Vacuum interlayer crystal crucible

Abstract

The utility model discloses a vacuum interlayer crystal crucible, and belongs to the technical field of single crystal preparation tools. A vacuum interlayer crystal crucible comprises a crucible body, and further comprises a vacuum inner layer, a vacuum outer layer, a vacuum layer and a vacuum layer, and the vacuum inner layer is arranged in the crucible body; the external crucible pipe is fixedly connected to the crucible body, and the end, away from the crucible body, of the external crucible pipe faces the upper portion of the crucible body; the vacuum inner pipe is arranged in the external crucible pipe, and the vacuum inner pipe is communicated with the vacuum inner layer; the small negative pressure meter is fixedly connected to the external crucible tube; by arranging the vacuum inner layer, the heat loss of the outer wall of the crucible is greatly reduced, and the temperature uniformity of each part of the crucible is improved, so that the yield and the yield of crystal growth are greatly improved, meanwhile, the negative pressure condition can be observed, and the conditions that the internal temperature of the crucible is inconsistent due to leakage and the crystal is cracked due to growth are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal preparation tools, in particular to a vacuum sandwich crystal crucible. Background Art

[0002] Artificial crystal materials are usually melted, crystallized and grown in a crucible. During the growth process of the crystal, there is always a heat exchange process between the crystal, crucible and the environment. The quality and yield of the crystal are closely related to these heat exchange processes: the heat exchange process must remain stable, uniform and smooth.

[0003] However, in general, there is always a certain temperature difference between the inner wall and the outer wall of the crucible, and between the upper part and the lower part of the crucible, and the temperature difference increases with the increase of the crystal growth temperature, thereby aggravating the heat exchange process, affecting the crystal quality, and even causing the crystal to crack. Therefore, it is necessary to ensure that the temperature distribution of each part of the crucible is as uniform as possible. Therefore, a vacuum sandwich crystal crucible is provided to solve the problem of uneven temperature distribution. Utility Model Content

[0004] The utility model aims to solve the problems raised in the above background technology and provides a vacuum sandwich crystal crucible.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A vacuum sandwich crystal crucible, comprising a crucible body, and further comprising:

[0007] A vacuum inner layer, wherein the vacuum inner layer is arranged inside the crucible body;

[0008] An external crucible tube is fixedly connected to the crucible body, and one end of the external crucible tube away from the crucible body faces upwards of the crucible body;

[0009] A vacuum inner tube is arranged inside the external crucible tube, and the vacuum inner tube is communicated with the vacuum inner layer;

[0010] A small negative pressure gauge is fixedly connected to the external crucible tube, and a detection end of the small negative pressure gauge is connected to the vacuum inner tube for detecting the pressure inside the vacuum inner layer and the vacuum inner tube.

[0011] In order to facilitate the growth of crystals, preferably, the crucible body is made of quartz.

[0012] In order to facilitate the growth of crystals, preferably, the crucible body is made of platinum.

[0013] In order to reduce heat loss, preferably, the vacuum inner layer has a thickness of 1-20 mm and a vacuum pressure of <5.0×10 - 3Pa.

[0014] In order to facilitate the placement of the crystal, preferably, the inner diameter of the crucible body is 10-300 mm.

[0015] In order to facilitate the growth of crystals, preferably, the length of the crucible body is 100-500 mm.

[0016] Compared with the prior art, the utility model provides a vacuum sandwich crystal crucible, which has the following beneficial effects:

[0017] The utility model provides a vacuum inner layer, which greatly reduces the heat loss of the outer wall of the crucible and improves the temperature uniformity of various parts of the crucible, thereby greatly improving the production rate and yield of crystal growth. At the same time, the negative pressure situation can be observed, and the situation of inconsistent temperature inside the crucible due to leakage, which reduces the situation of cracking of crystal growth. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic diagram of the structure of a vacuum sandwich crystal crucible proposed in the utility model Figure 1 ;

[0019] Figure 2 A schematic diagram of the structure of a vacuum sandwich crystal crucible proposed in the utility model Figure 2 ;

[0020] Figure 3 The utility model provides a schematic diagram of the structure of the interior of a crucible body in a vacuum sandwich crystal crucible.

[0021] In the figure: 1. crucible body; 101. vacuum inner layer; 102. external crucible tube; 103. vacuum inner tube; 2. small negative pressure gauge. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0023] Example:

[0024] Reference Figure 1-3A vacuum sandwich crystal crucible comprises a crucible body 1, and also comprises: a vacuum inner layer 101, which is arranged inside the crucible body 1; an external crucible tube 102, which is fixedly connected to the crucible body 1, and one end of the external crucible tube 102 away from the crucible body 1 faces above the crucible body 1; a vacuum inner tube 103, which is arranged inside the external crucible tube 102, and the vacuum inner tube 103 is connected to the vacuum inner layer 101; a small negative pressure gauge 2, which is fixedly connected to the external crucible tube 102, and the detection end of the small negative pressure gauge 2 is connected to the vacuum inner tube 103, and is used to detect the pressure inside the vacuum inner layer 101 and the vacuum inner tube 103. The crucible body 1 is made of quartz or platinum, the vacuum inner layer 101 has a thickness of 1-20 mm, and the vacuum pressure is less than 5.0×10 -3 Pa, the inner diameter of the crucible body 1 is 10-300 mm, and the length of the crucible body 1 is 100-500 mm.

[0025] The external crucible tube 102 in the present device is an auxiliary rod for assisting in removal, and its material is the same as that of the crucible body 1. During processing, the crucible body 1 can be placed in a vacuum environment to extract the internal gas, and then a small negative pressure gauge 2 can be inserted into the external crucible tube 102 to seal the vacuum inner tube 103 while monitoring the internal air pressure.

[0026] When in use, first check the small negative pressure gauge 2 to see if the pressure is appropriate. Due to the comprehensive factors such as the manufacturing process and the use time, gas leakage is inevitable. If the pressure is found to be inappropriate, it is necessary to replace it with a new one. Then put the crystal into the crucible body 1 and heat it in the heating device until the crystal growth is completed. Then the crucible body 1 can be taken out through the external crucible tube 102.

[0027] The size of the crucible body 1 provides two experimental data:

[0028] 1. Grow a Φ10mm×100mm single crystal, using a crucible made of quartz with a purity of 99.99% and a quartz wall thickness of 2mm. The width of the vacuum inner layer 101 is 4mm, and the interlayer vacuum pressure is <2.0×10 -4 Pa. The inner diameter of the crucible is 10 mm and the length of the crucible is 150 mm.

[0029] Second, grow a Φ100mm×200mm single crystal, use a crucible made of 99.999% pure platinum, the platinum wall thickness is 4mm. The width of the vacuum inner layer 101 is 5mm, and the interlayer vacuum pressure is <5.0×10 -3 Pa. The inner diameter of the crucible is 100 mm and the length of the crucible is 250 mm.

[0030] The utility model provides a vacuum inner layer 101, which greatly reduces the heat loss of the outer wall of the crucible and improves the temperature uniformity of each part of the crucible, thereby greatly improving the production rate and yield of crystal growth. At the same time, the negative pressure situation can be observed, and the situation of inconsistent temperature inside the crucible due to leakage, which reduces the situation of cracking of crystal growth.

[0031] The above is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent substitutions or changes within the technical scope disclosed by the present invention according to the technical solution and inventive concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A vacuum sandwich crystal crucible, comprising a crucible body (1), characterized in that: Also includes: A vacuum inner layer (101), wherein the vacuum inner layer (101) is arranged inside the crucible body (1); An external crucible tube (102) is fixedly connected to the crucible body (1), and one end of the external crucible tube (102) away from the crucible body (1) faces upward of the crucible body (1); A vacuum inner tube (103) is arranged inside the external crucible tube (102), and the vacuum inner tube (103) is in communication with the vacuum inner layer (101); A small negative pressure gauge (2) is fixedly connected to the external crucible tube (102); a detection end of the small negative pressure gauge (2) is connected to the vacuum inner tube (103) and is used to detect the pressure inside the vacuum inner layer (101) and the vacuum inner tube (103).

2. A vacuum sandwich crystal crucible according to claim 1, characterized in that: The crucible body (1) is made of quartz.

3. A vacuum sandwich crystal crucible according to claim 1, characterized in that: The crucible body (1) is made of platinum.

4. A vacuum sandwich crystal crucible according to claim 1, characterized in that: The vacuum inner layer (101) has a thickness of 1-20 mm and a vacuum pressure of <5.0×10 -3 Pa.

5. The vacuum sandwich crystal crucible according to claim 1, characterized in that: The inner diameter of the crucible body (1) is 10-300 mm.

6. A vacuum sandwich crystal crucible according to claim 5, characterized in that: The crucible body (1) has a length of 100-500 mm.

Images