Gas modular control system

Abstract

The utility model designs a gas modularization control system, which comprises a cabinet body, a gas extraction system, a gas flow module and a control system, an inner cavity is arranged in the cabinet body, the gas extraction system is arranged at the bottom of the cabinet body and is communicated with the inner cavity, the gas flow module is arranged in the cabinet body and is connected with an external process chamber through a pipeline, and the control system is connected with the gas flow module through a pipeline. The control system is arranged at the top of the cabinet body and used for controlling the air exhaust system and the air flow module. According to the gas modularization control system, the gas pumping system, the gas flow module and the control system are designed in a modularized and integrated mode, and the problems that in the prior art, the period cannot be precisely controlled, the time needed in the assembling process is long, and pipelines cannot be planned in advance are solved. The module can be directly communicated with a process chamber, and process gas with a certain flow is introduced into the process chamber, or carrier gas with a certain flow is introduced into the process chamber while the process gas with a certain flow is introduced into the process chamber.

Description

Technical Field

[0001] The utility model relates to the field of gas module control, in particular to a gas modular control system. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits, and its original material is silicon. High-purity polysilicon is dissolved and doped with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing, and slicing, the silicon crystal rod forms a silicon wafer, that is, a wafer. When the wafer surface is cleaned, the photoresist is removed, the photoresist is removed, the polymer is removed, and other processes, a gas control system is required to control the gas pressure of the process chamber, such as the Chinese patent document CN105093821A lithography method and process chamber.

[0003] In the prior art, the gas control system generally adopts a method of purchasing spare parts, electrical components and other components in the process gas circuit in a decentralized manner, and then the assembly technicians use their experience to assemble and fix the components on the electrical control board and the gas circuit board according to the circuit diagram, and need to send a variety of instructions through the master control to realize the supply of process gas; the common disadvantages of this method are: the procurement cycle of components cannot be accurately controlled, the assembly process takes a long time, the pipeline cannot be planned in advance, the gas and electricity control are separated, the software programs are numerous and cannot be quickly compatible with other equipment, etc. Utility Model Content

[0004] In order to solve the above problems, the utility model provides a gas modular control system.

[0005] To achieve the above-mentioned purpose, the utility model adopts the following technical solution: a gas modular control system, including a cabinet, an exhaust system, a gas flow module and a control system, wherein an inner cavity is provided inside the cabinet, the exhaust system is arranged at the bottom of the cabinet and connected to the inner cavity, the gas flow module is arranged inside the cabinet and connected to an external process chamber through a pipeline, and the control system is arranged at the top of the cabinet for controlling the exhaust system and the gas flow module.

[0006] Preferably, the exhaust system comprises a low vacuum exhaust port and an exhaust duct, wherein the low vacuum exhaust port is arranged at the bottom of the cabinet, and the low vacuum exhaust port passes through the bottom of the cabinet and is connected to the exhaust duct.

[0007] Preferably, a pressure difference controller is also included, and the pressure difference controller is installed at the bottom of the inner cavity of the cabinet.

[0008] Preferably, the gas flow module includes a No. 1 gas module and a No. 2 gas module, and a No. 1 gas inlet and several No. 2 gas inlets are further provided at the bottom of the cabinet, the No. 1 gas inlet is connected to the No. 1 gas module through a No. 1 gas pipeline, and the No. 2 gas inlet is connected to the No. 2 gas module through a No. 2 gas pipeline; a No. 1 gas outlet and a No. 2 gas outlet are provided on the side of the cabinet, and the ends of the No. 1 gas module and the No. 2 gas module are provided with a first chamber interface and a second chamber interface, the No. 1 gas pipeline of the No. 1 gas module passes through the cabinet through the No. 1 gas outlet and is connected to the first chamber interface, and the No. 2 gas pipeline of the No. 2 gas module passes through the cabinet through the No. 2 gas outlet and is connected to the second chamber interface.

[0009] Preferably, the No. 1 gas module comprises a first filter, a first manual control valve and a first pneumatic diaphragm valve, and the first filter, the first manual control valve and the first pneumatic diaphragm valve are connected through a No. 1 gas pipeline.

[0010] Preferably, one end of the first filter is connected to gas pipeline No. 1, the other end of the filter No. 1 is connected to manual control valve No. 1, the manual control valve No. 1 is connected to pneumatic diaphragm valve No. 1 through gas pipeline No. 1, and the pneumatic diaphragm valve No. 1 is connected to the external first chamber interface through gas pipeline No. 1 and gas outlet No. 1.

[0011] Preferably, the No. 2 gas module includes a second filter, a second manual control valve, a second mass flow controller, a second pneumatic diaphragm valve, and a second precision on-off valve, and the second filter, the second manual control valve, the second mass flow controller, the second pneumatic diaphragm valve, and the second precision on-off valve are connected through a No. 2 gas pipeline.

[0012] Preferably, one end of the second filter is connected to the No. 2 gas pipeline, the other end of the second filter is connected to the second manual control valve, the second manual control valve is connected to the second mass flow controller through the No. 2 gas pipeline, the other end of the second mass flow controller is connected to the second pneumatic diaphragm valve, the second pneumatic diaphragm valve is converged through the No. 2 gas pipeline and connected to the second precision on-off valve, and finally the second precision on-off valve is connected to the external second chamber interface through the No. 2 gas pipeline and the No. 2 gas outlet.

[0013] The beneficial effects of the utility model are as follows: the utility model is a gas modular control system, which solves the problems existing in the current technology, such as the cycle cannot be accurately controlled, the assembly process takes a long time, the pipeline cannot be planned in advance, the gas-electric control is separated, the software programs are numerous and cannot be quickly compatible with similar equipment, etc., through the modular integrated design of the exhaust system, the gas flow module and the control system. The utility model can be directly connected to the process chamber as a module, and a certain flow of process gas can be introduced into the process chamber, or a certain flow of carrier gas can be introduced into the process chamber while a certain flow of process gas is introduced into the process chamber. The control of the procurement cycle, the simplification of the assembly process, the modularization of gas and electricity, the unified program control, and the rapid compatibility can be achieved, which can significantly and effectively improve the control efficiency, save design time, save design costs and equipment space, make the equipment more compact and thus reduce operating costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is an overall schematic diagram of the gas modular control system of the utility model.

[0015] Figure 2 It is a schematic diagram of the inner cavity structure of the cabinet of the utility model.

[0016] Figure 3 It is a top view of the gas flow module structure in the inner cavity of the cabinet of the utility model.

[0017] Figure 4 This is another angle view of the inner cavity structure of the cabinet of the utility model.

[0018] Figure 5 This utility model Figure 4 A magnified view of part A.

[0019] Figure 6 It is a structural schematic diagram of the gas circuit of the gas flow module of the utility model.

[0020] Figure 7 It is a structural schematic diagram of the first pneumatic diaphragm valve and the second pneumatic diaphragm valve of the utility model.

[0021] Reference numerals

[0022] 1. Cabinet; 11. Inner cavity; 12. Gas inlet No. 1; 13. Gas inlet No. 2; 14. Gas outlet No. 1; 15. Gas outlet No. 2;

[0023] 2. Exhaust system; 21. Pressure difference controller; 22. Low vacuum exhaust port; 23. Exhaust duct;

[0024] 3. Gas flow module; 31. No. 1 gas module; 311. First filter; 312. First manual control valve; 313. First pneumatic diaphragm valve; 314. No. 1 gas pipeline; 315. First chamber interface;

[0025] 32. No. 2 gas module; 321. Second filter; 322. Second manual control valve; 323. Mass flow controller; 324. Second pneumatic diaphragm valve; 3241. Pneumatic part; 3242. Diaphragm part; 325. Precision on-off valve; 326. No. 2 gas pipeline; 327. Second chamber interface;

[0026] 4. Valve island controller;

[0027] 5. Process chamber; 51. First chamber; 52. Second chamber. DETAILED DESCRIPTION

[0028] See also Figure 1-7 As shown, the utility model relates to a gas modular control system, including a cabinet 1, an exhaust system 2, a gas flow module 3 and a control system. The cabinet 1 provides a closed space, an inner cavity 11 is provided inside the cabinet 1, the exhaust system 2 is arranged at the bottom of the cabinet 1 and connected to the inner cavity 11, the gas flow module 3 is arranged inside the cabinet 1 and connected to an external process chamber 5 through a pipeline, and the control system is arranged on the top outer surface of the cabinet 1.

[0029] In this embodiment, Figure 3 As shown, the exhaust system 2 includes a pressure difference controller 21, a low vacuum exhaust port 22, and an exhaust pipe 23. The low vacuum exhaust port 22 is arranged at the bottom of the cabinet 1, and the low vacuum exhaust port 22 runs through the bottom of the cabinet 1 and is connected to the exhaust pipe 23. The exhaust pipe 23 is connected to an external exhaust device (not shown in the figure). The exhaust device can provide a certain suction force. The exhaust device is connected to the exhaust pipe 23 to apply a certain suction speed so that the internal environment of the cabinet 1 reaches a low vacuum state. In this embodiment, the pressure difference controller 21 is installed at the bottom of the inner cavity 11 of the cabinet 1. The pressure difference controller 21 detects the pressure difference between the inside and outside of the cabinet 1 through a signal to ensure that the inside of the cabinet 1 maintains a low vacuum state to prevent gas leakage.

[0030] In this embodiment, Figure 4-5The gas flow module 3 includes a No. 1 gas module 31 and a No. 2 gas module 32, and the No. 1 gas module 31 is arranged on the left side of the No. 2 gas module 32. The bottom of the cabinet 1 is also provided with a No. 1 gas inlet 12 and a plurality of No. 2 gas inlets 13, the No. 1 gas inlet 12 is connected to the No. 1 gas module 31 through a No. 1 gas pipeline 314, and the No. 2 gas inlet 13 is connected to the No. 2 gas module 32 through a No. 2 gas pipeline 326. The side of the cabinet 1 is provided with a No. 1 gas outlet 14 and a No. 2 gas outlet 15, the No. 1 gas pipeline 314 of the No. 1 gas module 31 passes through the cabinet 1 through the No. 1 gas outlet 14 and is connected to the process chamber 5, and the No. 2 gas pipeline 326 of the No. 2 gas module 32 passes through the cabinet 1 through the No. 2 gas outlet 15 and is connected to the process chamber 5.

[0031] The process chamber 5 includes a first chamber 51 and a second chamber 52 . The first gas module 31 and the second gas module 32 are connected to the first chamber 51 and the second chamber 52 through a first chamber interface 315 and a second chamber interface 327 , respectively.

[0032] Furthermore, the No. 1 gas module 31 is used for the input of ordinary air. The No. 1 gas module 31 includes a first filter 311, a first manual control valve 312 and a first pneumatic diaphragm valve 313. The first filter 311, the first manual control valve 312 and the first pneumatic diaphragm valve 313 are connected through a No. 1 gas pipeline 314. Furthermore, in this embodiment, one end of the first filter 311 is connected to the No. 1 gas pipeline 314, the other end of the first filter 311 is connected to the first manual control valve 312, the first manual control valve 312 is connected to the first pneumatic diaphragm valve 313 through the No. 1 gas pipeline 314, and the first pneumatic diaphragm valve 313 is connected to the external first chamber interface 51 through the No. 1 gas outlet 14 through the No. 1 gas pipeline 314.

[0033] The No. 2 gas module 32 is different from the No. 1 gas module 31 in that the No. 2 gas module 32 is generally used for the input of nitrogen-containing gas or other process gases. The No. 2 gas module 32 includes a second filter 321, a second manual control valve 322, a second mass flow controller 323, a second pneumatic diaphragm valve 324 and a second precision on-off valve 325. The second filter 321, the second manual control valve 322, the second mass flow controller 323, the second pneumatic diaphragm valve 324 and the second precision on-off valve 325 are connected through a No. 2 gas pipeline 326. Furthermore, in this embodiment, since there are four No. 2 gas inlets 13, four sets of second filters 321, second manual control valves 322, second mass flow controllers 323 and second pneumatic diaphragm valves 324 that match the number of No. 2 gas inlets 13 are used for assembly. One end of the second filter 321 is connected to the No. 2 gas pipeline 326, and the other end of the second filter 321 is connected to the second manual control valve 322. The second manual control valve 322 is connected to the second mass flow controller 323 through the No. 2 gas pipeline 326. The other end of the second mass flow controller 323 is connected to the second pneumatic diaphragm valve 324. The second pneumatic diaphragm valve 324 converges through the No. 2 gas pipeline 326 and is connected to the second precision on-off valve 325. Finally, the second precision on-off valve 325 is connected to the external second chamber interface 52 through the No. 2 gas pipeline 326 and the No. 2 gas outlet 15.

[0034] The control system is a valve island controller 4 , which is a modular integrated electromagnetic control valve group, and realizes signal control of the gas flow module 3 through analog signals.

[0035] More specifically, the functions of the components in the gas flow module 3 are as follows: as disclosed in the Chinese patent document CN114815532A, a photoresist removal method and a semiconductor device manufacturing method, the process chamber requires not only process gas input but also carrier gas. The No. 1 gas module 31 and the No. 2 gas module 32 carry different gas inputs. The first filter 311 and the second filter 321 have built-in filter materials to efficiently filter the passing gas and provide pollution-free gas for the system. The first manual control valve 312 and the second manual control valve 322 manually open and close the gas passing through the first filter 311 and the second filter 321. The mass flow controller 323 controls the flow of the gas passing through the second manual control valve 322 to a preset value through an analog signal. The first pneumatic diaphragm valve 313 and the second pneumatic diaphragm valve 324 include a pneumatic part 3241 and a diaphragm part 3242 (the pneumatic diaphragm valve is an existing structure and will not be described in detail). The pneumatic part executes the signal sent by the valve island controller 4 to open and close the diaphragm part, that is, the valve island controller 4 controls the pneumatic part, and the pneumatic part opens and closes the diaphragm part to achieve the flow control of the preset value flow. The precision on-off valve 325 is provided with a precision valve inside to achieve the on-off and closing action of the gas in the pipeline.

[0036] More specifically, the process flow of a gas modular control system of the utility model includes the following steps: first, the exhaust device applies a certain suction force, and the suction force passes through the exhaust pipe 23 to make the internal environment of the cabinet 1 reach a low vacuum state. At this time, the internal air pressure state of the cabinet 1 is monitored in real time by the pressure difference controller 21 to prevent gas leakage and increase the production cost. Take nitrogen as an example, when ensuring that the inner cavity 11 of the cabinet 1 is in a low vacuum state, the gas enters the second gas pipeline 326 from the second gas inlet 13, and the gas enters the second filter 321 for filtration. After filtration, the gas flows to the second mass flow controller 323 by the preset opening and closing control program of the second manual control valve 322. The second mass flow controller 323 controls the flow of the gas passing through the second pneumatic diaphragm valve 324 by a preset value through an analog signal, and the second pneumatic diaphragm valve 324 performs an opening and closing action to make the gas converge and mix, and then the valve island controller 4 gives a signal to the second precision on-off valve 325 to make the gas enter the second chamber through the second gas pipeline 326.

[0037] The utility model provides a gas modular control system, which has a modular integrated design of an exhaust system 2, a gas flow module 3 and a control system. The whole process of gas input only needs to send a control signal to a valve island controller 4 and a second mass flow controller 323 through the control system. The second mass flow controller 323 controls the flow, and the valve island controller 4 controls the opening and closing of the first pneumatic diaphragm valve 313 and the second pneumatic diaphragm valve 324, so as to complete the operation of the entire gas flow module 3.

[0038] It solves the problems existing in current technology, such as the cycle cannot be accurately controlled, the assembly process takes a long time, the pipeline cannot be planned in advance, the gas and electricity control are separated, the software programs are numerous and cannot be quickly compatible with similar equipment. Through this gas modular control system, the procurement cycle can be controlled, the assembly process can be simplified, the gas and electricity can be modularized, the program control can be unified, and the compatibility can be quickly achieved. It can significantly and effectively improve the control efficiency, save design time, design cost and equipment space, make the equipment more compact and reduce the operating cost.

[0039] The above implementation modes are merely descriptions of the preferred implementation modes of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary engineering and technical personnel in the field shall fall within the protection scope determined by the claims of the present invention.

Claims

1. A gas modular control system, characterized in that: The invention comprises a cabinet, an exhaust system, a gas flow module and a control system. The cabinet is provided with an inner cavity. The exhaust system is arranged at the bottom of the cabinet and connected to the inner cavity. The gas flow module is arranged inside the cabinet and connected to an external process chamber through a pipeline. The control system is arranged at the top of the cabinet and is used to control the exhaust system and the gas flow module.

2. A gas modular control system according to claim 1, characterized in that: The exhaust system comprises a low vacuum exhaust port and an exhaust duct. The low vacuum exhaust port is arranged at the bottom of the cabinet. The low vacuum exhaust port passes through the bottom of the cabinet and is connected to the exhaust duct.

3. A gas modular control system according to claim 1, characterized in that: It also includes a pressure difference controller, which is installed at the bottom of the inner cavity of the cabinet.

4. A gas modular control system according to claim 1, characterized in that: The gas flow module includes a No. 1 gas module and a No. 2 gas module. The bottom of the cabinet is also provided with a No. 1 gas inlet and a plurality of No. 2 gas inlets. The No. 1 gas inlet is connected to the No. 1 gas module through a No. 1 gas pipeline, and the No. 2 gas inlet is connected to the No. 2 gas module through a No. 2 gas pipeline; A No. 1 gas outlet and a No. 2 gas outlet are provided on the side of the cabinet, and a first chamber interface and a second chamber interface are provided at the ends of the No. 1 gas module and the No. 2 gas module. The No. 1 gas pipeline of the No. 1 gas module passes through the cabinet through the No. 1 gas outlet and is connected to the first chamber interface, and the No. 2 gas pipeline of the No. 2 gas module passes through the cabinet through the No. 2 gas outlet and is connected to the second chamber interface.

5. A gas modular control system according to claim 4, characterized in that: The No. 1 gas module includes a first filter, a first manual control valve and a first pneumatic diaphragm valve, and the first filter, the first manual control valve and the first pneumatic diaphragm valve are connected through a No. 1 gas pipeline.

6. A gas modular control system according to claim 5, characterized in that: One end of the first filter is connected to gas pipeline No. 1, and the other end of the filter No. 1 is connected to manual control valve No. 1, and manual control valve No. 1 is connected to pneumatic diaphragm valve No. 1 through gas pipeline No. 1, and pneumatic diaphragm valve No. 1 is connected to the external first chamber interface through gas pipeline No. 1 and gas outlet No.

1.

7. A gas modular control system according to claim 4, characterized in that: The No. 2 gas module includes a second filter, a second manual control valve, a second mass flow controller, a second pneumatic diaphragm valve, and a second precision on-off valve. The second filter, the second manual control valve, the second mass flow controller, the second pneumatic diaphragm valve, and the second precision on-off valve are connected through a No. 2 gas pipeline.

8. A gas modular control system according to claim 7, characterized in that: One end of the second filter is connected to the No. 2 gas pipeline, and the other end of the second filter is connected to the second manual control valve, the second manual control valve is connected to the second mass flow controller through the No. 2 gas pipeline, the other end of the second mass flow controller is connected to the second pneumatic diaphragm valve, the second pneumatic diaphragm valve is converged through the No. 2 gas pipeline and connected to the second precision on-off valve, and finally the second precision on-off valve is connected to the external second chamber interface through the No. 2 gas pipeline and the No. 2 gas outlet.

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