Evaporation source, evaporation system and composite metal film

Abstract

The embodiment of the utility model provides graphite paper, an evaporation source, an evaporation system and a composite metal film. The emissivity of the graphite paper is larger than or equal to 0.3 and smaller than 1. Or the roughness of the graphite paper ranges from 0.58 mu m to 100 mu m. An evaporation source includes: an evaporation container; the graphite paper is arranged on the periphery of the outer side of the evaporation container, and the emissivity of the graphite paper is larger than or equal to 0.3 and smaller than 1; and the heating container is used for accommodating the evaporation container provided with the graphite paper. The graphite paper is good in heat conduction effect and more uniform in heat conduction, so that the heat conduction uniformity of an evaporation source is improved. According to the evaporation source disclosed by the embodiment, the graphite paper with the emissivity is used, so that heat conduction and heat transfer can be better performed on the evaporation container.

Description

Technical Field

[0001] The utility model relates to the field of thin film evaporation, and in particular to a graphite paper, an evaporation source, an evaporation system and a composite metal film. Background Art

[0002] Evaporation system is an industrial device used to form a thin film or coating on a substrate by heating the coating material to the evaporation point, causing it to evaporate and condense on the surface of the substrate. This technology is widely used in the fields of electronics, optics, decoration and protective coating. The evaporation process is usually carried out in a vacuum environment to reduce the interaction of the coating material with impurities in the air, thereby improving the quality and purity of the coating. In the evaporation system, the evaporation source is one of the core components, which is responsible for providing enough heat to heat the coating material to the evaporated state.

[0003] However, current evaporation sources have poor thermal conductivity and uniformity of thermally conductive materials. Poor thermal conductivity can cause heat loss, which increases energy consumption, reduces the life of heating elements, and may require longer heating times to reach the desired evaporation temperature. Uneven thermal conductivity will result in uneven heating, and local overheating or insufficient heating may occur in the evaporation container, which will affect the efficiency of the evaporation process and the quality of the coating. Utility Model Content

[0004] In view of this, the purpose of the embodiments of the present invention is to provide a graphite paper, an evaporation source, an evaporation system and a composite metal film to solve the problem of poor thermal conductivity uniformity of the evaporation source.

[0005] To achieve the above objectives, in a first aspect, an embodiment of the utility model provides a graphite paper, wherein the emissivity of the graphite paper is greater than or equal to 0.3 and less than 1; or, the roughness of the graphite paper is 0.58umm-100um.

[0006] In some possible implementations, the graphite paper is used to wrap an evaporation container.

[0007] In a second aspect, an embodiment of the utility model provides an evaporation source, which includes:

[0008] Evaporation vessel;

[0009] The graphite paper according to the first aspect is arranged around the outer side of the evaporation container;

[0010] A heating container is provided to accommodate the evaporation container provided with the graphite paper.

[0011] In some possible implementations, the evaporation source further includes: thermal insulation cotton wrapped around the outer side of the graphite paper; and the heating container accommodating the evaporation container provided with the graphite paper and the thermal insulation cotton.

[0012] In some possible implementations, the evaporation container includes a crucible, and the crucible includes any one or more of the following features:

[0013] The diameter of the crucible is 20mm-200mm;

[0014] The crucible is cylindrical in shape, hollow in the middle and open at the top;

[0015] The inner surface of the crucible is provided with a layer of aluminum nitride, silicon nitride or aluminum oxide protective coating;

[0016] The crucible is made of at least one material selected from graphite, boron nitride, aluminum nitride and metal alloy.

[0017] In some possible implementations, the thickness of the protective coating is 3nm-1um; and the heating container includes a graphite heating container.

[0018] In a third aspect, an embodiment of the utility model provides an evaporation system, which includes: a vacuum chamber and the following components disposed in the vacuum chamber:

[0019] An unwinding device, used for unwinding the original film;

[0020] The cooling main roller is used to cool the original film passing through during the evaporation process;

[0021] The evaporation source according to the second aspect is arranged under the cooling main roller and is used for evaporating the original film;

[0022] The winding device is used to wind up the original film after evaporation.

[0023] In some possible embodiments, the original film is one of polyethylene, polypropylene, ethylene propylene copolymer, polyethylene terephthalate, polyethylene naphthalate, poly(p-phenylene terephthalamide), acrylonitrile-butadiene-styrene copolymer, poly(p-phenylene terephthalamide), polypropylene, polyoxymethylene, epoxy resin, phenolic resin, polytetrafluoroethylene, polyvinylidene fluoride, silicone rubber and polycarbonate.

[0024] In a fourth aspect, an embodiment of the utility model provides a composite metal film produced by the evaporation system described in the third aspect, characterized in that it includes: an original film and a coating formed on the original film.

[0025] In some possible implementations, the coating has a thickness of 10 nm-1000 nm, the total thickness of the composite metal film is 3 um-8 um, and the thickness of the original film is 3 um-8 um; and / or,

[0026] The coating is metal or non-metal, the metal includes at least one of copper, aluminum, aluminum alloy, nickel alloy, titanium alloy, and nickel alloy, and the non-metal includes aluminum nitride, silicon carbide, silicon nitride or polyethylene glycol.

[0027] The above technical solution has the following beneficial effects:

[0028] The graphite paper of this embodiment has good thermal conductivity and more uniform thermal conductivity, which is conducive to improving the uniformity of thermal conductivity of the evaporation source. The evaporation source of this embodiment can better conduct heat and transfer heat to the evaporation container by using the graphite paper with the above emissivity. Through the above settings, since the average emissivity of the graphite paper is greater than or equal to 0.3 and less than 1, or the roughness of the graphite paper is 0.58umm-100um, the heat and heat absorption of the crucible are uniform, and the material in the crucible can be heated uniformly, so that the coating formed on the original film is uniform, no holes are generated, and the quality of the film product is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0030] Figure 1 This is a schematic diagram of the structure of an evaporation source according to an embodiment of the utility model;

[0031] Figure 2 It is a structural schematic diagram of another evaporation source of an embodiment of the utility model;

[0032] Figure 3 It is a structural schematic diagram of a vapor deposition system according to an embodiment of the utility model.

[0033] Description of Figure Numbers:

[0034] 10. Evaporation container; 20. Graphite paper; 30. Heating container; 40. Insulation cotton;

[0035] 100, evaporation source; 110, vacuum chamber; 120, unwinding device; 130, cooling main roller; 140, winding device. DETAILED DESCRIPTION

[0036] The features and exemplary embodiments of various aspects of the utility model will be described in detail below. In the detailed description below, many specific details are proposed in order to provide a comprehensive understanding of the utility model. However, it is obvious to those skilled in the art that the utility model can be implemented without the need for some of these specific details. The following description of the embodiment is only to provide a better understanding of the utility model by illustrating an example of the utility model. In the drawings and the following description, at least part of the known structures and technologies are not shown in order to avoid unnecessary ambiguity to the utility model; and, for clarity, the size of some structures may be exaggerated. In addition, the features, structures or characteristics described below may be combined in one or more embodiments in any suitable manner.

[0037] Since the thermal conductivity and uniformity of the materials used for heat preservation and / or heat conduction of the evaporation container in the prior art are poor, in order to solve this technical problem, the embodiment of the utility model provides a graphite paper, an evaporation source, an evaporation system and a composite metal film. The embodiment of the utility model provides a graphite paper, the emissivity of the graphite paper is greater than or equal to 0.3 and less than 1. When the graphite paper is within this emissivity range, its thermal conductivity and heat transfer performance are optimal. This embodiment controls the surface emissivity of the graphite paper, mainly by controlling the surface roughness of the graphite paper. The roughness of the graphite paper within this emissivity range is 0.58um-100um.

[0038] The roughness of graphite paper is 0.58um-100um, and there can be multiple specific intermediate values ​​within this range. The roughness value depends on the manufacturing process of graphite paper and the required application scenario. The following are some possible intermediate values, all of which are in the range of 0.58um to 100um: 1um, 2um, 5um, 10um, 20um, 30um, 40um, 50um, 60um, 70um, 80um, 90um. These values ​​are only examples, and the actual roughness value can be any value in the range of 0.58um to 100um, including non-integer values ​​such as 3.5um, 12.7um, 45.6um, etc.

[0039] In the range of emissivity from 0.3 to 1, the present embodiment can provide the following multiple representative intermediate emissivity values: 0.35, 0.4, 0.45, 0.5, 0.55, 0.6, 0.65, 0.7, 0.75, 0.8, 0.85, 0.9, 0.95. According to the specific use and preparation process of the graphite paper, the best emissivity can be selected from these intermediate values ​​to optimize the thermal conductivity and heat transfer performance of the graphite paper.

[0040] Thermal conductivity refers to the ability of a material to transfer heat energy inside. The thermal conductivity of graphite paper depends on its internal structure and composition, which determines the efficiency of heat transfer inside the material. Graphite has good thermal conductivity because its layered structure allows heat energy to be efficiently transferred between layers. Heat transfer performance generally involves the ability to transfer heat energy from one object to another. In the evaporation system, graphite paper is able to effectively transfer heat energy from the heating source to the material in the crucible. Emissivity plays a key role here because it affects the thermal radiation exchange between the surface of the graphite paper and the surrounding environment. When the emissivity of graphite paper is between 0.3 and 1, it is able to absorb more thermal radiation energy and convert it into heat energy, while also being able to effectively release heat energy into the crucible in the form of radiation. The emissivity within this range ensures that the graphite paper minimizes the loss of heat energy while maintaining the crucible temperature, and ensures uniform heating of the material in the crucible, which is essential for obtaining high-quality coatings during the evaporation process.

[0041] The emissivity of graphite paper has an important influence on the uniform heat absorption, heating and thermal conductivity of the crucible. The following is a specific analysis:

[0042] The emissivity of graphite paper affects its ability to absorb thermal radiation. When the emissivity of graphite paper is between 0.3 and 1, it can evenly absorb the thermal radiation energy from the heating source. This means that the entire surface of the graphite paper can effectively absorb heat energy without local overheating or insufficient heat absorption. Therefore, the selection of the emissivity range of graphite paper helps to ensure uniform heat absorption in the crucible, thereby providing uniform heat input for the evaporation process.

[0043] The thermal energy absorbed by the graphite paper is converted into heat and transferred to the inside of the crucible. Since the graphite paper can effectively absorb and release thermal radiation energy within the emissivity range, the heat is transferred to the inside of the crucible more evenly, so that the material in the crucible is heated evenly. This helps to avoid local temperatures that are too high or too low, ensuring that the material in the crucible is heated evenly during the evaporation process, which is conducive to the formation of a uniform coating.

[0044] Graphite paper within the above emissivity range can ensure uniform heat transfer inside the crucible and avoid excessive local temperature gradients, thereby facilitating the formation of a uniform coating and achieving uniform thermal conductivity.

[0045] Therefore, the selection of the emissivity range of the graphite paper is conducive to the uniform heat absorption, uniform heating and uniform thermal conductivity of the crucible. During the evaporation process, the improvement of thermal conductivity uniformity helps to ensure the uniformity and quality of the coating, avoid the generation of holes or other defects, and thus improve the quality of the final film product.

[0046] like Figure 1As shown, the embodiment of the utility model further provides an evaporation source 100, which includes an evaporation container 10, the above-mentioned graphite paper 20 arranged around the outside of the evaporation container 10, and the evaporation container 10 wrapped by the graphite paper 20 is arranged in the heating container 30, thus constituting an evaporation source 100 of the embodiment of the utility model.

[0047] The evaporation container 10 includes a crucible, which can be made of the following materials: graphite, boron nitride, aluminum nitride, metal alloy, etc. The diameter of the crucible is 20-200 mm, such as 50 mm, 100 mm, 150 mm, 75 mm, 125 mm, 175 mm. The shape of the crucible can be cylindrical, hollow in the middle, and open at the top, for containing materials to be evaporated, such as metal aluminum, copper, etc.

[0048] The crucible adopts a cylindrical hollow design with an open top, which has the following advantages: the cylindrical crucible is easy to process and manufacture, the molding process is simple, and the production cost is low; the cylindrical shape has good structural strength, can withstand a certain internal pressure, and is safe and reliable to use; the cylindrical design maximizes the contact area between the inner wall and the heating source, which is beneficial to heat transfer and improves evaporation efficiency; the cylindrical crucible is easy to arrange heating structures such as graphite paper on its periphery.

[0049] In another embodiment, the evaporation container 10 includes a vacuum evaporation boat, which is a container similar to a crucible and is used to evaporate materials in a vacuum environment for processes such as thin film deposition and vacuum coating.

[0050] Furthermore, in order to prevent metals such as aluminum or copper from penetrating into the crucible, a layer of aluminum nitride protective coating, silicon nitride protective coating or aluminum oxide protective coating may be provided on the inner surface of the crucible, and the thickness of the protective coating may be 3nm-1um.

[0051] The graphite paper 20 of this embodiment has good thermal conductivity and more uniform thermal conductivity, which is beneficial to improving the thermal conductivity uniformity of the evaporation source 100. The evaporation source 100 of this embodiment can better conduct heat for the evaporation container 10 by using the graphite paper 20 with the above emissivity.

[0052] like Figure 2As shown, in another embodiment, the embodiment of the utility model also provides another evaporation source 100, which includes an evaporation container 10, the above-mentioned graphite paper 20 arranged around the outside of the evaporation container 10, and a heat preservation cotton 40 is arranged around the graphite paper 20. The evaporation container 10 wrapped by the heat preservation cotton 40 is arranged in the heating container 30, thus constituting another evaporation source 100 of the embodiment of the utility model. The above-mentioned heating container 30 can be a graphite heating container 30, a heating container with an electric heating wire / electric heating plate, an electromagnetic induction heater, etc. The function of the above-mentioned heat preservation cotton 40 is to keep the crucible warm. The above-mentioned evaporation source 100 can better keep the crucible warm and transfer heat by using the above-mentioned graphite paper 20. The use of a graphite heating container has the following advantages: graphite has good thermal conductivity and can quickly convert electrical energy into thermal energy, thereby heating the material in the crucible; the graphite heating container can provide a stable heating temperature, which is conducive to the stable evaporation of the material; the graphite heating container has a simple structure and is easy to achieve precise temperature control; the graphite heating container reacts quickly, has high heating efficiency, and can heat up quickly; the graphite heating container is safe to use, does not produce open flames, and reduces safety hazards.

[0053] In order to give full play to the functions of the graphite paper 20 and the thermal insulation cotton 40 and make the evaporation source work more effectively, the graphite paper 20 and the thermal insulation cotton 40 are preferably tightly wrapped in corresponding positions.

[0054] like Figure 3 As shown, the embodiment of the utility model further provides an evaporation system, which includes: a vacuum chamber 110 and the following components arranged in the vacuum chamber 110: a cooling main roller 130, which is used to cool the original film passing through during the evaporation process; the evaporation source 100 as described above, which is arranged under the cooling main roller 130, and is used to evaporate the original film; a unwinding device 120, which is used to unwind the original film; and a winding device 140, which is used to wind up the original film after evaporation.

[0055] Specifically, the evaporation system includes a vacuum chamber 110, the evaporation source 100 is arranged in the vacuum chamber 110, a cooling main roller 130 is also arranged in the evaporation system, the evaporation source 100 is arranged under the cooling main roller 130, and an original film, a unwinding device 120 and a winding device 140 are also arranged in the vacuum chamber 110. After the original film is unwound from the unwinding device 120, it passes through the cooling main roller 130, and the metal in the evaporation source 100 evaporates and comes out of the crucible to form on the original film to form a coating, and then it is wound up by the winding device 140.

[0056] The embodiment of the utility model also includes a composite metal film produced by the above-mentioned evaporation system, and the composite metal film includes the above-mentioned original film and a coating formed on the original film, and the coating can be metal or non-metal. For example, the metal can be copper, aluminum, aluminum alloy, nickel alloy, titanium alloy, nickel alloy, etc., and the non-metal can be aluminum nitride, silicon carbide, silicon nitride, and even polyethylene glycol. The thickness of the coating, that is, the coating thickness on the upper surface of the original film is 10nm-1000nm, and the thickness of the coating on the lower surface of the original film can be 10nm-1000nm. The original film of the embodiment of the utility model can be one of polyethylene, polypropylene, ethylene propylene copolymer, polyethylene terephthalate, polyethylene naphthalate, and poly(p-phenylene terephthalamide), acrylonitrile-butadiene-styrene copolymer, poly(p-phenylene terephthalamide), polypropylene, polyoxymethylene, epoxy resin, phenolic resin, polytetrafluoroethylene, polyvinylidene fluoride, silicone rubber and polycarbonate.

[0057] The thickness of the original film of the embodiment of the utility model can be 3-8um. Within this range, the original film can be prevented from being broken on the machine, and the weight of the polymer conductive film of the embodiment of the utility model can be reduced as much as possible. The thickness of the finished polymer conductive film of the embodiment of the utility model is 3-8umn. For example, if the thickness of the original film is 3um, the thickness of the finished film can be 5um, and the conductive material can be 1um on the upper surface of the original film and 1um on the lower surface.

[0058] Through the above arrangement, since the average emissivity of the graphite paper 20 is greater than or equal to 0.3 and less than 1, the crucible can be heated and absorbed evenly at all locations, and the material in the crucible can be heated evenly, so that the coating formed on the original film is uniform without the generation of holes, thereby improving product quality.

[0059] In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "upper, lower, inner and outer" are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first, second or third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0060] In this utility model, unless otherwise clearly specified and limited, the terms "install, connect, connect" should be understood in a broad sense, for example: it can be a fixed connection, a detachable connection or an integral connection; it can also be a mechanical connection, an electrical connection or a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0061] Although the present invention has been described with reference to preferred embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present invention. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there is no structural conflict. The present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. An evaporation source (100), characterized in that: include: An evaporation container (10) and graphite paper (20) are arranged around the outer side of the evaporation container (10) and are used to wrap the evaporation container (10); A heating container (30) accommodates an evaporation container (10) provided with the graphite paper (20); wherein the emissivity of the graphite paper (20) is greater than or equal to 0.3 and less than 1; or the roughness of the graphite paper (20) is 0.58umm-100um.

2. The evaporation source (100) according to claim 1, characterized in that: Also includes: Thermal insulation cotton (40), arranged around the outer side of the graphite paper (20); The heating container (30) accommodates an evaporation container (10) provided with the graphite paper (20) and the heat-insulating cotton (40).

3. The evaporation source (100) according to claim 1, characterized in that: The evaporation container (10) comprises a crucible, and the crucible comprises any one or more of the following features: The diameter of the crucible is 20mm-200mm; The crucible is cylindrical in shape, hollow in the middle and open at the top; The inner surface of the crucible is provided with a layer of aluminum nitride, silicon nitride or aluminum oxide protective coating; The crucible is made of any one of graphite, boron nitride, aluminum nitride and metal alloy.

4. The evaporation source (100) according to claim 3, characterized in that: The thickness of the protective coating is 3nm-1um; and the heating container (30) comprises a graphite heating container (30).

5. A vapor deposition system, characterized in that: include: A vacuum chamber (110) and the following components arranged in the vacuum chamber (110): An unwinding device (120) for unwinding the original film; A cooling main roller (130) is used to cool the original film passing through during the evaporation process; An evaporation source (100) according to any one of claims 1 to 4, arranged under the cooling main roller (130), for evaporating the original film; The winding device (140) is used to wind up the original film after vapor deposition.

6. The evaporation system according to claim 5, characterized in that: The original film is one of polyethylene, polypropylene, ethylene propylene copolymer, polyethylene terephthalate, polyethylene naphthalate, poly(p-phenylene terephthalamide), acrylonitrile-butadiene-styrene copolymer, polypropylene, polyoxymethylene, epoxy resin, phenolic resin, polytetrafluoroethylene, polyvinylidene fluoride, silicone rubber and polycarbonate.

7. A composite metal film produced by the evaporation system according to claim 6, characterized in that: include: An original film and a coating formed on the original film.

8. The composite metal film according to claim 7, characterized in that: The thickness of the coating is 10nm-1000nm, the total thickness of the composite metal film is 3um-8um, and the thickness of the original film is 3um-8um; and / or, The coating is metal or non-metal, the metal includes copper, aluminum, aluminum alloy, nickel alloy, titanium alloy or nickel alloy, and the non-metal includes aluminum nitride, silicon carbide, silicon nitride or polyethylene glycol.

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