Electric smelting furnace for metal silicon processing

Abstract

The utility model discloses a smelting electric furnace for metal silicon processing, which comprises a furnace body and a crushing vehicle, a heat insulation layer is arranged on the periphery inside the furnace body, a circular opening is arranged at the top of the furnace body, three platforms are arranged at the top of the furnace body, rails are respectively arranged on the three platforms, the direction of the rails is tangent to the outline of the opening, and the crushing vehicle is arranged at the top of the rails. The crushing vehicle is provided with a hydraulically-driven telescopic extension rod, a hydraulically-driven rotating arm is hinged to the tail end of the extension rod, the rotating arm is electrically and slidably connected with a lifting vehicle, and an electrically-driven rotating crushing rod is arranged at the tail end of the lifting vehicle. Compared with the prior art, the furnace has the advantages that refractory solid silicon carbide and silicon dioxide in the furnace are crushed by adopting the crushing vehicle, and liquid silicon is stirred, so that the heating in the furnace is more uniform; the crushed silicon carbide and silicon dioxide are mixed with high-temperature liquid silicon, flow to the vicinity of the graphite electrode column and are heated by the electric arc again, so that the silicon carbide and silicon dioxide can be promoted to be converted into monatomic silicon, and the conversion rate of raw materials is improved.

Description

Technical Field

[0001] The utility model relates to the field of silicon smelting equipment, in particular to a smelting electric furnace for processing metallic silicon. Background Art

[0002] Metallic silicon is a relatively upstream material in the semiconductor silicon industry chain. It is usually produced by heating a mixture of silicon dioxide and carbon in a three-phase arc melting furnace to generate single liquid silicon and then cooling it to obtain metallic silicon. This production equipment uses a large-sized furnace body as a reaction container, in which three graphite electrode columns need to be extended into the furnace body for high-voltage discharge to generate arc breakdown and heat the mixture of silicon dioxide and carbon. However, the discharge range of the graphite electrode column is relatively limited. The temperature outside the discharge range of the graphite electrode column is relatively low. Silicon dioxide and carbon cannot be converted into liquid silicon but form silicon carbide. The melting temperature of silicon carbide is higher than the temperature that the graphite electrode column can provide. The silicon carbide that cannot be melted will gather and settle in the outer circle area of ​​the three graphite electrode columns, which will occupy a large amount of space in the furnace, reduce the reaction area, and reduce the conversion rate of raw materials. At the same time, when the liquid silicon that has been converted in the furnace needs to be discharged, a high-temperature furnace opening device needs to be used on the side wall of the furnace body to melt through the furnace eye to connect the furnace with the outside for discharge. The silicon carbide layer will greatly increase the difficulty of melting through the furnace opening device and reduce production efficiency.

[0003] At present, a tamping car is usually used to simply stir the liquid silicon in the furnace at the opening on the furnace top to slow down the formation of silicon carbide. However, the stirring depth of the tamping car is prioritized and cannot affect the silicon carbide at the bottom of the furnace body. Utility Model Content

[0004] The technical problem to be solved by the utility model is that the production of metallic silicon in a three-phase electric arc melting furnace will cause silicon carbide to accumulate on the furnace wall and the furnace bottom, reducing the utilization rate of raw materials. A smelting electric furnace for metallic silicon processing is provided.

[0005] In order to solve the above technical problems, the technical solution provided by the utility model is: a smelting electric furnace for metal silicon processing, which includes a furnace body and a crushing car, characterized in that: a heat insulation layer is arranged around the inside of the furnace body, a circular opening is arranged on the top of the furnace body, three platforms are arranged on the top of the furnace body, and rails are arranged on the three platforms respectively, and the direction of the rails is tangent to the opening contour, and a crushing car is arranged on the top of the rails, and the crushing car is provided with a hydraulically driven telescopic extension rod, and a hydraulically driven rotating arm is hingedly arranged at the end of the extension rod, and the rotating arm is electrically slidably connected to a lifting car, and an electrically driven rotating crushing rod is arranged at the end of the lifting car, and a remote control module is arranged on the side of the crushing car to facilitate the staff to remotely operate the device in a safe position.

[0006] Furthermore, a plurality of rollers cooperating with rails are arranged on the top of the crushing vehicle, and a travel motor driving roller is arranged at one end of the crushing vehicle.

[0007] Furthermore, a limiting slide running through the front and rear sides is provided at the center of the crushing vehicle, and the limiting slide is arranged in conjunction with the extension rod. First hydraulic rods parallel to the extension rods are arranged on both sides of the crushing vehicle, and a connecting beam is connected to the telescopic end of the first hydraulic rod, and the end of the connecting beam is fixedly connected to the end of the extension rod. A first hinge block and a second hinge block are respectively arranged at one end of the extension rod connected to the connecting beam, and the first hinge block and the second hinge block are arranged in sequence along the extension direction of the extension rod. The second hinge block is hingedly connected to a rotating arm, and a third hinge block is arranged at the other end of the rotating arm connected to the second hinge block. A second hydraulic rod is hingedly connected between the first hinge block and the third hinge block. A plurality of limiting rollers matching the contour of the rotating arm are arranged on the side of the lifting vehicle close to the rotating arm, and the limiting rollers are arranged around the rotating arm, and a rack is arranged on the side of the rotating arm close to the lifting vehicle. The lifting vehicle is provided with a first gear meshing with the rack on the same side of the limiting roller, and the lifting vehicle is provided with a lifting motor driven to connect the first gear, and the crushing rod can be sent to the top of the furnace opening by hydraulic means.

[0008] Furthermore, the lifting vehicle is provided with a reducer on the other side of the limit roller, a crushing motor is provided at the input end of the reducer, a crushing rod is provided at the output end of the reducer, and the extending direction of the crushing rod is arranged along the lifting direction of the lifting vehicle. Tungsten alloy can be used as the crushing rod material, and silicon carbide and silicon dioxide can be first crushed under high temperature conditions in the furnace, and the surrounding liquid silicon can also be stirred.

[0009] Furthermore, a smoke exhaust hood is suspended from the top of the furnace body, a smoke exhaust pipe is connected to the top of the smoke exhaust hood, and three graphite electrode columns penetrating the smoke exhaust hood are suspended from the top of the furnace body, and the graphite electrode columns are arranged in an equilateral triangle.

[0010] Furthermore, a plurality of discharge ports are arranged on the side of the furnace body, a rotating base is arranged on the bottom of the furnace body, the rotating base is fixedly connected to the ground, a gear ring is arranged on the bottom surface of the furnace body, a rotating motor is arranged on one side of the rotating base, the rotating motor drives and connects to a second gear, and the second gear is meshed with the gear ring, which can further improve the uniformity of heating in the furnace.

[0011] The advantages of the utility model compared with the prior art are: a crushing vehicle is used to crush the refractory solid silicon carbide and silicon dioxide in the furnace, and liquid silicon is stirred to make the heating in the furnace more uniform; the crushed silicon carbide and silicon dioxide are mixed with high-temperature liquid silicon and flow to the vicinity of the graphite electrode column and are heated by electric arc again, which can promote the conversion of silicon carbide and silicon dioxide into elemental silicon, thereby improving the conversion rate of raw materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 The diagram is a schematic diagram of the structure of a smelting electric furnace for processing metallic silicon.

[0013] Figure 2 The present invention is a structural diagram of a smelting electric furnace for processing metallic silicon in use.

[0014] Figure 3 The present invention is a structural diagram of a smelting electric furnace crushing vehicle for processing metallic silicon.

[0015] Figure 4 The present invention is a structural schematic diagram of a smelting electric furnace lifting vehicle for processing metallic silicon.

[0016] As shown in the figure: 1. furnace body, 2. insulation layer, 3. opening, 4. discharge port, 5. gear ring, 6. second gear, 7. rotating motor, 8. rotating base, 9. platform, 10. rail, 11. crushing car, 12. graphite electrode column, 13. exhaust hood, 14. exhaust pipe, 15. first hydraulic rod, 16. limiting slide groove, 17. extension rod, 18. walking motor, 19. roller, 20. second hydraulic rod, 21. connecting beam, 22. first hinge block, 23. second hinge block, 24. rotating arm, 25. rack, 26. third hinge block, 27. limiting roller, 28. lifting car, 29. reducer, 30. crushing motor, 31. crushing rod, 32. lifting motor, 33. first gear. DETAILED DESCRIPTION

[0017] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0018] Combined with Figure 1-4 A smelting electric furnace for metal silicon processing, comprising a furnace body 1 and a crushing vehicle 11, wherein a heat insulation layer 2 is arranged around the furnace body 1, a circular opening 3 is arranged on the top of the furnace body 1, and three platforms 9 are arranged on the top of the furnace body 1, and rails 10 are arranged on the three platforms 9 respectively, and the direction of the rails 10 is tangent to the contour of the opening 3, and a crushing vehicle 11 is arranged on the top of the rails 10, and the crushing vehicle 11 is provided with a hydraulically driven telescopic extension rod 17, and a hydraulically driven rotating arm 24 is hinged at the end of the extension rod 17, and the rotating arm 24 is electrically slidably connected to a lifting vehicle 2 8. An electrically driven rotating crushing rod 31 is provided at the end of the lifting vehicle 28. A remote control module 34 is provided on the side of the crushing vehicle 11. The staff can remotely operate the crushing vehicle 11 to drive it to the edge of the rail 10 near the opening 3, and extend the crushing rod 31 to the area where the graphite electrode column 12 cannot be heated through the extension rod 17 and the rotating arm 24. The lifting vehicle 28 electrically descends and the crushing rod 31 is electrically driven to rotate, and the crushing rod 31 is extended to the area where the silicon carbide and silicon dioxide that cannot be melted are accumulated in the furnace body 1 for crushing, and at the same time, the high-temperature liquid silicon nearby can be driven to stir.

[0019] A plurality of discharge ports 4 are arranged on the side of the furnace body 1, a rotating base 8 is arranged on the bottom of the furnace body 1, the rotating base 8 is fixedly connected to the ground, a gear ring 5 is arranged on the bottom surface of the furnace body 1, a rotating motor 7 is arranged on one side of the rotating base 8, the rotating motor 7 is driven and connected to set a second gear 6, the second gear 6 is meshed with the gear ring 5, the furnace body 1 can be rotated electrically, and at the same time, the heating of the graphite electrode column 12 and the crushing and stirring of the crushing rod 31 can further increase the uniformity of heating of the material in the furnace.

[0020] A smoke exhaust hood 13 is suspended from the top of the furnace body 1, and a smoke exhaust pipe 14 is connected to the top of the smoke exhaust hood 13. Three graphite electrode columns 12 that penetrate the smoke exhaust hood 13 are suspended from the top of the furnace body 1. The graphite electrode columns 12 are arranged in an equilateral triangle. The outside of the triangular area surrounded by the graphite electrode columns 12 cannot be broken down by the electric arc between the graphite electrode columns 12. The temperature is low, part of the silicon dioxide cannot react, and the other part will be converted into silicon carbide at a lower temperature, thereby forming a solid area outside the graphite electrode column 12. The direction of the rail 10 can make the breaker rod 31 extend just above this solid area.

[0021] The top of the crushing vehicle 11 is provided with a plurality of rollers 19 that match the rails 10, one end of the crushing vehicle 11 is provided with a walking motor 18 to drive the roller 19, the center of the crushing vehicle 11 is provided with a limiting slide 16 that runs through the front and rear sides, the limiting slide 16 is provided in conjunction with the extension rod 17, and first hydraulic rods 15 parallel to the extension rod 17 are provided on both sides of the crushing vehicle 11, the telescopic end of the first hydraulic rod 15 is connected to a connecting beam 21, the end of the connecting beam 21 is fixedly connected to the end of the extension rod 17, the first hydraulic rod 15 hydraulically drives the extension rod 17 to extend outward to send the crushing rod 31 to the top of the opening 3, and the end of the extension rod 17 connected to the connecting beam 21 is respectively provided with a first hinge block 22 and a second hinge block 23, the first hinge block 22 and the second hinge block 23 are sequentially arranged along the extension direction of the extension rod 17, and the first hinge block 22 and the second hinge block 23 are sequentially arranged along the extension direction of the extension rod 17. The second hinge block 23 is hingedly connected to set a rotating arm 24, and the other end of the rotating arm 24 connected to the second hinge block 23 is set with a third hinge block 26, and the first hinge block 22 and the third hinge block 26 are hingedly connected to set a second hydraulic rod 20, and the second hydraulic rod 20 hydraulically drives the rotating arm 24 to rotate to be perpendicular to the horizontal plane. The end of the crushing rod 31 is facing the solid area in the furnace body 1, and the side of the lifting vehicle 28 close to the rotating arm 24 is provided with a plurality of limiting rollers 27 matching the contour of the rotating arm 24, and the limiting rollers 27 are arranged around the rotating arm 24, and the side of the rotating arm 24 close to the lifting vehicle 28 is provided with a rack 25, and the lifting vehicle 28 is provided with a first gear 33 meshing with the rack 25 on the same side of the limiting roller 27, and the lifting vehicle 28 is provided with a lifting motor 32 to drive and connect the first gear 33.

[0022] The lifting vehicle 28 is provided with a reducer 29 on the other side of the limiting roller 27, the input end of the reducer 29 is provided with a crushing motor 30, the output end of the reducer 29 is provided with a crushing rod 31, and the extension direction of the crushing rod 31 is arranged along the lifting direction of the lifting vehicle 28. The crushing rod 31 is set to be made of tungsten alloy, and has high hardness and high heat resistance. It can crush the high-temperature silicon carbide and silicon dioxide solids in the furnace and stir the high-temperature liquid silicon at the same time.

[0023] During the specific implementation of the utility model, the staff remotely controls the crushing vehicle 11, first drives the crushing vehicle 11 to the edge of the furnace body 1, then controls the first hydraulic rod 15 to drive the extension rod 17 to extend toward the opening 3, and controls the second hydraulic rod 20 to make the rotating arm 24 upright. During this period, the lifting vehicle 28 is appropriately lowered to avoid collision with the exhaust hood 13. When the crushing rod 31 is at the same distance from the two nearby graphite electrode columns 12 and is just above the solid area in the furnace, the crushing motor 30 is started and the lifting vehicle 28 is lowered at the same time, and the crushing rod 31 extends into the furnace to crush the solid silicon carbide and silicon dioxide.

[0024] The above description of the utility model and its implementation methods is not restrictive. The drawings show only one implementation method of the utility model, and the actual structure is not limited thereto. In short, if ordinary technicians in this field are inspired by it and design structural methods and embodiments similar to the technical solution without creativity without departing from the purpose of the invention of the utility model, they should all fall within the protection scope of the utility model.

Claims

1. A smelting electric furnace for processing metallic silicon, comprising a furnace body (1) and a crushing vehicle (11), characterized in that: A heat insulating layer (2) is arranged around the inside of the furnace body (1), a circular opening (3) is arranged on the top of the furnace body (1), three platforms (9) are arranged on the top of the furnace body (1), rails (10) are arranged on the three platforms (9), the direction of the rails (10) is tangent to the outline of the opening (3), a crushing vehicle (11) is arranged on the top of the rails (10), the crushing vehicle (11) is provided with a hydraulically driven telescopic extension rod (17), the end of the extension rod (17) is hingedly provided with a hydraulically driven rotating arm (24), the rotating arm (24) is electrically slidably connected to a lifting vehicle (28), the end of the lifting vehicle (28) is provided with an electrically driven rotating crushing rod (31), and a remote control module (34) is arranged on the side of the crushing vehicle (11).

2. The smelting electric furnace for processing metallic silicon according to claim 1, characterized in that: The top of the crushing vehicle (11) is provided with a plurality of rollers (19) that match the rails (10), and one end of the crushing vehicle (11) is provided with a traveling motor (18) that drives the rollers (19).

3. The smelting electric furnace for processing metallic silicon according to claim 1, characterized in that: The center of the crushing vehicle (11) is provided with a limiting slide groove (16) running through the front and rear sides. The limiting slide groove (16) is arranged in conjunction with the extension rod (17). First hydraulic rods (15) parallel to the extension rod (17) are arranged on both sides of the crushing vehicle (11). The telescopic end of the first hydraulic rod (15) is connected to a connecting beam (21). The end of the connecting beam (21) is fixedly connected to the end of the extension rod (17). The end of the extension rod (17) connected to the connecting beam (21) is respectively provided with a first hinge block (22) and a second hinge block (23). The first hinge block (22) and the second hinge block (23) are arranged in sequence along the extension direction of the extension rod (17). The second hinge block (23) is hingedly connected to a rotating arm (24). A third hinge block (26) is arranged at the other end of the rotating arm (24) connected to the second hinge block (23); a second hydraulic rod (20) is arranged between the first hinge block (22) and the third hinge block (26) in hinged connection; a plurality of limiting rollers (27) matching the profile of the rotating arm (24) are arranged on the side of the lifting vehicle (28) close to the rotating arm (24); the limiting rollers (27) are arranged around the rotating arm (24); a rack (25) is arranged on the side of the rotating arm (24) close to the lifting vehicle (28); a first gear (33) meshing with the rack (25) is arranged on the same side of the limiting roller (27); and the lifting vehicle (28) is provided with a lifting motor (32) drivingly connected to the first gear (33).

4. The smelting electric furnace for processing metallic silicon according to claim 3, characterized in that: The lifting vehicle (28) is provided with a limit roller (27) on the other side thereof, a reducer (29) is provided, a crushing motor (30) is provided at the input end of the reducer (29), and a crushing rod (31) is provided at the output end of the reducer (29), and the crushing rod (31) is extended in the lifting direction of the lifting vehicle (28).

5. The smelting electric furnace for processing metallic silicon according to claim 1, characterized in that: A smoke exhaust hood (13) is suspended from the top of the furnace body (1), a smoke exhaust pipe (14) is connected to the top of the smoke exhaust hood (13), and three graphite electrode columns (12) penetrating the smoke exhaust hood (13) are suspended from the top of the furnace body (1), with the graphite electrode columns (12) being arranged in an equilateral triangle.

6. The smelting electric furnace for processing metallic silicon according to claim 1, characterized in that: A plurality of discharge ports (4) are arranged on the side of the furnace body (1); a rotating base (8) is arranged on the bottom of the furnace body (1); the rotating base (8) is fixedly connected to the ground; a gear ring (5) is arranged on the bottom surface of the furnace body (1); a rotating motor (7) is arranged on one side of the rotating base (8); the rotating motor (7) is connected to drive a second gear (6); and the second gear (6) is meshed with the gear ring (5).

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