Film thickness measuring instrument

Abstract

The utility model relates to the technical field of semiconductor material thickness measurement, in particular to a film thickness measuring instrument which comprises a measuring instrument body, an XY-direction workbench which moves in the horizontal direction is arranged on the table top of the measuring instrument body, a detection probe is arranged over the XY-direction workbench, a material to be detected is placed on the XY-direction workbench, and the thickness of the material to be detected is measured through the detection probe. The XY-direction workbench is provided with a leveling assembly for arranging a to-be-tested material, the leveling assembly comprises a leveling roller arranged on the XY-direction workbench in a sliding manner, and the leveling roller is in rolling contact with the to-be-tested material. The film thickness measuring instrument has the effect of improving the material detection accuracy of the film thickness measuring instrument.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor material thickness measurement, and in particular to a film thickness measuring instrument. Background Art

[0002] With the rapid development of the semiconductor industry, it is very important to use optical measurement technology to accurately measure the critical dimensions, spatial morphology and material properties of the three-dimensional structure formed by single or multi-layer thin films on the wafer. In order to make the measurement results valid, the measurement system used should be able to measure the film thickness and / or film composition with high accuracy. The film thickness measuring instrument detects the thickness of the coating of the vacuum coating machine by optical means, and the equipment currently used to detect the coating thickness of the vacuum coating machine is an externally purchased 2V meter installed on the film thickness meter to display the thickness data.

[0003] For some materials, thickness measurement is a basic means of measuring material quality; the objects of measurement are often materials with high requirements for thickness, such as films, plastics, rubber, paper, textiles, metal foils (aluminum foil, copper foil, tin foil, etc.), plates, etc.; the purpose of thickness measurement has gradually evolved from controlling appearance quality to the main method to ensure further improvement of material processing. At present, when the photoelectric film thickness measuring instrument in the prior art is used, the photoelectric film thickness measuring instrument is used to detect the photoelectric film.

[0004] When using a photoelectric film thickness gauge to measure the thickness of a material, since the material to be tested has a small intrinsic thickness and a certain degree of flexibility, if the material is wrinkled or damaged when placed on the film thickness gauge for testing, the test result will be inaccurate. Utility Model Content

[0005] In order to improve the accuracy of a film thickness measuring instrument when detecting materials, the present application provides a film thickness measuring instrument.

[0006] The present application provides a film thickness measuring instrument, which adopts the following technical solution:

[0007] A film thickness measuring instrument comprises a measuring instrument body, an XY workbench which moves in a horizontal direction is arranged on the table of the measuring instrument body, and a detection probe is arranged directly above the XY workbench, a material to be detected is placed on the XY workbench, a leveling component for arranging the material to be detected is arranged on the XY workbench, the leveling component comprises a leveling roller which is slidably arranged on the XY workbench, and the leveling roller is in rolling contact with the material to be detected.

[0008] By adopting the above technical solution, when testing the thickness of the material to be tested, the leveling roller can first roll on the material to be tested, so that the material to be tested can be laid flat on the surface of the XY workbench, avoiding problems such as wrinkles on the material to be tested. The material to be tested is leveled by the leveling roller to ensure that the material is in a flat state, and the detection probe can accurately detect the thickness of the material, thereby improving the accuracy of the detection result.

[0009] Optionally, the leveling assembly includes a fixed frame arranged on an XY workbench, the fixed frame is a rectangular frame structure, the leveling roller is slidably arranged on the inner side of the fixed frame and slides along the length direction of the fixed frame, and the material to be tested is installed and fixed on the inner side of the fixed frame.

[0010] By adopting the above technical solution, the material to be tested is arranged on the inner side of the fixed frame, and through the cooperation between the fixed frame and the leveling roller, the leveling roller can move along the length direction of the fixed frame, providing a guide for the movement of the leveling roller, and allowing the material to be tested to be subjected to uniform leveling pressure.

[0011] Optionally, the fixing frame includes a pair of horizontal bars and a pair of vertical bars, the two horizontal bars and the two vertical bars form a fixing frame structure, the two horizontal bars are both slidably sleeved with sliding rings, and the two ends of the leveling roller are correspondingly connected to the two sliding rings for rotation.

[0012] By adopting the above technical solution, when the leveling roller moves, the leveling roller can move following the two sliding rings, thereby controlling the stability of the leveling roller during movement, and ensuring that the length direction of the leveling roller is always perpendicular to the length direction of the fixed frame during the movement, thereby avoiding the problem of tilting of the leveling roller during the movement.

[0013] Optionally, a fixing piece for fixing the position of the sliding ring is threadedly connected to the sliding ring.

[0014] By adopting the above technical solution, after the leveling roller has finished leveling the material to be tested, it can move to the edge of the material to be tested, and fix the position of the leveling roller by the set fixing part, so that the leveling roller can press the material to be tested, thereby avoiding the position of the material to be tested from moving during the testing process.

[0015] Optionally, a clamping member is provided on the two sliding rings of the fixed frame, and the clamping member includes a pair of clamping rods fixed on the two sliding rings, the smoothing roller is arranged between the two clamping rods, and the two ends of the smoothing roller are vertically slidably matched with the two clamping rods.

[0016] By adopting the above technical solution, when operating the leveling roller to level the surface of the material to be tested, the staff can first lift the leveling roller upward along the clamping rod, move the leveling roller to the top of the material to be tested, and then place the leveling roller on the surface of the material to be tested for leveling, so as to avoid rolling the edge of the material to be tested directly from the outside to the material to be tested, causing wrinkles in the material and affecting subsequent testing.

[0017] Optionally, vertical guide grooves are provided on the opposite surfaces of the two clamping rods, a fixed shaft is passed through the axis of the leveling roller, and the leveling roller is rotatably connected to the fixed shaft, and both ends of the fixed shaft are plugged into the guide grooves.

[0018] By adopting the above technical solution, the leveling roller and the fixed shaft rotate in cooperation, which not only ensures that the leveling roller can move along the height direction of the clamping rod, but also allows the leveling roller to roll and level normally on the material to be tested.

[0019] Optionally, the pressing member further comprises a pressing spring arranged in each guide groove, wherein the upper end of the pressing spring is fixed to the pressing rod, and the lower end is fixed to the end of the fixing shaft.

[0020] By adopting the above technical solution, the provided compression spring can press the leveling roller onto the material to be tested. When the material to be tested is leveled, the leveling roller is pressed onto the edge of the material to be tested under the action of the compression spring, thereby preventing the leveled material to be tested from being lifted from the XY workbench during the testing process.

[0021] Optionally, a U-shaped pull rod is provided on the fixed shaft, the leveling roller is located inside the U-shaped pull rod, a U-shaped push rod is connected and fixed between the two clamping rods, and both ends of the U-shaped push rod are fixed to the two clamping rods.

[0022] By adopting the above technical solution, when it is necessary to control the leveling roller to move upward, the staff pulls the U-shaped pull rod upward to quickly lift the leveling roller upward; when it is necessary to control the leveling roller to move, the staff pushes the U-shaped push rod so that the two clamping rods drive the two sliding rings to move on the cross bar of the fixed frame, thereby moving the leveling roller to a suitable position. When moving the leveling roller, the U-shaped pull rod is pulled upward at the same time. When the leveling roller moves above the material to be tested, the U-shaped pull rod is first released to allow the leveling roller to contact the surface of the material to be tested.

[0023] Optionally, the leveling rollers and the pressing members are provided in multiple groups on the fixing frame and are evenly arranged along the length direction of the fixing frame, so as to press and fix the edge of the material to be tested.

[0024] By adopting the above technical solution, multiple sets of leveling rollers are set up, so that the edges of the materials to be tested can be pressed by the leveling rollers, so as to prevent the ultra-thin materials to be tested from protruding from the XY workbench during the testing process. In addition, multiple sets of leveling rollers are set up to repeatedly level the materials to be tested, so that the materials can be adsorbed onto the XY workbench surface.

[0025] Optionally, the outer cover of the measuring instrument body is provided with a protective part, which includes a protective shell fixed on the measuring instrument body and a protective cover hingedly arranged on the protective shell, a taking and releasing opening is opened on the protective shell, and the protective cover is hingedly arranged at the taking and releasing opening, and the protective shell and the protective cover are both made of opaque material.

[0026] By adopting the above technical solution, the protective shell and the protective cover can form a closed structure to provide daily protection for the measuring instrument body, thereby preventing external impurities from drifting onto the equipment and affecting the accuracy of detection. In addition, the protective shell and the protective cover are both made of opaque material. The provision of an opaque protective shell and protective cover can prevent external light sources from irradiating the inside of the protective shell during detection, thereby improving the accuracy of detection.

[0027] In summary, the present application includes at least one of the following beneficial technical effects:

[0028] 1. When testing the thickness of the material to be tested, the material to be tested can be laid flat on the surface of the XY workbench through the provided flattening roller to avoid damage and wrinkles on the material to be tested. The provided flattening roller can press the material to be tested through the compression spring, so that the material to be tested can be kept flat on the XY workbench, thereby improving the accuracy of the test;

[0029] 2. The protective shell and protective cover are made of opaque materials, so that the detection of the material to be detected can be carried out in an opaque environment, avoiding the influence of external light sources on the detection of the detection probe during detection, and improving the accuracy of detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present application.

[0031] Figure 2 It is a schematic diagram of the overall structure of the leveling component embodied in an embodiment of the present application.

[0032] Figure 3 It is a schematic diagram of a guide groove and a compression spring according to an embodiment of the present application.

[0033] Explanation of the accompanying reference numerals: 1. Measuring instrument body; 11. XY workbench; 12. Detection probe; 2. Leveling assembly; 21. Fixed frame; 22. Leveling roller; 221. Fixed shaft; 23. Sliding ring; 24. Clamping rod; 241. Guide groove; 25. U-shaped pull rod; 26. Clamping spring; 27. U-shaped push rod; 28. Fixing bolt; 3. Protective part; 31. Protective shell; 32. Protective cover. DETAILED DESCRIPTION

[0034] The following is combined with Figure 1-3 This application is described in further detail.

[0035] The embodiment of the present application discloses a film thickness measuring instrument.

[0036] Reference Figure 1 A film thickness measuring instrument includes a measuring instrument body 1 arranged on a workbench, an XY workbench 11 is installed on the table top of the detection table of the measuring instrument body 1, a material to be detected is placed on the XY workbench 11, a detection probe 12 is arranged directly above the XY workbench 11, the detection probe 12 can measure the material to be detected, when in use, the staff fixes the material to be detected on the XY workbench 11, the XY workbench 11 can drive the material to be detected to move in the X direction and the Y direction on the horizontal plane, so that the fixed detection probe 12 can detect any position of the material to be detected, and the overall thickness and average thickness of the material to be detected can be obtained by detecting multiple points, thereby improving the detection accuracy of the equipment.

[0037] Reference Figure 1 and Figure 2 A leveling component 2 for arranging the material to be tested is arranged on the XY-axis workbench 11. The leveling component 2 includes a fixed frame 21 fixed on the surface of the XY-axis workbench 11. The fixed frame 21 is a rectangular frame structure, which includes a pair of horizontal bars and a pair of vertical bars. The two ends of the two horizontal bars and the two vertical bars are fixed to each other. The material to be tested is placed on the inner side of the fixed frame 21. A leveling roller 22 is arranged on the inner side of the fixed frame 21. The length direction of the leveling roller 22 is the same as the width direction of the fixed frame 21, and the leveling roller 22 can slide along the length direction of the fixed frame 21. The roller surface of the leveling roller 22 can contact the material to be tested. The leveling roller 22 is slidably arranged to move back and forth on the material to be tested, and the material to be tested is arranged so that the uneven position can be trimmed and the material to be tested is pressed onto the XY-axis workbench 11, thereby preventing problems such as wrinkles.

[0038] Reference Figure 2 and Figure 3, sliding rings 23 are slidably sleeved on the two cross bars on the fixed frame 21, and the smoothing roller 22 is arranged between the two sliding rings 23. The smoothing roller 22 can slide on the fixed frame 21 following the two sliding rings 23, and the two ends of the smoothing roller 22 are rotatably connected with the two sliding rings 23. When the smoothing roller 22 arranges the material to be tested, the smoothing roller 22 can move and rotate at the same time to avoid the fixed smoothing roller 22 from damaging the material to be tested; a clamping member is arranged on the two sliding rings 23, and the clamping member includes a pair of vertically arranged clamping rods 24, the two clamping rods 24 are fixed on the corresponding sliding rings 23, the clamping rods 24 are perpendicular to the fixed frame 21, and extend upward, the clamping rod 24 is fixed on the inner side surfaces of the two sliding rings 23, the smoothing roller 22 is located between the two clamping rods 24, and the two ends of the smoothing roller 22 are rotatably connected with the two clamping rods 24.

[0039] A fixed shaft 221 is passed through the axis of the leveling roller 22, and both ends of the fixed shaft 221 pass through the two ends of the leveling roller 22, and the leveling roller 22 is rotatably connected to the fixed shaft 221; guide grooves 241 are provided on the opposite surfaces of the two pressing rods 24, and the length direction of the guide grooves 241 is the same as the length direction of the pressing rod 24. The two ends of the fixed shaft 221 are plugged into the corresponding guide grooves 241, so that the fixed shaft 221 can slide along the height direction of the pressing rod 24 with the leveling roller 22. When the material to be tested is placed on the inner side of the fixed frame 21, the staff can first lift the leveling roller 22 upwards, then move it to the top of the material to be tested, and then lower the leveling roller 22 Place it on the surface of the material to be tested, and level the material to be tested by moving the leveling roller 22 back and forth to avoid directly moving the leveling roller 22 in the horizontal direction to crush the edge of the material to be tested; a U-shaped pull rod 25 is fixed on the fixed shaft 221, and the length direction of the U-shaped pull rod 25 is the same as the length direction of the fixed shaft 221, and the fixed shaft 221 passes through the ends of the two vertical rods on the U-shaped pull rod 25 away from the cross rod, and the two vertical rods of the U-shaped pull rod 25 are arranged in a vertical direction, and the leveling roller 22 is located between the two vertical rods of the U-shaped pull rod 25. When it is necessary to control the leveling roller 22 to move upward, the staff pulls the U-shaped pull rod 25 upward to quickly lift the leveling roller 22 upward.

[0040] Reference Figure 2 and Figure 3The pressing member also includes a pressing spring 26 arranged in each guide groove 241. The pressing spring 26 is located above the fixed shaft 221, and the upper end of the pressing spring 26 is fixed to the pressing rod 24, and the lower end is fixed to the end of the fixed shaft 221. When the staff lifts the leveling roller 22 upward through the U-shaped pull rod 25, the pressing spring 26 is compressed. When the leveling roller 22 moves to the top of the material to be tested, the U-shaped pull rod 25 is released. Under the action of the two pressing springs 26, the leveling roller 22 is pressed onto the material to be tested, and plays a role in pressing the material to be tested, so that the material to be tested can be flattened on the surface of the XY workbench 11, thereby improving the accuracy of the detection.

[0041] A U-shaped push rod 27 is fixed on the same side of the two clamping rods 24, and the two vertical rod ends of the U-shaped push rod 27 are fixed to the two clamping rods 24, so that the two clamping rods 24 are connected as a whole. When it is necessary to control the leveling roller 22 to move, the staff pushes the U-shaped push rod 27 to make the two clamping rods 24 drive the two sliding rings 23 to move on the cross bar of the fixed frame 21, thereby moving the leveling roller 22 to a suitable position. When moving the leveling roller 22, the U-shaped pull rod 25 is pulled upward at the same time. When the leveling roller 22 moves to the top of the material to be tested, the U-shaped pull rod 25 is first released to allow the leveling roller 22 to contact the surface of the material to be tested.

[0042] There are multiple sets of leveling rollers 22 slidingly arranged on the fixed frame 21, and corresponding clamping rods 24, sliding rings 23, clamping springs 26, U-shaped pull rods 25 and U-shaped push rods 27 are arranged on the fixed frame 21. Through the multiple sets of leveling rollers 22, the edges of the materials to be tested can be clamped by the leveling rollers 22 to prevent the ultra-thin materials to be tested from protruding from the XY workbench 11 during the testing process. In addition, the multiple sets of leveling rollers 22 can repeatedly level the materials to be tested so that the materials can be adsorbed onto the surface of the XY workbench 11.

[0043] Reference Figure 2 and Figure 3 , each sliding ring 23 is provided with a fixing piece for fixing its position, the fixing piece package is threadedly connected to the fixing bolt 28 on the sliding ring 23, the fixing bolt 28 passes through the sliding ring 23 and is tightened to the cross bar of the fixing frame 21. After controlling the leveling rollers 22 to move to the correct position, the staff can first press one of the leveling rollers 22 to the edge of the material to be tested, and then tighten the fixing bolt 28, and operate the other leveling rollers 22 to level the material to be tested, so as to avoid the position of the material to be tested from moving during the leveling process of multiple leveling rollers 22 at the same time.

[0044] Reference Figure 1 and Figure 3A protective member 3 is provided on the outer cover of the measuring instrument body 1. The protective member 3 includes a protective shell 31 fixed on the measuring instrument body 1. The protective shell 31 is buckled on the measuring instrument body 1. A take-out port for the convenience of the staff to install and remove the test material is provided in front of the protective shell 31. A protective cover 32 is hingedly provided at the take-out port. The protective shell 31 and the protective cover 32 can form a closed structure to provide daily protection for the measuring instrument body 1 to prevent external impurities from drifting onto the equipment and affecting the accuracy of the test. In addition, the protective shell 31 and the protective cover 32 are both made of opaque material. When testing the material to be tested, the principle adopted is that when light in a specified wavelength range is irradiated onto the film, the light reflected from different interfaces has different phases, thereby causing interference and resulting in constructive or destructive intensity. This intensity oscillation is related to the structure of the film. The sample thickness and related optical constants can be obtained by fitting this oscillation and Fourier transforming. The external light source will affect the detection structure. By setting an opaque protective shell 31 and a protective cover 32, during detection, the external light source is prevented from irradiating the inside of the protective shell 31, thereby improving the accuracy of detection.

[0045] The implementation principle of a film thickness measuring instrument in an embodiment of the present application is as follows: when it is necessary to detect the thickness of a material to be detected, a staff member lays the material to be detected on an XY workbench 11, and flattens the material to be detected by pushing a leveling roller 22. When the material to be detected is arranged, the leveling roller 22 is set to press the edge of the material to be detected to fix the position of the material to be detected, and finally the thickness of the material to be detected is detected by the detection probe 12.

[0046] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A film thickness measuring instrument, characterized in that: The invention comprises a measuring instrument body, an XY workbench which moves in a horizontal direction is arranged on the table of the measuring instrument body, and a detection probe is arranged directly above the XY workbench, the material to be detected is placed on the XY workbench, a leveling component which arranges the material to be detected is arranged on the XY workbench, and the leveling component comprises a leveling roller which is slidably arranged on the XY workbench, and the leveling roller makes rolling contact on the material to be detected.

2. A film thickness measuring instrument according to claim 1, characterized in that: The leveling assembly includes a fixed frame arranged on an XY workbench, the fixed frame is a rectangular frame structure, the leveling roller is slidably arranged inside the fixed frame and slides along the length direction of the fixed frame, and the material to be tested is installed inside the fixed frame.

3. A film thickness measuring instrument according to claim 2, characterized in that: The fixing frame comprises a pair of horizontal bars and a pair of vertical bars, the two horizontal bars and the two vertical bars form a fixing frame structure, the two horizontal bars are both slidably sleeved with sliding rings, and the two ends of the leveling roller are correspondingly connected to the two sliding rings for rotation.

4. A film thickness measuring instrument according to claim 3, characterized in that: The sliding ring is threadedly connected with a fixing piece for fixing the position of the sliding ring.

5. A film thickness measuring instrument according to claim 2, characterized in that: The two sliding rings of the fixed frame are provided with a clamping member, which includes a pair of clamping rods fixed on the two sliding rings. The leveling roller is arranged between the two clamping rods, and the two ends of the leveling roller are vertically slidably matched with the two clamping rods.

6. A film thickness measuring instrument according to claim 5, characterized in that: Vertical guide grooves are provided on the opposite surfaces of the two clamping rods, a fixed shaft is passed through the axis of the leveling roller, and the leveling roller is rotatably connected to the fixed shaft, and both ends of the fixed shaft are plugged into the guide grooves.

7. A film thickness measuring instrument according to claim 5, characterized in that: The pressing member also includes a pressing spring arranged in each guide groove, wherein the upper end of the pressing spring is fixed to the pressing rod, and the lower end of the pressing spring is fixed to the end of the fixed shaft.

8. A film thickness measuring instrument according to claim 6, characterized in that: A U-shaped pull rod is arranged on the fixed shaft, the leveling roller is located inside the U-shaped pull rod, a U-shaped push rod is connected and fixed between the two clamping rods, and the two ends of the U-shaped push rod are fixed to the two clamping rods.

9. A film thickness measuring instrument according to claim 1, characterized in that: The leveling rollers and the pressing members are arranged in multiple groups on the fixing frame and are evenly arranged along the length direction of the fixing frame, so as to press and fix the edge of the material to be tested.

10. The film thickness measuring instrument according to claim 1, characterized in that: The outer cover of the measuring instrument body is provided with a protective part, which includes a protective shell fixed on the measuring instrument body and a protective cover hingedly arranged on the protective shell. A take-in and put-out opening is opened on the protective shell, and the protective cover is hingedly arranged at the take-in and put-out opening. The protective shell and the protective cover are both made of opaque material.

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