Ceramic substrate air tightness testing device

Abstract

The utility model discloses an air tightness testing device for a ceramic substrate. The air tightness testing device comprises a lower die, an upper die and an air pressure sensor, the lower die is provided with an air exhaust cavity with an upward opening, and a sealing supporting face is formed on the edge of the opening of the air exhaust cavity. The upper die is arranged right above the lower die in an up-and-down movable mode, the upper die is provided with an inflation cavity with a downward opening, a sealing abutting face is formed on the edge of the opening of the inflation cavity, and the sealing abutting face and the sealing supporting face are right opposite to each other up and down; and the air pressure sensor is arranged on the lower die and extends into the air exhaust cavity. The air exhaust cavity is formed in the lower die, the air inflation cavity is formed in the upper die, the air pressure sensor is arranged in a matched mode, during testing, the ceramic substrate is arranged between the air exhaust cavity and the air inflation cavity in a sealed mode, air exhaust is conducted on one face of the ceramic substrate, air inflation is conducted on the other face of the ceramic substrate, and then air leakage detection is conducted through the air pressure sensor. Therefore, the airtightness of the ceramic substrate can be really and effectively judged, and convenience is brought to production operation.

Description

Technical Field

[0001] The utility model relates to the technology of ceramic substrate production field, in particular to an air tightness testing device for ceramic substrate. Background Art

[0002] Ceramic substrate refers to copper foil directly bonded to alumina (Al 2 O 3 ) or aluminum nitride (AlN) ceramic substrate surface (single or double sides). The ultra-thin composite substrate has excellent electrical insulation properties, high thermal conductivity, excellent soft soldering and high adhesion strength, and can be etched with various patterns like PCB boards, with great current carrying capacity. Therefore, ceramic substrates have become the basic materials for high-power power electronic circuit structure technology and interconnection technology. Ceramic substrates have many advantages: (1) strong mechanical stress and stable shape; high strength, high thermal conductivity, high insulation; strong bonding force and corrosion resistance. (2) Excellent thermal cycle performance, cycle times up to 50,000 times, high reliability. (3) Like PCB boards (or IMS substrates), various graphic structures can be etched; no pollution, no environmental damage. (4) Wide operating temperature range of -55℃~850℃; thermal expansion coefficient is close to silicon, simplifying the production process of power modules.

[0003] During the production process, ceramic substrates may produce hidden cracks, breakage and other problems, resulting in poor sealing between the upper and lower surfaces of the ceramic substrates, which cannot be used in products with high airtightness requirements. Therefore, it is necessary to detect the ceramic substrates. In the prior art, visual or CCD photography and analysis are mainly used for detection. Both methods can only see the surface of the ceramic substrate, and cannot detect the inside of the ceramic substrate, so it is impossible to effectively judge the airtightness of the ceramic substrate. Therefore, it is necessary to study a solution to solve the above problems. Utility Model Content

[0004] In view of this, the utility model aims to solve the deficiencies in the prior art, and its main purpose is to provide a ceramic substrate airtightness testing device, which can effectively solve the problem that the existing visual or CCD photography analysis of ceramic substrates cannot effectively determine the airtightness of the ceramic substrate.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A ceramic substrate air tightness testing device comprises a lower mold, an upper mold and an air pressure sensor; the lower mold has an air extraction cavity with an opening facing upward, and a sealing support surface is formed at the opening edge of the air extraction cavity; the upper mold can be movably arranged directly above the lower mold, and the upper mold has an air filling cavity with an opening facing downward, and a sealing pressure surface is formed at the opening edge of the air filling cavity, and the sealing pressure surface and the sealing support surface are directly opposite to each other vertically; the air pressure sensor is arranged on the lower mold and extends into the air extraction cavity.

[0007] As a preferred solution, a plurality of support columns extend from the inner bottom surface of the vacuum cavity, the plurality of support columns are arranged at intervals, the top surface of each support column is flush with the sealing support surface, and the plurality of support columns are used to support the ceramic substrate to prevent the ceramic substrate from bending and deformation.

[0008] As a preferred solution, a plurality of pressure columns extend from the inner bottom surface of the air-filled cavity, and the plurality of pressure columns are arranged at intervals, and the top end surface of each pressure column is flush with the sealing pressure surface, so as to press the ceramic substrate and better fix the ceramic substrate.

[0009] As a preferred solution, an exhaust duct connected to the outside is provided in the lower mold, and a plurality of exhaust ports are opened on the inner wall of the exhaust cavity. The plurality of exhaust ports are connected to the exhaust duct so as to connect an external vacuum device to vacuum the exhaust cavity.

[0010] As a preferred solution, an inflation channel connected to the outside is provided in the upper mold, and a plurality of inflation ports are provided on the inner wall of the inflation cavity, which are connected to the inflation channel so as to connect an external inflation device to inflate the inflation cavity.

[0011] Compared with the prior art, the utility model has obvious advantages and beneficial effects. Specifically, it can be seen from the above technical solution that:

[0012] By setting a vacuum cavity on the lower mold and an inflation cavity on the upper mold, and cooperating with an air pressure sensor, during testing, the ceramic substrate is sealed and placed between the vacuum cavity and the inflation cavity, and air is pumped on one side of the ceramic substrate and inflated on the other side, and then the air pressure sensor is used to perform leakage detection, the air tightness of the ceramic substrate can be truly and effectively judged, which brings convenience to production operations.

[0013] In order to more clearly illustrate the structural features and functions of the present invention, the present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the mold opening state of a preferred embodiment of the utility model;

[0015] Figure 2It is a schematic diagram of the mold closing state of a preferred embodiment of the utility model.

[0016] Description of the accompanying drawings:

[0017] 10. Lower mold 11. Vacuum cavity

[0018] 12. Sealing support surface 13. Support column

[0019] 14. Air extraction duct 15. Air extraction port

[0020] 20. Upper mold 21. Inflatable cavity

[0021] 22. Sealing pressure surface 23. Pressure column

[0022] 24. Inflatable channel 25. Inflatable port

[0023] 30. Air pressure sensor 40. Ceramic substrate. DETAILED DESCRIPTION

[0024] Please refer to Figure 1 to Figure 2 As shown, it shows the specific structure of a preferred embodiment of the utility model, including a lower mold 10, an upper mold 20 and an air pressure sensor 30.

[0025] The lower mold 10 has an upwardly opened vacuum cavity 11, and a sealing support surface 12 is formed at the opening edge of the vacuum cavity 11. In this embodiment, a plurality of support columns 13 extend from the inner bottom surface of the vacuum cavity 11, and the plurality of support columns 13 are arranged at intervals, and the top surface of each support column 13 is flush with the sealing support surface 12. The plurality of support columns 13 are used to support the ceramic substrate 40 to prevent the ceramic substrate 40 from bending and deforming. In addition, a vacuum channel 14 connected to the outside is provided in the lower mold 10, and a plurality of vacuum ports 15 are provided on the inner wall of the vacuum cavity 11, and the plurality of vacuum ports 15 are connected to the vacuum channel 14 so as to connect an external vacuum device to vacuum the vacuum cavity 11.

[0026] The upper mold 20 can be movably arranged up and down just above the lower mold 10. The upper mold 20 has an air-filled cavity 21 with an opening facing downward. The opening edge of the air-filled cavity 21 forms a sealing pressure surface 22. The sealing pressure surface 22 and the sealing support surface 12 face each other up and down. In this embodiment, a plurality of pressure columns 23 extend from the inner bottom surface of the air-filled cavity 21. The plurality of pressure columns 23 are arranged at intervals. The top surface of each pressure column 23 is flush with the sealing pressure surface 22, so as to press against the ceramic substrate 40 and better fix the ceramic substrate 40. In addition, an air-filled passage 24 connected to the outside is provided in the upper mold 20. The inner wall of the air-filled cavity 21 is provided with a plurality of air-filled ports 25. The plurality of air-filled ports 25 are connected to the air-filled passage 24, so as to connect an external air-filled device to inflate the air-filled cavity 21.

[0027] The air pressure sensor 30 is disposed on the lower mold 10 and extends into the air extraction cavity 11 . The air pressure sensor 30 is used to sense the air pressure in the air extraction cavity 11 so as to determine whether there is air leakage.

[0028] The working principle of this embodiment is described in detail as follows:

[0029] The lower mold 10 and the upper mold 20 are installed on the external equipment, the exhaust channel 14 is connected to the external vacuum device, the inflation channel 24 is connected to the external inflation device, and the air pressure sensor 30 is connected to the external controller. Then, the robot arm of the equipment places the ceramic substrate 40 on the lower mold 10, so that the bottom peripheral edge of the ceramic substrate 40 is sealed against the sealing support surface 12. After the ceramic substrate 40 is in place, the equipment makes the upper mold 20 move downward to close the mold with the lower mold 10, and the sealing pressing surface 22 of the upper mold 20 is sealed against the top peripheral edge of the ceramic substrate 40. Then, the vacuum device starts to vacuum the exhaust cavity 11, and at the same time, the inflation device inflates the inflation cavity 21. When the inflation cavity 21 reaches a certain atmospheric pressure value, the equipment maintains the pressure for a period of time, and the air pressure sensor 30 detects whether there is any leakage in the exhaust cavity 11, and displays it on the controller; after the detection is completed, the upper mold 20 and the lower mold 10 are opened, and then the ceramic substrate 40 is removed.

[0030] The design focus of the utility model is that an exhaust cavity is arranged on the lower mold, an inflation cavity is arranged on the upper mold, and an air pressure sensor is arranged in cooperation. During testing, the ceramic substrate is sealed and placed between the exhaust cavity and the inflation cavity. Air is exhausted on one side of the ceramic substrate and inflated on the other side, and then the air pressure sensor is used to perform air leakage detection, so that the air tightness of the ceramic substrate can be truly and effectively judged, bringing convenience to production operations.

[0031] The above description is only a preferred embodiment of the present invention and does not limit the technical scope of the present invention. Therefore, any slight modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A ceramic substrate air tightness testing device, characterized in that: It includes a lower mold, an upper mold and an air pressure sensor; the lower mold has an air extraction cavity with an opening facing upward, and a sealing support surface is formed at the opening edge of the air extraction cavity; the upper mold can be movably arranged above the lower mold, and the upper mold has an inflation cavity with an opening facing downward, and a sealing pressure surface is formed at the opening edge of the inflation cavity, and the sealing pressure surface and the sealing support surface are directly opposite to each other up and down; the air pressure sensor is arranged on the lower mold and extends into the air extraction cavity.

2. The ceramic substrate air tightness testing device according to claim 1, characterized in that: A plurality of support columns extend from the inner bottom surface of the air extraction cavity. The plurality of support columns are arranged at intervals, and the top end surface of each support column is flush with the sealing support surface.

3. The ceramic substrate air tightness testing device according to claim 1 or 2, characterized in that: A plurality of pressure posts extend from the inner bottom surface of the inflatable cavity. The plurality of pressure posts are arranged at intervals, and the top end surface of each pressure post is flush with the sealing pressure surface.

4. The ceramic substrate air tightness testing device according to claim 1, characterized in that: An air suction channel connected to the outside is arranged in the lower mold, and a plurality of air suction ports are opened on the inner wall of the air suction cavity, and the plurality of air suction ports are connected to the air suction channel.

5. The ceramic substrate air tightness testing device according to claim 1, characterized in that: An air filling passage communicating with the outside is arranged in the upper mold, and a plurality of air filling ports are opened on the inner wall of the air filling cavity, and the plurality of air filling ports are communicated with the air filling passage.

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