Tray transfer structure for semiconductor test

Abstract

The utility model discloses a tray circulation structure for semiconductor testing, belongs to the technical field of semiconductor testing and packaging, and is used for solving the problem that a tray suction position of a vacuum chuck is relatively fixed, so that small or large trays are inconvenient to carry and suck stably. Comprising a carrying mechanism; when a small or large supporting plate is needed, the relative positions of the two vacuum suction cups need to be changed so that a tray can be adsorbed and carried more stably, at the moment, a transmission rotary disc can be rotated, when the transmission rotary disc rotates, an adjusting gear can be driven to rotate, and when the adjusting gear rotates, the adjusting gear can be driven to rotate. The two toothed plates can drive the two movable sliding blocks to move in the movable sliding grooves in the opposite direction or the back-to-back direction, then the positions of the two vacuum suction cups are adjusted, and the stability of the vacuum suction cups when trays of different specifications are sucked and carried is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor testing and packaging, and in particular relates to a tray circulation structure for semiconductor testing. Background Art

[0002] The turntable test printing and taping machine is used to test semiconductor components at different stations and processes, including polarity testing, steering positioning, performance testing, visual inspection (2D, 3D, 5S), printing, steering, classification of defective products and final taping and packaging of qualified products.

[0003] For example, the pallet transfer mechanism of the semiconductor testing and packaging equipment with the authorization publication number CN218123364U drives the vacuum suction cup to transfer the pallet through a telescopic rod, and the position of the telescopic rod on the horizontal slide bar is fixed, so the position point where the vacuum suction cup absorbs the pallet is relatively fixed. However, this method is not convenient for stable transportation and adsorption of some smaller or larger pallets. For this reason, we propose a pallet transfer structure for semiconductor testing. Utility Model Content

[0004] The purpose of the utility model is to provide a semiconductor test tray circulation structure to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a semiconductor test tray circulation structure, comprising a circulation lifting mechanism, a conveying mechanism is provided at the upper end of the circulation lifting mechanism, the conveying mechanism comprises a support rod, a first slide rail is provided on the upper surface of the support rod, a connecting box is slidably connected inside the first slide rail, a movable slide groove is provided inside the connecting box, a movable slide groove is provided inside the movable slide groove, and two groups of movable slide grooves are provided, and the two groups of movable slide grooves are symmetrically arranged in the movable slide groove, a servo electric cylinder is provided on the lower surface of the movable slide groove, a vacuum suction cup is provided at the output end of the servo electric cylinder, a limiting slide groove is provided on the upper surface of the connecting box, a tooth plate is provided on the upper surface of the movable slide groove, and the tooth plate slides in the limiting slide groove, a rotating rod is provided in the middle part of the upper surface of the connecting box, a support frame is provided on the upper surface of the connecting box, and the support frame is rotatably connected to the rotating rod, an adjusting gear is provided on the circumferential surface of the rotating rod, and the two tooth plates are meshed with the front and rear ends of the circumferential surface of the adjusting gear.

[0006] Preferably, the first slide rail is internally rotatably connected to a second threaded rod, and a connecting box is threadedly connected to the circumferential surface of the second threaded rod, an end of the connecting box away from the second threaded rod is slidably connected to a second limiting slide rod, a third servo motor is provided on the side of the first slide rail, and an output end of the third servo motor is transmission-connected to the second threaded rod.

[0007] Preferably, the circulation lifting mechanism includes a support seat, the upper surface of the support seat is rotatably connected to a rotating shaft, the end of the rotating shaft away from the support seat is transmission-connected to a rotating gear, the circumferential surface of the support seat is provided with a motor seat, the upper surface of the motor seat is provided with a first servo motor, the output end of the first servo motor is transmission-connected to a driving gear, and the driving gear is meshingly connected to the rotating gear.

[0008] Preferably, a second servo motor is provided in the middle of the upper surface of the rotating gear, and the output end of the second servo motor is transmission-connected to a first threaded rod, the circumferential surface of the first threaded rod is threadedly connected to a carrying plate, and the support rod is arranged on the upper surface of the carrying plate, a limit seat is provided in the middle of the upper surface of the carrying plate, and the limit seat is threadedly connected to the first threaded rod, a first limit slide rod is provided on the upper surface of the rotating gear, and the first limit slide rod is provided in two groups, and the two groups of the first limit slide rods are slidably connected to the carrying plate.

[0009] Preferably, a connecting plate is provided at one end of the first limiting sliding rod away from the rotating gear, and the first threaded rod is rotatably connected to the connecting plate, and a placement groove is provided inside the circumferential surface of the supporting plate.

[0010] Compared with the prior art, the beneficial effects of the utility model are:

[0011] This semiconductor test tray circulation structure needs to change the relative positions of the two vacuum suction cups when a smaller or larger tray is needed, so that the tray can be adsorbed and transported more stably. At this time, the transmission turntable can be rotated. When the transmission turntable rotates, it can drive the adjusting gear to rotate. When the adjusting gear rotates, the two tooth plates can drive the two moving sliders to move toward or oppositely in the moving slide groove, thereby adjusting the positions of the two vacuum suction cups, thereby increasing the stability of the vacuum suction cups when adsorbing and transporting trays of different specifications. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0013] Figure 2 It is a three-dimensional structural schematic diagram of the transport mechanism of the utility model;

[0014] Figure 3 It is a three-dimensional structural schematic diagram of a cross-section of the transport mechanism of the utility model;

[0015] Figure 4 For the utility model Figure 3 A magnified view of the structure at center.

[0016] In the figure: 10, circulation lifting mechanism; 11, support seat; 12, rotating shaft; 13, rotating gear; 14, first servo motor; 15, driving gear; 16, second servo motor; 17, first threaded rod; 18, limiting seat; 19, first limiting slide bar; 110, carrying plate; 111, connecting plate; 112, placement groove; 20, conveying mechanism; 21, support rod; 22, first slide rail; 23, second threaded rod; 24, third servo motor; 25, second limiting slide bar; 26, connecting box; 27, moving slide groove; 28, moving slider; 29, limiting slide groove; 210, tooth plate; 211, rotating rod; 212, support frame; 213, adjusting gear; 214, transmission turntable; 215, servo electric cylinder; 216, vacuum suction cup. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] See also Figure 1 - Figure 4 The utility model provides a semiconductor test tray circulation structure, including a circulation lifting mechanism 10, the upper end of the circulation lifting mechanism 10 is provided with a transport mechanism 20, the circulation lifting mechanism 10 includes a support seat 11, the upper surface of the support seat 11 is rotatably connected with a rotating shaft 12, the end of the rotating shaft 12 away from the support seat 11 is transmission-connected with a rotating gear 13, the circumferential surface of the support seat 11 is provided with a motor seat, the upper surface of the motor seat is provided with a first servo motor 14, the output end of the first servo motor 14 is transmission-connected with a driving gear 15, and the driving gear 15 is meshed with the rotating gear 13, a second servo motor 16 is provided in the middle of the upper surface of the rotating gear 13, the output end of the second servo motor 16 is transmission-connected with the first A threaded rod 17, the circumferential surface of the first threaded rod 17 is threadedly connected to a carrying plate 110, a limit seat 18 is provided in the middle of the upper surface of the carrying plate 110, and the limit seat 18 is threadedly connected to the first threaded rod 17, wherein the function of the limit seat 18 is to increase the stability of the threaded connection between the first threaded rod 17 and the carrying plate 110, a first limit slide 19 is provided on the upper surface of the rotating gear 13, and the first limit slide 19 is provided with two groups, the two groups of first limit slides 19 are slidably connected to the carrying plate 110, a connecting plate 111 is provided at one end of the first limit slide 19 away from the rotating gear 13, and the first threaded rod 17 is rotatably connected to the connecting plate 111, and a placement groove 112 is provided inside the circumferential surface of the carrying plate 110.

[0019] It should be noted that when the first servo motor 14 drives the driving gear 15 to rotate, the driving gear 15 can drive the rotating gear 13 to rotate. When the rotating gear 13 rotates, the first threaded rod 17, the limit seat 18, and the first limit slide bar 19 can drive the carrying plate 110 to rotate. When the carrying plate 110 rotates, the tray carrying the semiconductor can be circulated and transported during semiconductor testing. The second servo motor 16 is driven to rotate the first threaded rod 17 to rotate. Under the rotation limit of the first limit slide bar 19, the height of the carrying plate 110 can be adjusted, so that the device can transfer materials to the feed port of the test device at different heights.

[0020] The transport mechanism 20 includes a support rod 21, and the support rod 21 is arranged on the upper surface of the carrier plate 110. A first slide rail 22 is provided on the upper surface of the support rod 21. The first slide rail 22 is internally rotatably connected to the second threaded rod 23. A third servo motor 24 is provided on the side of the first slide rail 22, and the output end of the third servo motor 24 is transmission-connected to the second threaded rod 23. A connecting box 26 is internally slidably connected to the first slide rail 22, and the connecting box 26 is threadedly connected to the circumferential surface of the second threaded rod 23. The end of the connecting box 26 away from the second threaded rod 23 is slidably connected to the second limiting slide rod 25, wherein the first slide rail 22 is provided with two groups, one of which is internally rotatably connected to the second threaded rod 23, and the other is internally provided with the second limiting slide rod 25, and a movable slide groove is provided inside the connecting box 26 27, a moving slide 28 is provided inside the moving slide 27, and the moving slide 28 is provided with two groups, and the two groups of moving slides 28 are symmetrically arranged in the moving slide 27, a servo electric cylinder 215 is provided on the lower surface of the moving slide 28, and a vacuum suction cup 216 is provided at the output end of the servo electric cylinder 215, a limiting slide 29 is provided on the upper surface of the connecting box 26, a tooth plate 210 is provided on the upper surface of the moving slide 28, and the tooth plate 210 slides in the limiting slide 29, a rotating rod 211 is provided in the middle of the upper surface of the connecting box 26, a supporting frame 212 is provided on the upper surface of the connecting box 26, and the supporting frame 212 is rotatably connected with the rotating rod 211, an adjusting gear 213 is provided on the circumferential surface of the rotating rod 211, and the two tooth plates 210 are meshed with the front and rear ends of the circumferential surface of the adjusting gear 213.

[0021] It should be noted that by operating the third servo motor 24 to drive the second threaded rod 23 to rotate, under the rotation limit of the second limit slide bar 25, the movable slide block 28 can move in the movable slide slot 27, thereby driving the servo electric cylinder 215 and the vacuum suction cup 216 to move to the top of the tray, and then the vacuum suction cup 216 can be moved to the surface of the pallet by the servo electric cylinder 215, so that the vacuum suction cup 216 adsorbs it, and then transports it to the placement slot 112 for circulation and transportation. When a smaller or larger pallet is needed, it is necessary The relative positions of the two vacuum suction cups 216 are changed so that the pallet can be adsorbed and transported more stably. At this time, the transmission turntable 214 can be rotated. When the transmission turntable 214 rotates, the adjusting gear 213 can be driven to rotate. When the adjusting gear 213 rotates, the two tooth plates 210 can drive the two moving sliders 28 to move toward or away from each other in the moving slide groove 27, thereby adjusting the positions of the two vacuum suction cups 216, thereby increasing the stability of the vacuum suction cups 216 when adsorbing and transporting pallets of different specifications.

[0022] The working principle and use process of the utility model are as follows: when the device is used, the third servo motor 24 drives the second threaded rod 23 to rotate. Under the rotation limit of the second limit slide bar 25, the movable slide block 28 can move in the movable slide slot 27, thereby driving the servo electric cylinder 215 and the vacuum suction cup 216 to move to the top of the tray. Then, the vacuum suction cup 216 can be moved to the surface of the tray by the servo electric cylinder 215, so that the vacuum suction cup 216 adsorbs it and then transports it to the placement slot 112. The first servo motor 14 drives the rotating gear 13 to rotate through the driving gear 15. When the rotating gear 13 rotates, the first threaded rod 17, the limit seat 18 and the first limit slide bar 19 can be driven. The dynamic carrier plate 110 rotates. When the carrier plate 110 rotates, the tray carrying the semiconductor can be circulated and transported. When a smaller or larger tray is needed, the relative positions of the two vacuum suction cups 216 need to be changed so that the tray can be adsorbed and transported more stably. At this time, the transmission turntable 214 can be rotated. When the transmission turntable 214 rotates, it can drive the adjusting gear 213 to rotate. When the adjusting gear 213 rotates, the two tooth plates 210 can drive the two moving sliders 28 to move toward or away from each other in the moving slide groove 27, thereby adjusting the positions of the two vacuum suction cups 216, thereby increasing the stability of the vacuum suction cups 216 when adsorbing and transporting trays of different specifications.

[0023] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor test tray circulation structure, comprising a circulation lifting mechanism (10), characterized in that: The upper end of the transfer lifting mechanism (10) is provided with a transport mechanism (20), and the transport mechanism (20) includes a support rod (21), and the upper surface of the support rod (21) is provided with a first slide rail (22), and the interior of the first slide rail (22) is slidably connected with a connection box (26), and the interior of the connection box (26) is provided with a movable slide groove (27), and the interior of the movable slide groove (27) is provided with a movable slider (28), and the movable slider (28) is provided with two groups, and the two groups of the movable sliders (28) are symmetrically arranged in the movable slide groove (27), and the lower surface of the movable slider (28) is provided with a servo electric cylinder (215), and the servo electric cylinder (215) ) is provided with a vacuum suction cup (216) at the output end, a limiting slide groove (29) is provided on the upper surface of the connection box (26), a tooth plate (210) is provided on the upper surface of the movable slider (28), and the tooth plate (210) is located in the limiting slide groove (29) and slides, a rotating rod (211) is provided in the middle of the upper surface of the connection box (26), a support frame (212) is provided on the upper surface of the connection box (26), and the support frame (212) is rotatably connected to the rotating rod (211), an adjusting gear (213) is provided on the circumferential surface of the rotating rod (211), and the two tooth plates (210) are meshed with the front and rear ends of the circumferential surface of the adjusting gear (213).

2. A semiconductor test tray circulation structure according to claim 1, characterized in that: The first slide rail (22) is internally rotatably connected to a second threaded rod (23), and a connecting box (26) is threadedly connected to the circumferential surface of the second threaded rod (23); an end of the connecting box (26) away from the second threaded rod (23) is slidably connected to a second limiting slide rod (25); a third servo motor (24) is provided on the side of the first slide rail (22), and an output end of the third servo motor (24) is transmission-connected to the second threaded rod (23).

3. The semiconductor test tray circulation structure according to claim 1, characterized in that: The circulation lifting mechanism (10) comprises a support seat (11), the upper surface of the support seat (11) is rotatably connected to a rotating shaft (12), one end of the rotating shaft (12) away from the support seat (11) is transmission-connected to a rotating gear (13), a motor seat is provided on the circumferential surface of the support seat (11), a first servo motor (14) is provided on the upper surface of the motor seat, an output end of the first servo motor (14) is transmission-connected to a driving gear (15), and the driving gear (15) is meshingly connected to the rotating gear (13).

4. The semiconductor test tray circulation structure according to claim 3, characterized in that: A second servo motor (16) is provided in the middle of the upper surface of the rotating gear (13); the output end of the second servo motor (16) is transmission-connected to a first threaded rod (17); the circumferential surface of the first threaded rod (17) is threadedly connected to a carrying plate (110); and a support rod (21) is arranged on the upper surface of the carrying plate (110); a limit seat (18) is provided in the middle of the upper surface of the carrying plate (110); and the limit seat (18) is threadedly connected to the first threaded rod (17); a first limit slide bar (19) is provided on the upper surface of the rotating gear (13); and the first limit slide bar (19) is provided with two groups, and the two groups of the first limit slide bars (19) are slidably connected to the carrying plate (110).

5. The semiconductor test tray circulation structure according to claim 4, characterized in that: A connecting plate (111) is provided at one end of the first limiting sliding rod (19) away from the rotating gear (13), and the first threaded rod (17) is rotatably connected to the connecting plate (111). A placement groove (112) is provided inside the circumferential surface of the supporting plate (110).

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