Anti-deformation bearing device for silicon wafer coating

Abstract

A rear vertical beam assembly and a front vertical beam assembly are arranged between a first end face cross beam assembly and a second end face cross beam assembly, a middle cross beam assembly is connected between the rear vertical beam assembly and the front vertical beam assembly, the first end face cross beam assembly is connected with a first tray assembly through a first end face cross beam supporting table, and the second end face cross beam assembly is connected with a second tray assembly through a second end face cross beam supporting table. The second end face cross beam assembly is connected with the second tray assembly through a second end face cross beam supporting table, the first tray assembly is fastened to the first end face cross beam supporting table through an outer hexagonal equal-height screw, the outer hexagonal equal-height screw is provided with a locknut, and a peek gasket is arranged between the locknut and the first tray assembly. The planeness of the tray is ensured, and convenience and reliability are achieved.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon wafer equipment and relates to an anti-deformation bearing device used for silicon wafer coating. Background Art

[0002] The heterojunction cell uses n-type monocrystalline silicon wafer as substrate. After texturing and cleaning, the plasma enhanced chemical vapor deposition (PECVD) method is used on the front to deposit 3-5nm thick intrinsic amorphous silicon film ia-Si and p-type amorphous silicon film pa-Si, thus forming a pn heterojunction.

[0003] The existing tray will deform after being heated, thereby affecting the flatness of the silicon wafer supporting device and reducing the coating quality of the silicon wafer. Utility Model Content

[0004] In view of the above problems existing in the prior art, the present application provides an anti-deformation supporting device for silicon wafer coating.

[0005] The technical solution of the utility model is as follows:

[0006] A deformation-proof bearing device for silicon wafer coating comprises an end cross beam component 1 and an end cross beam component 2, a rear vertical beam component and a front vertical beam component are arranged between the end cross beam component 1 and the end cross beam component 2, an intermediate cross beam component is connected between the rear vertical beam component and the front vertical beam component, the end cross beam component 1 is connected to the tray component 1 through the end cross beam support platform 1, the end cross beam component 2 is connected to the tray component 2 through the end cross beam support platform 2, the tray component 1 is fastened to the end cross beam support platform 1 through the external hexagonal contour screw, the external hexagonal contour screw is equipped with a locking nut, and a peek washer is arranged between the locking nut and the tray component 1.

[0007] As a preferred implementation mode of the utility model: the end cross beam assembly is connected to the rear vertical beam assembly through the end right flange, and the end cross beam assembly is connected to the front vertical beam assembly through the end left flange.

[0008] As a preferred implementation mode of the utility model: the middle cross beam assembly is connected to the rear vertical beam assembly via the middle right flange, and the middle cross beam assembly is connected to the front vertical beam assembly via the middle left flange.

[0009] As a preferred implementation mode of the utility model: the second end cross beam assembly is connected to the rear vertical beam assembly via the second end right flange, and the second end cross beam assembly is connected to the front vertical beam assembly via the second end left flange.

[0010] As a preferred embodiment of the present utility model: support beam 1 and support beam 2 are arranged below tray component 1, and support beam 3 and support beam 4 are arranged below tray component 2.

[0011] As a preferred embodiment of the present utility model: a peek washer is provided between the end face cross beam support platform 1 and the tray component 1, and a peek washer is provided between the end face cross beam support platform 2 and the tray component 2.

[0012] The beneficial effects of the utility model are:

[0013] The utility model discloses an anti-deformation bearing device for silicon wafer coating, wherein a tray assembly can be fastened by an external hexagon shaped height screw, the external hexagon shaped height screw is equipped with an anti-loosening nut, the external hexagon shaped height screw will not be completely locked under the condition of ensuring locking, a peek washer is arranged between the anti-loosening nut and the tray assembly, the peek washer has a low friction coefficient and a smooth surface, so that the resistance encountered by the tray when it is heated is reduced, thereby reducing the extension resistance of the tray when it is heated, improving the flatness of the silicon wafer bearing device, improving the coating quality of the silicon wafer, and being convenient and reliable. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a front view of an anti-deformation carrying device for silicon wafer coating according to the utility model;

[0015] Figure 2 It is a three-dimensional diagram of the utility model;

[0016] Figure 3 This is the enlarged view of point A;

[0017] Figure 4 It is a back perspective view of the utility model.

[0018] In the figure: 1-end face cross beam assembly 1; 2-end face cross beam support platform 1; 3-end face right flange 1; 4-rear vertical beam assembly; 5-middle cross beam assembly; 6-middle right flange; 7-tray assembly 2; 8-end face right flange 2; 9-end face cross beam support platform 2; 10-end face cross beam assembly 2; 11-end face left flange 2; 12-middle left flange; 13-front vertical beam assembly; 14-end face left flange 1; 15-tray assembly 1; 16-support beam 1; 17-support beam 2; 18-support beam 3; 19-support beam 4; 20-peek washer; 21-locking nut; 22-external hexagonal equal height screw. DETAILED DESCRIPTION

[0019] The present invention is described in detail below in conjunction with the accompanying drawings and embodiments. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0020] like Figure 1-4As shown, an anti-deformation bearing device for silicon wafer coating includes an end cross beam component 1 and an end cross beam component 2 10, a rear vertical beam component 4 and a front vertical beam component 13 are arranged between the end cross beam component 1 and the end cross beam component 2 10, an intermediate cross beam component 5 is connected between the rear vertical beam component 4 and the front vertical beam component 13, the end cross beam component 1 is connected to the tray component 15 through the end cross beam support 2, the end cross beam component 2 10 is connected to the tray component 2 7 through the end cross beam support 2 9, the tray component 15 is fastened to the end cross beam support 2 through the external hexagonal contour screw 22, the external hexagonal contour screw 22 is equipped with a locking nut 21, and a peek washer 20 is arranged between the locking nut 21 and the tray component 15.

[0021] The end cross beam assembly 1 is connected to the rear vertical beam assembly 4 through the end right flange 13, and the end cross beam assembly 1 is connected to the front vertical beam assembly 13 through the end left flange 14; the middle cross beam assembly 5 is connected to the rear vertical beam assembly 4 through the middle right flange 6, and the middle cross beam assembly 5 is connected to the front vertical beam assembly 13 through the middle left flange 12; the end cross beam assembly 2 10 is connected to the rear vertical beam assembly 4 through the end right flange 2 8, and the end cross beam assembly 2 10 is connected to the front vertical beam assembly 13 through the end left flange 2 11; support beam 1 16 and support beam 2 17 are arranged below the tray assembly 1 15, and support beam 3 18 and support beam 4 19 are arranged below the tray assembly 2 7; a peek gasket 20 is arranged between the end cross beam support 2 and the tray assembly 15, and a peek gasket 20 is arranged between the end cross beam support 2 9 and the tray assembly 2 7.

[0022] To sum up, the utility model is an anti-deformation bearing device for silicon wafer coating. The tray assembly can be fastened by external hexagonal contour screws. The external hexagonal contour screws are equipped with anti-loosening nuts. The external hexagonal contour screws will not be completely locked while ensuring locking. A peek washer is arranged between the anti-loosening nut and the tray assembly. The peek washer has a low friction coefficient and a smooth surface, which reduces the resistance to the extension of the tray when heated, thereby reducing the extension resistance of the tray when heated, improving the flatness of the silicon wafer bearing device, and improving the quality of silicon wafer coating.

[0023] Although the implementation scheme of the utility model has been disclosed as above, it is not limited to the applications listed in the specification and implementation modes, and it can be fully applicable to various fields suitable for the utility model. For those familiar with the art, for ordinary technicians in the art, these embodiments can be changed, modified, replaced and modified without departing from the principle and spirit of the utility model. Therefore, without departing from the general concept defined by the claims and the equivalent scope, the utility model is not limited to specific details.

Claims

1. An anti-deformation bearing device for silicon wafer coating, characterized in that: The invention comprises an end cross beam assembly 1 (1) and an end cross beam assembly 2 (10), wherein a rear vertical beam assembly (4) and a front vertical beam assembly (13) are arranged between the end cross beam assembly 1 (1) and the end cross beam assembly 2 (10), and an intermediate cross beam assembly (5) is connected between the rear vertical beam assembly (4) and the front vertical beam assembly (13); the end cross beam assembly 1 (1) is connected to a tray assembly 1 (15) via an end cross beam support platform 1 (2); the end cross beam assembly 2 (10) is connected to a tray assembly 2 (7) via an end cross beam support platform 2 (9); the tray assembly 1 (15) is fastened to the end cross beam support platform 1 (2) via an external hexagonal height screw (22); the external hexagonal height screw (22) is equipped with a locking nut (21); and a peek washer (20) is arranged between the locking nut (21) and the tray assembly 1 (15).

2. The anti-deformation carrying device for silicon wafer coating according to claim 1, characterized in that: The end face cross beam assembly 1 (1) is connected to the rear vertical beam assembly (4) via the end face right flange 1 (3), and the end face cross beam assembly 1 (1) is connected to the front vertical beam assembly (13) via the end face left flange 1 (14).

3. The anti-deformation carrying device for silicon wafer coating according to claim 1, characterized in that: The middle cross beam assembly (5) is connected to the rear vertical beam assembly (4) via a middle right flange (6), and the middle cross beam assembly (5) is connected to the front vertical beam assembly (13) via a middle left flange (12).

4. The anti-deformation carrying device for silicon wafer coating according to claim 1, characterized in that: The second end face cross beam assembly (10) is connected to the rear vertical beam assembly (4) via the second end face right flange (8), and the second end face cross beam assembly (10) is connected to the front vertical beam assembly (13) via the second end face left flange (11).

5. The anti-deformation carrying device for silicon wafer coating according to claim 1, characterized in that: A support beam 1 (16) and a support beam 2 (17) are arranged below the tray component 1 (15), and a support beam 3 (18) and a support beam 4 (19) are arranged below the tray component 2 (7).

6. The anti-deformation bearing device for silicon wafer coating according to any one of claims 1 to 5, characterized in that: A peek washer (20) is provided between the end face cross beam support platform 1 (2) and the tray assembly 1 (15), and a peek washer (20) is provided between the end face cross beam support platform 2 (9) and the tray assembly 2 (7).

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