Clamping tool for post-processing equipment

Abstract

The utility model discloses a clamping tool for post-processing equipment, which comprises a base plate and a plurality of clamping pieces arranged on the base plate, a mounting groove is arranged on the base plate, and the clamping pieces are detachably arranged in the mounting groove. The clamping piece comprises a bottom plate and a plurality of positioning columns detachably arranged on the bottom plate, a flushing opening is formed in the bottom plate, the plurality of positioning columns are circumferentially arranged on the outer side of the flushing opening, each positioning column is provided with a conical section, and the mask plate is located among the plurality of positioning columns and is suspended. The conical sections of the positioning columns facilitate placement of the mask plate, meanwhile, the contact area with the side edge of the mask plate is reduced, the limiting rings on the positioning columns are used for supporting and positioning the placed mask plate, the contact area with the mask plate is small, and liquid medicine is prevented from being left on the mask plate after follow-up spin-drying. Meanwhile, the mask is in a suspended state after being placed, on one hand, taking and placing are convenient, and on the other hand, it is guaranteed that the back is flushed more sufficiently.

Description

Technical Field

[0001] The utility model relates to the technical field of clamping tooling, and more specifically to a clamping tooling for post-processing equipment. Background Art

[0002] The clamp for post-processing of mask refers to the clamp used for developing, etching and cleaning of semiconductor photolithography mask. In the prior art, conventional post-processing developing, etching and cleaning machines for mask can only produce mask with a minimum size of 520*610. For small-sized clamps such as 6 inches, it is necessary to customize the clamping tooling of a specific size. For example, the utility model patent with patent number CN214098107U discloses a clamp for post-processing of mask, which can clamp small-sized mask, but it uses a support bar to support the mask, and the contact area with the mask is large. In addition, the contact area will have residual liquid and water after drying, resulting in dirty mask mirror and poor cleaning effect. Utility Model Content

[0003] The purpose of the utility model is to provide a clamping tool for post-processing equipment to solve the technical problems existing in the above-mentioned background technology.

[0004] The technical solution of the utility model provides a clamping tool for post-processing equipment, comprising a substrate, and a plurality of clamping members arranged on the substrate, wherein the substrate is provided with a mounting groove, and the clamping member is detachably arranged in the mounting groove;

[0005] The clamping member includes a base plate and a plurality of positioning columns detachably arranged on the base plate. The base plate is provided with a flushing port. A plurality of the positioning columns are circumferentially arranged outside the flushing port. The positioning columns have a tapered section. The mask is located between the plurality of positioning columns and is suspended.

[0006] In a preferred embodiment, a supporting ring is provided on the cylindrical section of the positioning column.

[0007] In a preferred embodiment, the positioning column is threadedly connected to the base plate.

[0008] In a preferred embodiment, a connecting section is provided at the bottom of the conical section, a threaded column is provided on the connecting section, and a threaded hole is correspondingly provided on the bottom plate.

[0009] In a preferred embodiment, two groups of threaded holes are provided, the two groups of threaded holes are at different distances from the center of the flushing port, and the positioning column is installed and connected to one of the groups of threaded holes.

[0010] In a preferred embodiment, a support bar is provided in the installation groove, a limiting protrusion is provided on the support bar, a limiting groove is correspondingly provided on the bottom plate, and the limiting protrusion is snap-fitted into the limiting groove.

[0011] The beneficial effects of the technical solution of the utility model are:

[0012] The tapered section of the positioning column facilitates the placement of the mask, while reducing the contact area with the side of the mask. The limiting ring on it is used to support and position the placed mask, and the contact area with the mask is small, which avoids residual liquid on the mask after subsequent drying. At the same time, the mask is suspended after placement, which is convenient for taking and placing, and ensures that its back is rinsed more fully. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a schematic diagram of the overall structure of the utility model.

[0014] Figure 2 This is a schematic diagram of the overall structure of the clamping member of the utility model.

[0015] Figure 3 It is a partial structural schematic diagram of the utility model.

[0016] Explanation of the reference numerals: 1 base plate, 2 clamping member, 3 bottom plate, 4 flushing port, 5 positioning column, 6 conical section, 7 connecting section, 8 supporting ring, 9 threaded column, 10 threaded hole, 11 supporting bar, 12 limiting protrusion, 13 mounting groove. DETAILED DESCRIPTION

[0017] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for the sake of illustration and convenience of description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations are obvious to those of ordinary skill in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific purposes.

[0018] like Figure 1-3 As shown, the technical solution of the utility model provides a clamping tool for post-processing equipment, including a substrate 1, and a plurality of clamping members 2 arranged on the substrate 1, the substrate 1 is provided with a mounting groove 13, the clamping member 2 is detachably arranged in the mounting groove 13, the clamping member 2 is used to clamp the mask plate, and then perform cleaning and other work, and a plurality of clamping members 2 can be arranged on the substrate 1 at the same time to realize post-processing work on multiple mask plates at the same time, thereby improving work efficiency.

[0019] The clamping member 2 includes a bottom plate 3 and a plurality of positioning posts 5 detachably arranged on the bottom plate 3. The bottom plate 3 is provided with a flushing port 4. A plurality of the positioning posts 5 are circumferentially arranged outside the flushing port 4. The positioning posts 5 have a conical section 6. The mask is located between the plurality of the positioning posts 5 and is suspended. A support ring 8 is arranged on the cylindrical section of the positioning posts 5.

[0020] In the above scheme, in order to ensure the clamping stability, the positioning posts 5 are generally set to 6-8, and the tapered section 6 at the upper end is convenient for the placement of the mask, while reducing the contact area with the side of the mask. The limit ring on it is used to support and position the placed mask. In order to reduce the contact area with the mask, the width of the support ring 8 is set to 6-8mm for the best, to avoid residual liquid on the mask after subsequent drying. The mask is in a suspended state, which is convenient for taking and placing on the one hand, and ensures that its back is rinsed more fully on the other hand.

[0021] The positioning column 5 is threadedly connected to the bottom plate 3. A connecting section 7 is provided at the bottom of the conical section 6, and a threaded column 9 is provided on the connecting section 7. A threaded hole 10 is correspondingly provided on the bottom plate 3. During installation, the threaded column 9 can be screwed into the threaded hole 10. The detachable design facilitates disassembly and replacement at a later stage.

[0022] The threaded holes 10 are provided in two groups, and the distances between the two groups of threaded holes 10 and the center of the flushing port 4 are different. The positioning column 5 is installed and connected to one of the groups of threaded holes 10. By providing two groups of threaded holes 10, it is convenient to switch the position of the positioning column 5, so that the post-processing of two sizes of masks can be realized, and its versatility is increased.

[0023] A support bar 11 is arranged in the installation groove 13, and a limiting protrusion 12 is arranged on the support bar 11. A limiting groove (not shown in the figure) is correspondingly arranged on the base plate. The limiting protrusion 12 is snapped into the limiting groove. The base plate 3 is supported by the support bar 11, and the limiting protrusion 12 is used for limiting at the same time, so as to ensure the installation stability of the base plate 3 and facilitate disassembly.

[0024] The main body of the clamping tool is made of aluminum alloy, which has certain stability and plasticity, small deformation, stable structure, and light weight. A layer of 0.5mm thick Teflon material is plated on the surface of the aluminum alloy to prevent chemical liquid from corroding the aluminum alloy. The positioning column 5 is made of Teflon material.

[0025] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without creative work should fall within the scope of protection of the present invention. Structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to conventional means in the field unless otherwise specified and limited.

Claims

1. A clamping tool for post-processing equipment, characterized in that: It comprises a base plate and a plurality of clamping members arranged on the base plate, wherein the base plate is provided with a mounting groove, and the clamping members are detachably arranged in the mounting groove; The clamping member includes a base plate and a plurality of positioning columns detachably arranged on the base plate. The base plate is provided with a flushing port. A plurality of the positioning columns are circumferentially arranged outside the flushing port. The positioning columns have a tapered section. The mask is located between the plurality of positioning columns and is suspended.

2. The clamping tool for post-processing equipment according to claim 1, characterized in that: A supporting ring is arranged on the cylindrical section of the positioning column.

3. The clamping tool for post-processing equipment according to claim 1, characterized in that: The positioning column is threadedly connected to the bottom plate.

4. The clamping tool for post-processing equipment according to claim 3, characterized in that: A connecting section is provided at the bottom of the conical section, a threaded column is provided on the connecting section, and threaded holes are correspondingly provided on the bottom plate.

5. The clamping tool for post-processing equipment according to claim 4, characterized in that: The threaded holes are provided in two groups, and the distances between the two groups of threaded holes and the center of the flushing port are different. The positioning column is installed and connected to one of the groups of threaded holes.

6. The clamping tool for post-processing equipment according to claim 1, characterized in that: A support bar is arranged in the installation groove, a limiting protrusion is arranged on the support bar, a limiting groove is correspondingly arranged on the bottom plate, and the limiting protrusion is clamped in the limiting groove.

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