length of the chain 13 .

[0063] In actual application, the sprocket wheel 14 shaft is clamped in the sprocket wheel 14 fixing seat by screws, the first bearing is assembled on the outside of the sprocket wheel 14 shaft, the shaft is installed on the outside of the sprocket wheel 14 shaft with an elastic retaining ring, the sprocket wheel 14 is installed outside the first bearing, the hole is installed in the sprocket wheel 14 with an elastic retaining ring, the chain fixing seat 39 is installed on the base 1 by screws, the fixed end of the chain 13 is installed on the chain fixing seat 39, the adjusting end of the chain is installed on the chain adjusting seat 15 after passing through the sprocket wheel 14, the chain adjusting seat 15 is installed on the secondary lifting frame 12, the upper and lower parts of the chain adjusting seat 15 are clamped by nuts, and the chain tightness can be adjusted.

[0064] In practical applications, the technical solution involved in the utility model is not limited to the field of silicon wafer processing, but is also applicable to other fields that require loading and unloading of materials.

[0065] The above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. In the above embodiments, the utility model can have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. An automatic loading and unloading system, characterized in that The invention comprises an aerial track (40), an upper and lower material taking device arranged on the aerial track (40), and a control mechanism (51) for controlling the operation of the upper and lower material taking device. The upper and lower material taking device comprises a base (1), an upper and lower material taking mechanism arranged on the base (1), the upper and lower material taking mechanism comprises a lifting mechanism arranged on the base (1) and a pick-up and put mechanism arranged on the lifting mechanism. A movable guide component is arranged on the base (1), and the movable guide component enables the base (1) to move on the aerial track (40) to change the position of the upper and lower material taking mechanism. The lifting mechanism is used to make the pick-up and put mechanism descend for downward material feeding, ascend for resetting or upward material feeding, and the pick-up and put mechanism is opened for material feeding and tightened for material grabbing.

2. The automatic loading and unloading system according to claim 1 is characterized in that The aerial track (40) is at least two tracks arranged at intervals, and a rack (41) is arranged on at least one of the aerial tracks (40). The movable guide assembly comprises a guide member (18) arranged at the bottom of the base (1), a third gear (19), a second reducer (20) and a second power source (21). The third gear (19) is meshed with the rack (41), and the second power source (21) and the second reducer (20) cooperate to drive the third gear (19) to rotate and drive the base (1) to move on the aerial track (40).

3. The automatic loading and unloading system according to claim 2 is characterized in that An intermediate track is arranged between two adjacent aerial tracks (40), an opening and closing door (42) is arranged in the intermediate track, an opening and closing assembly for opening or closing the opening and closing door (42) is arranged between the opening and closing door (42) and the aerial track (40), the opening and closing assembly comprising an opening and closing door mounting seat (44) and a supporting roller seat (45) respectively mounted below the two aerial tracks (40), a third power source (43) arranged on the opening and closing door mounting seat (44), a transfer block (46) being arranged on one side of the opening and closing door and a supporting roller (47) being arranged on the other side, the transfer block (46) being connected to a power output shaft of the third power source (43), the supporting roller (47) being matched with the supporting roller seat (45), the third power source (43) enabling the opening and closing door (42) to move along the straight line direction of the opening and closing door mounting seat (44) and the supporting roller seat (45) to achieve the purpose of opening and closing the door.

4. The automatic loading and unloading system according to claim 3 is characterized in that A water conducting through hole (48) is provided on the opening and closing door, and the lower end of the water conducting through hole (48) is used to connect a water conducting pipe for conducting dripping water received on the middle track.

5. The automatic loading and unloading system according to claim 1 is characterized in that A notch positioning block (49) and a travel hard limit block (50) are arranged on the aerial track (40), and a second proximity switch is arranged on the base (1). The notch positioning blocks (49) are multiple and are arranged along the length direction of the aerial track (40). The notch positioning blocks (49) cooperate with the second proximity switch to position the base (1), and the travel hard limit blocks (50) are arranged at appropriate positions at both ends of the aerial track (40).

6. The automatic loading and unloading system according to claim 1 is characterized in that Two groups of movable guide components are respectively arranged on the base (1) on opposite sides of the moving direction of the base (1), and are used to make the base (1) move back and forth along the aerial track (40). The movable guide components include a guide seat (17), a guide member (18) arranged at the bottom of the guide seat (17), and a third power drive mechanism arranged on the guide seat (17). The guide seat (17) extends outward from the outside of the base (1) to avoid the upper and lower material taking mechanism. The third power drive mechanism is used to cooperate with the aerial track (40) to push the base (1) to move, and the guide member (18) is used to cooperate with the aerial track (40) for guidance.

7. The automated loading and unloading system according to any one of claims 1 to 6, characterized in that The upper and lower material taking mechanisms are in two groups, which are respectively arranged on opposite sides of the base (1) and are arranged corresponding to the moving direction of the base (1); the lifting mechanism comprises at least a first-level lifting frame (2), a first-level driving mechanism for driving the first-level lifting frame (2) to move longitudinally, and a first-level longitudinal guide component is arranged between the first-level lifting frame (2) and the base (1), and the first-level longitudinal guide component is used to make the first-level lifting frame (2) move longitudinally in a straight line.

8. The automatic loading and unloading system according to claim 7 is characterized in that The primary driving mechanism comprises a first power source (3), a screw rod (5) cooperating with the first power source (3) through a first reducer (4), and a screw rod nut (6) arranged on the primary lifting frame (2); the first power source (3) and the first reducer (4) cooperate to drive the screw rod (5) to rotate, and the screw rod (5) cooperates with the screw rod nut (6) to make the primary lifting frame (2) rise or fall.

9. The automatic loading and unloading system according to claim 8, characterized in that The lifting mechanism further comprises a secondary lifting frame (12) arranged on the primary lifting frame (2), a secondary longitudinal guide assembly arranged between the secondary lifting frame (12) and the primary lifting frame (2), and a linkage mechanism for enabling the secondary lifting frame (12) to move longitudinally. The secondary longitudinal guide assembly is used to enable the secondary lifting frame (12) to move longitudinally in a straight line, and the linkage mechanism enables the secondary lifting frame (12) to perform an applicable lifting action following the lifting action of the primary lifting frame (2).

10. The automatic loading and unloading system according to claim 7, characterized in that The pick-and-place mechanism comprises a pick-and-place seat (16) arranged at the bottom of the lifting mechanism, a pick-and-place member (29) arranged on the pick-and-place seat (16), a second power drive mechanism for driving the pick-and-place member (29) to grab or release materials, and a linear guide component for guiding the movement of the pick-and-place member (29).

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