Adaptive bearing flower basket for wafer cleaning

Abstract

The utility model provides a self-adaptive bearing flower basket for wafer cleaning, which comprises a first bearing seat and a second bearing seat, and an accommodating space for bearing wafers is formed between the first bearing seat and the second bearing seat; the distance adjusting structure is arranged on the first bearing seat and / or the second bearing seat and is used for adjusting the distance between the first bearing seat and the second bearing seat before the wafer is cleaned; one end of the elastic connecting piece is connected with the first bearing seat, the other end of the elastic connecting piece is connected with the second bearing seat, and when the wafer is cleaned, the elastic connecting piece is in a compressed state; after cleaning is finished, the elastic connecting piece starts to rebound from a compressed state. Through the combination of the elastic connecting piece and the spacing adjusting structure, the flower basket can be flexibly adjusted according to the size of the wafer, and extra replacement is not needed. After the cleaning is finished, the elastic connecting piece rebounds to an initial state, so that the wafer descends for a certain distance along with the expansion of the distance between the bearing seats, and the water on the surface of the wafer is quickly thrown away by using inertia force.

Description

Technical Field

[0001] The utility model relates to a receiving flower basket, in particular to an adaptive receiving flower basket for wafer cleaning, belonging to the technical field of wafer cleaning flower baskets. Background Art

[0002] In the production process of semiconductor devices, it is essential to maintain a high degree of cleanliness to avoid device performance degradation or failure that may be caused by tiny contamination. In this process, the role of the wafer basket is crucial, especially in the wafer cleaning stage. PFA basket is one of the commonly used tools in the semiconductor manufacturing industry. It is usually made of PFA (perfluoroalkoxyethylene) material, which has excellent chemical stability, high temperature resistance and corrosion resistance. This material can effectively resist the erosion of various chemicals used in the cleaning process, thereby ensuring the safety and effectiveness of the wafer during the cleaning process.

[0003] However, the traditional PFA basket design is usually only suitable for wafers of a specific size, and the wafer receiving area is usually a hollow design. This means that in actual operation, a cleaning basket of corresponding size needs to be prepared for each size of wafer, which increases tooling costs and operational complexity. Utility Model Content

[0004] In order to solve all or part of the problems of the above-mentioned prior art, the utility model provides an adaptive receiving flower basket for wafer cleaning, which utilizes a combination of elastic connecting parts and a spacing adjustment structure so that the flower basket can be adjusted according to the size of the wafer without the need to replace flower baskets of different sizes, thereby improving the flexibility and efficiency of operation.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] An adaptive wafer cleaning receiving basket, comprising:

[0007] A first receiving seat and a second receiving seat, wherein a receiving space for receiving a wafer is formed between the first receiving seat and the second receiving seat;

[0008] A spacing adjustment structure, mounted on the first receiving seat and / or the second receiving seat, and used for adjusting the spacing between the first receiving seat and the second receiving seat before the wafer is cleaned;

[0009] An elastic connector has one end connected to the first receiving seat and the other end connected to the second receiving seat. When cleaning the wafer, the elastic connector is in a compressed state; after cleaning, the elastic connector starts to rebound from the compressed state.

[0010] The spacing between the two sockets can be precisely adjusted through the spacing adjustment structure to accommodate wafers of different sizes. The elastic connector plays a supporting role and can flexibly compress and rebound when adjusting the spacing to ensure stable support for the wafer. After cleaning, the elastic connector rebounds to its initial state, and the wafer will drop a certain distance as the spacing between the sockets expands. The inertial force is used to quickly remove the moisture on the surface of the wafer, which helps to improve the draining efficiency.

[0011] The first receiving seat and the second receiving seat both include a vertical section, an inclined section, and a plurality of mounting grooves extending from the surface of the vertical section to the surface of the inclined section; the upper end of the inclined section is connected to the lower end of the vertical section, and the lower end of the inclined section is inclined toward the direction of the accommodation space. Through the design of the inclined section, the wafer can get good support and stability in the accommodation space. The inclined section adopts a non-hollow design, which means that after cleaning, when the elastic connector starts to rebound from the compressed state, the wafer can drop a distance along the outward expansion direction of the two receiving seats. Such a design utilizes inertial force to help quickly remove moisture from the surface of the wafer.

[0012] The elastic connecting member is an elastic connecting rod with a spring element built in. There are four elastic connecting rods, which are symmetrically arranged on both sides of the first receiving seat and the second receiving seat in pairs. These elastic connecting rods provide a reliable support function, which helps to ensure the balance and stability during the wafer cleaning process. At the same time, they have a certain elasticity. By compressing and releasing the elastic connecting rods, water can be drained during the wafer cleaning process, thereby improving the draining efficiency.

[0013] The spacing adjustment structure includes a first connecting member installed on the first receiving seat and a second connecting member installed on the second receiving seat, the first connecting member includes a plurality of first connecting ends of different lengths, the second connecting member includes a second connecting end, and the plurality of first connecting ends can be switchably connected to the second connecting end. The design of this spacing adjustment structure enables the receiving flower basket to flexibly adjust the spacing between wafers without changing the entire structure or reinstalling it, and can adapt to wafers of different sizes by switching the first connecting member and the second connecting member.

[0014] The spacing adjustment structure is divided into two groups, which are symmetrically arranged on both sides of the first receiving seat and the second receiving seat, which helps to maintain the balance and stability of the structure and avoid instability or tilting caused by asymmetry.

[0015] The first connecting member comprises a rotating base, and a plurality of first connecting ends of different lengths are mounted on the rotating base. By rotating the base, the positions of the first connecting ends can be conveniently rotated and adjusted to adapt to wafers of different sizes.

[0016] The first connecting member further comprises a fixed base, on which a first limiting structure is arranged, and on the rotating base, second limiting structures are arranged corresponding to the first connecting ends, respectively, and the first limiting structure matches the second limiting structure. Such a design makes it easy to match the limiting structure on the rotating base with the corresponding limiting structure on the fixed base when switching the first connecting end, thereby ensuring the stability and accuracy of the connection.

[0017] The first connecting end is a hollow first connecting rod, a clamping hole is provided on the first connecting rod, the second connecting end is a second connecting rod, a retractable clamping block is provided on the second connecting rod, and the outer diameter of the second connecting rod is smaller than the inner diameter of the first connecting rod. With this design, the second connecting rod can be easily inserted into the hollow interior of the first connecting rod, and the retractable clamping block can be automatically expanded and fixed in the clamping hole of the first connecting rod, thereby achieving a stable connection.

[0018] The invention also includes at least one guide limit rod, which passes through the first receiving seat and the second receiving seat, and the limit rod is connected to the first receiving seat and the second receiving seat in a sliding manner with significant friction. The sliding connection with the guide limit rod can increase friction damping, so that the receiving seat is more stable when moving and adjusting, and reduces the risk of damage caused by sudden movement or swinging.

[0019] The invention also comprises a drain box with a drainage hole at the bottom, and the two ends of the guide limit rod are respectively installed on the two sides of the drain box. The drainage hole allows water to be quickly drained to keep the inside of the drain box dry.

[0020] Compared with the prior art, the utility model has at least the following beneficial effects:

[0021] Through the clever combination of elastic connectors and spacing adjustment structures, adaptive adjustment of wafer size is achieved without the need to replace flower baskets of different sizes. The spacing adjustment structure provides a flexible adjustment mechanism, which can accurately adjust the spacing between the two sockets according to the sizes of different wafers to adapt to wafers of different sizes. While providing stable support, the elastic connector also has good resilience properties; after cleaning, the spacing adjustment structure is opened, and the elastic connector relies on its own resilience to expand the two sockets outward and restore them to the initial state. During this process, the wafer will quickly drop a distance, and the inertial force of the drop will help to remove the moisture on the surface of the wafer; when replacing wafers of different sizes, the spacing between the sockets is adjusted through the spacing adjustment structure, and the elastic connector can be compressed or rebounded accordingly to adapt to the change in spacing, ensuring that each size of wafer can obtain uniform and stable support. The socket adopts a non-hollow design, so that after cleaning, when the elastic connector starts to rebound from the compressed state, the wafer can drop a distance along the expansion direction of the two sockets.

[0022] By adjusting the different connection ends of the first connecting member, the distance between the first receiving seat and the second receiving seat can be flexibly adjusted to adapt to wafers of different sizes, thereby realizing adaptive reception of different wafers. The first connecting member adopts a simple rotation control method, which makes it simple and convenient to switch different first connecting ends, and the user can easily adjust the flower basket to meet the needs of wafers of different sizes. Compared with the traditional fixed receiving device, this new structure has higher flexibility and applicability. It can not only adapt to wafers of different sizes, but also is easy to operate without complicated adjustment steps. In addition, due to the design of the first connecting member, the overall structural deformation range is small, so it is not easy to be damaged during use and has a longer service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the specific embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 It is a schematic structural diagram of an adaptive wafer cleaning receiving basket according to an embodiment of the utility model.

[0025] Figure 2 The embodiment of the utility model provides Figure 1 A schematic diagram of the structure of the first receiving seat, the second receiving seat and the drain box.

[0026] Figure 3 The embodiment of the utility model provides Figure 1 A schematic diagram of the structure of the first connecting member and the second connecting member.

[0027] Figure 4 The embodiment of the utility model provides Figure 3 Schematic diagram of the structure of the first connecting member.

[0028] Figure 5 The embodiment of the utility model provides Figure 3 Schematic diagram of the structure of the second connecting member.

[0029] Figure markings: 1-first receiving seat; 2-second receiving seat; 101-vertical section; 102-inclined section; 103-limiting section; 3-first connecting member; 301-fixed base; 3011-first limiting structure; 302-rotating base; 3021-second limiting structure; 3022-clamping hole; 4-second connecting member; 401-clamping block; 5-elastic connecting member; 6-guide limiting rod; 7-drain box; 701-drainage hole. DETAILED DESCRIPTION

[0030] The technical solutions in the specific embodiments of the utility model are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] The implementation of the present utility model is described in detail below in conjunction with specific embodiments.

[0032] Reference Figure 1-5 As shown, a preferred embodiment of the utility model is provided. An adaptive receiving flower basket for wafer cleaning is provided, comprising a first receiving seat 1 and a second receiving seat 2, between which a containing space is formed for receiving wafers. It also comprises a spacing adjustment structure and an elastic connecting member 5, through which the spacing adjustment structure is used to adjust the spacing between the first receiving seat 1 and the second receiving seat 2, and the elastic connecting member 5 plays a supporting role in this process, and can be compressed and rebounded as the spacing between the first receiving seat 1 and the second receiving seat 2 changes, so as to ensure that the flower basket can flexibly adapt to wafers of different sizes.

[0033] The first receiving seat 1 and the second receiving seat 2 both include a vertical section 101 of non-hollow design, an inclined section 102, and several mounting grooves extending from the surface of the vertical section 101 to the surface of the inclined section 102. These mounting grooves are used to receive wafers. The design of these mounting grooves can more effectively fix the wafers and ensure their stability and safety. The upper end of the inclined section 102 is connected to the lower end of the vertical section 101 to form a smooth transition. The lower end of the inclined section 102 is inclined in the direction of the accommodating space, so that when the wafer is placed, the wafer can be more firmly positioned. In other specific embodiments, a limiting section 103 is also included, which is located at the lower end of the inclined section 102 and connected to the inclined section 102 to ensure that the wafer is accurately positioned and fixed. The flexibility and stability of this design enable it to adapt to wafers of different sizes, making the wafer cleaning process more reliable and efficient. In addition, the receiving seat adopts a non-hollow design, which means that after the cleaning is completed, when the elastic connector 5 starts to rebound from the compressed state, the wafer can drop a distance along the outward expansion direction of the two receiving seats. This design uses inertial force to help quickly remove moisture from the wafer surface. The non-hollow design also enhances the strength and stability of the structure, making the wafer cleaning process more efficient and reliable.

[0034] The spacing adjustment structure includes a first connecting member 3 and a second connecting member 4, which are respectively installed on the first receiving seat 1 and the second receiving seat 2. The connecting ends of the two connecting members are connected, and the spacing between them can be adjusted through an adjustable mechanism. The first connecting member 3 includes a fixed base 301 and a rotating base 302 connected to each other. The fixed base 301 is connected to the first receiving seat 1 through a connecting rod, and the rotating base 302 can rotate relative to the fixed base 301. A plurality of first connecting ends of different lengths are installed on the rotating base 302 and are evenly distributed around the central axis of the rotating base 302. By rotating the rotating base 302, the first connecting ends of different lengths can be switched to be located at the top and connected to the second connecting member 4. Such a design allows the first connecting end of a suitable length to be selected as needed when connecting to the second connecting member 4, thereby achieving a more flexible connection method. A first limiting structure 3011 is provided on the fixed base 301, and a second limiting structure 3021 is provided on the rotating base 302 corresponding to each first connection end. The two limiting structures match each other to ensure that the rotating base 302 can be correctly aligned and fixed in the correct position after rotation, so as to ensure the stability and reliability of the connecting member. In this embodiment, the first limiting structure 3011 is two limiting rings, and the second limiting structure 3021 is four limiting protrusions, which can be inserted into the limiting rings and fixed together. In other specific embodiments, the first limiting structure 3011 and the second limiting structure 3021 can adopt different designs, but both can realize the rotation and fixing function of the rotating base 302 relative to the fixed base 301. The second connecting member 4 includes a second connection end, and the first connection ends of different lengths can be switched to be connected to the second connection end. This design allows the spacing between the first receiving seat 1 and the second receiving seat 2 to be adjusted before the wafer is cleaned, so as to adapt to the cleaning needs of wafers of different sizes, providing greater flexibility and adaptability.

[0035] In this embodiment, the spacing adjustment structure adopts a design of two groups of symmetrical settings, which are located on both sides of the first receiving seat 1 and the second receiving seat 2. This symmetrical setting can ensure that the balance is maintained when adjusting the spacing, and provides a more stable and reliable support structure. The first connecting end is a hollow first connecting rod, and the first connecting rod is provided with a clamping hole 3022. The second connecting end is a second connecting rod, and the second connecting rod is provided with a retractable clamping block 401. The outer diameter of the second connecting rod is smaller than the inner diameter of the first connecting rod, so that it can be smoothly inserted into the first connecting rod. Through the precise matching of the clamping block 401 and the clamping hole 3022, the two connecting rods can be firmly connected together to form a stable overall structure. When disassembly is required, it is only necessary to press the clamping block 401 to disengage it from the clamping hole 3022. In other specific embodiments, multiple groups of spacing adjustment structures and other connection methods can be used according to different needs and application scenarios. Four first connecting rods of different lengths are installed on the rotating base 302. When the four first connecting rods are respectively connected with the second connecting rods, the distance between the first receiving seat 1 and the second receiving seat 2 is used to receive 4-inch, 6-inch, 8-inch and 12-inch wafers respectively.

[0036] In this embodiment, the elastic connector 5 is an elastic connecting rod with a built-in spring element, one end of which is connected to the first receiving seat 1, and the other end is connected to the second receiving seat 2. The elastic connecting rod includes a first rod body and a second rod body connected in sequence, and an elastic part and a clamping part (not shown in the figure) are arranged inside the first rod body, one end of the clamping part is connected to the elastic part, and the other end is clamped with the second rod body. The elastic part is used to provide elasticity so that the elastic connector 5 can have a certain deformation ability when subjected to force, and the clamping part is used to connect the first rod body and the second rod body. In this embodiment, the elastic part is a spring part. When the elastic connector 5 is in a normal state, a 4-inch wafer can be received between the first receiving seat 1 and the second receiving seat 2; when the distance between the first receiving seat 1 and the second receiving seat 2 changes, the elastic connector 5 can be compressed or expanded accordingly, so that the receiving flower basket can adapt to wafers of different sizes. In other specific embodiments, the design of the elastic connector 5 can be adopted in a variety of ways, one of which is that the elastic connecting rod is made of elastic material, which is different from the design of the built-in spring element described above. This method directly uses the elasticity of the material itself to achieve the flexibility and deformation ability of the connection. In this embodiment, a total of four elastic connecting rods are provided, which are symmetrically installed on both sides of the first receiving seat 1 and the second receiving seat 2 in pairs, so that the first receiving seat 1 and the second receiving seat 2 maintain a relatively stable connection state, can only move left and right, and cannot shake, and has high stability.

[0037] When cleaning the wafer, it is first necessary to open the connection between the first connector 3 and the second connector 4, and rotate the rotating base 302 to ensure that the appropriate first connection end is selected to connect with the second connector 4. In this process, the connection of the spacing adjustment structure causes the elastic connector 5 to be compressed. After the cleaning is completed, in order to allow the wafer to drain excess water as soon as possible, the spacing adjustment structure is opened to release the elastic connector 5. The elastic connector 5 quickly restores its original shape and expands outward, pushing the distance between the first receiving seat 1 and the second receiving seat 2 to expand rapidly. This expansion process allows the wafer to quickly drop a distance, and the inertial force is used to help remove the moisture on the surface of the wafer. The key to this design lies in the characteristics of the elastic connector 5, which is elastic after being compressed and will quickly restore its shape once released. By controlling the release of the elastic connecting rod through the spacing adjustment structure, the falling speed and amplitude of the wafer can be accurately controlled, thereby achieving efficient draining during the cleaning process. This design not only makes full use of the coordination of elastic force and mechanical structure, but also makes the draining process faster and more thorough through the application of inertial force.

[0038] The receiving flower basket also includes a drain box 7 with a drainage hole 701 at the bottom, and at least one guide limit rod 6 is installed inside. The guide limit rod 6 passes through the first receiving seat 1 and the second receiving seat 2 in a sliding manner with significant friction. The drainage hole 701 at the bottom of the drain box 7 ensures that the water accumulated during the cleaning process can be effectively drained, and the guide limit rod 6 installed inside the drain box 7 plays a guiding and limiting role. The design of these guide limit rods 6 can ensure that the drain box 7 remains stable during the movement and is correctly aligned with the receiving seat, thereby ensuring that the drain box 7 can accurately collect the water on the surface of the wafer and improve the draining efficiency.

[0039] The utility model provides an adaptive receiving flower basket for wafer cleaning, which is characterized in that it includes a first receiving seat 1, a second receiving seat 2, a spacing adjustment structure and an elastic connector 5. Through the precise matching of these components, the adaptability and efficiency of the receiving flower basket during the wafer cleaning process are achieved. The spacing between the two receiving seats can be accurately adjusted by the spacing adjustment structure to adapt to the cleaning of wafers of different sizes. Under the control of the spacing adjustment structure, the elastic connector 5 can be compressed and rebounded by its elastic characteristics. The receiving seat adopts a non-hollow design to provide a stable support for the wafer. At the same time, after the cleaning is completed, the wafer can be lowered a certain distance with the rebound of the elastic connector 5 to achieve water drainage. At the same time, the drain box 7 with a drainage hole 701 at the bottom of the flower basket and the guide limit rod 6 ensure that the water is effectively discharged and maintain the stability and accuracy of the drain box 7. The utility model is simple and convenient to operate, has strong adaptability, and a wide range of application. The overall structure of the flower basket has a small deformation amplitude, is not easy to be damaged, has a longer service life, and is highly practical.

[0040] It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made to the utility model without departing from the principle of the utility model, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

Claims

1. An adaptive wafer cleaning receiving basket, characterized in that: The receiving flower basket comprises: A first receiving seat (1) and a second receiving seat (2), wherein a receiving space for receiving a wafer is formed between the first receiving seat (1) and the second receiving seat (2); A spacing adjustment structure, mounted on the first receiving seat (1) and / or the second receiving seat (2), and used for adjusting the spacing between the first receiving seat (1) and the second receiving seat (2) before the wafer is cleaned; An elastic connecting member (5) has one end connected to the first receiving seat (1) and the other end connected to the second receiving seat (2). When cleaning the wafer, the elastic connecting member (5) is in a compressed state; after cleaning, the elastic connecting member (5) starts to rebound from the compressed state.

2. The flower basket according to claim 1, characterized in that: The first receiving seat (1) and the second receiving seat (2) both comprise a vertical section (101), an inclined section (102), and a plurality of mounting grooves extending from the surface of the vertical section (101) to the surface of the inclined section (102); the upper end of the inclined section (102) is connected to the lower end of the vertical section (101), and the lower end of the inclined section (102) is inclined toward the direction of the accommodating space.

3. The flower basket according to claim 1, characterized in that: The elastic connecting member (5) is an elastic connecting rod with a built-in spring element. There are four elastic connecting rods, which are symmetrically arranged in pairs on both sides of the first receiving seat (1) and the second receiving seat (2).

4. The flower basket according to claim 1, characterized in that: The spacing adjustment structure comprises a first connecting member (3) mounted on the first receiving seat (1) and a second connecting member (4) mounted on the second receiving seat (2), wherein the first connecting member (3) comprises a plurality of first connecting ends of different lengths, and the second connecting member (4) comprises a second connecting end, and the plurality of first connecting ends can be switchably connected to the second connecting end.

5. The flower receiving basket according to claim 1, characterized in that: The spacing adjustment structures are divided into two groups, which are symmetrically arranged on both sides of the first receiving seat (1) and the second receiving seat (2).

6. The flower receiving basket according to claim 4, characterized in that: The first connecting member (3) comprises a rotating base (302), and a plurality of first connecting ends of different lengths are mounted on the rotating base (302).

7. The flower receiving basket according to claim 6, characterized in that: The first connecting member (3) further comprises a fixed base (301), a first limiting structure (3011) being arranged on the fixed base (301), and second limiting structures (3021) being arranged on the rotating base (302) corresponding to the first connecting ends, respectively, and the first limiting structure (3011) matches the second limiting structure (3021).

8. The flower basket according to claim 4, characterized in that: The first connecting end is a hollow first connecting rod, on which a snap-in hole (3022) is provided, and the second connecting end is a second connecting rod, on which a retractable snap-in block (401) is provided, and the outer diameter of the second connecting rod is smaller than the inner diameter of the first connecting rod.

9. The flower receiving basket according to claim 1, characterized in that: It also comprises at least one guide limit rod (6), the guide limit rod (6) passes through the first receiving seat (1) and the second receiving seat (2), and the limit rod is connected to the first receiving seat (1) and the second receiving seat (2) in a sliding manner with friction.

10. The receiving flower basket according to claim 9, characterized in that: It also comprises a drain box (7) with a drainage hole (701) at the bottom, and the two ends of the guide limit rod (6) are respectively installed on the two sides of the drain box (7).

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