Gallium boat internal reaction structure

Abstract

The utility model relates to the technical field of hydride vapor phase epitaxy reaction equipment, in particular to an internal reaction structure of a gallium boat. According to the technical scheme, the device comprises a shell located in a gallium boat and used for reacting hydrogen chloride with metal gallium, the inner wall of the shell is fixedly connected with an upper partition plate, and the bottom of the upper partition plate is connected with a plurality of sets of vertical partition plates; a gas pipeline penetrating through the shell is mounted in the shell, the gas pipeline is divided into two sections, the upper section of the gas pipeline is connected with the top of the upper partition plate, and the lower section of the gas pipeline penetrates through the bottom of the upper partition plate and the bottom of the shell; a second through hole penetrating through the upper partition plate is formed in the upper partition plate, a cavity is further formed in the inner wall of the upper partition plate, and a first through hole is formed in the bottom of the upper partition plate. According to the utility model, a circuitous path is formed, and a gas reaction path is increased, so that the reaction time of hydrogen chloride and metal gallium is prolonged, full reaction is realized, waste of reaction gas is avoided, and the reaction effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of hydride vapor phase epitaxial reaction equipment, in particular to an internal reaction structure of a gallium boat. Background Art

[0002] Hydride vapor phase epitaxy equipment is a compound growth process equipment, which is mainly used to epitaxially grow a thick film or crystal such as GaAs, GaN, etc. on the substrate surface through hydride gases such as H2, HCl, etc. in a high temperature environment. The reaction principle inside the gallium boat is shown in the figure of the specification. Figure 6 As shown, in the equipment reaction, there is a problem that due to the intake of hydrogen chloride gas inside the gallium boat, the outlet of gaseous gallium chloride after the reaction is in the same space and the distance is relatively close, so it is easy for the hydrogen chloride gas to directly enter the bottom growth area from the outlet before it completely reacts with the liquid metal gallium, resulting in waste of reaction gas. Due to incomplete reaction, the efficiency of gallium chloride synthesis is uncontrollable, resulting in unstable and uncontrollable process. In view of the above reasons, the present application proposes a gallium boat internal reaction structure that increases the path for hydrogen chloride gas to flow in a limited space, that is, increases the contact reaction time between hydrogen chloride gas and metal gallium. Summary of the invention

[0003] The utility model aims to solve the problems existing in the background technology and proposes an internal reaction structure of a gallium boat which increases the path through which hydrogen chloride gas flows in a limited space, that is, increases the contact reaction time between hydrogen chloride gas and metal gallium.

[0004] The technical solution of the utility model: a gallium boat internal reaction structure, comprising a shell located in the gallium boat for the reaction of hydrogen chloride and metal gallium, wherein the inner wall of the shell is fixedly connected to an upper partition, and the bottom of the upper partition is connected to multiple groups of vertical partitions;

[0005] A gas pipeline is installed in the shell and passes through it. The gas pipeline is divided into two sections. The upper section of the gas pipeline is connected to the top of the upper partition, and the lower section of the gas pipeline passes through the bottom of the upper partition and the bottom of the shell.

[0006] The upper partition is provided with a second through hole penetrating therethrough, the inner wall of the upper partition is further provided with a cavity, and the bottom of the upper partition is provided with a first through hole.

[0007] Optionally, a side panel wall of the vertical partition is fixedly connected to the inner wall of the shell.

[0008] Optionally, there is a gap between the bottom of the vertical partition and the plate surface and the bottom inner wall of the shell.

[0009] Optionally, a through hole three for the outflow of metal gallium and hydrogen chloride is opened on one side of the gas pipeline in the upper section.

[0010] Optionally, the top of the gas pipeline in the lower section passes through the bottom of the upper partition and does not contact the top inner wall of the cavity.

[0011] Optionally, the upper partition divides the internal reaction space of the shell into a circulation chamber and a reaction chamber, and the second through hole is used to penetrate the reaction chamber and the circulation chamber.

[0012] Compared with the prior art, the utility model has the following beneficial technical effects:

[0013] The utility model first introduces liquid metal gallium into the reaction chamber, fully disperses the liquid metal gallium in the reaction chamber, and then passes gaseous hydrogen chloride through the reaction chamber from the gas pipeline. Due to the arrangement of multiple groups of vertical partitions, the flow path of hydrogen chloride is increased to form a circuitous path, thereby increasing the reaction time of hydrogen chloride and liquid metal gallium and avoiding gas waste.

[0014] Furthermore, a gap is set between the bottom of the vertical partition and the inner wall of the shell, so that the liquid metal gallium can be fully dispersed and circulated on the bottom inner wall of the shell. At the same time, the metal gallium will solidify after shutdown. The gap setting at the bottom is conducive to stress release during solidification, protecting the internal quartz structure from cracking and extending the service life of the equipment.

[0015] In summary, the utility model forms a circuitous path, increases the reaction path of the gas, thereby increasing the reaction time of hydrogen chloride and metal gallium, allowing for a full reaction, avoiding waste of reaction gas, and improving the reaction effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Provide a front view schematic diagram of the utility model;

[0017] Figure 2 Given Figure 1 Schematic diagram of the cross-section structure at AA in the middle;

[0018] Figure 3 Give a schematic diagram of gas flow;

[0019] Figure 4 Given Figure 1 Schematic diagram of the cross-section structure at CC;

[0020] Figure 5 Given Figure 1 Schematic diagram of the cross-section structure at BB in the middle;

[0021] Figure 6 A schematic diagram of the existing gas flow is given.

[0022] Reference numerals:

[0023] 1. Shell; 11. Flow chamber; 12. Reaction chamber;

[0024] 2. upper partition; 21. through hole 1; 22. cavity; 23. through hole 2;

[0025] 3. Vertical partitions;

[0026] 4. Gas pipeline; 41. Through hole three. DETAILED DESCRIPTION

[0027] The technical solution of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all of the embodiments.

[0028] The components of the embodiments of the present disclosure generally described and shown in the drawings herein may be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of the present disclosure provided in the drawings is not intended to limit the scope of the present disclosure claimed, but merely represents selected embodiments of the present disclosure.

[0029] Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present disclosure.

[0030] In the description of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure.

[0031] In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0032] Example

[0033] like Figure 1-5As shown, the utility model proposes a gallium boat internal reaction structure, including a shell 1 located in the gallium boat for the reaction of hydrogen chloride and metal gallium, the inner wall of the shell 1 is fixedly connected with an upper partition 2, the upper partition 2 divides the internal reaction space of the shell 1 into a flow chamber 11 and a reaction chamber 12, the bottom of the upper partition 2 is connected with multiple groups of vertical partitions 3, the multiple groups of vertical partitions 3 are symmetrically installed, one side panel wall of the vertical partition 3 is fixedly connected to the inner wall of the shell 1, and there is a gap between the bottom and the plate surface of the vertical partition 3 and the bottom inner wall of the shell 1. Due to the poor fluidity of the liquid gallium source, the bottom of the vertical partition 3 can maintain a certain gap with the bottom inner wall of the shell 1, so that the gallium source can flow into the small chamber formed by each group of vertical partitions 3 when injected. When the liquid metal gallium level is higher than the bottom of the vertical partition 3, a circuitous gas path can still be formed. Considering that the metal gallium will solidify after shutdown and cooling, the gap setting at the bottom is conducive to the stress release during solidification, protecting the internal quartz structure from being broken.

[0034] The upper partition plate 2 is provided with a second through hole 23 penetrating therethrough, and the second through hole 23 is used to penetrate the reaction chamber 12 and the flow chamber 11 . The inner wall of the upper partition plate 2 is also provided with a cavity 22 , and the bottom of the upper partition plate 2 is provided with a first through hole 21 .

[0035] like Figure 2 and Figure 3 As shown, a gas pipeline 4 is installed in the shell 1 and passes through it. The gas pipeline 4 is divided into two sections. The upper gas pipeline 4 is connected to the top of the upper partition 2. A through hole 3 41 for the outflow of metal gallium and hydrogen chloride is opened on one side of the upper gas pipeline 4. Metal gallium is injected first, and liquid metal gallium flows into the reaction chamber 12 through the through hole 3 41 and the through hole 23; the lower gas pipeline 4 passes through the bottom of the upper partition 2 and the bottom of the shell 1, and the top of the lower gas pipeline 4 passes through the bottom of the upper partition 2 and does not contact the top inner wall of the cavity 22. The lower gas pipeline 4 is configured to allow gallium chloride formed after the reaction of hydrogen chloride and metal gallium to flow from the through hole 1 21 into the cavity 22, and then discharged from the shell 1 from the gas pipeline 4.

[0036] In this embodiment, a vertical partition 3 is installed in the space containing the metal gallium source to form a circuitous loop, and an upper partition 2 is also added between the shells 1 to separate the air intake and the air outlet, so that the gas path passes through the bottom vertical partition 3 and then enters the gas pipeline 4, and the air is taken in from the top of the gas pipeline 4 and discharged from the bottom of the gas pipeline 4. The metal gallium source injection port can be directly injected from the hydrogen chloride inlet, or it can be set separately. When filling, it is added in liquid form and flows to the bottom of the gallium source container by gravity. Since there is a gap between the vertical partition 3 and the bottom inner wall of the shell 1, the liquid metal gallium will be fully circulated and dispersed on the bottom inner wall of the shell 1. The introduction of hydrogen chloride combined with the arrangement of multiple vertical partitions 3 can make the hydrogen chloride and the metal gallium fully contact and react. The reacted gas gallium chloride enters the cavity 22 through the through hole 1 21, and enters through the top of the lower gas pipeline 4 and is discharged from the bottom of the gas pipeline 4, so that the gas reaction is more sufficient.

[0037] The above specific embodiment is only an optional embodiment of the present invention. Based on the technical solution of the present invention and the relevant inspiration of the above embodiment, those skilled in the art can make various alternative improvements and combinations to the above specific embodiment.

Claims

1. A gallium boat internal reaction structure, comprising a shell (1) located in the gallium boat for the reaction of hydrogen chloride and metal gallium, characterized in that: An upper partition (2) is fixedly connected to the inner wall of the shell (1), and a plurality of groups of vertical partitions (3) are connected to the bottom of the upper partition (2); The shell (1) is provided with a gas pipeline (4) penetrating therethrough, and the gas pipeline (4) is divided into two sections, the upper section of the gas pipeline (4) is connected to the top of the upper partition (2), and the lower section of the gas pipeline (4) penetrates the bottom of the upper partition (2) and the bottom of the shell (1); The upper partition (2) is provided with a second through hole (23) penetrating therethrough, the inner wall of the upper partition (2) is also provided with a cavity (22), and the bottom of the upper partition (2) is provided with a first through hole (21).

2. The internal reaction structure of a gallium boat according to claim 1, characterized in that: A side panel wall of the vertical partition (3) is fixedly connected to the inner wall of the shell (1).

3. The internal reaction structure of a gallium boat according to claim 1, characterized in that: There is a gap between the bottom and plate surface of the vertical partition (3) and the bottom inner wall of the shell (1).

4. The internal reaction structure of a gallium boat according to claim 1, characterized in that: A through hole three (41) for the outflow of metal gallium and hydrogen chloride is provided on one side of the gas pipeline (4) in the upper section.

5. The internal reaction structure of a gallium boat according to claim 1, characterized in that: The top of the gas pipeline (4) in the lower section passes through the bottom of the upper partition (2) and does not contact the top inner wall of the cavity (22).

6. The internal reaction structure of a gallium boat according to claim 1, characterized in that: The upper partition (2) divides the internal reaction space of the shell (1) into a circulation chamber (11) and a reaction chamber (12), and the second through hole (23) is used to penetrate the reaction chamber (12) and the circulation chamber (11).

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