Variable vacuum capacitor

Abstract

The utility model discloses a variable vacuum capacitor, which comprises a capacitor body and a driving module used for driving the capacitor body to change the capacitance value, the driving module comprises a driving motor, a commutator and a transmission mechanism, and an output shaft of the commutator is in transmission connection with a rotating screw of the capacitor body through the transmission mechanism. The driving motor is fixed on one side of the commutator and is perpendicular to the capacitor body. According to the variable vacuum capacitor, under the condition that the size of the driving motor is kept unchanged, the height of the whole machine can be shortened, the driving module is ensured to have enough torque to drive the capacitor body, meanwhile, on the premise that the insulating property is ensured, a transmission mechanism can be reduced, the size can be further reduced, and meanwhile, the precision of the whole system can be improved by several times.

Description

Technical Field

[0001] The utility model relates to the technical field of capacitors, in particular to a variable vacuum capacitor. Background Art

[0002] Compared with other variable capacitors, variable capacitors with vacuum as the medium have incomparable insulation characteristics and are often used in impedance matching networks, such as etcher, PECVD and other thin film deposition equipment, and necessary electronic components in the matching of cleaning equipment. At present, variable vacuum capacitors with intelligent drive systems in the domestic and foreign markets all adopt a straight-line connection method, that is, the drive part, the connecting transmission part and the vacuum capacitor are arranged on the same straight line. With the development of technology and the demand for miniaturization of production equipment, there will inevitably be higher requirements for the miniaturization of components.

[0003] There are currently only two ways to reduce the size of variable vacuum capacitors arranged in a straight line: 1) reduce the size of the motor; 2) shorten the connecting transmission part. The above two methods will bring the following catastrophic problems: the reduction of the motor size will inevitably lead to a reduction in torque, causing the motor to be unable to drive the capacitor; the shortening of the connecting transmission part will make the distance between the motor output shaft and the vacuum capacitor too small, and discharge is very likely to occur under a high-voltage standard working environment, and high-frequency and high current will instantly burn the motor and the control driver. Therefore, it is necessary to improve the existing technology to overcome the defects in the existing technology. Summary of the invention

[0004] The problem to be solved by the utility model is to provide a variable vacuum capacitor to overcome the defect of the existing vacuum capacitor being too large in size due to the linear arrangement.

[0005] The utility model adopts the following technical solution to solve the technical problem: a variable vacuum capacitor, comprising: a capacitor body and a driving module for driving the capacitor body to change the capacitance, the driving module comprising a driving motor, a commutator and a transmission mechanism, the output shaft of the commutator is connected to the rotating screw of the capacitor body through the transmission mechanism, the driving motor is fixed to one side of the commutator and is vertically distributed with the capacitor body.

[0006] As a further improvement of the present invention, the capacitor body, the commutator and the transmission mechanism are arranged on the same straight line so that the variable vacuum capacitor is L-shaped as a whole.

[0007] As a further improvement of the present invention, the transmission mechanism includes an insulating shaft and two joints mounted at both ends of the insulating shaft and rotating synchronously with the insulating shaft, one of the joints is fixedly connected to the output shaft, and the other joint is fixedly connected to the rotating screw.

[0008] As a further improvement of the utility model, both ends of the insulating shaft are provided with limiting grooves, and the two joints are provided with limiting bosses matching the limiting grooves on one side facing the insulating shaft, and the limiting bosses are plugged into the corresponding limiting grooves.

[0009] As a further improvement of the present invention, the two limiting grooves at both ends of the insulating shaft are distributed in a "cross" shape.

[0010] As a further improvement of the present invention, a socket is provided in the middle of the two joints, and the output shaft and the rotating screw are respectively inserted into the corresponding sockets and are locked and fixed with the corresponding joints through fasteners.

[0011] As a further improvement of the utility model, the surfaces of the output shaft and the rotating screw are provided with cutting planes along their respective length directions, the joint is provided with a screw hole connected to the socket along the radial direction, the fastener is a screw, and the fastener is threadedly installed in the screw hole and abuts against the corresponding cutting plane.

[0012] As a further improvement of the utility model, it also includes a supporting mechanism, which is fixedly connected between the capacitor body and the commutator and sleeved on the outside of the transmission mechanism.

[0013] As a further improvement of the present invention, the support mechanism includes a bracket, a first mounting flange and a second mounting flange, the first mounting flange is fixed between the commutator and the bracket, and the second mounting flange is fixed between the capacitor body and the bracket.

[0014] As a further improvement of the present invention, the commutator is a right-angle commutator, which is provided with a reduction gear set inside so that the rotation speed of the output shaft of the commutator is lower than the rotation speed of the drive motor.

[0015] The beneficial effects of the utility model are as follows: the utility model provides a variable vacuum capacitor, by fixing a driving motor on one side of a commutator and distributing the same vertically with a capacitor body, the driving motor drives the commutator to rotate, and after commutation, the rotating screw of the capacitor body is driven to rotate through a transmission mechanism, so as to achieve the purpose of adjusting the capacitance value, while maintaining the size of the driving motor unchanged, the height of the whole machine can be shortened, and it is ensured that the driving module has sufficient torque to drive the capacitor body, and at the same time, the transmission mechanism can be lowered and the volume can be further reduced under the premise of ensuring the insulation performance; at the same time, the capacitor body can be made to step and rotate at a smaller angle through the commutator, and the capacitance value can be adjusted to change at a smaller angle, and the commutator itself also has higher precision than the driving motor, and under the same conditions, the precision of the whole system can be improved by several times. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional diagram of the variable vacuum capacitor of the utility model;

[0017] Figure 2 This is an exploded view of the variable vacuum capacitor of the utility model;

[0018] Figure 3 It is a partial cross-sectional view of the variable vacuum capacitor of the utility model;

[0019] Figure 4 For this utility model Figure 3 A magnified view of middle;

[0020] Figure 5 It is a three-dimensional diagram of the capacitor body in the utility model;

[0021] Figure 6 It is a three-dimensional diagram of the transmission mechanism in the utility model;

[0022] Figure 7 It is an exploded view of the transmission mechanism in the utility model;

[0023] Figure 8 It is an exploded view of the support mechanism in the utility model.

[0024] Combined with the accompanying drawings, the following description is given:

[0025] 1. Capacitor body; 11. Rotating screw; 111. Cutting plane; 2. Driving motor; 21. Controller; 3. Commutator; 31. Output shaft; 4. Transmission mechanism; 41. Insulating shaft; 411. Limiting groove; 42. Joint; 421. Limiting boss; 422. Socket; 423. Screw hole; 43. Fastener; 5. Support mechanism; 51. Bracket; 511. Flange; 52. First mounting flange; 53. Second mounting flange; 54. Screw. DETAILED DESCRIPTION

[0026] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings.

[0027] See also Figure 1 The utility model provides a variable vacuum capacitor, comprising: a capacitor body 1 and a driving module for driving the capacitor body 1 to change the capacitance.

[0028] It should be noted that the capacitor body 1 in the present utility model adopts the existing conventional technology, and its structure is not an improvement of the present application. Specifically, the capacitor body 1 of the present embodiment adopts a thread system to adjust the capacitance; the vacuum chamber inside the capacitor body 1 contains two groups of electrodes, namely the moving electrode group and the static electrode group, the static electrode group is fixed to the shell of the capacitor body 1, and the moving electrode group is connected to the rotating screw 11 of the capacitor body 1. When the driving module drives the rotating screw 11 to rotate, the rotational motion of the rotating screw 11 is converted into linear motion through the nut, thereby driving the moving electrode group to move up and down, so that the coupling length between the moving electrode group and the static electrode group changes, and then the coupling area between the two groups of electrodes changes, and the capacitance of the capacitor changes accordingly, thereby realizing the adjustment of the capacitance of the variable vacuum capacitor.

[0029] See also Figures 1 to 3 The drive module includes a drive motor 2, a commutator 3 and a transmission mechanism 4. The commutator 3 adopts a right-angle commutator that can change the transmission direction. It is provided with an output shaft 31, which can vertically convert the rotation direction of the input end into the rotation direction of the output shaft 31, and can achieve high-precision commutation operation. The output shaft 31 of the commutator 3 is connected to the rotating screw 11 of the capacitor body 1 through the transmission mechanism 4, and the capacitor body 1, the commutator 3 and the transmission mechanism 4 are arranged on the same straight line. The drive motor 2 is fixed to one side of the commutator 3 and is vertically distributed with the capacitor body 1, so that the variable vacuum capacitor is L-shaped as a whole.

[0030] Optionally, the drive motor 2 is a stepper motor, and its motor shaft is connected to the input end of the commutator 3. In addition, the drive motor 2 is electrically connected to a controller 21, and the controller 21 is used to control the rotation of the drive motor 2. The drive motor 2 drives the commutator 3 to rotate. After the commutator 3 is commutated by 90 degrees, the output shaft 31 of the commutator 3 drives the rotating screw 11 of the capacitor body 1 to rotate through the transmission mechanism 4, thereby achieving the purpose of adjusting the capacitance. By adopting the commutator 3, the utility model can maintain the size of the drive motor 2 unchanged, ensure that the drive module has sufficient torque to drive the capacitor body 1, and at the same time, the transmission mechanism 4 can be lowered and the height of the whole machine can be shortened under the premise of ensuring the insulation performance.

[0031] It is worth mentioning that a reduction gear set is provided inside the commutator 3 so that the rotation speed of the output shaft 31 of the commutator 3 is less than the rotation speed of the drive motor 2. By utilizing different reduction ratios n, the adjustment step of the rotating screw 11 becomes 1 / n of the original, so that the capacitor body 1 can be stepped at a smaller angle, and the capacitance value can be adjusted at a smaller angle. In addition, the commutator 3 itself has a higher precision than the drive motor 2, and under the same conditions, the precision of the entire system can be improved several times.

[0032] Optionally, the commutator 3 adopts a model of AT42-L1-S1, which is produced by Dongguan Pratt Transmission Equipment Co., Ltd.

[0033] See also Figure 3 and Figure 4 The transmission mechanism 4 includes an insulating shaft 41 and two joints 42 assembled at both ends of the insulating shaft 41 and rotating synchronously with the insulating shaft 41, one of the joints 42 is fixedly connected to the output shaft 31 of the commutator 3, and the other joint 42 is fixedly connected to the rotating screw 11 of the capacitor body 1.

[0034] Specifically, Figures 4 to 6 As shown, the insulating shaft 41 and the two joints 42 can be cylindrical in shape, and the middle parts of the two joints 42 are provided with a socket 422 along their respective axial directions, and both ends of the insulating shaft 41 are provided with avoidance holes respectively opposite to the two sockets 422, and the output shaft 31 and the rotating screw 11 are respectively inserted into the sockets 422 of the corresponding joints 42 and extend into the avoidance holes, and the output shaft 31 and the rotating screw 11 are respectively locked and fixed to the corresponding joints 42 by fasteners 43.

[0035] Furthermore, the surfaces of the output shaft 31 and the rotating screw 11 are provided with cutting planes 111 along their respective length directions, and the two joints 42 are provided with screw holes 423 connected to the insertion hole 422 in the radial direction. The fasteners 43 are screws, and the fasteners 43 are threadedly installed in the screw holes 423 and abut against the corresponding cutting planes 111, thereby fixing the output shaft 31, the rotating screw 11 and the corresponding joints 42.

[0036] There may be one or more fasteners 43 on each joint 42 , and there may be one or more corresponding output shaft 31 , cutting plane 111 on the surface of rotating screw 11 , and screw hole 423 on joint 42 .

[0037] See also Figure 6 and Figure 7 , both end surfaces of the insulating shaft 41 are provided with limiting grooves 411 in the radial direction, and the limiting grooves 411 may be rectangular, and both ends thereof penetrate the outer circumferential surface of the insulating shaft 41. The two joints 42 are provided with limiting bosses 421 matching the limiting grooves 411 on one side facing the insulating shaft 41, and the limiting bosses 421 are plugged into the corresponding limiting grooves 411, so that the output shaft 31 of the commutator 3 can drive the insulating shaft 41 to rotate synchronously through one joint 42 connected thereto, and the insulating shaft 41 can drive the rotating screw 11 of the capacitor body 1 to rotate synchronously through the other joint 42.

[0038] It is worth mentioning that the two limiting grooves 411 at both ends of the insulating shaft 41 in the utility model are distributed in a "cross" shape. In this way, even if the output shaft 31 of the commutator 3 and the rotating screw 11 of the capacitor body 1 are not arranged on the same axis during assembly and there is a slight offset, the position of the insulating shaft 41 can be adjusted by the mutual cooperation of the limiting grooves 411 distributed in a "cross" shape at both ends of the insulating shaft 41 and the limiting bosses 421 of the joint 42 to eliminate the offset, thereby not affecting the transmission from the output shaft 31 to the rotating screw 11.

[0039] See also Figure 1 and Figure 8 , the variable vacuum capacitor also includes a support mechanism 5, which is fixedly connected between the capacitor body 1 and the commutator 3 and is sleeved on the outside of the transmission mechanism 4. Specifically, the support mechanism 5 includes a bracket 51, a first mounting flange 52 and a second mounting flange 53. The bracket 51 can be cylindrical, and flanges 511 are provided at both ends; the first mounting flange 52 is arranged between the commutator 3 and the bracket 51, and a corresponding flange 511 on the bracket 51 is fixed to the commutator 3 through the first mounting flange 52 using a number of screws 54. The second mounting flange 53 is arranged between the capacitor body 1 and the bracket 51, and another flange 511 on the bracket 51 is fixed to the capacitor body 1 through the second mounting flange 53 using a number of screws 54. The first mounting flange 52 and the second mounting flange 53 are used in an application scenario where the variable vacuum capacitor is fixed to the outside.

[0040] In summary, the variable vacuum capacitor of the utility model fixes the drive motor 2 on one side of the commutator 3 and is distributed vertically with the capacitor body 1. The drive motor 2 drives the commutator 3 to rotate. After commutation, the rotating screw 11 of the capacitor body 1 is driven to rotate through the transmission mechanism 4, so as to achieve the purpose of adjusting the capacitance. While maintaining the size of the drive motor 2 unchanged, the height of the whole machine can be shortened to ensure that the drive module has sufficient torque to drive the capacitor body 1. At the same time, the transmission mechanism 4 can be lowered while ensuring the insulation performance to further reduce the volume. At the same time, the commutator 3 can make the capacitor body 1 step by step at a smaller angle, and the capacitance adjustment changes at a smaller angle. The commutator 3 itself also has higher precision than the drive motor 2. Under the same conditions, the precision of the entire system can be improved several times.

[0041] In the above description, many specific details are described to facilitate a full understanding of the present invention. However, the above description is only a preferred embodiment of the present invention. The present invention can be implemented in many other ways different from those described herein, so the present invention is not limited by the specific implementation disclosed above. At the same time, any person familiar with the technical field can make many possible changes and modifications to the technical solution of the present invention by using the methods and technical contents disclosed above without departing from the scope of the technical solution of the present invention, or modify it into an equivalent embodiment of equivalent changes. Any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still falls within the scope of protection of the technical solution of the present invention.

Claims

1. A variable vacuum capacitor, comprising a capacitor body (1) and a driving module for driving the capacitor body (1) to change the capacitance, characterized in that: The drive module comprises a drive motor (2), a commutator (3) and a transmission mechanism (4); an output shaft (31) of the commutator (3) is connected to a rotating screw (11) of the capacitor body (1) through the transmission mechanism (4); and the drive motor (2) is fixed to one side of the commutator (3) and is distributed vertically with respect to the capacitor body (1).

2. The variable vacuum capacitor according to claim 1, characterized in that: The capacitor body (1), the commutator (3) and the transmission mechanism (4) are arranged on the same straight line, so that the variable vacuum capacitor is L-shaped as a whole.

3. The variable vacuum capacitor according to claim 1, characterized in that: The transmission mechanism (4) comprises an insulating shaft (41) and two joints (42) mounted at both ends of the insulating shaft (41) and rotating synchronously with the insulating shaft (41), wherein one of the joints (42) is fixedly connected to the output shaft (31), and the other of the joints (42) is fixedly connected to the rotating screw (11).

4. The variable vacuum capacitor according to claim 3, characterized in that: Both ends of the insulating shaft (41) are provided with limiting grooves (411), and the two joints (42) are provided with limiting bosses (421) matching the limiting grooves (411) on one side facing the insulating shaft (41), and the limiting bosses (421) are plugged into the corresponding limiting grooves (411).

5. The variable vacuum capacitor according to claim 4, characterized in that: The two limiting grooves (411) at the two ends of the insulating shaft (41) are distributed in a "cross" shape.

6. The variable vacuum capacitor according to claim 3, characterized in that: The middle parts of the two joints (42) are each provided with a plug hole (422), and the output shaft (31) and the rotating screw rod (11) are respectively inserted into the corresponding plug holes (422) and are locked and fixed with the corresponding joints (42) through fasteners (43).

7. The variable vacuum capacitor according to claim 6, characterized in that: The surfaces of the output shaft (31) and the rotating screw rod (11) are provided with cutting planes (111) along their respective length directions; the joint (42) is provided with a screw hole (423) in radial direction and connected to the insertion hole (422); the fastener (43) is a screw; the fastener (43) is threadedly installed in the screw hole (423) and abuts against the corresponding cutting plane (111).

8. The variable vacuum capacitor according to claim 1, characterized in that: It also comprises a supporting mechanism (5), wherein the supporting mechanism (5) is fixedly connected between the capacitor body (1) and the commutator (3), and is sleeved on the outside of the transmission mechanism (4).

9. The variable vacuum capacitor according to claim 8, characterized in that: The support mechanism (5) comprises a bracket (51), a first mounting flange (52) and a second mounting flange (53); the first mounting flange (52) is fixed between the commutator (3) and the bracket (51); and the second mounting flange (53) is fixed between the capacitor body (1) and the bracket (51).

10. The variable vacuum capacitor according to claim 1, characterized in that: The commutator (3) is a right-angle commutator, and a reduction gear set is provided inside the commutator so that the rotation speed of the output shaft (31) of the commutator (3) is lower than the rotation speed of the drive motor (2).

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