Device for molecular beam epitaxy and crystal growth

Abstract

The utility model is suitable for the technical field of vacuum film deposition, and provides a device for molecular beam epitaxy and crystal growth. The device for molecular beam epitaxy and crystal growth comprises a vacuum cavity, a gas supply unit, a vacuum obtaining device, a pressure detection unit and an adjusting valve, and the vacuum obtaining device is communicated with a pipeline of the vacuum cavity and used for reducing pressure in the vacuum cavity; the gas supply unit communicates with the vacuum cavity through a pipeline and is used for inputting gas into the vacuum cavity, and the pressure detection unit is used for detecting the pressure value in the vacuum cavity; the adjusting valve is arranged on a pipeline between the vacuum obtaining device and the vacuum cavity; the adjusting valve comprises a valve body and an adjusting structure, at least part of the adjusting structure is arranged in the valve body, and the adjusting structure is used for adjusting the opening degree of the whole valve body, so that pressure adjustment of the whole equipment is more convenient.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum thin film deposition, in particular to a device used for molecular beam epitaxy and crystal growth. Background Art

[0002] Vacuum thin film deposition is a thin film deposition technology performed in a vacuum environment. It is widely used in the fields of electronics, semiconductors, aerospace, energy science, nuclear industry, optics, decoration and protective coatings. Its working principle is to form a thin film on a substrate or workpiece by physical (including evaporation, sputtering, etc.) or chemical methods under vacuum conditions. Among them, the device used for molecular beam epitaxy and crystal growth requires a constant vacuum environment during operation. However, since the vacuum chamber is connected to the gas supply system, the gas supply system will provide gas to the vacuum chamber, which will cause the pressure in the vacuum chamber to change. Therefore, the pressure of the vacuum chamber needs to be adjusted to keep the pressure stable. However, most of the existing devices for molecular beam epitaxy and crystal growth have the technical problem of inconvenient vacuum pressure regulation. Utility Model Content

[0003] The utility model aims to provide a device for molecular beam epitaxy and crystal growth, aiming to solve the technical problem of inconvenient pressure regulation in the vacuum chamber in the prior art.

[0004] The utility model is implemented as follows: a device for molecular beam epitaxy and crystal growth, the device for molecular beam epitaxy and crystal growth comprising a vacuum chamber, a gas supply unit, a vacuum obtaining device, a pressure detection unit and a regulating valve, the vacuum obtaining device is connected to the vacuum chamber pipeline and is used to extract the gas in the vacuum chamber; the gas supply unit is connected to the vacuum chamber pipeline and is used to input gas into the vacuum chamber, the pressure detection unit is used to detect the pressure value in the vacuum chamber; the regulating valve is arranged on the pipeline between the vacuum obtaining device and the vacuum chamber; the regulating valve comprises a valve body and a regulating structure, at least a part of the regulating structure is arranged in the valve body, and the regulating structure is used to adjust the opening of the valve body.

[0005] In an optional embodiment, the valve body has a first opening, a second opening and a channel connecting the first opening and the second opening, and the adjustment structure includes a valve flap and a drive group. The valve flap is movably arranged in the valve body, and the drive group is used to drive the valve flap to move between a first position covering the first opening and a second position avoiding the channel.

[0006] In an optional embodiment, the driving group includes a rotating rod body and a power unit, the rotating rod body has the freedom to rotate around its own axis relative to the valve body, the valve flap only has the freedom to move along the axis of the rotating rod body relative to the valve body, the first end of the rotating rod body is located in the valve body and is threadedly connected to the valve flap, and the second end of the rotating rod body is located outside the valve body and is connected to the driving end of the power unit.

[0007] In an optional embodiment, the regulating valve also includes a telescopic sealing sleeve, which is located on the side of the valve disc away from the first opening and is sleeved on the outside of the connecting structure between the valve disc and the rotating rod body, the first end of the telescopic sealing sleeve is sealed to the valve disc, and the second end of the telescopic sealing sleeve is sealed to the inner wall of the valve body, and the telescopic sealing sleeve can be switched between a first telescopic state corresponding to the first position and a second telescopic state corresponding to the second position under the drive of the valve disc.

[0008] In an optional embodiment, a first boss is provided on the side of the valve flap facing away from the first opening, the first end sealing sleeve of the telescopic sealing sleeve is provided on the first boss, a second boss is provided on the inner wall of the valve body, the second boss is located on the side of the second position facing away from the first position, and the second end sealing sleeve of the telescopic sealing sleeve is provided on the second boss.

[0009] In an optional embodiment, the valve flap includes a main cover body and a connecting column, wherein the connecting column is connected to the side of the main cover body facing the rotating rod body, and a receiving hole coaxially arranged with the rotating rod body is provided on the connecting column, and the second end of the rotating rod body is threadedly connected to the inner wall of the receiving hole.

[0010] In an optional embodiment, a sealing structure is provided on the valve body and / or the main cover body, and the sealing structure is used to make the main cover body and the valve body in sealing contact when the main cover body moves to the first position.

[0011] In an optional embodiment, the sealing structure includes a sealing ring arranged on a plate surface of the main cover body facing the first opening, and the valve body is provided with a sealing surface for cooperating with the sealing ring, and the sealing surface is arranged around the first opening.

[0012] In an optional embodiment, a connection unit is further provided between the driving end of the power unit and the second end of the rotating rod body, and the driving end of the power unit is detachably connected to the second end of the rotating rod body through the connection unit.

[0013] In an optional embodiment, a mounting bracket is provided on the outside of the valve body, the power unit is connected to the mounting bracket and spaced apart from the valve body, and an escape space is provided on the mounting bracket, and the escape space is used to accommodate the connection unit.

[0014] The technical effect of the utility model compared with the prior art is: the vacuum cavity is connected to the vacuum obtaining device and the gas supply unit through pipelines respectively, the pressure value in the vacuum cavity can be continuously reduced through the vacuum obtaining device, and gas is input into the vacuum cavity through the gas supply unit. At the same time, a pressure detection unit is arranged on the vacuum cavity, which can detect the pressure in the vacuum cavity. In addition, a regulating valve including a valve body and a regulating structure is arranged on the pipeline between the vacuum cavity and the vacuum obtaining device, at least part of the regulating structure is arranged in the valve body, and the regulating structure is used to adjust the opening of the valve body. Compared with the prior art, the pressure in the vacuum chamber is detected by a pressure detection unit. When the pressure in the vacuum chamber is greater than a preset value, the opening of the valve body can be increased by an adjusting component, so that the amount of gas extracted from the vacuum chamber by the vacuum obtaining device per unit time can be greater than the amount of gas supplied by the gas supply unit, thereby reducing the pressure in the vacuum chamber; when the pressure in the vacuum chamber is less than a preset value, the opening of the valve body can be reduced by an adjusting component, so that the amount of gas extracted from the vacuum chamber by the vacuum obtaining device per unit time can be less than the amount of gas supplied by the gas supply unit, thereby increasing the pressure in the vacuum chamber and making pressure regulation of the entire equipment more convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments of the utility model or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 It is a schematic structural diagram of a device for molecular beam epitaxy and crystal growth provided by an embodiment of the utility model;

[0017] Figure 2 It is a structural schematic diagram of the regulating valve used in the embodiment of the utility model;

[0018] Figure 3 It is a schematic cross-sectional structure diagram of the regulating valve used in the embodiment of the utility model;

[0019] Figure 4 yes Figure 3 Schematic diagram of the enlarged structure at point A in the middle.

[0020] Description of reference numerals:

[0021] 1. Vacuum chamber; 2. Air supply unit; 3. Vacuum obtaining device; 4. Pressure detection unit; 5. Adjusting valve; 51. Valve body; 511. Second boss; 512. Sealing surface; 513. Main body; 514. Sealing end cover; 52. Adjusting structure; 521. Valve flap; 5211. Main cover; 5212. Connecting column; 5213. Sealing ring; 5214. First boss; 5215. Accommodating hole; 522. Driving group; 5221. Rotating rod; 5222. Power unit; 53. First opening; 54. Second opening; 55. Telescopic sealing sleeve; 56. Mounting bracket; 57. Connecting unit; 58. Connecting part; 6. Control unit. DETAILED DESCRIPTION

[0022] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0023] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0024] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0025] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0027] Please refer to Figures 1 to 4 As shown, in an embodiment of the utility model, a device for molecular beam epitaxy and crystal growth is provided, and the device for molecular beam epitaxy and crystal growth includes a vacuum chamber 1, a gas supply unit 2, a vacuum obtaining device 3, a pressure detection unit 4 and a regulating valve 5. The vacuum obtaining device 3 is connected to the vacuum chamber 1 through a pipeline, and is used to reduce the pressure in the vacuum chamber 1. The gas supply unit 2 is connected to the vacuum chamber 1 through a pipeline, and is used to input gas into the vacuum chamber 1. The pressure detection unit 4 is used to detect the pressure value in the vacuum chamber 1. The regulating valve 5 is arranged on the pipeline between the vacuum obtaining device 3 and the vacuum chamber 1. The regulating valve 5 includes a valve body 51 and a regulating structure 52, at least a part of the regulating structure 52 is arranged in the valve body 51, and the regulating structure 52 is used to adjust the opening of the valve body 51.

[0028] Specifically, the vacuum chamber 1 refers to a closed container with a certain accommodation space. When working, the vacuum chamber 1 is in a relatively "vacuum" state, that is, the pressure in the vacuum chamber 1 is less than the external air pressure. The vacuum obtaining device 3 refers to a device that can generate or maintain a vacuum degree, wherein the vacuum obtaining device 3 can be a single device such as a vacuum pump, a vacuum unit, etc., and the vacuum obtaining device 3 can also be a vacuum pipeline composed of multiple devices. The gas supply unit 2 can be a gas storage container, a gas making device, etc., and the gas supply unit 2 can also be a gas supply pipeline composed of multiple devices. The gas supply unit 2 provides a specific gas or a mixed gas to the inside of the device, thereby changing the atmosphere inside the device and affecting the performance, color or adhesion of the coating material. The pressure detection unit 4 refers to a component for detecting or monitoring pressure. The pressure detection unit 4 can include a pressure sensor and a signal conversion part, wherein the pressure sensor can be mechanical, electrical, thin film, optical, etc.

[0029] The regulating valve 5 refers to a valve structure that can regulate the flow rate passing through it, wherein the valve body 51 refers to a shell-like structure with a certain space inside, and the regulating structure 52 refers to an adjusting component arranged in the valve body 51 to adjust the opening of the valve body 51. The regulating structure 52 can be driven manually by an operator, or by a power unit such as a motor or a cylinder. The opening of the valve body 51 refers to the degree of change between the valve opening and the closed state. Under the same pressure and flow rate conditions, the larger the opening, the larger the flow rate that can pass through the valve, and the smaller the opening, the smaller the flow rate that can pass through the valve.

[0030] The device for molecular beam epitaxy and crystal growth provided by the embodiment of the utility model connects the vacuum cavity 1 with the vacuum obtaining device 3 and the gas supply unit 2 through pipelines respectively. The pressure value in the vacuum cavity 1 can be continuously reduced through the vacuum obtaining device 3, and gas is input into the vacuum cavity 1 through the gas supply unit 2. At the same time, a pressure detection unit 4 is provided on the vacuum cavity 1, which can detect the pressure in the vacuum cavity 1. In addition, a regulating valve 5 including a valve body 51 and an adjusting structure 52 is provided on the pipeline between the vacuum cavity 1 and the vacuum obtaining device 3, at least part of the adjusting structure 52 is provided in the valve body 51, and the adjusting structure 52 is used to adjust the opening of the valve body 51. Compared with the prior art, the pressure in the vacuum chamber 1 is detected by the pressure detection unit 4. When the pressure in the vacuum chamber 1 is greater than a preset value, the opening of the valve body 51 can be increased by the adjusting component, so that the amount of gas extracted from the vacuum chamber 1 by the vacuum obtaining device 3 per unit time can be greater than the amount of gas supplied by the gas supply unit 2, thereby reducing the pressure in the vacuum chamber 1; when the pressure in the vacuum chamber 1 is less than a preset value, the opening of the valve body 51 can be reduced by the adjusting component, so that the amount of gas extracted from the vacuum chamber 1 by the vacuum obtaining device 3 per unit time can be less than the amount of gas supplied by the gas supply unit 2, thereby increasing the pressure in the vacuum chamber 1 and making the pressure regulation of the equipment more convenient.

[0031] In one embodiment, see Figure 2 and Figure 3The valve body 51 has a first opening 53, a second opening 54 and a passage connecting the first opening 53 and the second opening 54. The regulating structure 52 includes a valve flap 521 and a driving group 522. The valve flap 521 is movably arranged in the valve body 51. The driving group 522 is used to drive the valve flap 521 to move between a first position of covering the first opening 53 and a second position of avoiding the passage. Specifically, the first opening 53 and the second opening 54 both refer to opening structures that can connect the valve body 51 with the outside, wherein the first opening 53 can be connected to the pipeline of the vacuum chamber 1, and the second opening 54 is connected to the pipeline of the vacuum obtaining device 3; the first opening 53 can also be connected to the pipeline of the vacuum obtaining device 3, and the second opening 54 is connected to the pipeline of the vacuum chamber 1. The channel refers to the area in the valve body 51 that connects the first opening 53 and the second opening 54. The first position refers to the position where the valve flap 521 completely covers the first opening 53. The second position refers to the position where the valve flap 521 is away from the first opening 53 and avoids the channel to connect the first opening 53 and the second opening 54. The valve flap 521 refers to a component with a certain volume. The valve flap 521 can be disc-shaped, block-shaped, columnar, etc., and the valve flap 521 can also be a combination of multiple shapes. The drive group 522 refers to a component that can drive an object to move. The drive group 522 can adopt a linear drive structure, such as a cylinder, a hydraulic cylinder, an electric push rod, etc.; the drive group 522 can also adopt a screw and a motor that cooperate with each other. The valve flap 521 is movably arranged in the valve body 51, and at the same time, the valve flap 521 can be driven by the drive group 522 to move between the first position and the second position. When the valve flap 521 is in the first position, the valve flap 521 completely covers the first opening 53, and the opening of the entire valve body 51 is the smallest, and the first opening 53 and the second opening 54 are completely blocked and separated; when the valve flap 521 is in the first position, the valve flap 521 is away from the first opening 53, and the opening of the entire valve body 51 is increased. The opening of the valve body 51 is adjusted by using the driving group 522 to drive the valve flap 521 away from or close to the first opening 53, so that the valve opening adjustment is more convenient, and the pressure adjustment is also more convenient.

[0032] In an alternative embodiment, see Figure 2 , a connecting portion 58 is provided at both the first opening 53 and the second opening 54, and the connecting portion 58 is used to connect the first opening 53 or the second opening 54 with other pipes. Specifically, the connecting portion 58 refers to a component with a certain length and a channel provided inside, one end of the connecting portion 58 is connected with the first opening 53 or the second opening 54, and the other end of the connecting portion 58 extends in a direction away from the valve body 51, wherein the connecting portion 58 is generally an integrally formed structure with the valve body 51. The provision of the connecting portion 58 can make it easier to connect the first opening 53 or the second opening 54 with other components or pipes, and can also make the sealing performance of the connection between the valve body 51 and other components better.

[0033] In one embodiment, see Figure 3 , the driving group 522 includes a rotating rod body 5221 and a power unit 5222. The rotating rod body 5221 has the freedom to rotate around its own axis relative to the valve body 51, and the valve flap 521 only has the freedom to move along the axis of the rotating rod body 5221 relative to the valve body 51. The first end of the rotating rod body 5221 is located in the valve body 51 and is threadedly connected to the valve flap 521. The second end of the rotating rod body 5221 is located outside the valve body 51 and is connected to the driving end of the power unit 5222. Specifically, the rotating rod body 5221 refers to a rod-shaped component with a certain length, and the rotating rod body 5221 has the freedom to rotate around its own axis relative to the valve body 51. The rotating rod body 5221 can be arranged to penetrate the side wall of the valve body 51, and the rotating rod body 5221 can also maintain sealing while rotating relative to the valve body 51. The power unit 5222 refers to a device that can output torque, and the power unit 5222 can be a motor, a hydraulic motor, etc. The valve flap 521 has only the freedom to move along the axis of the rotating rod 5221 relative to the valve body 51, which means that the valve flap 521 can only slide along the axis of the rotating rod 5221 and cannot rotate with the rotating rod 5221. This can be achieved by providing a limiting structure on the inner wall of the valve body 51. At the same time, the first end of the rotating rod 5221 is located inside the valve body 51 and is threadedly connected to the valve flap 521, and the second end of the rotating rod 5221 is located outside the valve body 51 and is connected to the driving end of the power unit 5222. The rotating rod 5221 can be driven to rotate around its own axis by the power unit 5222. During the rotation of the rotating rod 5221, since the valve flap 521 has only the freedom to move along the axis of the rotating rod 5221 relative to the valve body 51, the valve flap 521 can be driven to move along the axial direction of the rotating rod 5221 by the thread. The valve flap 521 is driven to move by the cooperation of the rotating rod body 5221 and the power unit 5222 , so that the position adjustment of the valve flap 521 is more convenient and stable.

[0034] In an alternative embodiment, see Figure 1 and Figure 2The power unit 5222 can be a device such as an electric motor or a hydraulic motor that can output rotational torque, wherein the control end of the power unit 5222, the control end of the vacuum obtaining device 3 and the pressure detection unit 4 can all be electrically connected to the control unit 6. When working, the control unit 6 can obtain the actual pressure value in the vacuum chamber 1 from the pressure detection unit 4, and compare the actual pressure value with the preset pressure value. When the actual pressure value is greater than the preset pressure value, the control unit 6 can control the power unit 5222 to rotate forward, and then drive the valve flap 521 away from the first opening 53 by rotating the rod body 5221, so that the opening of the valve body 51 increases, so that the amount of gas extracted from the vacuum chamber 1 by the vacuum obtaining device 3 per unit time can be greater than the amount of gas supplied by the gas supply unit 2, so that the pressure in the vacuum chamber 1 decreases; when the actual pressure value is less than the preset pressure value, the control unit 6 can control the power unit 5222 to rotate reversely, and then drive the valve flap 521 close to the first opening 53 by rotating the rod body 5221, so that the opening of the valve body 51 decreases, so that the amount of gas extracted from the vacuum chamber 1 by the vacuum obtaining device 3 per unit time can be less than the amount of gas supplied by the gas supply unit 2, so that the pressure in the vacuum chamber 1 increases. In addition, the control unit 6 can coordinate and control multiple devices through PID (Proportional-Integral-Differential) regulation, making the regulation of the pressure in the vacuum chamber 1 more intelligent and accurate.

[0035] In one embodiment, see Figure 3 and Figure 4 The regulating valve 5 also includes a telescopic sealing sleeve 55. The telescopic sealing sleeve 55 is located on the side of the valve disc 521 away from the first opening, and is sleeved on the outside of the connection structure between the valve disc 521 and the rotating rod body 5221. The first end of the telescopic sealing sleeve 55 is sealed and connected to the valve disc 521, and the second end of the telescopic sealing sleeve 55 is sealed and connected to the inner wall of the valve body 51. The telescopic sealing sleeve 55 can be switched between a first telescopic state corresponding to the first position and a second telescopic state corresponding to the second position under the drive of the valve disc 521. Specifically, the telescopic sealing sleeve 55 refers to a tubular component that can change its own length. The telescopic sealing sleeve 55 is mounted on the outside of the rotating rod body 5221, and the first end of the telescopic sealing sleeve 55 is sealed and connected to the valve flap 521, and the second end is sealed and connected to the inner wall of the valve body 51. The telescopic sealing sleeve 55 and the valve flap 521 can form a sealing structure to separate the rotating rod body 5221 from other areas of the valve body 51, thereby avoiding leakage at the connection between the rotating rod body 5221 and the valve body 51. At the same time, the telescopic sealing sleeve 55 can be switched between a first telescopic state corresponding to the first position and a second telescopic state corresponding to the second position under the drive of the valve flap 521, thereby improving the overall sealing performance of the regulating valve 5.

[0036] In an alternative embodiment, see Figure 4 The telescopic sealing sleeve 55 can be a bellows, which is a tubular elastic element with a corrugated shape. It has good elasticity, elasticity and sealing properties. The telescopic sealing sleeve 55 can be a metal part, so that the telescopic sealing sleeve 55 can play a certain supporting role, thereby preventing the valve flap 521 from rotating with the rotating rod body 5221, making the position adjustment of the valve flap 521 more convenient and stable.

[0037] In one embodiment, see Figure 4 , a first boss 5214 is provided on the side of the valve disc 521 away from the first opening 53, the first end of the telescopic sealing sleeve 55 is sealed on the first boss 5214, a second boss 511 is provided on the inner wall of the valve body 51, the second boss 511 is located on the side of the second position away from the first position, and the second end of the telescopic sealing sleeve 55 is sealed on the second boss 511. Specifically, the first boss 5214 refers to a structure with a certain height on the valve disc 521, and the first boss 5214 can be an integrally formed structure with the valve disc 521. The second boss 511 refers to a structure with a certain height on the inner wall of the valve body 51. By arranging the first end of the telescopic sealing sleeve 55 on the first boss 5214 and making the inner wall of the telescopic sealing sleeve 55 abut against the circumference of the first boss 5214, the contact area between the first end of the telescopic sealing sleeve 55 and the valve disc 521 can be increased, so that the sealing between the first end of the telescopic sealing sleeve 55 and the valve disc 521 is better. At the same time, by arranging the second end sealing sleeve of the telescopic sealing sleeve 55 on the second boss 511 and making the inner wall of the telescopic sealing sleeve 55 abut against the circumference of the second boss 511, the contact area between the first end of the telescopic sealing sleeve 55 and the inner wall of the valve body 51 can be increased, thereby making the sealing between the second end of the telescopic sealing sleeve 55 and the interior of the valve body 51 better.

[0038] In an alternative embodiment, see Figure 4 The first end of the telescopic sealing sleeve 55 can be sealed and connected to the first boss 5214 by welding, and the second end of the telescopic sealing sleeve 55 can also be sealed and connected to the second boss 511 by welding, so that the overall sealing performance of the two ends of the entire telescopic sealing sleeve 55 can be better.

[0039] In one embodiment, see Figure 4The valve flap 521 includes a main cover 5211 and a connecting column 5212. The connecting column 5212 is connected to the side of the main cover 5211 facing the rotating rod 5221. The connecting column 5212 is provided with a receiving hole 5215 coaxially arranged with the rotating rod 5221. The second end of the rotating rod 5221 is movably arranged in the receiving hole 5215. The rotating rod 5221 is threadedly connected to the inner wall of the receiving hole 5215. Specifically, the main cover 5211 refers to a component with a certain volume. The shape of the main cover 5211 matches the shape of the first opening 53 but the area is larger than the area of ​​the first opening 53. The connecting column 5212 refers to a columnar component with a certain length. The connecting column 5212 is provided with a receiving hole 5215 coaxially arranged with the rotating rod 5221, so that the second end of the rotating rod 5221 can be extended into the receiving hole 5215, and the rotating rod 5221 is threadedly connected to the inner wall of the receiving hole 5215. The main cover 5211 and the connecting column 5212 may be an integrally formed structure, or they may be two independent components connected by welding, fasteners, or clamping. By dividing the valve flap 521 into two parts, namely, the main cover 5211 and the connecting column 5212, the overall coverage area of ​​the valve flap 521 is ensured, and the threaded connection between the valve flap 521 and the rotating rod 5221 is made more convenient, thereby reducing the overall volume of the valve flap 521 and reducing the manufacturing cost of the regulating valve 5.

[0040] In one embodiment, see Figure 4 A sealing structure is provided on the valve body 51 and / or the main cover 5211, and the sealing structure is used to make the main cover 5211 and the valve body 51 sealed when the main cover 5211 moves to the first position. Specifically, the sealing structure refers to a structure that can seal two components, and the sealing structure can be a sealing ring, a sealing gasket, etc. The setting of the sealing structure can make the main cover 5211 and the inner wall of the valve body 51 abut against each other, so that the sealing performance between the main cover 5211 and the inner wall of the valve body 51 is better.

[0041] In one embodiment, see Figure 4The sealing structure includes a sealing ring 5213 arranged on the plate surface of the main cover body 5211 facing the first opening 53, and a sealing surface 512 for cooperating with the sealing ring 5213 is arranged on the valve body 51, and the sealing surface 512 is arranged around the first opening 53. Specifically, the sealing ring 5213 refers to a gasket used to seal between two connecting parts, wherein the sealing ring 5213 can be made of rubber. In addition, a clamping groove for accommodating the sealing ring 5213 can be arranged on the main cover body 5211, and the sealing ring 5213 is installed in the clamping groove. The sealing surface 512 refers to a surface structure arranged on the inner wall of the valve body 51. The arrangement of the sealing ring 5213 can make the main cover body 5211 and the inner wall of the valve body 51 abut against each other, so that the sealing performance between the main cover body 5211 and the inner wall of the valve body 51 is better. The setting of the sealing surface 512 can cooperate with the main cover body 5211, and the shape of the sealing surface 512 can match the shape of the side of the main cover body 5211 facing the first opening 53, so that the contact surface between the main cover body 5211 and the inner wall of the valve body 51 is larger when the main cover body 5211 abuts against the inner wall of the valve body 51, thereby making the sealing between the main cover body 5211 and the inner wall of the valve body 51 better when the two are in contact.

[0042] In one embodiment, see Figure 4 The valve body 51 is provided with a sealing surface 512 for cooperating with the main cover body 5211, and the sealing surface 512 is arranged around the first opening 53. Specifically, the sealing surface 512 refers to a surface structure arranged on the inner wall of the valve body 51, and the sealing surface 512 can cooperate with the main cover body 5211 through the arrangement of the sealing surface 512. The shape of the sealing surface 512 can match the shape of the side of the main cover body 5211 facing the first opening 53, so that the contact surface between the main cover body 5211 and the inner wall of the valve body 51 is larger when the main cover body 5211 abuts against the inner wall of the valve body 51, so that the sealing performance between the main cover body 5211 and the inner wall of the valve body 51 is better when the main cover body 5211 contacts the inner wall of the valve body 51.

[0043] In one embodiment, see Figure 3 The valve body 51 includes a main body 513 and a sealing end cover 514. The main body 513 has a cavity. The first opening 53 and the second opening 54 are both arranged on the main body 513. The main body 513 also has an installation opening arranged opposite to the first opening 53. The sealing end cover 514 is arranged at the installation opening and is detachably connected to the main body 513. The rotating rod 5221 can be arranged through the sealing end cover 514, and a sealing bearing can be arranged between the rotating rod 5221 and the sealing end cover 514, so that the rotating rod 5221 can be rotated while maintaining the seal. By dividing the valve body 51 into two parts, the main body 513 and the sealing end cover 514, the assembly of the regulating valve 5 can be made more convenient and quick.

[0044] In one embodiment, see Figure 2 and Figure 3A connection unit 57 is further provided between the driving end of the power unit 5222 and the second end of the rotating rod body 5221, and the driving end of the power unit 5222 is detachably connected to the second end of the rotating rod body 5221 through the connection unit 57. Specifically, the connection unit 57 refers to a component that can connect two components, and the connection unit 57 can be a coupling, a reducer, etc. The setting of the connection unit 57 can make the connection between the driving end of the power unit 5222 and the second end of the rotating rod body 5221 more convenient and more secure.

[0045] In an alternative embodiment, see Figure 3 The connecting unit 57 can be a coupling, by which the driving end of the power unit 5222 and the second end of the rotating rod body 5221 can be disassembled and connected, so that the connection between the driving end of the power unit 5222 and the rotating rod body 5221 can be more firmly connected, and at the same time, the driving end of the power unit 5222 and the rotating rod body 5221 can be disassembled more conveniently, which is convenient for repair and maintenance when the components are damaged.

[0046] In one embodiment, see Figure 2 , a mounting bracket 56 is provided outside the valve body 51, the power unit 5222 is connected to the mounting bracket 56 and is spaced apart from the valve body 51, and an escape space is provided on the mounting bracket 56, and the escape space is used to accommodate the connection unit 57. Specifically, the mounting bracket 56 refers to a supporting component with a certain height, and the installation and fixation of the power unit 5222 can be made more convenient and firm by setting the mounting bracket 56. At the same time, an escape space is also provided on the mounting bracket 56, and during assembly, the driving end of the power unit 5222 and the second end of the rotating rod body 5221 can be extended into the escape space, and then the connection unit 57 connects the two, so that the structure of the regulating valve 5 is more compact.

[0047] The above are only preferred embodiments of the present invention, and only specifically describe the technical principles of the present invention. These descriptions are only for the purpose of explaining the principles of the present invention, and cannot be interpreted as limiting the scope of protection of the present invention in any way. Based on the explanation here, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention, and other specific implementation methods of the present invention that can be associated with by technicians in this field without creative labor, should be included in the scope of protection of the present invention.

Claims

1. A device for molecular beam epitaxy and crystal growth, characterized in that: It includes a vacuum chamber, an air supply unit, a vacuum obtaining device, a pressure detection unit and a regulating valve, wherein the vacuum obtaining device is connected to the vacuum chamber pipeline and is used to extract the gas in the vacuum chamber; the air supply unit is connected to the vacuum chamber pipeline and is used to input gas into the vacuum chamber, and the pressure detection unit is used to detect the pressure value in the vacuum chamber; the regulating valve is arranged on the pipeline between the vacuum obtaining device and the vacuum chamber; the regulating valve includes a valve body and a regulating structure, at least a part of the regulating structure is arranged in the valve body, and the regulating structure is used to adjust the opening of the valve body.

2. The apparatus for molecular beam epitaxy and crystal growth according to claim 1, characterized in that: The valve body has a first opening, a second opening and a channel connecting the first opening and the second opening. The adjustment structure includes a valve flap and a drive group. The valve flap is movably arranged in the valve body. The drive group is used to drive the valve flap to move between a first position covering the first opening and a second position avoiding the channel.

3. The apparatus for molecular beam epitaxy and crystal growth according to claim 2, characterized in that: The driving group includes a rotating rod body and a power unit. The rotating rod body has the freedom to rotate around its own axis relative to the valve body, and the valve flap only has the freedom to move along the axis of the rotating rod body relative to the valve body. The first end of the rotating rod body is located in the valve body and is threadedly connected to the valve flap, and the second end of the rotating rod body is located outside the valve body and is connected to the driving end of the power unit.

4. The apparatus for molecular beam epitaxy and crystal growth according to claim 3, characterized in that: The regulating valve also includes a telescopic sealing sleeve, which is located on a side of the valve disc away from the first opening and is sleeved on the outside of a connecting structure between the valve disc and the rotating rod body. A first end of the telescopic sealing sleeve is sealingly connected to the valve disc, and a second end of the telescopic sealing sleeve is sealingly connected to an inner wall of the valve body. Driven by the valve disc, the telescopic sealing sleeve can switch between a first telescopic state corresponding to the first position and a second telescopic state corresponding to the second position.

5. The apparatus for molecular beam epitaxy and crystal growth according to claim 4, characterized in that: A first boss is provided on the side of the valve disc away from the first opening, the first end sealing sleeve of the telescopic sealing sleeve is provided on the first boss, a second boss is provided on the inner wall of the valve body, the second boss is located at the side of the second position away from the first position, and the second end sealing sleeve of the telescopic sealing sleeve is provided on the second boss.

6. The apparatus for molecular beam epitaxy and crystal growth according to claim 3, characterized in that: The valve flap includes a main cover body and a connecting column, wherein the connecting column is connected to the side of the main cover body facing the rotating rod body, and a receiving hole coaxially arranged with the rotating rod body is provided on the connecting column, and the second end of the rotating rod body is threadedly connected to the inner wall of the receiving hole.

7. The apparatus for molecular beam epitaxy and crystal growth according to claim 6, characterized in that: A sealing structure is provided on the valve body and / or the main cover body, and the sealing structure is used to make the main cover body seal and contact with the valve body when the main cover body moves to the first position.

8. The apparatus for molecular beam epitaxy and crystal growth according to claim 7, characterized in that: The sealing structure comprises a sealing ring arranged on a plate surface of the main cover body facing the first opening, and a sealing surface for cooperating with the sealing ring is arranged on the valve body, and the sealing surface is arranged around the first opening.

9. The apparatus for molecular beam epitaxy and crystal growth according to any one of claims 3 to 8, characterized in that: A connection unit is further provided between the driving end of the power unit and the second end of the rotating rod body, and the driving end of the power unit is detachably connected to the second end of the rotating rod body through the connection unit.

10. The apparatus for molecular beam epitaxy and crystal growth according to claim 9, characterized in that: A mounting bracket is arranged outside the valve body, the power unit is connected to the mounting bracket and is spaced apart from the valve body, and an escape space is provided on the mounting bracket, and the escape space is used to accommodate the connection unit.

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