Diameter measuring device and silicon rod production system
By designing a diameter measurement device, the orthoprojection effect of light and the automatic movement of displacement components are solved, and the problems of low efficiency and large error of silicon rod diameter measurement are achieved, and efficient and accurate automatic detection of silicon rod diameter is achieved.
Patent Information
- Application Number
- CN202420228947.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-31
- Publication Date
- 2025-01-10
- Estimated Expiration
- 2034-01-31
AI Technical Summary
In the prior art, silicon rod diameter measurement has problems such as low detection efficiency and large error, resulting in low production process optimization and unqualified product removal efficiency.
A diameter measuring device is designed, including a measuring assembly and a displacement assembly. The measuring assembly consists of a measuring light source and a receiving member. The diameter of the silicon rod is measured by the orthoprojection effect of light. The displacement assembly drives the measuring assembly to move along the axial direction of the silicon rod to realize Automatic measurement.
It improves measurement efficiency and accuracy, reduces manual detection errors, and realizes automatic detection of diameters of different parts of silicon rods.
Smart Images
Figure CN222336310U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of measurement technology, and in particular to a diameter measuring device and a silicon rod production system. Background Art
[0002] In the production process of silicon rods, it is necessary to measure the diameter of the silicon rods after the production of the silicon rods is completed. By detecting the diameters of different positions of the crystal rods, the measured values are used to adjust and optimize the production process, and the silicon crystal rods that do not meet the diameter requirements are removed. However, in the prior art, the diameter measurement of silicon rods has the disadvantages of low detection efficiency and large errors. To this end, a diameter measuring device and a silicon rod production system are provided. Utility Model Content
[0003] In view of this, the purpose of the present application is to provide a diameter measuring device and a silicon rod production system, aiming to solve the technical problems of low efficiency and large errors in manual detection in the prior art.
[0004] To achieve the above objectives, the technical solutions adopted in this application are as follows:
[0005] In a first aspect, an embodiment of the present application provides a diameter measuring device for measuring the outer diameter of a workpiece to be measured, the diameter measuring device comprising:
[0006] A measuring component, the measuring component comprising a measuring light source and a receiving component, the measuring light source is located on one side of the workpiece to be measured, and the receiving component is located on a side of the workpiece to be measured away from the measuring light source;
[0007] A displacement component, wherein the displacement component is connected to the measuring light source and the receiving element respectively;
[0008] There are two receiving members, which are respectively located at two opposite sides of the workpiece to be measured and receive the measuring light emitted by the measuring light source. The displacement assembly drives the measuring light source and the receiving member to move along the axial direction of the workpiece to be measured.
[0009] In one embodiment of the first aspect, the displacement assembly includes a slide rail and a bracket, the receiving member is provided at one end of the bracket close to the slide rail, one end of the bracket is slidably engaged with the slide rail, and the measuring light source is installed at one end of the bracket away from the slide rail.
[0010] In one embodiment of the first aspect, a gap is provided between the bracket and the workpiece to be measured, and the receiving member is provided on a side of the bracket close to the workpiece to be measured.
[0011] In one embodiment of the first aspect, the diameter measuring device further includes a light shielding component, and the light shielding component is covered on the workpiece to be measured.
[0012] In one of the embodiments of the first aspect, the shading assembly includes a cover body, the cover body is provided with a groove, and the measuring assembly and the workpiece to be measured are both located in the groove.
[0013] In one embodiment of the first aspect, the diameter measuring device further includes a measuring platform, and the displacement assembly and the workpiece to be measured are both mounted on the measuring platform.
[0014] In one embodiment of the first aspect, a mounting groove is provided on the measuring platform, and the workpiece to be measured is placed in the mounting groove.
[0015] In one embodiment of the first aspect, the mounting groove is in a V-shaped structure.
[0016] In one of the embodiments of the first aspect, a support member is provided at an edge of the mounting groove, and the workpiece to be measured is placed on the support member.
[0017] In a second aspect, an embodiment of the present application further provides a silicon rod production system, comprising the diameter measuring device described in any of the above embodiments.
[0018] Compared with the prior art, the beneficial effects of the present application are as follows: the present application provides a diameter measuring device and a silicon rod production system, which can be used for the diameter measurement of silicon rods. The diameter measuring device includes a measuring component and a displacement component, wherein the measuring component includes a measuring light source and a receiving component, the measuring light source is located on one side of the workpiece to be measured, the receiving component is located on the side of the workpiece to be measured away from the measuring light source, and the displacement component is connected to the measuring light source and the receiving component respectively. In this way, during the measurement process, the measuring component is first placed at one end of the silicon rod, and the measuring light source is turned on. The measuring light source is located at the top of the silicon rod and emits vertical light to the silicon rod. The receiving component is located on the bottom side of the silicon rod, and the light of the measuring light source is received by the receiving component, while the measuring light that is not received is blocked by the silicon rod, and then the diameter of the silicon rod is fed back. The present application drives the measuring component to move from the head end to the tail end of the silicon rod through the displacement component to measure the diameter of different parts of the silicon rod, thereby improving the measurement efficiency and accuracy and reducing manual detection errors. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.
[0020] Figure 1 The structure of the diameter measuring device in some embodiments of the present application is shown. Figure 1 ;
[0021] Figure 2 The structure of the diameter measuring device in some embodiments of the present application is shown. Figure 2 .
[0022] Description of main component symbols:
[0023] 100-diameter measuring device; 110-measuring component; 111-measuring light source; 112-receiving member; 120-displacement component; 121-slide rail; 122-bracket; 130-light shielding component; 131-groove; 140-measuring platform; 141-mounting slot; 142-support member;
[0024] 200-Workpiece to be tested. DETAILED DESCRIPTION
[0025] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.
[0026] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.
[0027] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
[0028] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0029] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.
[0030] The production of single crystal silicon in the photovoltaic industry generally adopts the direct pulling method. During the single crystal growth process, the seed crystal is immersed in the silicon melt in the quartz crucible using a pulling mechanism and a seed crystal chuck, and the seed crystal is slowly pulled upward using the pulling mechanism. In this way, a single crystal silicon rod with a certain diameter range is grown under the seed crystal.
[0031] The inventors of this application have found that during the growth of single crystal silicon, the diameter of the growing crystal rod fluctuates within a certain range due to factors such as temperature, crystal rotation, crucible rotation, argon gas flow, and thermal field design. Therefore, after the growth of the crystal rod is completed, the diameter of the crystal rod at different positions needs to be detected. On the one hand, the production process can be adjusted and optimized using the measured value, and on the other hand, the crystal rod that does not meet the diameter requirement can be removed. However, in the prior art, manual detection is used, which has the disadvantages of low detection efficiency and large errors.
[0032] The present application provides a diameter measuring device 100 and a silicon rod production system, which can be used to measure the outer diameter of workpieces such as tubes and rods, and specifically used for outer diameter detection after silicon rod production. The diameter measuring device 100 and the silicon rod production system provided in the present application can measure the diameter size of different parts of the silicon rod, improve the measurement efficiency and accuracy, and reduce manual detection errors.
[0033] It should be noted that, for ease of understanding, the workpiece 200 to be tested in the embodiments of the present application can be replaced by a silicon rod.
[0034] Figure 1 1 shows a schematic side view of the diameter measuring device 100. Figure 2A front view schematic diagram of the diameter measuring device 100 is shown.
[0035] Combination Figure 1 and Figure 2 As shown, an embodiment of the present application provides a diameter measuring device 100, which is used to measure the outer diameter of a workpiece 200 to be measured, and the diameter measuring device 100 includes a measuring component 110 and a displacement component 120. The measuring component 110 includes a measuring light source 111 and a receiving component 112, the measuring light source 111 is located on one side of the workpiece 200 to be measured, the receiving component 112 is located on a side of the workpiece 200 to be measured away from the measuring light source 111, and the displacement component 120 is connected to the measuring light source 111 and the receiving component 112 respectively.
[0036] Specifically, two receiving members 112 are provided, and the two receiving members 112 are respectively located at two opposite sides of the workpiece 200 to be measured, and receive the measuring light emitted by the measuring light source 111 . The displacement assembly 120 drives the measuring light source 111 and the receiving member 112 to move along the axial direction of the workpiece 200 to be measured.
[0037] The measuring component 110 uses the orthographic projection effect of light, and by obtaining the change in the projection size of the silicon rod, the change in the diameter size of the silicon rod can be fed back. The measuring light source 111 is installed above the silicon rod. When powered on, the measuring light source 111 can emit light vertically to the silicon rod. Through the rectilinear propagation of light, part of the light from the measuring light source 111 is blocked by the silicon rod, and the remaining light leaks from both sides of the silicon rod and is received by the receiving element 112, thereby obtaining the orthographic projection data of the silicon rod, and the spacing between the two sides of the silicon rod projection is fed back as the diameter data of the silicon rod. By moving the measuring light source 111 and the receiving element 112 from one end of the silicon rod to the other end, the complete diameter data of the silicon rod is obtained, and the automatic measurement of the diameter of the silicon rod is realized.
[0038] In addition, the receiving element 112 may be a photoelectric detector, and the diameter measuring device 100 further includes a processing component, which may include a processing computer, and a processing program is set in the computer. The receiving element 112 is electrically connected to the computer and transmits the received projection data to the computer. The computer calculates the projection data according to a specific program to obtain the diameter parameter of the silicon rod.
[0039] The displacement component 120 can be a linear motion mechanism such as a linear guide, a hydraulic cylinder, a pneumatic cylinder, a screw motor, etc., to achieve the electronically controlled displacement adjustment of the measuring component 110 .
[0040] In some embodiments, the displacement assembly 120 includes a slide rail 121 and a bracket 122 , the receiving member 112 is disposed at one end of the bracket 122 close to the slide rail 121 , one end of the bracket 122 is slidably matched with the slide rail 121 , and the measuring light source 111 is installed at one end of the bracket 122 away from the slide rail 121 .
[0041] The slide rail 121 can be an electric linear guide rail, and the bracket 122 is installed on the slide rail 121. Under the control of the linear guide rail, the bracket 122 moves linearly, thereby driving the measurement light source 111 and the receiving element 112 installed on the bracket 122 to move, so as to measure the outer diameters of different parts of the silicon rod.
[0042] In some embodiments, a gap is provided between the bracket 122 and the workpiece 200 to be measured, and the receiving member 112 is disposed on a side of the bracket 122 close to the workpiece 200 to be measured.
[0043] The receiving side of the receiving member 112 is arranged opposite to the light-emitting side of the measuring light source 111. The receiving members 112 symmetrically arranged on both sides of the silicon rod can receive the light vertically emitted by the measuring light source 111 and feed back the data signal to the processing computer. The bracket 122 includes two supporting plates arranged opposite to each other, and the two supporting plates are symmetrically arranged on both sides of the silicon rod. The measuring light source 111 is a plate-like structure, and its two ends are respectively connected to the two supporting plates. A gap is reserved between the supporting plate and the silicon rod to facilitate the installation of the receiving member 112 and the reception of light. The length of the receiving member 112 is greater than the gap between the supporting plate and the silicon rod. One end of the receiving member 112 is connected to the supporting plate and is flush with the end of the measuring light source 111. The end of the receiving member 112 away from the supporting plate extends below the silicon rod so that the receiving part cannot receive the light, thereby obtaining the positive projection data of the silicon rod, and finally measuring the diameter of the silicon rod.
[0044] In some embodiments, the diameter measuring device 100 further includes a light shielding component 130 , and the light shielding component 130 is disposed on the workpiece 200 to be measured.
[0045] The shading component 130 is made of a light-proof material. Through the covering of the shading component 130 , when the silicon rod is completely located in the shading component 130 , there is no interference from external ambient light sources, and the receiving element 112 only receives the light from the measuring light source 111 .
[0046] In some embodiments, the light shielding assembly 130 includes a cover body, and the cover body is provided with a groove 131 . The measuring assembly 110 and the workpiece 200 to be measured are both located in the groove 131 .
[0047] The cover is a prism structure with one side open and the other five sides shielded, and the open side forms a groove 131. The depth of the groove 131 is greater than the height of the bracket 122, so as to facilitate the arrangement of the measuring component 110 and the workpiece 200 to be measured.
[0048] In some embodiments, the diameter measuring device 100 further includes a measuring platform 140 , and the displacement assembly 120 and the workpiece 200 to be measured are both mounted on the measuring platform 140 .
[0049] The measuring platform 140 may be a flat plate or a work surface for mounting the displacement assembly 120 and the workpiece 200 to be measured. The displacement assembly 120 includes two symmetrically arranged slide rails 121 , which are respectively located at two opposite sides of the silicon rod.
[0050] In some embodiments, a mounting groove 141 is formed on the measuring platform 140 , and the workpiece 200 to be measured is placed in the mounting groove 141 .
[0051] Since the silicon rod is in a cylindrical structure and is easy to roll and slide, a mounting groove 141 is provided on the measuring platform 140 to limit and fix the silicon rod, thereby stabilizing the measuring environment.
[0052] In some embodiments, the mounting groove 141 is in a V-shaped structure.
[0053] By configuring the mounting groove 141 to be a V-shaped structure, after the silicon rod is placed on the measuring platform 140 , it is prevented from abutting against the two groove edges of the mounting groove 141 , thereby limiting the silicon rod.
[0054] In some embodiments, a support member 142 is disposed at the edge of the mounting groove 141 , and the workpiece 200 to be measured is placed on the support member 142 .
[0055] The support member 142 may be an elastic buffer, which can reduce wear when the silicon rod is placed in the installation groove 141 and make the installation more stable.
[0056] An embodiment of the present application further provides a silicon rod production system, comprising the diameter measuring device 100 in any of the above embodiments.
[0057] This embodiment has the diameter measuring device 100 in any of the above embodiments, and therefore has all the beneficial effects of the diameter measuring device 100 in any of the above embodiments, which will not be described in detail here.
[0058] In summary, the diameter measuring device 100 and silicon rod production system provided by the present application have a simple structure, can realize automatic loading and unloading and automatic detection of silicon rods, and improve the detection efficiency and detection accuracy compared with the prior art. The present application receives the light of the measuring light source 111 through the receiving member 112, and the measurement light that is not received is blocked by the silicon rod, and then the diameter of the silicon rod is fed back. At the same time, the displacement component 120 drives the measuring component 110 to move from the head end of the silicon rod to the tail end, and the diameter size of different parts of the silicon rod is measured, the measurement efficiency and accuracy are improved, and the manual detection error is reduced.
[0059] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.
[0060] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.
Claims
1. A diameter measuring device, characterized in that: Used to measure the outer diameter of a workpiece to be measured, the diameter measuring device comprises: A measuring component, the measuring component comprising a measuring light source and a receiving component, the measuring light source is located on one side of the workpiece to be measured, and the receiving component is located on a side of the workpiece to be measured away from the measuring light source; A displacement component, wherein the displacement component is connected to the measuring light source and the receiving element respectively; There are two receiving members, which are respectively located at two opposite sides of the workpiece to be measured and receive the measuring light emitted by the measuring light source. The displacement assembly drives the measuring light source and the receiving member to move along the axial direction of the workpiece to be measured.
2. The diameter measuring device according to claim 1, characterized in that: The displacement assembly includes a slide rail and a bracket, the receiving member is arranged at one end of the bracket close to the slide rail, one end of the bracket is slidably matched with the slide rail, and the measuring light source is installed at one end of the bracket away from the slide rail.
3. The diameter measuring device according to claim 2, characterized in that: A gap is provided between the bracket and the workpiece to be measured, and the receiving member is arranged on a side of the bracket close to the workpiece to be measured.
4. The diameter measuring device according to claim 1, characterized in that: The diameter measuring device further comprises a light shielding component, and the light shielding component is covered on the workpiece to be measured.
5. The diameter measuring device according to claim 4, characterized in that: The shading component comprises a cover body, the cover body is provided with a groove, and the measuring component and the workpiece to be measured are both located in the groove.
6. The diameter measuring device according to any one of claims 1 to 5, characterized in that: The diameter measuring device further comprises a measuring platform, and the displacement assembly and the workpiece to be measured are both mounted on the measuring platform.
7. The diameter measuring device according to claim 6, characterized in that: The measuring platform is provided with a mounting groove, and the workpiece to be measured is placed in the mounting groove.
8. The diameter measuring device according to claim 7, characterized in that: The installation groove is in a V-shaped structure.
9. The diameter measuring device according to claim 8, characterized in that: A support member is provided at the edge of the installation groove, and the workpiece to be measured is placed on the support member.
10. A silicon rod production system, characterized in that: A diameter measuring device comprising the diameter measuring device according to any one of claims 1 to 9.